CN221094373U - Electrode position adjusting mechanism adapting to heating deformation of heater - Google Patents

Electrode position adjusting mechanism adapting to heating deformation of heater Download PDF

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Publication number
CN221094373U
CN221094373U CN202323029278.5U CN202323029278U CN221094373U CN 221094373 U CN221094373 U CN 221094373U CN 202323029278 U CN202323029278 U CN 202323029278U CN 221094373 U CN221094373 U CN 221094373U
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China
Prior art keywords
heater
water
electrode
horizontal position
adjusting mechanism
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Active
Application number
CN202323029278.5U
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Chinese (zh)
Inventor
王人松
胡动力
马文龙
李井顺
贾新旺
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Lianke Semiconductor Co ltd
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Lianke Semiconductor Co ltd
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Priority to CN202323029278.5U priority Critical patent/CN221094373U/en
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  • Resistance Heating (AREA)

Abstract

The utility model relates to an electrode position adjusting mechanism suitable for the heated deformation of a heater, which structurally comprises two water-cooled electrodes which are oppositely and symmetrically arranged on two sides of a furnace cover in a horizontal position adjustable way, wherein the two water-cooled electrodes are respectively connected with two poles of the heater, and the water-cooled electrode mechanisms on the two sides are respectively arranged on a A, B horizontal position adjusting mechanism on the top surface of the furnace cover. The water-cooled electrode on one side is fixed through the adjusting position of the horizontal position adjusting mechanism A, and can be placed at a theoretical position during primary installation; the water-cooled electrode on the other side is adjusted in position and fixed through the horizontal position adjusting mechanism B, and the radial deformation of the heater can be measured after the test; and during secondary installation, the position of the water-cooled electrode can be adjusted and fixed according to the value measured for the first time. The electric resistance heater can effectively prevent the heater or the connecting piece from being broken or loose in connection due to heating deformation when in work, and the center of the heater can be freely adjusted through the horizontal position adjusting mechanisms at two sides, so that the electric resistance heater is kept concentric with a heated object, and the heating uniformity is improved.

Description

Electrode position adjusting mechanism adapting to heating deformation of heater
Technical Field
The utility model relates to an electrode position adjusting mechanism suitable for heating deformation of a heater, in particular to a mechanism capable of adjusting the electrode position in a single crystal furnace and suitable for heating deformation of the heater, and belongs to the technical field of single crystal furnaces.
Background
In the prior art single crystal furnace, when the resistance heater works, the problems of stress fracture and connection looseness of the heater or a connecting piece caused by heating deformation exist, and the radial deformation of the heater can be caused, so that the heating uniformity is affected.
Disclosure of utility model
The utility model provides an electrode position adjusting mechanism suitable for heating deformation of a heater, and aims to overcome the defects in the prior art, realize free adjustment of the position of the heater and improve heating uniformity.
The technical solution of the utility model is as follows: the electrode position adjusting mechanism suitable for the heated deformation of the heater structurally comprises two water-cooled electrodes which are oppositely arranged on two sides of a furnace cover in a horizontal position adjustable mode, wherein the two water-cooled electrodes are symmetrically arranged on two sides of the heater, the two water-cooled electrodes are respectively connected with two poles of the heater, and the water-cooled electrode mechanisms on the two sides are respectively arranged on an A horizontal position adjusting mechanism and a B horizontal position adjusting mechanism on the top surface of the furnace cover. The water-cooled electrode on one side is fixed through the adjusting position of the horizontal position adjusting mechanism A, and can be placed at a theoretical position during primary installation; the water-cooled electrode on the other side is adjusted in position and fixed through the horizontal position adjusting mechanism B, and the radial deformation of the heater can be measured after the test; and during secondary installation, the position of the water-cooled electrode can be adjusted and fixed according to the value measured for the first time.
Preferably, the horizontal position adjusting mechanism A and the horizontal position adjusting mechanism B both comprise a pair of linear guide rails, the water-cooled electrode is connected to the linear guide rails in a sliding manner, and the linear guide rails extend outwards from the center of the furnace cover.
Preferably, the horizontal position adjusting mechanism A further comprises an adjusting fixing block and a stud, wherein the adjusting fixing block is fixed on the top surface of the furnace cover between the corresponding pair of linear guide rails, the stud is connected with the screw hole on the adjusting fixing block through internal threads, and the stud is parallel to the linear guide rails and is connected with the corresponding water-cooled electrode side surface at the end part. The water-cooled electrode can be adjusted in position and fixed through the stud,
Preferably, the horizontal position adjusting mechanism B further comprises a differential head bracket and a differential head, wherein the differential head bracket is fixed on the top surface of the furnace cover between the corresponding pair of linear guide rails, the differential head bracket is connected with the differential head, and the differential head is parallel to the linear guide rails and is connected with the corresponding side surface of the water-cooled electrode at the end part. The position of the water-cooled electrode is adjusted and fixed through the micro head.
Preferably, the middle part of the water-cooled electrode is in sealing connection with the welded corrugated pipe, and the bottom is in sealing connection with the furnace cover.
The utility model has the advantages that: the electric resistance heater has reasonable structural design, can effectively prevent the electric resistance heater from being broken or loose in connection due to stress of the heater or the connecting piece caused by heating deformation during working, and can freely adjust the center of the heater through the horizontal position adjusting mechanisms at two sides, so that the electric resistance heater can keep concentric with a heated object, and heating uniformity is effectively improved.
Drawings
FIG. 1 is a schematic cross-sectional view of an electrode position adjustment mechanism of the present utility model that accommodates thermal deformation of a heater.
Fig. 2 is a top view of fig. 1.
In the figure, a furnace cover 1, a water-cooled electrode 2, a welded corrugated pipe 3, a linear guide rail 4, an adjusting and fixing block 5, a stud 6, a micro-head bracket 7 and a micro-head 8 are adopted.
Detailed Description
The present utility model will be described in further detail with reference to examples and embodiments.
As shown in fig. 1 and 2, an electrode position adjusting mechanism adapted to the thermal deformation of a heater structurally comprises two water-cooled electrodes 2 which are oppositely arranged on two sides of a furnace cover 1 in a horizontal position adjustable manner, wherein the two water-cooled electrodes 2 are symmetrically arranged on two sides of the heater, the two water-cooled electrodes 2 are respectively connected with two poles of the heater, and the water-cooled electrode mechanisms on the two sides are respectively arranged on an A horizontal position adjusting mechanism and a B horizontal position adjusting mechanism on the top surface of the furnace cover 1.
The middle part of the water-cooled electrode 2 is in sealing connection with the welding corrugated pipe 3, and the bottom is in sealing connection with the furnace cover 1.
The horizontal position adjusting mechanism A and the horizontal position adjusting mechanism B both comprise a pair of linear guide rails 4, the water-cooled electrode 2 is connected to the linear guide rails 4 in a sliding manner, and the linear guide rails 4 extend outwards from the center of the furnace cover 1.
The horizontal position adjusting mechanism A further comprises an adjusting fixing block 5 and a stud 6, wherein the adjusting fixing block 5 is fixed on the top surface of the furnace cover 1 between the corresponding pair of linear guide rails 4, the stud 6 is connected with the screw hole on the adjusting fixing block 5 through internal threads, and the stud 6 is parallel to the linear guide rails 4 and is connected with the corresponding side surface of the water-cooled electrode 2 at the end part.
The horizontal position adjusting mechanism B further comprises a differential head support 7 and a differential head 8, wherein the differential head support 7 is fixed on the top surface of the furnace cover 1 between the corresponding pair of linear guide rails 4, the differential head support 7 is connected with the differential head 8, and the differential head 8 is parallel to the linear guide rails 4 and is connected with the corresponding side surface of the water-cooled electrode 2 at the end part.
The water-cooled electrode 2 at one side is adjusted in position and fixed through a stud 6 of the horizontal position adjusting mechanism A, and can be placed at a theoretical position during primary installation; the water-cooled electrode 2 on the other side is adjusted in position and fixed through a micro head 8 of a horizontal position adjusting mechanism B, and the radial deformation of the heater can be measured after the test; and during secondary installation, the position of the water-cooled electrode 2 can be adjusted and fixed according to the value measured for the first time, so that the mechanism function is realized.
The above components are all of the prior art, and any model and existing design that can achieve their corresponding functions can be used by those skilled in the art.
The foregoing is merely a preferred embodiment of the present utility model, and it should be noted that modifications and improvements could be made by those skilled in the art without departing from the inventive concept, which falls within the scope of the present utility model.

Claims (5)

1. The utility model provides an electrode position adjustment mechanism that adaptation heater is heated to warp, its characterized in that includes two water-cooled electrode (2) of horizontal position adjustable relative installation both sides on bell (1), and two water-cooled electrode (2) symmetry set up in the heater both sides, and two water-cooled electrode (2) are connected the heater respectively and are two poles of the earth, and both sides water-cooled electrode mechanism is installed respectively on A horizontal position adjustment mechanism and B horizontal position adjustment mechanism on the top surface of bell (1).
2. An electrode position adjusting mechanism for adapting to heat deformation of a heater as claimed in claim 1, wherein the horizontal position adjusting mechanism a and the horizontal position adjusting mechanism B both comprise a pair of linear guide rails (4), the water-cooled electrode (2) is slidably connected to the linear guide rails (4), and the linear guide rails (4) extend outwards from the center of the furnace cover (1).
3. The electrode position adjusting mechanism for adapting to the thermal deformation of the heater according to claim 2, wherein the horizontal position adjusting mechanism A further comprises an adjusting fixing block (5) and a stud (6), the adjusting fixing block (5) is fixed on the top surface of the furnace cover (1) between the corresponding pair of linear guide rails (4), the stud (6) is connected with the screw hole on the adjusting fixing block (5) in a threaded manner, and the stud (6) is parallel to the linear guide rails (4) and is connected with the corresponding side surface of the water-cooled electrode (2) at the end part.
4. A mechanism for adjusting the position of an electrode adapted to thermal deformation of a heater according to claim 3, wherein the mechanism for adjusting the horizontal position B further comprises a differential head bracket (7) and a differential head (8), the differential head bracket (7) is fixed on the top surface of the furnace cover (1) between the corresponding pair of linear guide rails (4), the differential head bracket (7) is connected with the differential head (8), and the differential head (8) is parallel to the linear guide rails (4) and is connected with the side surface of the corresponding water-cooled electrode (2) at the end.
5. An electrode position adjusting mechanism adapting to the thermal deformation of a heater as claimed in any one of claims 1-4, wherein the middle part of the water-cooled electrode (2) is in sealing connection with the welding corrugated pipe (3), and the bottom part is in sealing connection with the furnace cover (1).
CN202323029278.5U 2023-11-09 2023-11-09 Electrode position adjusting mechanism adapting to heating deformation of heater Active CN221094373U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN202323029278.5U CN221094373U (en) 2023-11-09 2023-11-09 Electrode position adjusting mechanism adapting to heating deformation of heater

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN202323029278.5U CN221094373U (en) 2023-11-09 2023-11-09 Electrode position adjusting mechanism adapting to heating deformation of heater

Publications (1)

Publication Number Publication Date
CN221094373U true CN221094373U (en) 2024-06-07

Family

ID=91319512

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202323029278.5U Active CN221094373U (en) 2023-11-09 2023-11-09 Electrode position adjusting mechanism adapting to heating deformation of heater

Country Status (1)

Country Link
CN (1) CN221094373U (en)

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