CN221097698U - Vacuum valve - Google Patents

Abstract

A vacuum valve comprises a valve body, a valve seat, a closing member and a driving member; the valve body is provided with a valve port; the valve seat is arranged on the mounting surface of the valve body; the driving piece is also arranged on the mounting surface of the valve body and drives the closing piece to move close to or away from the valve seat; at least one group of sliding parts are arranged between the valve body and the closing part; the sliding piece comprises a sliding rail arranged on the valve body mounting surface and a sliding block arranged on the closing piece; the closing piece is in sliding connection with the valve body through sliding fit between the sliding rail and the sliding block; the sliding part is connected with the valve body and the closing part, so that the stability of the closing part in movement is enhanced; the sliding fit between the sliding rail and the sliding block also limits the movement track of the closure member, so that the deviation of the closure member during movement is prevented, and the stability is further enhanced.

Description

Vacuum valve

Technical Field

The application relates to the field of vacuum sputtering equipment, in particular to a vacuum valve.

Background

Vacuum sputtering refers to the process of forming a film on a substrate by bombarding atoms or atomic groups from the surface of a target by inert gas ions in a vacuum environment; the vacuum sputtering apparatus generally comprises a loading chamber, a discharging chamber and a sputtering chamber, wherein the chambers are separated by a vacuum valve, so that the chambers can independently enter a vacuum or non-vacuum state.

Chinese patent discloses a vacuum valve (publication number CN 102141160B) comprising a valve body with a valve port having an axis; a valve seat surrounding the valve port, the valve seat having a first valve seat main section and a second valve seat main section, the valve seat main sections being arranged offset relative to each other in the direction of the axis of the valve port and being connected to each other by a first and a second valve seat connecting section; a closing member that is linearly movable in a closing direction at an angle to an axis of the valve port from an opening position where the valve port is opened toward a closing position where the valve port is closed, and is linearly movable in a direction opposite to the closing direction from the closing position toward the opening position; at least one peripherally closed seal arranged on the closure element, said seal having first and second seal main segments and first and second seal connecting segments corresponding to the first and second valve seat main segments and first and second valve seat connecting segments, said seal extending in a groove, the cross-sectional boundary of the groove being formed by two side walls and a bottom wall; the first seal main section is arranged on the front end face of the closing element relative to the closing direction and has a central portion in which the seal extends straight, characterized in that the seal is clamped at least in the region of its longitudinal extension in a first partial region in the central portion of the first seal main section by a clamping plate which is fastened to the closing element and forms one of the two side walls of the groove and at least in the region of a second partial region of the longitudinal extension of the seal, the two side walls and the bottom wall forming the boundary of the groove being formed by the closing element, wherein for each peripherally closed seal arranged on the closing element a peripherally closed valve seat seal is arranged on the valve seat which, when the closing element is in the closed position without a strip passing through the valve opening, is pressed against the respective seal on the closing element in the region of its entire longitudinal extension and extends in the valve seat sealing groove with the two side walls and one bottom wall.

The closing piece of the vacuum valve is driven by the driving piece only, and the closing piece is connected with the valve body only through the driving piece, so that the stability is poor.

Disclosure of utility model

In order to solve the problems in the prior art, the application provides a vacuum valve, which enables the movement of a closing member to be more stable.

The application adopts the technical scheme that:

A vacuum valve comprises a valve body, a valve seat, a closing member and a driving member; the valve body is provided with a valve port; the valve seat is arranged on the mounting surface of the valve body; the driving piece is also arranged on the mounting surface of the valve body and drives the closing piece to move close to or away from the valve seat; at least one group of sliding parts are arranged between the valve body and the closing part; the sliding piece comprises a sliding rail arranged on the valve body mounting surface and a sliding block arranged on the closing piece; the closure member is in sliding connection with the valve body through sliding fit between the sliding rail and the sliding block.

The sliding part is connected with the valve body and the closing part, so that the stability of the closing part in movement is enhanced; the sliding fit between the sliding rail and the sliding block also limits the movement track of the closure member, so that the deviation of the closure member during movement is prevented, and the stability is further enhanced.

According to the embodiment of the utility model, at least two groups of sliding parts are arranged, the sliding parts are distributed at equal intervals along a straight line, and the distribution direction of the sliding parts is perpendicular to the moving direction of the closing part.

The arrangement of multiple sets of sliders further enhances the stability of the closure during movement.

According to the embodiment of the utility model, the sliding rail is fixed on the mounting surface of the valve body in a bolt connection mode.

According to the embodiment of the utility model, the surface of the closing piece, which is close to the valve body, is provided with the mounting groove, and the sliding block is connected in the mounting groove through bolts.

The sliding block is arranged in the mounting groove, so that the distance between the closing piece and the mounting surface of the valve body can be reduced as far as possible, and the good sealing effect is ensured when the closing piece and the valve seat are closed.

According to the embodiment of the utility model, the valve body is connected with a safety piece; the safety piece is a fastener and is used for limiting the distance among the valve seat, the closing piece and the valve body.

The safety piece is used for limiting the distance between the valve seat, the closing piece and the valve body and preventing the closing piece from deviating along the normal direction of the valve body installation surface, thereby affecting the sealing effect and the stability of the whole vacuum gate valve.

According to the embodiment of the utility model, the safety piece comprises a limiting part and fixing parts arranged at two ends of the limiting part, and the valve seat and the closing piece are matched in a space formed by the fixing part, the limiting part and the valve body in a surrounding manner;

The fixed part is used for connecting the valve body and the limiting part;

the limiting part is used for limiting the distance between the valve seat, the closing piece and the valve body.

The safety piece and the mounting surface of the valve body are enclosed to form a closed space, and the valve seat and the closing piece are matched in the closed space, so that the limiting function of the safety piece is further improved.

According to the embodiment of the utility model, the limiting part is movably connected with the fixing part.

The limiting part and the movable part can be disassembled and transformed, so that the safety piece is more convenient to disassemble and assemble.

According to the embodiment of the utility model, the fixing part is provided with an adjusting screw hole, and the adjusting screw hole is long-strip-shaped;

The limiting part is connected with different positions in the adjusting screw hole through bolts, so that the distance between the limiting part and the valve body is adjusted.

The spacing portion can adjust the distance between it and the valve body, makes the safety spare can adapt to not unidimensional closure member and disk seat, also makes the safety spare simultaneously can freely adjust the distance between spacing portion and the closure member, and whether the friction is produced between free control spacing portion and the closure member to adapt to different application scenario demands.

According to the embodiment of the utility model, the limiting part is provided with a hollow.

The spacing portion is provided with the fretwork and can lighten the weight of insurance spare, reduce cost.

According to an embodiment of the present utility model, the fixing portion is angle iron.

Drawings

The application will be described in further detail below in connection with the drawings and the preferred embodiments, but it will be appreciated by those skilled in the art that these drawings are drawn for the purpose of illustrating the preferred embodiments only and thus should not be taken as limiting the scope of the application. Moreover, unless specifically indicated otherwise, the drawings are merely schematic representations, not necessarily to scale, of the compositions or constructions of the described objects and may include exaggerated representations.

FIG. 1 is a schematic view of a vacuum valve according to an embodiment of the present application (a mounting surface view);

FIG. 2 is a schematic diagram of a vacuum valve (view angle of vacuum surface) according to an embodiment of the present application;

FIG. 3 is an exploded view of a vacuum valve according to a first embodiment of the present application;

FIG. 4 is a schematic view of a valve seat according to an embodiment of the present application;

FIG. 5 is a schematic view of a closure according to a first embodiment of the present application;

FIG. 6 is an enlarged view of area A of FIG. 5;

FIG. 7 is a schematic view of a sliding member according to an embodiment of the present application;

FIG. 8 is a schematic diagram of a vacuum valve according to a second embodiment of the present application;

fig. 9 is an exploded view of a safety member according to a second embodiment of the present application.

In the figure:

1. a valve body;

2. A valve port;

3. A valve seat; 31. a mating protrusion; 32. a mating recess; 33. a mating connection; 34. a mating plane; 35. matching with a slope; 36. an airway;

4. A closure; 41. closing the recess; 42. closing the convex part; 43. closing the connecting part; 44. a closure plane; 45. closing the slope; 46. a mounting groove;

5. A driving member; 51. a connecting block;

6. Sealing grooves;

7. a slider; 71. a slide rail; 72. a slide block; 721. a limit groove;

8. A safety member; 81. a limit part; 82. a fixing part; 821. fixing the edges; 822. connecting edges; 823. and adjusting the screw hole.

Detailed Description

In the description of the present utility model, it should be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", etc. indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings are merely for convenience in describing the present utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be configured and operated in a specific orientation, and thus should not be construed as limiting the present utility model. Furthermore, the terms "first," "second," and the like, are used for descriptive purposes only and are not to be construed as indicating or implying a relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defining "a first" or "a second" may explicitly or implicitly include one or more of the described features. In the description of the present utility model, the meaning of "a plurality" is two or more, unless explicitly defined otherwise.

In the description of the present utility model, it should be noted that, unless explicitly specified and limited otherwise, the terms "mounted," "connected," and "connected" are to be construed broadly, and may be either fixedly connected, detachably connected, or integrally connected, for example; can be mechanically connected, electrically connected or can be communicated with each other; can be directly connected or indirectly connected through an intermediate medium, and can be communicated with the inside of two elements or the interaction relationship of the two elements. The specific meaning of the above terms in the present utility model can be understood by those of ordinary skill in the art according to the specific circumstances.

In the present utility model, unless expressly stated or limited otherwise, a first feature "above" or "below" a second feature may include both the first and second features being in direct contact, as well as the first and second features not being in direct contact but being in contact with each other through additional features therebetween. Moreover, a first feature being "above," "over" and "on" a second feature includes the first feature being directly above and obliquely above the second feature, or simply indicating that the first feature is higher in level than the second feature. The first feature being "under", "below" and "beneath" the second feature includes the first feature being directly under and obliquely below the second feature, or simply means that the first feature is less level than the second feature.

The following disclosure provides many different embodiments, or examples, for implementing different features of the utility model. In order to simplify the present disclosure, components and arrangements of specific examples are described below. They are, of course, merely examples and are not intended to limit the utility model. Furthermore, the present utility model may repeat reference numerals and/or letters in the various examples, which are for the purpose of brevity and clarity, and which do not themselves indicate the relationship between the various embodiments and/or arrangements discussed. In addition, the present utility model provides examples of various specific processes and materials, but one of ordinary skill in the art will recognize the application of other processes and/or the use of other materials.

Example 1

As shown in fig. 1-7, the present embodiment discloses a vacuum valve based on the prior art.

The vacuum valve comprises a valve body 1, a valve seat 3, a closing piece 4 and a driving piece 5, wherein the valve body 1 comprises a mounting surface and a vacuum surface, a valve port 2 is arranged on the valve body 1, the valve port 2 penetrates through the mounting surface and the vacuum surface of the valve body 1, the valve port 2 is arranged in a long and thin strip shape, and the longer side of the valve port 2 is parallel to the bottom side of the valve body 1. The valve seat 3 is connected to the mounting surface of the valve body 1 through bolts, and the valve port 2 is completely covered. The valve seat 3 has a structure disclosed in the prior art, and comprises a matching convex part 31, a matching concave part 32 and a matching connecting part 33 for connecting the matching convex part 31 and the matching concave part 32, wherein the matching concave part 32 and the matching convex part 31 are arranged in a staggered manner at the position of the valve port 2; specifically, the left and right ends of the valve seat 3 are mating connection portions 33, the middle of the mating connection portions 33 at the two ends is a mating concave portion 32 and a mating convex portion 31, wherein the top end of the mating concave portion 32 is provided with an inverted ladder-shaped hollow

In the region, the fitting convex portion 31 is connected in the hollow region of the fitting concave portion 32, the width of the fitting convex portion 31 is smaller than the width of the fitting concave portion 32 and the hollow region and is arranged on one side, close to the valve body 1, in the hollow region, the fitting convex portion 31 is trapezoid and extends to the highest plane protruding out of the fitting connection portion 33 towards the top end of the valve seat 3. The side of the mating connection 33 facing the closure 4 is planar. The matching concave part 32 and the matching convex part 31 comprise a matching plane 34 and two matching sloping surfaces 35 in the direction of the closing piece 4; for the fitting convex portion 31, the fitting plane 34 is an upper plane protruding in a trapezoid shape, the fitting slope 35 is left and right side surfaces protruding in a trapezoid shape, and the left and right fitting slope 35 is respectively connected with the fitting plane 34 and the fitting connection portion 33; for the matching concave portion 32, the matching plane 34 is the bottom plane of the hollow area with the inverted trapezoid-shaped recess, and the matching slope 35 is the left and right sides of the hollow area with the inverted trapezoid-shaped recess. Further, the connection part between the fitting convex part 31 and the fitting concave part 32 is also provided with an air passage 36, the position of the air passage 36 corresponds to the valve port 2 and penetrates through the fitting convex part 31, and the air passage 36 is used for communicating the valve port 2 and is used as a gas transmission structure together.

The driving piece 5 is connected with the valve body 1 at a position higher than the valve seat 3 by bolts, and the driving piece 5 can be any linear stepping mechanical device in the prior art, such as a linear motor or a cylinder; the output of the drive element 5 is directed towards the valve seat 3 and the closure element 4 is connected to the output. Preferably, the driving member 5 is not directly connected with the valve body 1, but the driving member 5 is connected with the mounting surface of the valve body 1 through the connecting block 51, so that the influence of equipment vibration on the driving member 5 and the closing member 4 is reduced.

The closure member 4 is similar in construction to the inverted valve seat 3. The closing element 4 also comprises a closing concave part 41, a closing convex part 42 and a closing connecting part 43 for connecting the closing concave part 41 and the closing convex part 42, wherein the closing concave part 41 and the closing convex part 42 are also arranged in a staggered way. Specifically, the closing connecting portions 43 are disposed at two ends of the closing member 4, the closing concave portion 41 is disposed in the middle of the closing connecting portions 43 at two ends, a trapezoidal concave area facing the valve seat 3 is also disposed on the bottom surface of the closing concave portion 41, the closing convex portion 42 is disposed in the trapezoidal concave area, the closing convex portion 42 is an inverted trapezoidal convex structure disposed toward the valve seat 3, and the width of the closing convex portion 42 is also smaller than the width of the closing concave portion 41 and the concave area. Preferably, the width of the closing protrusion 42 is exactly equal to the difference between the width of the mating recess 32 and the width of the mating protrusion 31, and the width of the closing recess 41 is also exactly equal to the width of the mating recess 32. The closing projection 42 is arranged on the side of the recess region remote from the valve body 1. The side of the closing connection 43 facing the valve seat 3 is planar. The closing recess 41 and the closing projection 42 each comprise a closing plane 44 and two closing ramps 45 in the direction of the valve seat 3; for the closing convex part 42, the closing plane 44 is the bottom surface of the inverted trapezoid protruding, the closing slope 45 is the left and right sides of the inverted trapezoid protruding, and the left and right closing slope 45 respectively connects the closing plane 44 and the closing connecting part 43; in the closing concave portion 41, the closing plane 44 is an upper plane of the trapezoidal concave region, the closing slope 45 is left and right sides of the trapezoidal concave region, and the left and right closing slopes 45 also connect the closing plane 44 and the closing connecting portion 43.

The closing convex part 42 and the closing concave part 41 are completely matched with the matching concave part 32 and the matching convex part 31, when the driving piece 5 drives the closing piece 4 to move down to the lower limit, the closing convex part 42 is completely matched with the matching concave part 32, the closing concave part 41 is completely matched with the matching convex part 31, the matching connecting part 33 is completely matched with the closing connecting part 43, and the closing piece 4 is completely closed with the valve seat 3. When the closure member 4 is fully closed with the valve seat 3, the closure member 4 fully closes the air passage 36 with the valve port 2.

Further, at least one circle of sealing groove 6 is arranged on the closing piece 4, and the sealing groove 6 is arranged on one side, close to the valve seat 3, of the closing piece 4; specifically, the seal groove 6 is a closed ring groove formed by sequentially passing through the closing convex part 42, the closing connecting part 43, the closing concave part 41 and the closing connecting part 43 and finally returning to the closing convex part 42 in an end-to-end manner; the sealing groove 6 passes through each closure plane 44, the closure ramp 45 and the bottom surface of the closure connection 43. Preferably, the sealing groove 6 is arranged in one circle or two circles; further preferably, the sealing groove 6 is provided with two circles, and the two circles of sealing grooves 6 are arranged in parallel, so that the tightness of the closing member 4 when the valve seat 3 is closed is further improved.

The sealing groove 6 is internally provided with a sealing element, the sealing element is a sealing ring with uniform wire diameters of all parts, and the sealing ring is arranged in the sealing groove 6.

At least one group of sliding parts 7 are further arranged between the valve body 1 and the closing part 4, each group of sliding parts 7 comprises a sliding rail 71 and a sliding block 72 which form sliding fit with each other, the sliding rail 71 is fixed on the mounting surface of the valve body 1 by bolts, and the sliding rail 71 is parallel to the moving direction of the closing part 4.

A side surface, close to the valve body 1, of the closing member 4 is provided with a mounting groove 46, the positions and the numbers of the mounting grooves 46 are set based on the sliding members 7, the mounting groove 46 is used for mounting and fixing a sliding block 72, and the sliding block 72 is fixedly connected in the mounting groove 46 through bolts. Preferably, the depth of the mounting groove 46 is equal to the width of the slider 72, i.e., when the slider 72 is secured within the mounting groove 46, the side of the slider 72 adjacent the valve body 1 is exactly coplanar with the side of the closure member 4 adjacent the valve body 1. The sliding block 72 is provided with a limit groove 721, and the sliding block 72 is in sliding fit with the sliding rail 71 through the limit groove 721, so that the closing member 4 can be in sliding connection with the valve body 1. And the cooperation between the spacing groove 721 and the sliding rail 71 also plays a role in stabilizing and spacing, further prevents the easy rocking of the closure member 4 during sliding, and also limits the sliding track of the closure member 4, thereby improving the sliding stability of the closure member 4.

Preferably, the sliding member 7 includes at least two sets of sliding rails 71, at least two sliding rails 71 are disposed on the mounting surface of the valve body 1 at equal intervals along a straight line, the arrangement direction of the sliding rails 71 is perpendicular to the moving direction of the closing member 4, one sliding rail 71 is necessarily mounted on each of the leftmost side and the rightmost side of the mounting surface of the valve body 1, and the sliding block 72 is also mounted at the corresponding position of the closing member 4.

Example two

As shown in fig. 8-9, another embodiment is provided based on the previous embodiment.

The vacuum valve further comprises at least one safety piece 8, wherein the safety piece 8 comprises a limiting part 81 and fixing parts 82 arranged at two ends of the limiting part 81, and the fixing parts 82 are connected to the mounting surface of the valve body 1 through bolts and are used for connecting the valve body 1 with the limiting part 81; the spacing part 81 is arranged with a distance between the mounting surface and the spacing part, the distance is exactly equal to the width of the valve seat 3 and the closing part 4, so that the valve seat 3 and the closing part 4 can be exactly matched in the space formed by the valve body 1, the fixing part 82 and the spacing part 81; the distance formed by the clamping between the two fixing parts 82 is set to be larger than the total height of the closing piece 4 and the valve seat 3 when the closing piece 3 is closed, so that the valve seat 3 and the closing piece 4 can be closed and opened in a sliding mode in a space formed by the valve body 1, the fixing parts 82 and the limiting parts 81, and the closing and opening of the valve port 2 and the air passage 36 are realized.

The safety part 8 ensures that the movement of the closure member 4 is more stable by limiting the positions of the valve seat 3 and the closure member 4, and prevents the closure member 4 from loosening, laterally moving and falling relative to the valve body 1 and the valve seat 3.

Preferably, the safety member 8 is in a detachable structure, and the fixing portion 82 and the limiting portion 81 are detachably connected through a bolt.

Further preferably, the fixing portion 82 is an angle iron with an angle of 90 ° and the angle iron includes a fixing edge 821 and a connecting edge 822, the fixing edge 821 is used for being connected with the mounting surface of the valve body 1 by a bolt, and the connecting edge 822 is used for being detachably connected with the limiting portion 81. The screw hole on the connecting side 822 is an adjusting screw hole 823, the adjusting screw hole 823 is arranged in a long strip shape, and the direction of the long side of the long strip-shaped adjusting screw hole 823 is parallel to the normal direction of the mounting surface of the valve body 1. The fixing part 82 and the limiting part 81 are connected by arranging bolts in the adjusting screw holes 823, and the distance between the limiting part 81 and the mounting surface of the valve body 1 is adjusted by fastening and mounting the limiting part 81 at different positions in the adjusting screw holes 823 through bolts, so that the safety piece 8 can be adjusted to meet the mounting requirements of the closing piece 4 and the valve seat 3 with different widths, and the closing piece 4 and the valve seat 3 can be conveniently dismounted.

Still more preferably, the limiting portion 81 is provided with a hollow, the limiting portion 81 reduces its weight by providing the hollow, reduces manufacturing cost, and facilitates the disassembly and assembly between the limiting portion 81 and the fixing portion 82. The arrangement mode of the hollows is not limited, and any hollow arrangement mode capable of reducing weight in the prior art can be applied to the embodiment.

Any combination of the above embodiments is possible.

The foregoing has outlined rather broadly the more detailed description of the application in order that the detailed description of the application that follows may be better understood, and in order that the present application may be better understood. It should be noted that it will be apparent to those skilled in the art that various modifications and adaptations of the application can be made without departing from the principles of the application and these modifications and adaptations are intended to be within the scope of the application as defined in the following claims.

Claims (7)

1. A vacuum valve comprises a valve body (1), a valve seat (3), a closing member (4) and a driving member (5); the valve body (1) is provided with a valve port (2); the valve seat (3) is arranged on the mounting surface of the valve body (1); the driving piece (5) is also arranged on the mounting surface of the valve body (1) and drives the closing piece (4) to move close to or away from the valve seat (3);

It is characterized in that at least one group of sliding parts (7) are arranged between the valve body (1) and the closing part (4); the sliding piece (7) comprises a sliding rail (71) arranged on the mounting surface of the valve body (1) and a sliding block (72) arranged on the closing piece (4); the closing piece (4) is in sliding connection with the valve body (1) through sliding fit between the sliding rail (71) and the sliding block (72).

2. Vacuum valve according to claim 1, characterized in that at least two sets of sliding members (7) are provided, the sliding members (7) are distributed at equal intervals along a straight line, and the distribution direction of the sliding members (7) is perpendicular to the moving direction of the closing member (4).

3. Vacuum valve according to claim 1, characterized in that the slide rail (71) is fastened to the mounting surface of the valve body (1) by means of a screw connection.

4. Vacuum valve according to claim 1, characterized in that the closure member (4) is provided with a mounting groove (46) on the side close to the valve body (1), and the slider (72) is bolted in the mounting groove (46).

5. Vacuum valve according to claim 1, characterized in that the valve body (1) is connected with a safety element (8); the safety piece (8) is a fastener and is used for limiting the distance between the valve seat (3), the closing piece (4) and the valve body (1).

6. The vacuum valve according to claim 5, wherein the safety member (8) comprises a limiting part (81) and fixing parts (82) arranged at two ends of the limiting part (81), and the valve seat (3) and the closing member (4) are matched in a space formed by the fixing parts (82), the limiting part (81) and the valve body (1);

the fixing part (82) is used for connecting the valve body (1) and the limiting part (81);

the limiting part (81) is used for limiting the distance between the valve seat (3), the closing piece (4) and the valve body (1).

7. The vacuum valve according to claim 6, wherein the limiting portion (81) is movably connected with the fixing portion (82).