CN221102006U - Cooling ring of etching machine - Google Patents
Cooling ring of etching machine Download PDFInfo
- Publication number
- CN221102006U CN221102006U CN202323142225.4U CN202323142225U CN221102006U CN 221102006 U CN221102006 U CN 221102006U CN 202323142225 U CN202323142225 U CN 202323142225U CN 221102006 U CN221102006 U CN 221102006U
- Authority
- CN
- China
- Prior art keywords
- cooling ring
- ring body
- arc
- water pipe
- shaped
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Links
- 238000001816 cooling Methods 0.000 title claims abstract description 39
- 238000005530 etching Methods 0.000 title claims abstract description 15
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims abstract description 30
- 238000012423 maintenance Methods 0.000 abstract description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
Landscapes
- Cooling Or The Like Of Semiconductors Or Solid State Devices (AREA)
Abstract
The utility model discloses a cooling ring of an etching machine, and mainly relates to the technical field of etching machines; the cooling ring comprises a cooling ring body, wherein a plurality of lug plates are uniformly arranged on the outer side wall of the cooling ring body along the circumferential direction of the cooling ring body, positioning waist-shaped holes are formed in the lug plates, a plurality of mounting holes are formed in the cooling ring body, screw sleeves are arranged in the mounting holes, an arc-shaped water pipe line plane is arranged on the cooling ring body, one end of the arc-shaped water pipe line plane is provided with a water inlet end, and the other end of the arc-shaped water pipe line plane is provided with a water outlet end; the utility model has easier positioning and more convenient maintenance, reduces the processing cost and is easier to overhaul the water leakage position.
Description
Technical Field
The utility model relates to the technical field of etchers, in particular to a cooling ring of an etcher.
Background
In the semiconductor manufacturing industry, etching (Etch) refers to engraving a pattern on a thin film. The pattern is plasma sprayed to form the final profile of each process step. Its main purpose is to present perfectly accurate patterns according to the layout, maintaining uniform and consistent results under any conditions. The cooling ring of the etching machine is an important part of the etching machine, and the existing cooling ring of the etching machine has the following problems in use:
1) Round holes uniformly distributed along the circumferential direction of the cooling ring of the etching machine are adopted for positioning, so that the problem of difficult positioning exists;
2) The cooling ring of the existing etching machine is provided with a plurality of screw holes, the screw holes are required to be re-tapped after failure, and the maintenance cost is high;
3) The waterway on the cooling ring of the existing etching machine is complex, and the processing cost is high.
Disclosure of utility model
The utility model aims to solve the problems in the prior art and provides the cooling ring of the etching machine, which is easier to position and maintain, reduces the processing cost and is easier to overhaul the water leakage position.
The utility model aims to achieve the aim, and the aim is achieved by the following technical scheme:
Etching machine cooling ring, including the cooling ring body evenly be equipped with a plurality of otic placode along the circumference of cooling ring body on the lateral wall of cooling ring body, be equipped with location waist formula hole on the otic placode, be equipped with a plurality of mounting holes on the cooling ring body, be equipped with the swivel nut in the mounting hole, be equipped with arc water pipe pipeline plane on the cooling ring body, arc water pipe pipeline planar one end is equipped with the water inlet end, and the other end is equipped with the water outlet end.
Preferably, the number of the ear plates is three.
Compared with the prior art, the utility model has the beneficial effects that:
1. the utility model changes the original positioning hole from a round hole to a waist-shaped hole, so that the positioning is easier.
2. The raw water path is complex, the processing cost is high, the plane of the arc-shaped water pipe pipeline is changed from a plurality of planes to a single plane, the processing cost is reduced, and the water leakage position is easier to overhaul.
3. The screw sleeve is adopted to replace the original threaded hole, so that the screw sleeve has higher stability, can be directly replaced, and does not need to be tapped again after the threaded hole fails.
Drawings
Fig. 1 is a schematic structural view of the present utility model.
The reference numbers in the drawings: 1. a cooling ring body; 2. ear plates; 3. positioning the waist-shaped hole; 4. a screw sleeve; 5. an arc-shaped water pipe line plane; 6. a water inlet end; 7. and a water outlet end.
Detailed Description
The utility model will be further illustrated with reference to specific examples. It is to be understood that these examples are illustrative of the present utility model and are not intended to limit the scope of the present utility model. Further, it will be understood that various changes and modifications may be made by those skilled in the art after reading the teachings of the utility model, and equivalents thereof fall within the scope of the utility model as defined by the claims.
Examples: as shown in figure 1, the cooling ring of the etching machine comprises a cooling ring body 1, a plurality of lug plates 2 are uniformly arranged on the outer side wall of the cooling ring body 1 along the circumferential direction of the cooling ring body 1, and an integrated structure is adopted between the lug plates 2 and the cooling ring body 1, so that the original positioning holes are changed into waist-shaped holes from round holes, and the positioning is easier.
The number of ear panels 2 is preferably three.
Be equipped with location waist type hole 3 on the otic placode 2, be equipped with a plurality of mounting holes on the cooling ring body 1, the position of mounting hole is the position coincidence with former screw hole, be equipped with swivel nut 4 in the mounting hole, adopt swivel nut 4 to replace former screw hole, make it more stable, can directly change swivel nut 4, need not to rethread after the screw hole inefficacy.
The cooling ring body 1 is provided with an arc-shaped water pipe pipeline plane 5, one end of the arc-shaped water pipe pipeline plane 5 is provided with a water inlet end 6, the other end of the arc-shaped water pipe pipeline plane 5 is provided with a water outlet end 7, a raw water path is complex, the processing cost is high, the multi-plane is changed into a single-plane arc-shaped water pipe pipeline plane, the processing cost is reduced, and the water leakage part is more easily overhauled.
Claims (2)
1. Etching machine cooling ring, including cooling ring body (1), characterized by: the cooling ring comprises a cooling ring body (1), and is characterized in that a plurality of lug plates (2) are uniformly arranged on the outer side wall of the cooling ring body (1) along the circumferential direction of the cooling ring body (1), positioning waist-shaped holes (3) are formed in the lug plates (2), a plurality of mounting holes are formed in the cooling ring body (1), screw sleeves (4) are arranged in the mounting holes, an arc-shaped water pipe plane (5) is arranged on the cooling ring body (1), a water inlet end (6) is formed in one end of the arc-shaped water pipe plane (5), and a water outlet end (7) is formed in the other end of the arc-shaped water pipe plane.
2. The etcher cooling ring of claim 1, wherein: the number of the ear plates (2) is three.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202323142225.4U CN221102006U (en) | 2023-11-20 | 2023-11-20 | Cooling ring of etching machine |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202323142225.4U CN221102006U (en) | 2023-11-20 | 2023-11-20 | Cooling ring of etching machine |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN221102006U true CN221102006U (en) | 2024-06-07 |
Family
ID=91305636
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202323142225.4U Active CN221102006U (en) | 2023-11-20 | 2023-11-20 | Cooling ring of etching machine |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN221102006U (en) |
-
2023
- 2023-11-20 CN CN202323142225.4U patent/CN221102006U/en active Active
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant |