CN221221765U - Gas shielding mechanism for tail gas processor - Google Patents
Gas shielding mechanism for tail gas processor Download PDFInfo
- Publication number
- CN221221765U CN221221765U CN202322944351.5U CN202322944351U CN221221765U CN 221221765 U CN221221765 U CN 221221765U CN 202322944351 U CN202322944351 U CN 202322944351U CN 221221765 U CN221221765 U CN 221221765U
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- China
- Prior art keywords
- interlayer
- treatment device
- processor
- tail gas
- connecting plate
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- 239000010410 layer Substances 0.000 claims abstract description 52
- 239000011229 interlayer Substances 0.000 claims abstract description 40
- 239000000919 ceramic Substances 0.000 claims abstract description 17
- 238000009792 diffusion process Methods 0.000 claims abstract description 17
- BPQQTUXANYXVAA-UHFFFAOYSA-N Orthosilicate Chemical compound [O-][Si]([O-])([O-])[O-] BPQQTUXANYXVAA-UHFFFAOYSA-N 0.000 claims abstract description 16
- 229920000742 Cotton Polymers 0.000 claims abstract description 3
- 239000011521 glass Substances 0.000 claims abstract 2
- 239000011491 glass wool Substances 0.000 claims description 14
- 239000002184 metal Substances 0.000 claims description 9
- 238000000576 coating method Methods 0.000 claims description 8
- 239000011248 coating agent Substances 0.000 claims description 7
- 239000003054 catalyst Substances 0.000 claims description 5
- 229920005830 Polyurethane Foam Polymers 0.000 claims description 4
- 239000011496 polyurethane foam Substances 0.000 claims description 4
- 238000007789 sealing Methods 0.000 claims description 4
- 230000007797 corrosion Effects 0.000 claims description 3
- 238000005260 corrosion Methods 0.000 claims description 3
- 230000004888 barrier function Effects 0.000 claims 2
- 230000000694 effects Effects 0.000 abstract description 22
- 238000009413 insulation Methods 0.000 abstract description 13
- 238000005187 foaming Methods 0.000 abstract description 7
- 229920002635 polyurethane Polymers 0.000 abstract description 7
- 239000004814 polyurethane Substances 0.000 abstract description 7
- 239000004065 semiconductor Substances 0.000 abstract description 3
- 239000007789 gas Substances 0.000 description 48
- 238000010586 diagram Methods 0.000 description 4
- 238000000034 method Methods 0.000 description 3
- 238000006555 catalytic reaction Methods 0.000 description 2
- 230000007774 longterm Effects 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 239000002245 particle Substances 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000003344 environmental pollutant Substances 0.000 description 1
- 238000003912 environmental pollution Methods 0.000 description 1
- 239000006260 foam Substances 0.000 description 1
- 231100000719 pollutant Toxicity 0.000 description 1
- 239000002937 thermal insulation foam Substances 0.000 description 1
- 239000002912 waste gas Substances 0.000 description 1
Landscapes
- Exhaust Silencers (AREA)
Abstract
The utility model provides a gas shielding mechanism for a tail gas processor, which relates to the field of semiconductor tail gas treatment and comprises the following components: the device comprises a processor shell, a processing mechanism and a diffusion component, wherein an air outlet end and an air inlet end are respectively arranged on two sides of the processor shell, the processing mechanism is arranged on the inner side of the processor shell, the processing mechanism comprises an outer interlayer jacket, a heat insulation interlayer is arranged on the inner side of the interlayer jacket, an interlayer inner sleeve is arranged on the inner side of the heat insulation interlayer, a liner is arranged on the inner side of the interlayer inner sleeve, a ceramic carrier is arranged on the inner side of the liner, the interlayer inner sleeve comprises a polyurethane foaming layer, a silicate board layer and a glass cotton board layer, the diffusion component is arranged inside the air inlet end, the diffusion component comprises a mesh board, and a positioning shaft penetrates through the center of the mesh board. The utility model solves the problems that the internal structure of the existing tail gas processor has deviation on the tail gas treatment effect and does not have noise shielding effect on the tail gas passing through the processor.
Description
Technical Field
The utility model relates to the technical field of tail gas treatment, in particular to a gas shielding mechanism for a tail gas treatment device.
Background
When the semiconductor production equipment is used, a large amount of waste gas can be generated, and in order to avoid environmental pollution, the tail gas processor is arranged on the gas outlet of the semiconductor production equipment. When the tail gas processor works, a large amount of air flows pass through the shell of the tail gas processor, noise can be generated, and in order to avoid noise pollution, the tail gas processor is provided with a gas shielding mechanism.
At present, the existing gas shielding mechanism for the tail gas processor is simpler, and only a layer of sound insulation foam is additionally arranged on the outer surface of a shell of the tail gas processor, so that the shielding effect is poor. And the soundproof foam is easy to be polluted, resulting in shorter use time. Secondly, tail gas enters the process inside the processor through the through hole, so that the air flow is disturbed, pressure difference is easily formed outside the filter cotton, vibration is easily generated under the pressure effect of the air flow, and noise pollution is aggravated.
Disclosure of utility model
In order to overcome the defects existing in the prior art, the gas shielding mechanism for the tail gas processor is provided at present, so that the problems that the internal structure of the existing tail gas processor has deviation on the tail gas treatment effect and poor sound insulation effect are solved.
To achieve the above object, there is provided a gas shielding mechanism for an exhaust gas treatment device, comprising: the device comprises a processor shell, a processing mechanism and a diffusion component, wherein an air outlet end and an air inlet end are respectively arranged on two sides of the processor shell, the processing mechanism is arranged on the inner side of the processor shell, the processing mechanism comprises an outer interlayer sleeve on the outer side, a heat insulation interlayer is arranged on the inner side of the interlayer sleeve, an interlayer inner sleeve is arranged on the inner side of the heat insulation interlayer, a liner is arranged on the inner side of the interlayer inner sleeve, a ceramic carrier is arranged on the inner side of the liner, the interlayer inner sleeve comprises a polyurethane foaming layer, a silicate board layer and a glass wool board layer, the diffusion component is arranged inside the air inlet end, the diffusion component comprises a mesh board, a positioning shaft penetrates through the center of the mesh board, blades are connected to the inner side of the positioning shaft, and a brush rod is connected to the outer side of the positioning shaft.
Furthermore, the processor shell is of a cylindrical structure made of metal, the processor shell is provided with two symmetrical parts, and the interlayer jacket is connected to the inner wall of the processor shell.
Further, the edge of the processor shell is provided with a first connecting plate and a second connecting plate respectively, a sealing gasket is arranged between the first connecting plate and the second connecting plate, and the first connecting plate and the second connecting plate are correspondingly connected through bolts.
Further, the glass wool sheet layer is positioned on the outside of the gasket, the silicate sheet layer is positioned on the outside of the glass wool sheet layer, and the polyurethane foam layer is positioned on the outside of the silicate sheet layer.
Further, the edge of the mesh plate is fixed on the inner wall of the air inlet end, the center of the circle of the mesh plate is provided with a shaft sleeve, and the positioning shaft rotates to penetrate through the shaft sleeve.
Further, the brush rod is provided with metal bristles towards one side of the mesh plate, the surfaces of the metal bristles are provided with corrosion-resistant coatings, and the bristles are in contact with the surface of the mesh plate.
Further, the ceramic carrier is provided in a cylindrical structure, the inside of the cylinder is provided in a honeycomb hole shape, and the inside of the honeycomb hole is coated with a catalyst coating.
The utility model has the beneficial effects that:
1. the positioning shaft, the mesh plate and the blades are adopted, so that the blades are driven to rotate by uniform diffusion of the mesh plate in the process that tail gas enters the air inlet end along with the use, vortex air supply generated by the blades is accelerated, the passing efficiency of the tail gas is improved, differential pressure caused by the turbulence of the air flow is avoided, and noise generated by vibration is further reduced;
2. The tail gas is further catalyzed and treated through the treatment mechanism by utilizing the ceramic carrier, the liner, the interlayer inner sleeve, the heat insulation interlayer and the interlayer outer sleeve which are included in the treatment mechanism, the honeycomb ceramic carrier has the effect of contacting with the tail gas in a large area, the catalyst coating on the surface reacts with harmful particles in the tail gas, the purifying treatment effect is improved, and meanwhile, the heat insulation interlayer has the heat insulation effect of realizing the catalysis effect on the ceramic carrier;
3. The glass wool board layer, the silicate board layer and the polyurethane foaming layer are arranged in the interlayer, so that the effects of sound insulation and noise reduction are achieved, exhaust noise pollution is effectively shielded, and meanwhile, the glass wool board layer and the silicate board layer have high temperature resistance and fire resistance, and the safety of using in a tail gas high temperature environment is improved conveniently.
Drawings
FIG. 1 is a schematic diagram of a partial cross-sectional structure of a processor housing according to an embodiment of the utility model.
Fig. 2 is a schematic structural diagram of a diffusion component according to an embodiment of the present utility model.
FIG. 3 is a schematic diagram of a layered structure of an interlayer liner according to an embodiment of the present utility model.
Fig. 4 is a schematic diagram of the structure a in fig. 1 according to an embodiment of the present utility model.
In the figure: 1. a processor housing; 11. an air outlet end; 12. an air inlet end; 2. a processing mechanism; 21. an interlayer jacket; 211. a first connecting plate; 212. a sealing gasket; 213. a second connecting plate; 214. a bolt; 22. a heat insulating interlayer; 23. an interlayer inner sleeve; 231. a polyurethane foaming layer; 232. silicate board layer; 233. a glass wool board layer; 24. a gasket; 25. a ceramic carrier; 3. a diffusion assembly; 31. positioning a shaft; 32. a brush bar; 33. a mesh plate; 34. and (3) a blade.
Detailed Description
Referring to fig. 1 to 4, the present utility model provides a gas shielding mechanism for an exhaust gas treatment device, comprising: a processor housing 1, a processing mechanism 2, and a diffusion assembly 3.
Specifically, the two sides of the processor housing 1 are respectively provided with an air outlet end 11 and an air inlet end 12, the processing mechanism 2 is arranged on the inner side of the processor housing 1, the processing mechanism 2 comprises an outer interlayer jacket 21, an insulating interlayer 22 is arranged on the inner side of the interlayer jacket 21, an inner interlayer jacket 23 is arranged on the inner side of the insulating interlayer 22, a liner 24 is arranged on the inner side of the inner interlayer jacket 23, a ceramic carrier 25 is arranged on the inner side of the liner 24, the inner interlayer jacket 23 comprises a polyurethane foaming layer 231, a silicate board layer 232 and a glass wool board layer 233, the diffusion component 3 is arranged in the air inlet end 12, the diffusion component 3 comprises a mesh board 33, a positioning shaft 31 penetrates through the center of the mesh board 33, blades 34 are connected on the inner side of the positioning shaft 31, and a brush rod 32 is connected on the outer side of the positioning shaft 31.
In the present embodiment, the processor housing 1, the processing mechanism 2, and the diffusion unit 3 constitute a gas shielding mechanism main body structure for an exhaust gas processor according to the present application.
As a preferred embodiment, the ceramic carrier 25 is stably wrapped and fixed layer by arranging the liner 24, the interlayer inner sleeve 23 and the interlayer outer sleeve 21.
Specifically, the processor housing 1 is configured as a cylindrical structure made of metal, the processor housing 1 is provided with two symmetrical parts, the interlayer jacket 21 is connected to the inner wall of the processor housing 1, the edge of the processor housing 1 is respectively provided with a first connecting plate 211 and a second connecting plate 213, a sealing gasket 212 is arranged between the first connecting plate 211 and the second connecting plate 213, the first connecting plate 211 and the second connecting plate 213 are correspondingly connected through bolts 214, the glass wool board layer 233 is positioned outside the gasket 24, the silicate board layer 232 is positioned outside the glass wool board layer 233, and the polyurethane foaming layer 231 is positioned outside the silicate board layer 232.
As a preferred embodiment, by providing the first connecting plate 211 and the second connecting plate 213, it is achieved that the processor housing 1 is easy to be disassembled after long-term use, and then the ceramic carrier 25 inside is easy to be replaced.
As a preferred embodiment, the glass wool board layer 233, the silicate board layer 232 and the polyurethane foam layer 231 have a noise-passing effect of shielding gas, and the three mutually compensate for each other's performance disadvantages, thereby prolonging the service life.
Specifically, the edge of the mesh plate 33 is fixed on the inner wall of the air inlet end 12, the center of the mesh plate 33 is provided with a shaft sleeve, the positioning shaft 31 rotates to pass through the shaft sleeve, the brush rod 32 is provided with metal brush hair towards one side of the mesh plate 33, the surface of the metal brush hair is provided with a corrosion-resistant coating, and the brush hair is in contact with the surface of the mesh plate 33.
As a preferred embodiment, the tail gas drives the blades 34 to rotate, so that the brush rod 32 is conveniently driven to rotate by the positioning shaft 31, and further, the pollutants on the surface of the mesh plate 33 are conveniently cleaned, and the blockage caused by long-term use is prevented.
Specifically, the ceramic support 25 is provided in a cylindrical structure, and the inside of the cylinder is provided in a honeycomb hole shape, and the inside of the honeycomb hole is coated with a catalyst coating.
As a preferred embodiment, a secondary cleaning effect is facilitated after the exhaust pipe by the ceramic carrier 25.
When the exhaust gas purifier is used, the positioning shaft, the mesh plate and the blades are included in the diffusion assembly, so that exhaust gas can be conveniently and uniformly diffused in the process of entering the air inlet end, the blades are driven to rotate, meanwhile, vortex air supply generated by the blades is realized, the passing efficiency of the exhaust gas is accelerated, the pressure difference caused by the turbulence of the air flow is avoided, and the noise generated by vibration is further reduced; the tail gas is further catalyzed and treated through the treatment mechanism by utilizing the ceramic carrier, the liner, the interlayer inner sleeve, the heat insulation interlayer and the interlayer outer sleeve which are included in the treatment mechanism, the honeycomb ceramic carrier has the effect of contacting with the tail gas in a large area, the catalyst coating on the surface reacts with harmful particles in the tail gas, the purifying treatment effect is improved, and meanwhile, the heat insulation interlayer has the heat insulation effect of realizing the catalysis effect on the ceramic carrier; the glass wool board layer, the silicate board layer and the polyurethane foaming layer are arranged in the interlayer, so that the effects of sound insulation and noise reduction are achieved, exhaust noise pollution is effectively shielded, and meanwhile, the glass wool board layer and the silicate board layer have high temperature resistance and fire resistance, and the safety of using in a tail gas high temperature environment is improved conveniently.
The gas shielding mechanism for the tail gas processor can effectively solve the problems that the existing internal structure of the processor has deviation on the tail gas treatment effect and does not have noise shielding effect on the tail gas passing through the processor, further improves the treatment effect of the tail gas on the basis of the existing gas shielding mechanism technology for the tail gas processor, and has the effect of shielding the noise of the tail gas.
Claims (7)
1. A gas barrier mechanism for an exhaust gas treatment device, comprising: treater shell (1), processing mechanism (2) and diffusion subassembly (3), the both sides of treater shell (1) are equipped with respectively and give vent to anger end (11) and inlet end (12), its characterized in that: the utility model provides a treater, treater shell (1) is located to treatment mechanism (2), and treatment mechanism (2) include intermediate layer overcoat (21) in the outside, and intermediate layer overcoat (21) inboard is equipped with thermal-insulated intermediate layer (22) to the inboard of thermal-insulated intermediate layer (22) is equipped with intermediate layer endotheca (23), intermediate layer endotheca (23) inboard is equipped with liner (24), and liner (24) inboard is equipped with ceramic support (25), and intermediate layer endotheca (23) include polyurethane foam layer (231), silicate sheet layer (232) and glass cotton sheet layer (233), inside air inlet end (12) is located in diffusion subassembly (3), and diffusion subassembly (3) include mesh board (33), and mesh board (33) center runs through there is locating shaft (31) to the inboard of locating shaft (31) is connected with blade (34), and locating shaft (31) outside is connected with brush-holder (32).
2. The gas shielding mechanism for an exhaust gas treatment device according to claim 1, wherein the treatment device housing (1) is a cylindrical structure made of metal, the treatment device housing (1) is provided with two symmetrical parts, and the interlayer jacket (21) is connected to the inner wall of the treatment device housing (1).
3. The gas shielding mechanism for an exhaust gas treatment device according to claim 1, wherein the edges of the treatment device housing (1) are respectively provided with a first connecting plate (211) and a second connecting plate (213), a sealing gasket (212) is arranged between the first connecting plate (211) and the second connecting plate (213), and the first connecting plate (211) and the second connecting plate (213) are correspondingly connected through bolts (214).
4. A gas barrier mechanism for an exhaust gas treatment according to claim 1, wherein the glass wool sheet layer (233) is located outside the gasket (24), and the silicate sheet layer (232) is located outside the glass wool sheet layer (233), and the polyurethane foam layer (231) is located outside the silicate sheet layer (232).
5. A gas shielding mechanism for an exhaust gas treatment device according to claim 1, wherein the edge of the mesh plate (33) is fixed to the inner wall of the inlet end (12), the center of the mesh plate (33) is provided with a shaft sleeve, and the positioning shaft (31) rotates through the shaft sleeve.
6. The gas shielding mechanism for an exhaust gas treatment device according to claim 1, wherein the brush bar (32) is provided with metal bristles on a side facing the mesh plate (33), the surfaces of the metal bristles are provided with a corrosion-resistant coating, and the bristles are in contact with the surface of the mesh plate (33).
7. A gas shielding mechanism for an exhaust gas treatment device according to claim 1, wherein the ceramic support (25) is provided in a cylindrical structure, and the inside of the cylinder is provided in a honeycomb-like shape, and the inside of the honeycomb holes is coated with a catalyst coating.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202322944351.5U CN221221765U (en) | 2023-11-01 | 2023-11-01 | Gas shielding mechanism for tail gas processor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202322944351.5U CN221221765U (en) | 2023-11-01 | 2023-11-01 | Gas shielding mechanism for tail gas processor |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN221221765U true CN221221765U (en) | 2024-06-25 |
Family
ID=91571677
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202322944351.5U Active CN221221765U (en) | 2023-11-01 | 2023-11-01 | Gas shielding mechanism for tail gas processor |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN221221765U (en) |
-
2023
- 2023-11-01 CN CN202322944351.5U patent/CN221221765U/en active Active
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| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant |