CN221131606U - Exhaust gas adsorbent discharge apparatus - Google Patents
Exhaust gas adsorbent discharge apparatus Download PDFInfo
- Publication number
- CN221131606U CN221131606U CN202323200417.6U CN202323200417U CN221131606U CN 221131606 U CN221131606 U CN 221131606U CN 202323200417 U CN202323200417 U CN 202323200417U CN 221131606 U CN221131606 U CN 221131606U
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- adsorption
- pipe
- adsorption tower
- exhaust gas
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- 239000003463 adsorbent Substances 0.000 title claims abstract description 30
- 238000001179 sorption measurement Methods 0.000 claims abstract description 120
- 238000007789 sealing Methods 0.000 claims description 9
- 239000004744 fabric Substances 0.000 claims description 3
- 239000002594 sorbent Substances 0.000 claims 4
- 239000007789 gas Substances 0.000 abstract description 43
- 238000007599 discharging Methods 0.000 abstract description 18
- 239000004065 semiconductor Substances 0.000 abstract description 4
- 239000002912 waste gas Substances 0.000 abstract description 3
- 238000000034 method Methods 0.000 description 5
- 238000013461 design Methods 0.000 description 4
- 238000005192 partition Methods 0.000 description 4
- 230000009286 beneficial effect Effects 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- 238000012986 modification Methods 0.000 description 3
- 230000004048 modification Effects 0.000 description 3
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 2
- 229910052799 carbon Inorganic materials 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 230000007613 environmental effect Effects 0.000 description 2
- 238000011835 investigation Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 1
- 238000012216 screening Methods 0.000 description 1
- 230000001360 synchronised effect Effects 0.000 description 1
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- Treating Waste Gases (AREA)
Abstract
The utility model belongs to the technical field of semiconductor tail gas treatment, and particularly relates to an exhaust gas adsorbent discharging device which comprises an adsorption tower and supporting legs arranged at the bottom of the adsorption tower, wherein an air inlet pipe is arranged on the outer side wall of the adsorption tower, an exhaust pipe is arranged at the top of the adsorption tower, three adsorption pipes are arranged in the adsorption tower, connecting blocks are fixed between the adsorption pipes, a rotating shaft is fixed at the center of each connecting block, and two ends of each rotating shaft penetrate through the inner wall of the adsorption tower; when the utility model is used for discharging, the rotating shaft is rotated, the connecting block and the adsorption pipe are driven by the rotating shaft to rotate, the adsorption pipe below the exhaust pipe is rotated to the discharge opening, the adsorbent in the adsorption pipe can fall out from the discharge opening to discharge, at the moment, the other adsorption pipe is rotated to the exhaust pipe and is connected between the air inlet pipe and the exhaust pipe, at the moment, the adsorption treatment can be continuously carried out, the introduction of waste gas is not required to be stopped, the discharging efficiency is improved, and the utility model is convenient and quick, and is convenient for users to use.
Description
Technical Field
The utility model belongs to the technical field of semiconductor tail gas treatment, and particularly relates to an exhaust gas adsorbent discharging device.
Background
When semiconductor parts are processed, a large amount of tail gas containing harmful components is easy to generate, the tail gas cannot be directly discharged, an adsorption tower is used for treatment, and the adsorbent for treating the tail gas needs to be replaced periodically;
Through investigation publication (bulletin) number: CN218392977U discloses an automatic unloading type adsorption device, in this technology, it discloses a technical scheme that an exhaust gas adsorption tank air inlet, an exhaust gas adsorption tank air outlet and a charging port are formed on a tank body of the exhaust gas adsorption tank, an air-permeable partition plate is horizontally arranged in the exhaust gas adsorption tank, air holes are uniformly formed on the air-permeable partition plate, and the air holes are communicated with an upper part and a lower part of the exhaust gas adsorption tank; the automatic discharging type adsorption device has the technical effects of realizing whole-course closed automatic discharging, reducing carbon replacement cost, being more beneficial to environmental protection and the like;
However, the existing adsorption device needs to suspend the treatment of tail gas during unloading, and can work after the adsorbent is replaced, so that the treatment efficiency is affected.
In order to solve the above problems, the present application provides an exhaust gas adsorbent discharging device.
Disclosure of utility model
To solve the problems set forth in the background art. The utility model provides a waste gas adsorbent discharging device which has the characteristics of no need of stopping during discharging, capability of maintaining the efficiency of tail gas treatment and convenience and rapidness in discharging.
In order to achieve the above purpose, the present utility model provides the following technical solutions: the utility model provides an exhaust gas adsorbent discharge apparatus, includes the adsorption tower and installs the landing leg of adsorption tower bottom, the intake pipe is installed to the lateral wall of adsorption tower, the blast pipe is installed at the top of adsorption tower, be equipped with three adsorption tube in the adsorption tower, be fixed with the connecting block between the adsorption tube, the center department of connecting block is fixed with the pivot, the both ends of pivot run through the inner wall of adsorption tower, and with the adsorption tower rotates to be connected, every the lateral wall of adsorption tube corresponds the position department of intake pipe has seted up the through-hole, every the inside wall of adsorption tube corresponds through-hole department and installs the screen cloth, the bottom side of adsorption tower is close to the discharge opening has been seted up to the position department of blast pipe one side.
Preferably, as an exhaust gas adsorbent discharging device of the present utility model, a feeding pipe is installed on the upper surface of the adsorption tower at a position between the exhaust pipe and the discharge port.
Preferably, the bottom end of the rotating shaft is provided with a motor, the outer side wall of the motor is fixed with a shell, and the shell is fixed at the bottom of the adsorption tower.
In the exhaust gas adsorbent discharging device according to the present utility model, preferably, a sealing gasket is mounted on the inner wall of the adsorption tower at a position close to the screen, and the sealing gasket is bonded to the surface of the adsorption pipe.
As an exhaust gas adsorbent discharging device of the present utility model, preferably, three of the adsorption pipes are provided corresponding to the exhaust pipe, the discharge port and the feed pipe, respectively.
Compared with the prior art, the utility model has the beneficial effects that:
When the utility model is used for discharging, the rotating shaft is rotated, the connecting block and the adsorption pipe are driven by the rotating shaft to rotate, the adsorption pipe below the exhaust pipe is rotated to the discharge opening, the adsorbent in the adsorption pipe can fall out from the discharge opening to discharge, at the moment, the other adsorption pipe is rotated to the exhaust pipe and is connected between the air inlet pipe and the exhaust pipe, at the moment, the adsorption treatment can be continuously carried out, the introduction of waste gas is not required to be stopped, the discharging efficiency is improved, and the utility model is convenient and quick, and is convenient for users to use.
Drawings
The accompanying drawings are included to provide a further understanding of the utility model and are incorporated in and constitute a part of this specification, illustrate the utility model and together with the embodiments of the utility model, serve to explain the utility model. In the drawings:
FIG. 1 is a schematic diagram of the structure of the present utility model;
FIG. 2 is a schematic view showing the internal structure of the adsorption tower according to the present utility model;
FIG. 3 is a schematic cross-sectional view of the present utility model;
FIG. 4 is a schematic view of the structure of the adsorption tube according to the present utility model;
in the figure: 1. an adsorption tower; 2. a support leg; 3. an air inlet pipe; 4. an exhaust pipe; 5. an adsorption tube; 6. a connecting block; 7. a rotating shaft; 8. a discharge port; 9. a motor; 10. feeding pipes; 11. a sealing gasket; 12. a housing; 13. and (3) screening.
Detailed Description
The following description of the embodiments of the present utility model will be made clearly and completely with reference to the accompanying drawings, in which it is apparent that the embodiments described are only some embodiments of the present utility model, but not all embodiments. All other embodiments, which can be made by those skilled in the art based on the embodiments of the utility model without making any inventive effort, are intended to be within the scope of the utility model.
Example 1
As shown in fig. 1;
The exhaust gas adsorbent discharging device comprises an adsorption tower 1 and supporting legs 2 arranged at the bottom of the adsorption tower 1, wherein an air inlet pipe 3 is arranged on the outer side wall of the adsorption tower 1;
In this embodiment: when semiconductor parts are processed, a large amount of tail gas containing harmful components is easy to generate, the tail gas cannot be directly discharged, an adsorption tower is used for treatment, and the adsorbent for treating the tail gas needs to be replaced periodically;
Through investigation publication (bulletin) number: CN218392977U discloses an automatic unloading type adsorption device, in this technology, it discloses a technical scheme that an exhaust gas adsorption tank air inlet, an exhaust gas adsorption tank air outlet and a charging port are formed on a tank body of the exhaust gas adsorption tank, an air-permeable partition plate is horizontally arranged in the exhaust gas adsorption tank, air holes are uniformly formed on the air-permeable partition plate, and the air holes are communicated with an upper part and a lower part of the exhaust gas adsorption tank; the automatic discharging type adsorption device has the technical effects of realizing whole-course closed automatic discharging, reducing carbon replacement cost, being more beneficial to environmental protection and the like;
however, when the existing adsorption device discharges, the treatment of tail gas is needed to be stopped, and the operation can be performed after the adsorbent is replaced, so that the treatment efficiency is affected;
in order to solve the above problems, the following modifications are proposed.
Further, the method comprises the following steps:
As shown in fig. 1 to 4;
In combination with the above:
In order to improve the efficiency of unloading, blast pipe 4 is installed at the top of adsorption tower 1, be equipped with three adsorption tube 5 in the adsorption tower 1, be fixed with connecting block 6 between the adsorption tube 5, the center department of connecting block 6 is fixed with pivot 7, the inner wall of adsorption tower 1 is run through at the both ends of pivot 7 to rotate with adsorption tower 1 and be connected, the through-hole has been seted up to the outside wall of every adsorption tube 5 corresponding to the position department of intake pipe 3, screen cloth 13 is installed to the inside wall of every adsorption tube 5 corresponding to through-hole department, the downside of adsorption tower 1, discharge opening 8 has been seted up to the position department that is close to blast pipe 4 one side.
In this embodiment: when the utility model is used, tail gas enters the adsorption tower 1 through the air inlet pipe 3 and then enters the adsorption pipe 5, after the adsorption treatment of the adsorbent in the adsorption pipe 5, the tail gas is discharged to the outside through the exhaust pipe 4, and the tail gas treatment is completed.
Still further, the method comprises:
in an alternative embodiment, a loading pipe 10 is installed at the upper surface of the adsorption tower 1 at a position between the exhaust pipe 4 and the discharge port 8.
In this embodiment: through this design, the user can add the adsorbent to its below's adsorption tube 5 through material loading pipe 10, and when changing adsorption tube 5, the adsorption tube 5 of opposite side has loaded new adsorbent at this moment, can carry out tail gas treatment operation at any time, and then improves the efficiency that the adsorbent was changed, reduces tail gas treatment's dead time.
Still further, the method comprises:
In an alternative embodiment, the motor 9 is mounted at the bottom end of the rotating shaft 7, and a housing 12 is fixed to the outer side wall of the motor 9, and the housing 12 is fixed to the bottom of the adsorption tower 1.
In this embodiment: through this design, when needs change adsorption tube 5, the user can start motor 9, and motor 9 drives pivot 7 and connecting block 6 rotation, is convenient for change the adsorbent in the adsorption tube 5.
Still further, the method comprises:
In an alternative embodiment, a sealing gasket 11 is mounted on the inner wall of the adsorption tower 1 near the screen 13, and the sealing gasket 11 is attached to the surface of the adsorption tube 5.
In this embodiment: through this design, sealing washer 11 fills the gap of intake pipe 3 and adsorption tube 5 junction, and the tail gas of being convenient for enters into adsorption tube 5 through intake pipe 3, and when adsorption tube 5 rotates, sealing washer 11 can seal next adsorption tube 5.
Still further, the method comprises:
In an alternative embodiment, three adsorption tubes 5 are provided corresponding to the exhaust tube 4, the discharge opening 8 and the feed tube 10, respectively.
In this embodiment: through this design, when the blast pipe 4 is corresponding to one adsorption tube 5, other two adsorption tubes 5 correspond discharge opening 8 and material loading pipe 10, and when the adsorption tube 5 under blast pipe 4 carries out tail gas treatment, user's accessible material loading pipe 10 adds the adsorbent to the adsorption tube 5 of its below, and the adsorption tube 5 of discharge opening 8 department can carry out the adsorbent and unload simultaneously, but synchronous operation, convenience of customers uses.
The working principle and the using flow of the utility model are as follows: when the utility model is used, tail gas enters the adsorption tower 1 through the air inlet pipe 3 and then enters the adsorption pipe 5, after the adsorption treatment of the adsorbent in the adsorption pipe 5, the tail gas is discharged to the outside through the exhaust pipe 4, and the tail gas treatment is completed, when the adsorbent in the adsorption pipe 5 needs to be replaced, the motor 9 is started, the motor 9 drives the rotating shaft 7 to rotate, the rotating shaft 7 drives the connecting block 6 and the adsorption pipe 5 to rotate, when the adsorption pipe 5 rotates to the discharge opening 8, the adsorbent in the adsorption pipe 5 falls from the discharge opening 8 to complete the discharge operation, and when the discharge is carried out, the other adsorption pipe 5 rotates to the air inlet pipe 3 to continue the tail gas treatment operation, and when the adsorption pipe 5 is replaced, the adsorption pipe 5 at the other side is filled with new adsorbent at any time, the tail gas treatment operation can be carried out at any time, so that the efficiency of the replacement of the adsorbent is improved, and the dead time of the tail gas treatment is reduced.
Finally, it should be noted that: the foregoing description is only a preferred embodiment of the present utility model, and the present utility model is not limited thereto, but it is to be understood that modifications and equivalents of some of the technical features described in the foregoing embodiments may be made by those skilled in the art, although the present utility model has been described in detail with reference to the foregoing embodiments. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present utility model should be included in the protection scope of the present utility model.
Claims (5)
1. The utility model provides an exhaust gas adsorbent discharge apparatus, includes adsorption tower (1) and installs landing leg (2) of adsorption tower (1) bottom, intake pipe (3), its characterized in that are installed to the lateral wall of adsorption tower (1): the top of adsorption tower (1) is installed blast pipe (4), be equipped with three adsorption tube (5) in adsorption tower (1), be fixed with connecting block (6) between adsorption tube (5), the center department of connecting block (6) is fixed with pivot (7), the both ends of pivot (7) run through the inner wall of adsorption tower (1), and with adsorption tower (1) rotate and connect, every the lateral wall of adsorption tube (5) corresponds the position department of intake pipe (3) has seted up the through-hole, every the inside wall of adsorption tube (5) corresponds through-hole department and installs screen cloth (13), the downside of adsorption tower (1) is close to discharge opening (8) have been seted up to the position department of blast pipe (4) one side.
2. The exhaust gas sorbent discharge apparatus of claim 1, wherein: the upper surface of the adsorption tower (1) is positioned between the exhaust pipe (4) and the discharge opening (8), and a feeding pipe (10) is arranged at the position.
3. The exhaust gas sorbent discharge apparatus of claim 1, wherein: the bottom of pivot (7) is installed motor (9), the lateral wall of motor (9) is fixed with casing (12), casing (12) are fixed in the bottom of adsorption tower (1).
4. The exhaust gas sorbent discharge apparatus of claim 1, wherein: and a sealing gasket (11) is arranged at the position, close to the screen (13), of the inner wall of the adsorption tower (1), and the sealing gasket (11) is attached to the surface of the adsorption pipe (5).
5. The exhaust gas sorbent discharge apparatus of claim 2, wherein: the three adsorption pipes (5) are respectively arranged corresponding to the exhaust pipe (4), the discharge opening (8) and the feeding pipe (10).
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN202323200417.6U CN221131606U (en) | 2023-11-23 | 2023-11-23 | Exhaust gas adsorbent discharge apparatus |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN202323200417.6U CN221131606U (en) | 2023-11-23 | 2023-11-23 | Exhaust gas adsorbent discharge apparatus |
Publications (1)
Publication Number | Publication Date |
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CN221131606U true CN221131606U (en) | 2024-06-14 |
Family
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Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
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CN202323200417.6U Active CN221131606U (en) | 2023-11-23 | 2023-11-23 | Exhaust gas adsorbent discharge apparatus |
Country Status (1)
Country | Link |
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CN (1) | CN221131606U (en) |
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2023
- 2023-11-23 CN CN202323200417.6U patent/CN221131606U/en active Active
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