CN221085108U - Exhaust treatment device for MPCVD diamond production - Google Patents
Exhaust treatment device for MPCVD diamond production Download PDFInfo
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- CN221085108U CN221085108U CN202323076175.4U CN202323076175U CN221085108U CN 221085108 U CN221085108 U CN 221085108U CN 202323076175 U CN202323076175 U CN 202323076175U CN 221085108 U CN221085108 U CN 221085108U
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- exhaust gas
- waste gas
- exhaust
- filter
- treatment device
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- 239000010432 diamond Substances 0.000 title claims abstract description 54
- 229910003460 diamond Inorganic materials 0.000 title claims abstract description 53
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 25
- 238000000259 microwave plasma-assisted chemical vapour deposition Methods 0.000 title claims abstract description 21
- 238000003756 stirring Methods 0.000 claims abstract description 13
- 238000001914 filtration Methods 0.000 claims description 88
- 239000002912 waste gas Substances 0.000 claims description 73
- 239000007789 gas Substances 0.000 claims description 56
- 230000005540 biological transmission Effects 0.000 claims description 12
- 241000220317 Rosa Species 0.000 claims description 3
- 230000006978 adaptation Effects 0.000 claims 1
- 230000001360 synchronised effect Effects 0.000 description 10
- 239000007788 liquid Substances 0.000 description 8
- 239000003153 chemical reaction reagent Substances 0.000 description 7
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 6
- 239000000126 substance Substances 0.000 description 5
- 239000000463 material Substances 0.000 description 3
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 3
- 230000009286 beneficial effect Effects 0.000 description 2
- 229910052799 carbon Inorganic materials 0.000 description 2
- 238000000151 deposition Methods 0.000 description 2
- 230000008021 deposition Effects 0.000 description 2
- 238000007599 discharging Methods 0.000 description 2
- 230000007613 environmental effect Effects 0.000 description 2
- 239000008187 granular material Substances 0.000 description 2
- 239000000779 smoke Substances 0.000 description 2
- 239000007858 starting material Substances 0.000 description 2
- 238000010521 absorption reaction Methods 0.000 description 1
- 238000005229 chemical vapour deposition Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- -1 firstly Substances 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 239000003595 mist Substances 0.000 description 1
- 238000002156 mixing Methods 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 238000000746 purification Methods 0.000 description 1
- 238000001179 sorption measurement Methods 0.000 description 1
- 239000013589 supplement Substances 0.000 description 1
- 239000012808 vapor phase Substances 0.000 description 1
- 239000002699 waste material Substances 0.000 description 1
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
Abstract
The utility model discloses an exhaust treatment device for MPCVD diamond production, which relates to the technical field of diamond exhaust treatment and comprises an exhaust filter box, wherein an exhaust filter tank is arranged on the left side of the exhaust filter box, a sprayer is fixedly connected to the top wall of the exhaust filter box, a filter device is arranged on the right side surface of the exhaust filter box, a filter tank built-in groove is formed in the top end of the exhaust filter tank, and a stirring device is arranged on the inner wall of the exhaust filter tank.
Description
Technical Field
The utility model relates to the technical field of waste gas treatment of diamonds, in particular to a waste gas treatment device for MPCVD diamond production.
Background
MPCVD is a chemical vapor deposition technique for growing diamond films, in which diamond films are deposited in a chemical vapor phase excited by microwave plasma, and has advantages such as a high growth rate, a low deposition temperature, good deposition uniformity, etc., and is widely used for the preparation of diamond films for various application fields including optics, electronics, machinery, biology, etc.
It should be noted that exhaust gas may be generated during the growth of MPCVD diamond, which may contain some harmful substances, and therefore, appropriate exhaust gas treatment measures should be taken during the production of MPCVD diamond to ensure that exhaust gas emissions meet relevant environmental regulations and standards, which may involve steps such as exhaust gas collection, purification and emission control, to minimize environmental impact.
When the waste gas generated during MPCVD diamond production is treated at the present stage, the waste gas is filtered through simple physical adsorption devices such as activated carbon, so that the waste gas is easily filtered, and the polluted gas still exists in the gas, so that workers need to filter the waste gas for multiple times, even if the waste gas is filtered for multiple times, a small part of harmful gas possibly exists when the waste gas is discharged, and the environment is polluted to a certain extent when the waste gas is discharged.
Disclosure of utility model
(One) solving the technical problems
The utility model aims to at least solve one of the technical problems in the prior art, and provides an exhaust gas treatment device for MPCVD diamond production, which can solve the problems.
(II) technical scheme
In order to achieve the above purpose, the present utility model provides the following technical solutions: the waste gas treatment device for MPCVD diamond production comprises a waste gas filtering box, wherein the left side of the waste gas filtering box is provided with a waste gas filtering tank, and the top wall of the waste gas filtering box is fixedly connected with a sprayer;
Wherein, the right side surface of the waste gas filtering box is provided with a filtering device, and the inside of the top end of the waste gas filtering tank is provided with a filtering tank built-in groove;
wherein, the inner wall of exhaust gas filtration jar is provided with agitating unit, and the gas vent has been seted up to the upper surface of exhaust gas filtration jar.
Preferably, the filtering device comprises a first connecting pipe fixedly arranged on the right side surface of the exhaust gas filtering box;
Wherein, the one end fixedly connected with filter dish that waste gas rose box was kept away from to first connecting pipe, and the inner wall fixed mounting of filter dish has the filter screen, and the surface cover of filter dish is equipped with the screw sleeve.
Preferably, the inner wall of the threaded sleeve is sleeved with a second connecting pipe, the outer surfaces of the filter dish and the second connecting pipe are provided with threads matched with the threaded sleeve, and the filter dish and the second connecting pipe are connected together through the threaded sleeve.
Preferably, the outer surface of the exhaust gas filtering tank is provided with an air inlet, the air inlet is fixedly sleeved on the outer surface of the second connecting pipe, and the exhaust gas filtering tank is communicated with the exhaust gas filtering tank through a filtering device.
Preferably, the stirring device comprises a motor, the motor is fixedly arranged on the bottom wall of the built-in groove of the filter tank, the output end of the motor is fixedly connected with a transmission shaft, and a worm is fixedly sleeved on the outer surface of the transmission shaft.
Preferably, the outer surface of the worm is provided with a connecting rod, and the outer surface of the connecting rod is fixedly sleeved with a worm wheel;
The worm wheel is connected with the worm in a meshed mode, and one end, close to the worm wheel, of the connecting rod is connected with the top wall of the built-in groove of the filter tank in a rotating mode.
Preferably, one end of the connecting rod, which is far away from the worm wheel, rotates to penetrate through the top wall of the exhaust gas filtering tank and is rotationally connected with the bottom wall of the exhaust gas filtering tank, and three stirring plates are fixedly connected with one end outer surface of the connecting rod, which is positioned on the inner wall of the exhaust gas filtering tank.
(III) beneficial effects
Compared with the prior art, the utility model has the beneficial effects that:
1. This exhaust treatment device of MPCVD diamond production, when the staff is using the device to filter the waste gas of diamond production, at first waste gas is discharged into the waste gas rose box, wet filtration is carried out with the granule in the diamond waste gas through atomizer spun water smoke, wet filtered diamond waste gas is discharged to the waste gas filtration jar through filter bowl, threaded sleeve pipe, the second connecting pipe in, wet filtered waste gas can adsorb the filtration through the filter screen, the material of filter screen is the active carbon, finally diamond waste gas is discharged to the waste gas filtration jar in, through adding chemical liquid in to the waste gas filtration jar, carry out last liquid filtration can, the circumstances that gas is not up to standard probably exists when discharging, thereby cause the pollution to the environment, the device greatly reduced the diamond waste gas of output when diamond production.
2. This exhaust treatment device of MPCVD diamond production, before filtering diamond waste gas, at first pour chemical reagent into the waste gas filtration jar with the staff, the starter motor, the motor synchronous drive transmission shaft rotates, the synchronous drive worm of transmission shaft rotates, the worm synchronous drive worm wheel rotates, the worm wheel synchronous drive connecting rod rotates, the connecting rod synchronous drive stirring board rotates, can carry out intensive mixing with the chemical reagent in the waste gas filtration jar through the rotation of stirring board, avoid diamond waste gas when carrying out liquid filtration, with the insufficient condition that leads to's diamond waste gas discharge that leads to of chemical reagent contact is not up to standard, the device has further reduced the condition that waste gas discharge caused the pollution to the environment when diamond production
Drawings
The utility model is further illustrated by the following examples in conjunction with the accompanying drawings:
FIG. 1 is a schematic diagram of an exhaust gas treatment apparatus for MPCVD diamond production according to the present utility model;
FIG. 2 is a schematic view of the internal structure of the exhaust gas filter box of the present utility model;
FIG. 3 is a schematic view of a threaded sleeve according to the present utility model;
Fig. 4 is a schematic view showing the internal structure of the exhaust gas filtering tank of the present utility model.
Reference numerals: 1. an exhaust gas filtering box; 2. an exhaust gas filtering tank; 3. a sprayer; 4. a first connection pipe; 5. filtering the dish; 6. a filter screen; 7. a threaded sleeve; 8. a second connection pipe; 9. a threaded hole; 10. an exhaust port; 11. a tank is arranged in the filtering tank; 12. a motor; 13. a transmission shaft; 14. a worm; 15. a worm wheel; 16. a connecting rod; 17. a stirring plate; 18. an air inlet.
Detailed Description
Reference will now be made in detail to the present embodiments of the present utility model, examples of which are illustrated in the accompanying drawings, wherein the accompanying drawings are used to supplement the description of the written description so that one can intuitively and intuitively understand each technical feature and overall technical scheme of the present utility model, but not to limit the scope of the present utility model.
In the description of the present utility model, it should be understood that references to orientation descriptions such as upper, lower, front, rear, left, right, etc. are based on the orientation or positional relationship shown in the drawings, are merely for convenience of description of the present utility model and to simplify the description, and do not indicate or imply that the apparatus or elements referred to must have a particular orientation, be constructed and operated in a particular orientation, and thus should not be construed as limiting the present utility model.
In the description of the present utility model, greater than, less than, exceeding, etc. are understood to exclude this number, and above, below, within, etc. are understood to include this number. The description of the first and second is for the purpose of distinguishing between technical features only and should not be construed as indicating or implying relative importance or implicitly indicating the number of technical features indicated or implicitly indicating the precedence of the technical features indicated.
In the description of the present utility model, unless explicitly defined otherwise, terms such as arrangement, installation, connection, etc. should be construed broadly and the specific meaning of the terms in the present utility model can be reasonably determined by a person skilled in the art in combination with the specific contents of the technical scheme.
Referring to fig. 1-4, the present utility model provides a technical solution: the utility model provides an exhaust treatment device of MPCVD diamond production, including exhaust gas filtration case 1, the left side of exhaust gas filtration case 1 is equipped with exhaust gas filtration jar 2, the roof fixedly connected with atomizer 3 of exhaust gas filtration case 1, atomizer 3 is prior art, do not repeated here, exhaust gas filtration case 1's right side surface is provided with filter equipment, filter tank built-in groove 11 has been seted up to the inside top of exhaust gas filtration jar 2, exhaust gas filtration jar 2's inner wall is provided with agitating unit, exhaust port 10 has been seted up to exhaust gas filtration jar 2's upper surface.
Further, filter equipment includes first connecting pipe 4, and first connecting pipe 4 fixed mounting is at the right side surface of exhaust gas filtration case 1, and the one end fixedly connected with filter dish 5 of exhaust gas filtration case 1 is kept away from to first connecting pipe 4, and the inner wall fixed mounting of filter dish 5 has filter screen 6, and the surface cover of filter dish 5 is equipped with screw sleeve 7, and filter dish 5 is prior art, and details are not repeated here.
Further, the inner wall of the threaded sleeve 7 is sleeved with a second connecting pipe 8, threads matched with the threaded sleeve 7 are respectively arranged on the outer surfaces of the filter dish 5 and the second connecting pipe 8, and the filter dish 5 and the second connecting pipe 8 are connected together through the threaded sleeve 7.
Further, the air inlet 18 has been seted up to the surface of exhaust gas filtration jar 2, the fixed cover of air inlet 18 is established in the surface of second connecting pipe 8, communicate with each other through filter equipment between exhaust gas filtration case 1 and the exhaust gas filtration jar 2, when the staff is using the device to filter the waste gas of diamond production, firstly waste gas is discharged into exhaust gas filtration case 1, the granule in the diamond waste gas carries out the humidification filtration through atomizer 3 spun water smoke, the diamond waste gas after the humidification filtration is discharged into exhaust gas filtration jar 2 through filter bowl 5, threaded sleeve pipe 7, second connecting pipe 8, the absorption filtration can be carried out to the waste gas after the humidification filtration through filter screen 6, the material of filter screen 6 is the active carbon, finally the diamond waste gas is discharged into exhaust gas filtration jar 2, through adding chemical liquid to exhaust gas filtration jar 2 in the last liquid filtration can, the device greatly reduced the diamond waste gas of diamond production when discharging, the circumstances that probably has the gas not up to standard, thereby cause the pollution to the environment.
Further, the stirring device comprises a motor 12, the motor 12 is fixedly arranged on the bottom wall of the built-in groove 11 of the filter tank, the output end of the motor 12 is fixedly connected with a transmission shaft 13, and a worm 14 is fixedly sleeved on the outer surface of the transmission shaft 13.
Further, the outer surface of the worm 14 is provided with a connecting rod 16, a worm wheel 15 is fixedly sleeved on the outer surface of the connecting rod 16, the worm wheel 15 is connected with the worm 14 in a meshed mode, and one end, close to the worm wheel 15, of the connecting rod 16 is connected with the top wall of the built-in groove 11 of the filter tank in a rotating mode.
Further, the one end that worm wheel 15 was kept away from to connecting rod 16 rotates and runs through the roof of play waste gas filtration jar 2 to rotate with the diapire of waste gas filtration jar 2 and be connected, connecting rod 16 is located the one end surface fixedly connected with three stirring board 17 of waste gas filtration jar 2 inner wall, before the staff filters diamond waste gas, firstly pour chemical reagent into waste gas filtration jar 2, starter motor 12, motor 12 synchronous drive transmission shaft 13 rotates, transmission shaft 13 synchronous drive worm 14 rotates, worm 14 synchronous drive worm wheel 15 rotates, worm wheel 15 synchronous drive connecting rod 16 rotates, connecting rod 16 synchronous drive stirring board 17 rotates, can carry out abundant stirring with the chemical reagent in the waste gas filtration jar 2 through stirring board 17's rotation, avoid diamond waste gas to carry out liquid filtration, the insufficient diamond waste gas discharge that leads to with the chemical reagent contact is not up to standard the condition, the device has further reduced the condition that waste gas discharge causes the pollution to the environment when diamond production.
Working principle: when the device is used for filtering the waste gas produced by diamond, firstly, waste gas is discharged into the waste gas filtering box 1, particles in the diamond waste gas are humidified and filtered through water mist sprayed by the sprayer 3, the humidified and filtered diamond waste gas is discharged into the waste gas filtering tank 2 through the filtering dish 5, the threaded sleeve 7 and the second connecting pipe 8, the humidified and filtered waste gas can be adsorbed and filtered through the filter screen 6, the material of the filter screen 6 is activated carbon, finally, the diamond waste gas is discharged into the waste gas filtering tank 2, chemical liquid is added into the waste gas filtering tank 2, final liquid filtering is carried out, the condition that gas possibly exists when being discharged does not reach the standard is avoided, thereby the device greatly reduces the diamond waste gas produced when the diamond is produced, before the diamond waste gas is filtered by the working personnel, firstly, the chemical reagent is poured into the waste gas filtering tank 2, the motor 12 is started, the motor 12 synchronously drives the transmission shaft 13 to rotate, the worm 14 synchronously drives the worm 15 to rotate, the connecting rod 16 synchronously drives the worm wheel 17 to rotate, the worm wheel 17 synchronously drives the worm wheel 17 to rotate, the waste wheel 17 can further fully contact with the waste gas produced when the diamond waste gas is discharged, and the waste gas is fully polluted when the waste gas is not reached the diamond is discharged, and the waste gas is fully polluted when the waste gas is discharged.
The embodiments of the present utility model have been described in detail with reference to the accompanying drawings, but the present utility model is not limited to the above embodiments, and various changes can be made within the knowledge of one of ordinary skill in the art without departing from the spirit of the present utility model.
Claims (7)
1. An exhaust treatment device for MPCVD diamond production, comprising an exhaust filter box (1), characterized in that: an exhaust gas filtering tank (2) is arranged on the left side of the exhaust gas filtering box (1), and a sprayer (3) is fixedly connected to the top wall of the exhaust gas filtering box (1);
the right side surface of the waste gas filtering box (1) is provided with a filtering device, and the inside of the top end of the waste gas filtering tank (2) is provided with a filtering tank built-in groove (11);
wherein, the inner wall of exhaust gas filtration jar (2) is provided with agitating unit, and gas vent (10) have been seted up to the upper surface of exhaust gas filtration jar (2).
2. An exhaust treatment device for MPCVD diamond production according to claim 1, wherein: the filtering device comprises a first connecting pipe (4), and the first connecting pipe (4) is fixedly arranged on the right side surface of the waste gas filtering box (1);
Wherein, one end fixedly connected with filter dish (5) that waste gas rose box (1) was kept away from to first connecting pipe (4), and the inner wall fixed mounting of filter dish (5) has filter screen (6), and the surface cover of filter dish (5) is equipped with screw sleeve (7).
3. An exhaust treatment device for MPCVD diamond production according to claim 2, wherein: the inner wall cover of screw sleeve (7) is equipped with second connecting pipe (8), and the screw thread with screw sleeve (7) looks adaptation has all been seted up to the surface of filter bowl (5) and second connecting pipe (8), is in the same place through screw sleeve (7) threaded connection between filter bowl (5) and second connecting pipe (8).
4. An exhaust gas treatment device for MPCVD diamond production according to claim 3, wherein: an air inlet (18) is formed in the outer surface of the exhaust gas filtering tank (2), the air inlet (18) is fixedly sleeved on the outer surface of the second connecting pipe (8), and the exhaust gas filtering tank (1) is communicated with the exhaust gas filtering tank (2) through a filtering device.
5. An exhaust treatment device for MPCVD diamond production according to claim 1, wherein: the stirring device comprises a motor (12), the motor (12) is fixedly arranged on the bottom wall of the built-in groove (11) of the filter tank, the output end of the motor (12) is fixedly connected with a transmission shaft (13), and a worm (14) is fixedly sleeved on the outer surface of the transmission shaft (13).
6. An exhaust treatment device for MPCVD diamond production according to claim 5, wherein: the outer surface of the worm (14) is provided with a connecting rod (16), and the outer surface of the connecting rod (16) is fixedly sleeved with a worm wheel (15);
The worm wheel (15) is connected with the worm (14) in a meshed mode, and one end, close to the worm wheel (15), of the connecting rod (16) is connected with the top wall of the built-in groove (11) of the filter tank in a rotating mode.
7. An exhaust treatment device for MPCVD diamond production according to claim 6, wherein: one end of the connecting rod (16) far away from the worm wheel (15) rotates to penetrate through the top wall of the exhaust gas filtering tank (2) and is rotationally connected with the bottom wall of the exhaust gas filtering tank (2), and three stirring plates (17) are fixedly connected with the outer surface of one end of the connecting rod (16) positioned on the inner wall of the exhaust gas filtering tank (2).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202323076175.4U CN221085108U (en) | 2023-11-14 | 2023-11-14 | Exhaust treatment device for MPCVD diamond production |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202323076175.4U CN221085108U (en) | 2023-11-14 | 2023-11-14 | Exhaust treatment device for MPCVD diamond production |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN221085108U true CN221085108U (en) | 2024-06-07 |
Family
ID=91312180
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202323076175.4U Active CN221085108U (en) | 2023-11-14 | 2023-11-14 | Exhaust treatment device for MPCVD diamond production |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN221085108U (en) |
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2023
- 2023-11-14 CN CN202323076175.4U patent/CN221085108U/en active Active
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