CN221149947U - Rotary wet etching machine - Google Patents
Rotary wet etching machine Download PDFInfo
- Publication number
- CN221149947U CN221149947U CN202322584999.6U CN202322584999U CN221149947U CN 221149947 U CN221149947 U CN 221149947U CN 202322584999 U CN202322584999 U CN 202322584999U CN 221149947 U CN221149947 U CN 221149947U
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- Prior art keywords
- etching
- fixedly connected
- cleaning
- liquid
- cavity
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- 238000001039 wet etching Methods 0.000 title claims abstract description 18
- 239000007788 liquid Substances 0.000 claims abstract description 115
- 238000005530 etching Methods 0.000 claims abstract description 81
- 238000004140 cleaning Methods 0.000 claims abstract description 62
- 238000005192 partition Methods 0.000 claims abstract description 42
- 239000003814 drug Substances 0.000 abstract description 13
- 238000005406 washing Methods 0.000 description 6
- 238000001802 infusion Methods 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- 230000005540 biological transmission Effects 0.000 description 2
- 238000003486 chemical etching Methods 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- 238000013461 design Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000005457 optimization Methods 0.000 description 1
- 238000005086 pumping Methods 0.000 description 1
- 230000003068 static effect Effects 0.000 description 1
- 238000012546 transfer Methods 0.000 description 1
Classifications
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
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- ing And Chemical Polishing (AREA)
Abstract
The utility model discloses a rotary wet etching machine, wherein a first partition board is fixedly connected to the center in a shell, the first partition board divides the shell into an etching cavity and a cleaning cavity, the etching cavity is communicated with the cleaning cavity through a second through hole formed in the upper part of the first partition board, a second partition board is fixedly connected to the middle part of the etching cavity, the second partition board divides the etching cavity into a working chamber and a liquid storage chamber, the working chamber is arranged above the liquid storage chamber, a conveying device and an etching assembly are arranged in the working chamber, a rotating device is arranged in the etching assembly, the conveying device is fixedly connected with the top surface of the shell, and the center of the top surface of the second partition board is fixedly connected with the etching assembly; the middle part of the cleaning cavity is provided with a cleaning device. According to the utility model, the etching mode is changed through the etching component, so that the volume required to be filled with the liquid medicine is reduced, the volatilization of the liquid medicine is reduced, the utilization rate of the liquid medicine is effectively improved, and the etching quality is improved.
Description
Technical Field
The utility model relates to the technical field of etchers, in particular to a rotary wet etching machine.
Background
The chemical etching device uses chemical etching method (also called wet etching) to directly chemically etch the unprotected parts of the workpiece with chemical solution.
However, the existing wet etching machine needs to etch the workpiece in the container filled with the liquid medicine, which is easy to volatilize the liquid medicine, and the workpiece cannot be effectively etched because the workpiece is in a static state, so that the etching quality of the workpiece is seriously affected; therefore, a rotary wet etching machine is needed to effectively improve the etching quality of the workpiece while reducing the consumption of the chemical solution.
Disclosure of utility model
The utility model aims to provide a rotary wet etching machine, which is used for solving the problems in the prior art.
In order to achieve the above object, the present utility model provides the following solutions: the utility model provides a rotary wet etching machine, which comprises a shell, wherein a first partition plate is fixedly connected to the center in the shell, the first partition plate divides the shell into an etching cavity and a cleaning cavity, the etching cavity is communicated with the cleaning cavity through a second through hole formed in the upper part of the first partition plate, a second partition plate is fixedly connected to the middle part of the etching cavity, the second partition plate divides the etching cavity into a working chamber and a liquid storage chamber, the working chamber is arranged above the liquid storage chamber, a conveying device and an etching assembly are arranged in the working chamber, a rotating device is arranged in the etching assembly, the conveying device is fixedly connected with the top surface of the shell, the top surface center of the second partition plate is fixedly connected with the etching assembly, the conveying device is used for conveying a workpiece to the rotating device, and the rotating device is used for driving the workpiece to rotate; the middle part of the cleaning cavity is provided with a cleaning device which is used for cleaning the etched workpiece;
The two side walls of the shell are respectively provided with a conveying opening, the two conveying openings are respectively communicated with the etching cavity and the cleaning cavity, and the conveying openings are matched with the second through holes and are located on the same axis.
Preferably, the top surface center of the second partition plate is provided with a containing groove, the top surface of the second partition plate is symmetrically provided with first liquid draining holes, and the first liquid draining holes are communicated with the liquid storage chamber.
Preferably, the conveyer includes a plurality of first telescopic link, the stiff end of first telescopic link all with top surface fixed connection in the casing, the equal fixedly connected with conveyer belt of expansion end of first telescopic link, the one end of conveyer belt is passed through the etching chamber the delivery port stretches out the casing, the other end of conveyer belt is passed through the second through hole and is stretched into the washing intracavity.
Preferably, the etching component comprises a supporting plate, the supporting plate is fixedly connected with the second partition plate, one end of the supporting plate, which is away from the second partition plate, is fixedly connected with a hollow cylinder, an etching strip is arranged in the hollow cylinder and is fixedly connected with the supporting plate, a first through hole is formed in the center of the etching strip, the first through hole is rotationally connected with the rotating device, and the first through hole is communicated with the accommodating groove; liquid inlet holes are symmetrically formed in the etching strips, the liquid inlet holes are formed in two sides of the first through hole, and the first through hole is communicated with the liquid storage chamber through a first infusion pipeline.
Preferably, the top surface of the etching strip is provided with a plurality of etching grooves.
Preferably, the rotating device comprises a carrying disc rotating in the hollow cylinder, a support column is fixedly connected to the center of the bottom surface of the carrying disc, the support column is away from the telescopic end of a second telescopic rod fixedly connected with one end of the carrying disc, a rotating rod is fixedly connected with the fixed end of the second telescopic rod, the rotating rod penetrates through a supporting plate and is connected with a motor in a transmission manner, the motor is arranged in the accommodating groove, the motor is fixedly connected with the supporting plate, and the rotating rod is rotationally connected with the first through hole.
Preferably, the lower part in the hollow cylinder is symmetrically provided with liquid discharge holes.
Preferably, the cleaning device comprises a third partition plate fixedly connected to the middle of the cleaning cavity, the third partition plate divides the cleaning cavity into a cleaning chamber and a liquid supply chamber, the cleaning chamber is arranged above the liquid supply chamber, a cleaning tank is arranged at the center of the top surface of the third partition plate, liquid discharge tanks are arranged on two sides of the cleaning tank, the liquid discharge tanks are arranged on the third partition plate, a plurality of rollers are rotationally connected in the cleaning tank, a second liquid discharge hole is formed in the liquid discharge tank, the second liquid discharge hole is communicated with the liquid supply chamber, and the center in the cleaning tank is communicated with the liquid supply chamber through a second liquid conveying pipeline.
The utility model discloses the following technical effects:
1. According to the utility model, the etching mode is changed through the etching component, so that the volume required to be filled with the liquid medicine is reduced, and meanwhile, the volatilization of the liquid medicine is also reduced; the utility model reduces the consumption of the liquid medicine, effectively improves the utilization rate of the liquid medicine and improves the etching quality.
2. According to the utility model, the etching time can be changed by rotating the rotating device, so that the etching efficiency is effectively improved.
Drawings
In order to more clearly illustrate the embodiments of the present utility model or the technical solutions in the prior art, the drawings that are needed in the embodiments will be briefly described below, and it is obvious that the drawings in the following description are only some embodiments of the present utility model, and other drawings may be obtained according to these drawings without inventive effort for a person skilled in the art.
FIG. 1 is a schematic side cross-sectional view of the present utility model;
FIG. 2 is a schematic top view of the carrying disc of the present utility model;
FIG. 3 is a schematic top view of an etching strip according to the present utility model;
FIG. 4 is a schematic diagram of a side view of an etched bar according to the present utility model;
FIG. 5 is a schematic view of the hollow cylinder structure of the present utility model;
FIG. 6 is a schematic view of a rotary device according to the present utility model;
1, a shell; 2. a rotating device; 3. etching the strips; 4. a supporting plate; 5. a hollow cylinder; 6. a liquid discharge hole; 7. a motor; 8. a liquid discharge tank; 9. a cleaning tank; 10. a roller; 11. a first telescopic rod; 12. a conveyor belt; 13. a first separator; 14. a second separator; 15. a third separator; 21. a carrying disc; 22. a second telescopic rod; 23. a rotating rod; 24. a support column; 31. a liquid inlet hole; 32. a first through hole; 33. etching a groove; 131. a second through hole; 141. a first drain hole; 142. a first infusion line; 151. a second drain hole; 152. a second infusion line.
Detailed Description
The following description of the embodiments of the present utility model will be made clearly and completely with reference to the accompanying drawings, in which it is apparent that the embodiments described are only some embodiments of the present utility model, but not all embodiments. All other embodiments, which can be made by those skilled in the art based on the embodiments of the utility model without making any inventive effort, are intended to be within the scope of the utility model.
In order that the above-recited objects, features and advantages of the present utility model will become more readily apparent, a more particular description of the utility model will be rendered by reference to the appended drawings and appended detailed description.
Referring to fig. 1-6, the utility model discloses a rotary wet etching machine, which comprises a shell 1, wherein a first partition plate 13 is fixedly connected to the center in the shell 1, the first partition plate 13 divides the shell 1 into an etching cavity and a cleaning cavity, the etching cavity and the cleaning cavity are communicated through a second through hole 131 formed in the upper part of the first partition plate 13, a second partition plate 14 is fixedly connected to the middle part of the etching cavity, the second partition plate 14 divides the etching cavity into a working chamber and a liquid storage chamber, the working chamber is arranged above the liquid storage chamber, a conveying device and an etching assembly are arranged in the working chamber, a rotating device 2 is arranged in the etching assembly, the conveying device is fixedly connected with the top surface of the shell 1, the center of the top surface of the second partition plate 14 is fixedly connected with the etching assembly, the conveying device is used for conveying a workpiece to the rotating device, and the rotating device 2 is used for driving the workpiece to rotate; the middle part of the cleaning cavity is provided with a cleaning device which is used for cleaning the etched workpiece; the two side walls of the shell 1 are respectively provided with a conveying port, the two conveying ports are respectively communicated with the etching cavity and the cleaning cavity, and the conveying ports are matched with the second through holes 131 and are positioned on the same axis.
According to the utility model, the etching mode is changed through the etching component, so that the volume required to be filled with the liquid medicine is reduced, and meanwhile, the volatilization of the liquid medicine is also reduced; the utility model reduces the consumption of the liquid medicine, effectively improves the utilization rate of the liquid medicine and improves the etching quality; the utility model also enables the etching time to be changed by rotating the device 2, thereby effectively improving the etching efficiency.
In a further optimized scheme, the center of the top surface of the second partition plate 14 is provided with a containing groove, the top surface of the second partition plate 14 is symmetrically provided with first liquid draining holes 141, and the first liquid draining holes 141 are communicated with the liquid storage chamber.
Further optimizing scheme, conveyer includes a plurality of first telescopic link 11, and the stiff end of first telescopic link 11 all is connected with the top surface fixed in the casing 1, and the equal fixedly connected with conveyer belt 12 of the expansion end of first telescopic link 11, and the casing 1 is stretched out through the delivery port in etching chamber to the one end of conveyer belt 12, and the other end of conveyer belt 12 stretches into the washing intracavity through second through-hole 131. The first telescopic rod 11 is provided with a pressure detector to prevent the workpiece from being extruded and damaged; the height of the conveyor belt 12 is controlled by the first telescopic rod 11 so that the conveyor belt 12 can convey the work piece to the rotating device.
According to a further optimization scheme, the etching assembly comprises a supporting plate 4, the supporting plate 4 is fixedly connected with a second partition plate 14, one end, away from the second partition plate 14, of the supporting plate 4 is fixedly connected with a hollow cylinder 5, an etching strip 3 is arranged in the hollow cylinder 5, the etching strip 3 is fixedly connected with the supporting plate, a first through hole 32 is formed in the center of the etching strip 3, the first through hole 32 is rotationally connected with the rotating device, and the first through hole 32 is communicated with the accommodating groove; the etching strip 3 is symmetrically provided with liquid inlet holes 31, the liquid inlet holes 31 are arranged on two sides of the first through hole 32, and the first through hole 32 is communicated with the liquid storage chamber through a first liquid conveying pipeline 142. A first liquid supply pump is arranged in the liquid storage chamber, the liquid outlet end of the first liquid supply pump is connected and communicated with the first liquid delivery pipeline 142 in a prescribed manner, and the first liquid supply pump sends etching liquid into the first liquid delivery pipeline 142, so that the etching liquid flows into the hollow cylinder 5 from the liquid inlet hole 31.
Further optimizing scheme, a plurality of etching grooves 33 are formed in the top surface of the etching strip 3.
Further optimizing scheme, rotary device 2 includes at hollow cylinder 5 internal rotation's year thing disc 21, the bottom surface center fixedly connected with support column 24 of year thing disc 21, the one end fixedly connected with second telescopic link 22's that support column 24 deviates from year thing disc 21 flexible end, the stiff end fixedly connected with rotary rod 23 of second telescopic link 22, rotary rod 23 runs through layer board 4 transmission and is connected with motor 7, motor 7 sets up in the holding tank, motor 7 and layer board 4 fixed connection, rotary rod 23 and first through-hole 32 rotation are connected. The motor 7 drives the rotary rod 23 to rotate, the rotary rod 23 drives the second telescopic rod 22 to rotate, the second telescopic rod 22 drives the support column 24 to rotate, and the support column 24 drives the carrying disc 21 to rotate.
In a further optimized scheme, liquid discharge holes 6 are symmetrically formed in the lower portion in the hollow cylinder 5. The etching liquid can flow back into the liquid storage chamber, and the mobility of the etching liquid in the hollow cylinder 5 is increased.
Further optimizing scheme, belt cleaning device includes fixed connection at the third baffle 15 at the cleaning chamber middle part, third baffle 15 separates into cleaning chamber and liquid supply room with the cleaning chamber, the cleaning chamber sets up in the top of liquid supply room, washing tank 9 has been seted up at third baffle 15 top surface center, the both sides of washing tank 9 all are provided with the liquid discharge groove 8, liquid discharge groove 8 is seted up on third baffle 15, liquid discharge groove 8, all rotate in the washing tank 9 and be connected with a plurality of gyro wheel 10, second flowing back hole 151 has been seted up in the liquid discharge groove 8, second flowing back hole 151 is linked together with the liquid supply room, the center in the washing tank 9 is linked together with the liquid supply room through second transfer line 152. A second liquid supply pump is arranged in the liquid supply chamber, the second liquid supply pump is fixedly connected and communicated with the second liquid delivery pipeline 152, the first liquid supply pump sends the cleaning liquid into the second liquid delivery pipeline 152, the cleaning liquid flows into the cleaning tank 9, after the cleaning liquid in the cleaning tank 9 is filled, the cleaning liquid flows into the liquid discharge tank 8, and the cleaning liquid flows into the liquid supply chamber through the second liquid discharge hole 151.
The working process comprises the following steps: starting a first liquid supply pump to enable etching liquid to flow into the hollow cylinder 5, enabling overflowed etching liquid to flow back into a liquid storage chamber through the liquid discharge holes 6 and the first liquid discharge holes 141 in sequence, conveying a workpiece to be etched to the liquid storage chamber through the cooperation of the first telescopic rod 11 and the conveying belt 12, controlling the second telescopic rod 22 to retract, enabling the workpiece to be positioned in the hollow cylinder 5, starting the motor 7 to drive the liquid storage chamber 21 to rotate, etching the workpiece, closing the motor 7 after the etching requirement is met, controlling the second telescopic rod 22 to enable the liquid storage chamber 21 to be positioned above the hollow cylinder 5, conveying the workpiece into a cleaning cavity through the conveying belt 12, enabling the workpiece to move on the roller 10 for cleaning, pumping cleaning liquid into the cleaning tank 9 through the second liquid supply, enabling overflowed cleaning liquid to flow into the liquid discharge tank 8, and flowing back into the liquid supply chamber through the second liquid discharge holes 151, and conveying the workpiece to a conveying port at the cleaning cavity after the cleaning is completed; and repeating the process, and continuously etching and cleaning the workpiece.
In the description of the present utility model, it should be understood that the terms "longitudinal," "transverse," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," "outer," and the like indicate or are based on the orientation or positional relationship shown in the drawings, merely to facilitate description of the present utility model, and do not indicate or imply that the devices or elements referred to must have a particular orientation, be constructed and operated in a particular orientation, and thus should not be construed as limiting the present utility model.
The above embodiments are only illustrative of the preferred embodiments of the present utility model and are not intended to limit the scope of the present utility model, and various modifications and improvements made by those skilled in the art to the technical solutions of the present utility model should fall within the protection scope defined by the claims of the present utility model without departing from the design spirit of the present utility model.
Claims (8)
1. The utility model provides a rotation type wet etching machine which characterized in that: the device comprises a shell (1), wherein a first partition plate (13) is fixedly connected to the center in the shell (1), the first partition plate (13) divides the shell (1) into an etching cavity and a cleaning cavity, the etching cavity is communicated with the cleaning cavity through a second through hole (131) formed in the upper portion of the first partition plate (13), a second partition plate (14) is fixedly connected to the middle of the etching cavity, the second partition plate (14) divides the etching cavity into a working chamber and a liquid storage chamber, the working chamber is arranged above the liquid storage chamber, a conveying device and an etching assembly are arranged in the working chamber, a rotating device (2) is arranged in the etching assembly, the conveying device is fixedly connected with the top surface of the shell (1), the center of the top surface of the second partition plate (14) is fixedly connected with the etching assembly, the conveying device is used for conveying a workpiece to the rotating device, and the rotating device (2) is used for driving the workpiece to rotate; the middle part of the cleaning cavity is provided with a cleaning device which is used for cleaning the etched workpiece;
the two side walls of the shell (1) are respectively provided with a conveying opening, the two conveying openings are respectively communicated with the etching cavity and the cleaning cavity, and the conveying openings are matched with the second through holes (131) and are located on the same axis.
2. The rotary wet etching machine according to claim 1, wherein: the top surface center of second baffle (14) has seted up the holding tank, first flowing back hole (141) have been seted up to the top surface symmetry of second baffle (14), first flowing back hole (141) with the liquid storage chamber is linked together.
3. The rotary wet etching machine according to claim 1, wherein: the conveying device comprises a plurality of first telescopic rods (11), the fixed ends of the first telescopic rods (11) are fixedly connected with the top surface in the shell (1), the movable ends of the first telescopic rods (11) are fixedly connected with conveying belts (12), one ends of the conveying belts (12) extend out of the shell (1) through conveying openings of the etching cavity, and the other ends of the conveying belts (12) extend into the cleaning cavity through second through holes (131).
4. The rotary wet etching machine according to claim 2, wherein: the etching assembly comprises a supporting plate (4), the supporting plate (4) is fixedly connected with the second partition plate (14), one end, deviating from the second partition plate (14), of the supporting plate (4) is fixedly connected with a hollow cylinder (5), an etching strip (3) is arranged in the hollow cylinder (5), the etching strip (3) is fixedly connected with the supporting plate, a first through hole (32) is formed in the center of the etching strip (3), the first through hole (32) is rotationally connected with the rotating device, and the first through hole (32) is communicated with the accommodating groove; liquid inlet holes (31) are symmetrically formed in the etching strips (3), the liquid inlet holes (31) are formed in two sides of the first through holes (32), and the first through holes (32) are communicated with the liquid storage chamber through first liquid conveying pipelines (142).
5. The rotary wet etching machine according to claim 4, wherein: the top surface of the etching strip (3) is provided with a plurality of etching grooves (33).
6. The rotary wet etching machine according to claim 4, wherein: the rotating device (2) comprises a carrying disc (21) rotating in a hollow cylinder (5), a supporting column (24) is fixedly connected to the center of the bottom surface of the carrying disc (21), the supporting column (24) is deviated from the telescopic end of one end of the carrying disc (21) and fixedly connected with a second telescopic rod (22), a rotating rod (23) is fixedly connected to the fixed end of the second telescopic rod (22), the rotating rod (23) penetrates through a supporting plate (4) and is connected with a motor (7), the motor (7) is arranged in the accommodating groove, the motor (7) is fixedly connected with the supporting plate (4), and the rotating rod (23) is rotationally connected with a first through hole (32).
7. The rotary wet etching machine according to claim 4, wherein: liquid discharge holes (6) are symmetrically formed in the lower portion of the hollow cylinder (5).
8. The rotary wet etching machine according to claim 1, wherein: the cleaning device comprises a third partition plate (15) fixedly connected to the middle of a cleaning cavity, the cleaning cavity is divided into a cleaning chamber and a liquid supply chamber by the third partition plate (15), the cleaning chamber is arranged above the liquid supply chamber, a cleaning tank (9) is arranged at the center of the top surface of the third partition plate (15), liquid discharge grooves (8) are formed in two sides of the cleaning tank (9), the liquid discharge grooves (8) are formed in the third partition plate (15), a plurality of rollers (10) are rotatably connected in the cleaning tank (8), a second liquid discharge hole (151) is formed in the liquid discharge groove (8), the second liquid discharge hole (151) is communicated with the liquid supply chamber, and the center in the cleaning tank (9) is communicated with the liquid supply chamber through a second liquid conveying pipeline (152).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202322584999.6U CN221149947U (en) | 2023-09-22 | 2023-09-22 | Rotary wet etching machine |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202322584999.6U CN221149947U (en) | 2023-09-22 | 2023-09-22 | Rotary wet etching machine |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN221149947U true CN221149947U (en) | 2024-06-14 |
Family
ID=91421985
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202322584999.6U Active CN221149947U (en) | 2023-09-22 | 2023-09-22 | Rotary wet etching machine |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN221149947U (en) |
-
2023
- 2023-09-22 CN CN202322584999.6U patent/CN221149947U/en active Active
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