CN221117244U

CN221117244U - Third generation semiconductor wastewater treatment device

Info

Publication number: CN221117244U
Application number: CN202322753658.7U
Authority: CN
Inventors: 刘伟丽; 张银良; 刘晓江; 郁春
Original assignee: Yuanzhong Electronic System Technology Shanghai Co ltd
Current assignee: Yuanzhong Electronic System Technology Shanghai Co ltd
Priority date: 2023-10-13
Filing date: 2023-10-13
Publication date: 2024-06-11
Anticipated expiration: 2033-10-13

Abstract

The utility model relates to the technical field of water treatment, and discloses a third-generation semiconductor wastewater treatment device, which comprises a heat exchanger, a first stripping tower transfer pump arranged outside the heat exchanger, an ammonia stripping tower arranged outside the first stripping tower transfer pump, an ammonia absorption tower arranged outside the ammonia stripping tower, a second stripping tower transfer pump and a circulating fan arranged outside the ammonia absorption tower, and an RO membrane system arranged outside a buffer water tank, wherein the first stripping tower transfer pump is arranged outside the heat exchanger; the utility model can convert ammonia nitrogen pollutants in the wastewater into byproducts, realize the recycling treatment of the byproducts, and simultaneously separate high salinity in the wastewater from the wastewater, thereby being more beneficial to the discharge or recycling of the wastewater, realizing the recycling treatment of the ammonia nitrogen pollutants, forming ammonium sulfate byproducts and bringing a certain economic value; the MVR evaporator can realize effective removal of salt, form solid salt and reduce the amount of offsite waste; the effluent treated by the process can be reused in the sections of water supplementing of the cooling tower in the factory, and the like, so that the discharge amount of wastewater is reduced.

Description

Third generation semiconductor wastewater treatment device

Technical Field

The utility model relates to the technical field of wastewater treatment, in particular to a third-generation semiconductor wastewater treatment device.

Background

The third generation semiconductor is a wide forbidden band semiconductor material mainly comprising silicon carbide SiC and gallium nitride GaN, and has the characteristics of high breakdown electric field, high saturated electron velocity, high thermal conductivity, high electron density, high mobility, high power tolerance and the like. The third generation semiconductor industry has also met with a vigorous development era driven by the market demands of 5G and new energy automobiles.

The microwave and power device industry belongs to the third generation semiconductor industry, and the generated wastewater contains high-concentration ammonia nitrogen, chloride ions and other pollutants. The contaminants can cause harm to the environment and waste water resources.

Disclosure of utility model

The utility model aims to provide a third-generation semiconductor wastewater treatment device for solving the problems in the background technology.

In order to achieve the above purpose, the present utility model provides the following technical solutions: the third generation semiconductor wastewater treatment device comprises a heat exchanger, a first stripping tower transfer pump arranged outside the heat exchanger, an ammonia stripping tower arranged outside the first stripping tower transfer pump, an ammonia absorption tower arranged outside the ammonia stripping tower, a second stripping tower transfer pump and a circulating fan arranged outside the ammonia absorption tower, an RO membrane system arranged outside a buffer water tank, an MVR evaporator arranged outside the RO membrane system, and a standardized discharge well arranged outside the MVR evaporator.

Preferably, the outside of first stripping tower transfer pump has waste water adjustment tank, PH adjustment tank, intermediate flume and buffer flume, the PH adjustment tank sets up in the outside of waste water adjustment tank, the intermediate flume sets up in one side of PH adjustment tank, the buffer flume sets up in the outside of intermediate flume, still including setting up in the waste water elevator pump in the waste water adjustment tank outside, set up in the intermediate water pump in intermediate flume one side, the waste water adjustment tank still includes the first perforation aerator that sets up in inside to and set up in the static pressure level gauge in the outside, the waste water elevator pump still includes basket filter that is used for connecting the waste water adjustment tank, and sets up first export governing valve and electromagnetic flowmeter between waste water elevator pump and PH adjustment tank.

Preferably, the intermediate water tank comprises a second perforated aerator and a first multipoint liquid level switch which are arranged inside, and the intermediate water pump comprises a second outlet regulating valve and a first rotor flowmeter which are arranged outside.

Preferably, the ammonia stripping tower comprises a first spray separator, a first water distributor and a first filler layer which are arranged inside.

Preferably, the first stripping tower transfer pump comprises a third outlet regulating valve and a second rotameter which are arranged on the outer side, and a pipeline mixer which is arranged on the outer side of the buffer water tank, and the second stripping tower transfer pump comprises a fourth outlet regulating valve and a third rotameter which are arranged on the outer side.

Preferably, the ammonia absorption tower comprises a third spray separation tower, a second water distributor and a second packing layer which are arranged inside.

Preferably, the circulating fan comprises an air pipe arranged at the outer side and used for communicating with the ammonia absorption tower.

Preferably, the buffer water tank comprises a second multipoint liquid level switch arranged inside.

Preferably, the RO membrane system comprises a pre-pressurizing pump arranged on the outer side of the buffer water tank, and a fifth outlet regulating valve and a fourth rotameter which are arranged on the outer side of the pre-pressurizing pump.

Preferably, the standardized drainage well further comprises an ultrasonic flowmeter and a pasteurization tank disposed internally.

Compared with the prior art, the utility model has the following beneficial effects:

The utility model can convert ammonia nitrogen pollutants in the wastewater into byproducts, realize the recycling treatment of the byproducts, and simultaneously separate high salinity in the wastewater from the wastewater, thereby being more beneficial to the discharge or recycling of the wastewater, realizing the recycling treatment of the ammonia nitrogen pollutants, forming ammonium sulfate byproducts and bringing a certain economic value; the MVR evaporator can realize effective removal of salt, form solid salt and reduce the amount of offsite waste; the effluent treated by the process can be reused in the sections of water supplementing of the cooling tower in the factory, and the like, so that the discharge amount of wastewater is reduced.

Drawings

FIG. 1 is a schematic diagram of a third generation semiconductor wastewater treatment apparatus according to a preferred embodiment of the present utility model;

FIG. 2 is a schematic diagram of a wastewater regulating tank structure provided by the utility model;

Fig. 3 is a schematic diagram of an ammonia absorption tower according to the present utility model.

In the figure: 1. a waste water regulating tank; 101. a first perforated aerator; 102. static pressure type liquid level meter; 2. a waste water lifting pump; 201. a basket filter; 202. a first outlet regulator valve; 203. an electromagnetic flowmeter; 3. a PH adjusting tank; 4. a middle water tank; 401. a second perforated aerator; 402. a first multi-point liquid level switch; 5. a middle water pump; 501. a second outlet regulator valve; 502. a first rotor flow meter; 6. a heat exchanger; 7. an ammonia stripping tower; 701. a first droplet separator; 702. a first water distributor; 703. a first filler layer; 8. a first stripping column transfer pump; 801. a third outlet regulator valve; 802. a second rotameter; 803. a pipe mixer; 9. an ammonia absorption tower; 901. a third spray separation column; 902. the second water distributor; 903. a second filler layer; 10. a second stripping column transfer pump; 1001. a fourth outlet regulator valve; 1002. a third rotameter; 11. a circulating fan; 1101. an air duct; 12. a buffer water tank; 1201. a second multi-point liquid level switch; 13. an RO membrane system; 1301. pre-pressurizing pump; 1302. a fifth outlet regulator valve; 1303. a fourth rotameter; 14. an MVR evaporator; 15. standardized drainage wells; 1501. an ultrasonic flowmeter; 1502. a pasteurization tank.

Detailed Description

The following description of the embodiments of the present utility model will be made clearly and completely with reference to the accompanying drawings, in which it is apparent that the embodiments described are only some embodiments of the present utility model, but not all embodiments. All other embodiments, which can be made by those skilled in the art based on the embodiments of the utility model without making any inventive effort, are intended to be within the scope of the utility model.

Referring to fig. 1 to 3, a third generation semiconductor wastewater treatment apparatus includes a heat exchanger 6, a first stripping column transfer pump 8 disposed outside the heat exchanger 6, an ammonia stripping column 7 disposed outside the first stripping column transfer pump 8, an ammonia absorption column 9 disposed outside the ammonia stripping column 7, a second stripping column transfer pump 10 and a circulation fan 11 disposed outside the ammonia absorption column 9, an RO membrane system 13 disposed outside a buffer tank 12, an MVR evaporator 14 disposed outside the RO membrane system 13, and a standardized drain well 15 disposed outside the MVR evaporator 14.

Referring to fig. 1 and 2, there are a wastewater adjustment tank 1, a PH adjustment tank 3, an intermediate tank 4 and a buffer tank 12 outside the first stripping column transfer pump 8, the PH adjustment tank 3 is disposed outside the wastewater adjustment tank 1, the intermediate tank 4 is disposed on one side of the PH adjustment tank 3, the buffer tank 12 is disposed outside the intermediate tank 4, further, the first stripping column transfer pump 1 further includes a wastewater lift pump 2 disposed outside the wastewater adjustment tank 1, an intermediate water pump 5 disposed on one side of the intermediate tank 4, the wastewater adjustment tank 1 further includes a first perforated aerator 101 disposed inside, and a hydrostatic pressure type level gauge 102 disposed outside, the wastewater lift pump 2 further includes a basket filter 201 for connecting the wastewater adjustment tank 1, and a first outlet adjustment valve 202 and an electromagnetic flowmeter 203 disposed between the wastewater lift pump 2 and the PH adjustment tank 3.

It should be noted that: the waste water regulating tank 1 is used for collecting and storing waste water discharged by the machine and auxiliary equipment. The primary purpose of the first perforated aerator 101 is to agitate the wastewater, ensuring a homogenous homogenization of the wastewater. The tank is internally provided with a static pressure type liquid level meter 102, the liquid level height in the tank is monitored in real time, the starting and stopping of the wastewater lifting pump 2 are automatically controlled, meanwhile, when the liquid level is high, an alarm signal is sent, an operator is prompted that the liquid level is abnormal, whether the water inflow is normal or not is checked, whether the subsequent system is in a normal working state or not is checked, and the wastewater lifting pump 2 is used for quantitatively transferring homogenized wastewater to the PH adjusting tank 3. The inlet end of the pump is provided with a basket filter 201, the filtering precision is 100um, and the basket filter is mainly used for intercepting hard particles and large-particle-size suspended matters in wastewater and preventing damage and pollution blocking to the pump and subsequent devices. The pump outlet is provided with a first outlet regulating valve 202 and an electromagnetic flowmeter 203, and the opening of the valve is adjusted to ensure that the output flow of the pump is at a set value. The electromagnetic flowmeter 203 has both an instantaneous flow rate function and an accumulated flow rate function, and can measure the accumulated throughput of the wastewater treatment system.

Referring to fig. 1, the intermediate water tank 4 includes a second perforated aerator 401 and a first multi-point liquid level switch 402 provided inside, and the intermediate water pump 5 includes a second outlet regulating valve 501 and a first rotor flow meter 502 provided outside.

It should be noted that: the middle water tank 4 and the pH adjusting tank 3 are of a conjuncted structure, and the effluent after being adjusted by the pH adjusting tank 3 automatically flows into the middle water tank 4 for storage. A second perforated aerator 401 is arranged in the tank and has the same principle of operation as the first perforated aerator 101. The tank is internally provided with a first multi-point liquid level switch 402, the starting and stopping of the middle water pump 5 are automatically controlled, and meanwhile, the tank is provided with a high-low liquid level alarm function, and the middle water pump 5 is used for quantitatively transferring the wastewater with the pH value adjusted to an ammonia stripping absorption system. The pump outlet is provided with a second outlet regulating valve 501 and a first rotor flowmeter 502, and the opening degree of the valve is adjusted to ensure that the output flow of the pump is at a set value. The first rotor flow meter 502 may display the instantaneous flow value of the pump outlet flow meter.

Referring to fig. 1 and 3, the ammonia stripping column 7 includes a first head separator 701, a first water distributor 702, and a first packing layer 703 provided inside.

The ammonia absorption tower 9 includes a third spray separation tower 901, a second water distributor 902, and a second packing layer 903 disposed inside.

The first stripping column transfer pump 8 includes a third outlet regulating valve 801 and a second rotameter 802 provided on the outside, and a pipe mixer 803 provided on the outside of the buffer tank 12, and the second stripping column transfer pump 10 includes a fourth outlet regulating valve 1001 and a third rotameter 1002 provided on the outside.

The circulation fan 11 includes an air duct 1101 provided outside for communicating with the ammonia absorption tower 9.

It should be noted that: the ammonia stripping absorption system has the function of introducing ammonia-containing wastewater with pH of 11 and temperature of 55 ℃ into an ammonia stripping tower 7, wherein a first water distributor 702 and a first filler layer 703 are arranged in the tower, and the wastewater enters from the top of the first filler layer 703, is uniformly sprayed on the surface of the filler through the first water distributor 702 and flows downwards along the gaps of the first filler layer 703. Air is supplied to the bottom of the first packing layer 703, air and water are contacted with the first packing layer 703, NH3 molecules in the water phase are continuously transferred to a gas phase, the gas phase is separated by the first spray separator 701 at the top of the tower and then enters the ammonia absorption tower 9, the liquid phase with NH3 molecules removed is collected at the bottom of the tower and is transferred to the next process by the first stripping tower transfer pump 8. The pump outlet is provided with a third outlet regulating valve 801 and a second rotameter 802, the opening of the valve is regulated, the output flow of the pump is ensured to be at a set value, meanwhile, a pipeline mixer 803 and an alkali adding pipeline are arranged on the pump outlet pipeline, and the pH of the wastewater is regulated to 5-6 by utilizing an online pH meter. The gas phase containing NH3 molecules is discharged from the top of the stripping tower, is collected by an air pipe 1101 and is connected into an ammonia absorption tower 9, and a third spray separation tower 901, a second water distributor 902 and a second filler layer 903 are arranged inside the ammonia absorption tower 9. The second water distributor 902 at the top is filled with sulfuric acid, gas phase enters from the bottom of the second packing layer 903, two phases are contacted with the second packing layer 903, and the sulfuric acid and ammonia molecules react chemically to generate ammonium sulfate byproducts. The bottom of the ammonia absorption tower 9 is provided with a second stripping tower transfer pump 10, sulfuric acid liquid circulates in the tower all the time, and the feeding of sulfuric acid is controlled according to the pH value. And a densimeter is arranged on the circulating pipeline, when the specific gravity of the detected circulating liquid reaches a set value, the concentration of ammonium sulfate representing the circulating liquid reaches the set value, the circulating liquid is transferred into an ammonium sulfate collecting tank through valve switching, and the part of ammonium sulfate can be used as byproducts such as nitrogen fertilizer for recycling, so that the ammonia stripping absorption system has a certain economic value, and the gas phase circulation of the ammonia stripping absorption system consists of a circulating fan 11 and a matched air pipe 1101. The inlet of the circulating fan 11 is connected with an air port at the top of the absorption tower, the outlet of the circulating fan 11 is connected with the side bottom of the packing layer of the stripping tower, and the outlet air at the top of the stripping tower is connected to the side bottom of the packing layer of the absorption tower to form gas phase circulation.

Referring to fig. 1, the buffer tank 12 includes a second multi-point liquid level switch 1201 provided inside.

The RO membrane system 13 includes a pre-pressurizing pump 1301 provided outside the buffer tank 12, and a fifth outlet regulator valve 1302 and a fourth rotameter 1303 provided outside the pre-pressurizing pump 1301.

The standardized discharge well 15 further includes an ultrasonic flow meter 1501 and a pasteurization tank 1502 disposed internally.

It should be noted that: the buffer water tank 12 is mainly used for collecting effluent after ammonia stripping, a second multipoint liquid level switch 1201 is arranged in the tank, the starting and stopping of a lifting pump of the RO membrane system 13 are automatically controlled, the RO membrane system 13 has a high-low liquid level alarm function, the RO membrane system 13 is a reverse osmosis membrane system, the main function is to concentrate high salinity in wastewater, and the process is a physical separation process. The wastewater is lifted to the RO membrane system 13 by the pre-booster pump 1301, a fifth outlet regulating valve 1302 and a fourth rotameter 1303 are arranged on the pump outlet, the opening of the valve is adjusted, and the output flow of the pump is ensured to be at a set value. The produced water after membrane filtration can be used as a reuse water source and reused for water points such as circulating water replenishing of a cooling tower, and the redundant part is discharged after reaching the standard. The RO concentrate enters the MVR evaporator 14. The RO membrane system mainly comprises an RO membrane, an RO membrane shell, a high-pressure pump, a cartridge filter, related instruments and pipelines, and the MVR evaporator 14 is used for controlling the evaporating temperature to 90-95 ℃ under the micro negative pressure condition and evaporating and concentrating the salt in the wastewater to a crystallization state, and can further remove pollutants such as ammonia nitrogen, organic matters and the like in the wastewater. The evaporated condensate water is reused for supplementing water for the cooling tower, and the redundant part is discharged after reaching the standard. The MVR evaporator 14 is composed of a heat exchanger, a separator, a compressor, a circulating water pump, a mother liquor tank, a condensate tank, a thick kettle, a centrifuge, CIP cleaning and the like, and a standardized discharge well is provided with an ultrasonic flowmeter 1501 and a pasteurization tank 1502, the function of which is to discharge qualified effluent into a municipal pipe network through the discharge well, and the ultrasonic flowmeter 1501 measures the instantaneous and accumulated flow of the discharged water. And is also the sampling point for water quality detection of the discharged water.

Working principle: the waste water regulating tank 1 is used for collecting and storing waste water discharged by the machine and auxiliary equipment. The primary purpose of the first perforated aerator 101 is to agitate the wastewater, ensuring a homogenous homogenization of the wastewater. The tank is internally provided with a static pressure type liquid level meter 102, the liquid level height in the tank is monitored in real time, the starting and stopping of the wastewater lifting pump 2 are automatically controlled, meanwhile, when the liquid level is high, an alarm signal is sent, an operator is prompted that the liquid level is abnormal, whether the water inflow is normal or not is checked, whether the subsequent system is in a normal working state or not is checked, and the wastewater lifting pump 2 is used for quantitatively transferring homogenized wastewater to the PH adjusting tank 3. The inlet end of the pump is provided with a basket filter 201, the filtering precision is 100um, and the basket filter is mainly used for intercepting hard particles and large-particle-size suspended matters in wastewater and preventing damage and pollution blocking to the pump and subsequent devices. The pump outlet is provided with a first outlet regulating valve 202 and an electromagnetic flowmeter 203, and the opening of the valve is adjusted to ensure that the output flow of the pump is at a set value. The electromagnetic flowmeter 203 has both an instantaneous flow function and an accumulated flow function, and can measure the accumulated treatment capacity of the wastewater treatment system, the intermediate water tank 4 and the pH adjusting tank 3 are of a conjuncted structure, and the effluent after being adjusted by the pH adjusting tank 3 automatically flows into the intermediate water tank 4 for storage. A second perforated aerator 401 is arranged in the tank and has the same principle of operation as the first perforated aerator 101. The tank is internally provided with a first multi-point liquid level switch 402, the starting and stopping of the middle water pump 5 are automatically controlled, and meanwhile, the tank is provided with a high-low liquid level alarm function, and the middle water pump 5 is used for quantitatively transferring the wastewater with the pH value adjusted to an ammonia stripping absorption system. The pump outlet is provided with a second outlet regulating valve 501 and a first rotor flowmeter 502, and the opening degree of the valve is adjusted to ensure that the output flow of the pump is at a set value. The first rotor flow meter 502 can display the instantaneous flow value of the pump outlet flow meter, and the waste water is heated to 50-55 ℃ before entering the ammonia stripping absorption system, so that the ammonia stripping separation is facilitated. The waste water is heated by using an external heat source (hot water or steam) through the heat exchanger 6, and the fins of the heat exchanger 6 are made of stainless steel, so that the heat exchanger has better corrosion resistance. The heat exchanger 6 is used for passing waste water from the primary side and heat source from the secondary side, and the good heat conduction capacity of the fins is used for realizing the transmission of the heat source, the ammonia stripping absorption system has the function of passing ammonia-containing waste water with pH of 11 and temperature of 55 ℃ into the ammonia stripping tower 7, a first water distributor 702 and a first filler layer 703 are arranged in the ammonia stripping tower, the waste water enters from the top of the first filler layer 703, is uniformly sprayed on the surface of the filler through the first water distributor 702, and flows downwards along the gaps of the first filler layer 703. Air is supplied to the bottom of the first packing layer 703, air and water are contacted with the first packing layer 703, NH3 molecules in the water phase are continuously transferred to a gas phase, the gas phase is separated by the first spray separator 701 at the top of the tower and then enters the ammonia absorption tower 9, the liquid phase with NH3 molecules removed is collected at the bottom of the tower and is transferred to the next process by the first stripping tower transfer pump 8. The pump outlet is provided with a third outlet regulating valve 801 and a second rotameter 802, the opening of the valve is regulated, the output flow of the pump is ensured to be at a set value, meanwhile, a pipeline mixer 803 and an alkali adding pipeline are arranged on the pump outlet pipeline, and the pH of the wastewater is regulated to 5-6 by utilizing an online pH meter. The gas phase containing NH3 molecules is discharged from the top of the stripping tower, is collected by an air pipe 1101 and is connected into an ammonia absorption tower 9, and a third spray separation tower 901, a second water distributor 902 and a second filler layer 903 are arranged inside the ammonia absorption tower 9. The second water distributor 902 at the top is filled with sulfuric acid, gas phase enters from the bottom of the second packing layer 903, two phases are contacted with the second packing layer 903, and the sulfuric acid and ammonia molecules react chemically to generate ammonium sulfate byproducts. The bottom of the ammonia absorption tower 9 is provided with a second stripping tower transfer pump 10, sulfuric acid liquid circulates in the tower all the time, and the feeding of sulfuric acid is controlled according to the pH value. And a densimeter is arranged on the circulating pipeline, when the specific gravity of the detected circulating liquid reaches a set value, the concentration of ammonium sulfate representing the circulating liquid reaches the set value, the circulating liquid is transferred into an ammonium sulfate collecting tank through valve switching, and the part of ammonium sulfate can be used as byproducts such as nitrogen fertilizer for recycling, so that the ammonia stripping absorption system has a certain economic value, and the gas phase circulation of the ammonia stripping absorption system consists of a circulating fan 11 and a matched air pipe 1101. The inlet of the circulating fan 11 is connected with the air inlet at the top of the absorption tower, the outlet of the circulating fan 11 is connected with the side bottom of the packing layer of the stripping tower, the air outlet at the top of the stripping tower is connected with the side bottom of the packing layer of the absorption tower again to form gas-phase circulation, the buffer water tank 12 is mainly used for collecting the water discharged after ammonia stripping, the second multipoint liquid level switch 1201 is arranged in the tank, the starting and stopping of the lifting pump of the RO membrane system 13 are automatically controlled, the high-low liquid level alarming function is realized, the RO membrane system 13 is a reverse osmosis membrane system, the main function is to concentrate high salinity in wastewater, and the process is a physical separation process. The wastewater is lifted to the RO membrane system 13 by the pre-booster pump 1301, a fifth outlet regulating valve 1302 and a fourth rotameter 1303 are arranged on the pump outlet, the opening of the valve is adjusted, and the output flow of the pump is ensured to be at a set value. The produced water after membrane filtration can be used as a reuse water source and reused for water points such as circulating water replenishing of a cooling tower, and the redundant part is discharged after reaching the standard. The RO concentrate enters the MVR evaporator 14. The RO membrane system mainly comprises an RO membrane, an RO membrane shell, a high-pressure pump, a cartridge filter, related instruments and pipelines, and the MVR evaporator 14 is used for controlling the evaporating temperature to 90-95 ℃ under the micro negative pressure condition and evaporating and concentrating the salt in the wastewater to a crystallization state, and can further remove pollutants such as ammonia nitrogen, organic matters and the like in the wastewater. The evaporated condensate water is reused for supplementing water for the cooling tower, and the redundant part is discharged after reaching the standard. The MVR evaporator 14 is composed of a heat exchanger, a separator, a compressor, a circulating water pump, a mother liquor tank, a condensate tank, a thick kettle, a centrifuge, CIP cleaning and the like, and a standardized discharge well is provided with an ultrasonic flowmeter 1501 and a pasteurization tank 1502, the function of which is to discharge qualified effluent into a municipal pipe network through the discharge well, and the ultrasonic flowmeter 1501 measures the instantaneous and accumulated flow of the discharged water. And is also the sampling point for water quality detection of the discharged water.

It is noted that relational terms such as first and second, and the like are used solely to distinguish one entity or action from another entity or action without necessarily requiring or implying any actual such relationship or order between such entities or actions. Moreover, the terms "comprises," "comprising," or any other variation thereof, are intended to cover a non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements does not include only those elements but may include other elements not expressly listed or inherent to such process, method, article, or apparatus. Without further limitation, an element defined by the phrase "comprising one … …" does not exclude the presence of other like elements in a process, method, article, or apparatus that comprises the element.

Although embodiments of the present utility model have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations can be made therein without departing from the principles and spirit of the utility model, the scope of which is defined in the appended claims and their equivalents.

Claims

1. A third generation semiconductor wastewater treatment device is characterized in that: the device comprises a heat exchanger (6), a first stripping tower transfer pump (8) arranged outside the heat exchanger (6), an ammonia stripping tower (7) arranged outside the first stripping tower transfer pump (8), an ammonia absorption tower (9) arranged outside the ammonia stripping tower (7), a second stripping tower transfer pump (10) and a circulating fan (11) arranged outside the ammonia absorption tower (9), an RO membrane system (13) arranged outside a buffer water tank (12), an MVR evaporator (14) arranged outside the RO membrane system (13) and a standardized discharge well (15) arranged outside the MVR evaporator (14).

2. A third generation semiconductor wastewater treatment plant according to claim 1, wherein: the utility model provides a waste water pump (2), intermediate water pump (5) of setting in intermediate water tank (4) one side outside waste water regulating tank (1), waste water regulating tank (1) still including setting up in waste water pump (2), intermediate water pump (5) of setting in intermediate water tank (4) one side outside waste water regulating tank (1) in the outside, waste water regulating tank (1) still including setting up in inside first perforation aerator (101) to and set up in static pressure type liquid level gauge (102) of outside, waste water pump (2) still including basket filter (201) that are used for connecting waste water regulating tank (1), and set up first export governing valve (202) and electromagnetic flowmeter (203) between waste water pump (2) and PH regulating tank (3).

3. A third generation semiconductor wastewater treatment plant according to claim 2, wherein: the intermediate water tank (4) comprises a second perforated aerator (401) and a first multipoint liquid level switch (402) which are arranged inside, and the intermediate water pump (5) comprises a second outlet regulating valve (501) and a first rotor flowmeter (502) which are arranged outside.

4. A third generation semiconductor wastewater treatment plant according to claim 1, wherein: the ammonia stripping tower (7) comprises a first spray separator (701), a first water distributor (702) and a first packing layer (703) which are arranged in the ammonia stripping tower.

5. A third generation semiconductor wastewater treatment plant according to claim 1, wherein: the first stripping tower transfer pump (8) comprises a third outlet regulating valve (801) and a second rotameter (802) which are arranged on the outer side, and a pipeline mixer (803) which is arranged on the outer side of the buffer water tank (12), and the second stripping tower transfer pump (10) comprises a fourth outlet regulating valve (1001) and a third rotameter (1002) which are arranged on the outer side.

6. A third generation semiconductor wastewater treatment plant according to claim 1, wherein: the ammonia absorption tower (9) comprises a third spray separation tower (901), a second water distributor (902) and a second packing layer (903) which are arranged inside.

7. A third generation semiconductor wastewater treatment plant according to claim 1, wherein: the circulating fan (11) comprises an air pipe (1101) arranged on the outer side and used for being communicated with the ammonia absorption tower (9).

8. A third generation semiconductor wastewater treatment plant according to claim 1, wherein: the buffer water tank (12) comprises a second multi-point liquid level switch (1201) arranged inside.

9. A third generation semiconductor wastewater treatment plant according to claim 1, wherein: the RO membrane system (13) comprises a pre-pressurizing pump (1301) arranged outside the buffer water tank (12), and a fifth outlet regulating valve (1302) and a fourth rotameter (1303) which are arranged outside the pre-pressurizing pump (1301).

10. A third generation semiconductor wastewater treatment plant according to claim 1, wherein: the standardized drainage well (15) further comprises an ultrasonic flow meter (1501) and a pasteurization tank (1502) disposed internally.