CN221077088U - Semiconductor aluminum alloy spare part drying device - Google Patents

Abstract

The utility model relates to a semiconductor aluminum alloy part drying device which comprises a drying box, wherein a baffle is arranged in the drying box, a material placing disc is arranged at the upper end of the baffle, a rotating piece for driving the material placing disc to rotate is arranged at the lower end of the baffle, a covering device is arranged at the upper end of the material placing disc, and a drying device is arranged at the outer side of the drying box. This semiconductor aluminum alloy spare part drying device, place the dish through placing the spare part on the material, rotate the screw rod, under the restriction of both sides slide bar, push down the ventilative lid, make the spare part covered, dry by the drying device in outside to the spare part afterwards, simultaneously place the dish through rotating the piece control material and rotate, make the material can be quick comprehensive by even stoving processing, after drying, but reverse the screw rod, make ventilative lid shift up to the top, can be very convenient take out the spare part, its whole stoving process is very convenient high-efficient for the device is more suitable.

Description

Semiconductor aluminum alloy spare part drying device

Technical Field

The utility model relates to the technical field of semiconductor part processing, in particular to a semiconductor aluminum alloy part drying device.

Background

The aluminum alloy is an important material used for the semiconductor etching equipment, and most of key parts of the reaction chamber are manufactured by the aluminum alloy; according to design requirements, some parts are subjected to surface treatment, such as hard anodic oxidation, plasma spraying, conductive oxidation, brushing nickel and the like, and some parts are directly subjected to aluminum metal surfaces; in the integrated circuit manufacturing process, aluminum alloy parts are required to be cleaned frequently and periodically, the quality of the cleaning of the parts is related to whether the etching process can be normally performed, and after the etching process is performed, the material is required to be ensured to be dried, so that the influence of residual water on a circuit is avoided.

Most of the drying devices used in the prior art are inconvenient to take and place parts, after drying, workers are inconvenient to take out parts rapidly, so that the working efficiency is low, the processing is inconvenient, and the problem is solved by the aid of the semiconductor aluminum alloy part drying device.

Disclosure of utility model

(One) solving the technical problems

In order to overcome the defects in the prior art, the utility model provides a semiconductor aluminum alloy part drying device, which aims to solve the problems in the background.

(II) technical scheme

In order to achieve the above purpose, the present utility model provides the following technical solutions: the utility model provides a semiconductor aluminum alloy spare part drying device, includes the stoving case, be provided with the baffle in the stoving case, the upper end of baffle is provided with the material and places the dish, and the lower extreme is provided with the rotating member that is used for driving the material and places the dish pivoted, the upper end that the material placed the dish is provided with the lid and closes the device, is located the outside of stoving case is provided with drying device;

The cover closing device comprises a connecting frame fixedly installed on the left side of the material placing plate, a screw is arranged on the connecting frame in a threaded mode, a ventilation cover is arranged at the lower end of the screw, and two groups of sliding rods penetrating the connecting frame and movably connected with the connecting frame are fixedly installed at the top of the ventilation cover.

Preferably, the upper end of the screw rod is provided with a handle, and the outer side of the slide rod is sleeved with a spring.

Preferably, the rotating member comprises a motor arranged on the right side wall of the drying box, a main rotating rod is arranged at the output end of the motor, main conical teeth are arranged at the left end of the main rotating rod, a secondary rotating rod connected with the material placing disc is rotatably arranged on the baffle, and secondary conical teeth meshed with the main conical teeth are arranged at the bottom of the secondary rotating rod.

Preferably, the both sides of tray bottom are placed to the material all are provided with the supporting wheel of laminating baffle, the bottom of baffle is provided with the righting frame of being connected with main bull stick rotation.

Preferably, the drying device comprises a hot air bin arranged on the right side of the drying box, an air outlet and a heater are arranged in the hot air bin, a blower is arranged at the upper end of the drying box, and an air outlet pipe connected with the air outlet is arranged on the blower.

Preferably, a dehumidifier is arranged on the left side wall of the drying box, and a dehumidifier pipe extending into the drying box is arranged on the dehumidifier.

(III) beneficial effects

Compared with the prior art, the utility model provides a semiconductor aluminum alloy part drying device, which has the following beneficial effects:

This semiconductor aluminum alloy spare part drying device, place the dish through placing the spare part on the material, rotate the screw rod, under the restriction of both sides slide bar, push down the ventilative lid, make the spare part covered, dry by the drying device in outside to the spare part afterwards, simultaneously place the dish through rotating the piece control material and rotate, make the material can be quick comprehensive by even stoving processing, after drying, but reverse the screw rod, make ventilative lid shift up to the top, can be very convenient take out the spare part, its whole stoving process is very convenient high-efficient for the device is more suitable.

Drawings

FIG. 1 is a schematic diagram of the structure of the present utility model;

Fig. 2 is an enlarged view of fig. 1 at a in accordance with the present utility model.

In the figure: 1 baffle, 2 supporting wheels, 3 material placing trays, 4 ventilation covers, 5 dehumidifier, 6 dehumidifier pipes, 7 connecting frames, 8 handles, 9 blowers, 10 air outlet pipes, 11 air outlets, 12 heaters, 13 hot air bins, 14 motors, 15 centralizing frames, 16 main rotating rods, 17 main conical teeth, 18 secondary conical teeth, 19 secondary rotating rods, 20 screws, 21 sliding rods, 22 springs and 23 drying boxes.

Detailed Description

The following description of the preferred embodiments of the present utility model is provided in connection with the accompanying drawings, and it is to be understood that the utility model is not limited thereto.

The drawings are simplified schematic views, and only the basic structure of the present utility model is schematically described, so that only the constitution related to the present utility model is shown.

In the description of the present utility model, it should be understood that the terms "center", "longitudinal", "lateral", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner" and "outer", etc. indicate orientations or positional relationships based on the drawings, are merely for convenience in describing the present utility model and simplifying the description, and do not indicate or imply that the apparatus or element in question must have a specific orientation, be configured and operated in a specific orientation, and thus should not be construed as limiting the present utility model, and furthermore, the terms "first", "second" are used for descriptive purposes only and should not be construed to indicate or imply relative importance or implying a number of the technical features indicated, whereby the features defining "first", "second" may explicitly or implicitly include one or more of such features, and in the description of the present utility model, unless otherwise indicated, "a plurality" means two or more.

In the description of the present utility model, it should be noted that, unless explicitly specified and limited otherwise, the terms "mounted," "connected," and "connected" are to be construed broadly, and for example, may be fixedly connected, may be detachably connected, or integrally connected, may be mechanically connected, may be electrically connected, may be directly connected, may be indirectly connected through an intermediate medium, and may be in communication with the inside of two elements, and the specific meaning of the terms in the present utility model may be understood as specific to one of ordinary skill in the art.

Referring to fig. 1-2, in the embodiment of the utility model, a semiconductor aluminum alloy part drying device comprises a drying box 23, a baffle plate 1 is arranged in the drying box 23, a material placing tray 3 is arranged at the upper end of the baffle plate 1, a rotating member for driving the material placing tray 3 to rotate is arranged at the lower end of the baffle plate, a covering device is arranged at the upper end of the material placing tray 3, a drying device is arranged at the outer side of the drying box 23, the part is placed on the material placing tray 3 and limited by the covering device, and the part is dried by the drying device, and in the drying process, the material placing tray 3 is controlled to rotate by the rotating member, so that the part can be dried rapidly and uniformly, the drying efficiency is higher, and the effect is better;

The cover closes the device and includes fixed mounting in the material and places the left link 7 of dish 3, the screw thread is provided with screw rod 20 on the link 7, the lower extreme of screw rod 20 is provided with ventilative lid 4, the equal fixed mounting in top of ventilative lid 5 has two sets of penetrating connection frame 7 and with its swing joint's slide bar 21, rotates screw rod 20, produces the oscilaltion, and slide bar 21 of both sides is in the link 7 and slides, makes ventilative lid 4 can steadily go up and down to conveniently get the part and put fast, improve its work efficiency.

Further, the upper end of the screw rod 20 is provided with a handle 8, the outer side of the slide bar 21 is sleeved with a spring 22, the handle 8 is held, the screw rod 20 is convenient to rotate, and the lifting of the ventilation cover 4 is more stable due to the expansion and contraction of the spring 22.

Further, the rotating member comprises a motor 14 installed on the right side wall of a drying box 23, a main rotating rod 16 is installed at the output end of the motor 14, a main conical tooth 17 is arranged at the left end of the main rotating rod 16, a secondary rotating rod 19 connected with the material placing disc 3 is rotatably arranged on the baffle 1, a secondary conical tooth 18 meshed with the main conical tooth 17 is arranged at the bottom of the secondary rotating rod 19, the motor 14 is driven, the main rotating rod 16 drives the main conical tooth 17 to rotate, and the secondary conical tooth 18 is pushed to rotate through meshing, so that the secondary rotating rod 19 can drive the material placing disc 3 at the upper end to rotate, and accordingly rotation of parts is controlled, and drying efficiency and uniformity of the material placing disc are improved.

Further, the both sides of tray 3 bottom are all provided with the backing wheel 2 of laminating baffle 1, and the setting of backing wheel 2 can improve this tray 3 pivoted stationarity is placed to the material, the bottom of baffle 1 is provided with the righting frame 15 of being connected with main bull stick 16 rotation, and the setting of righting frame 15 makes the rotation of main bull stick 16 more steady.

Further, the drying device comprises a hot air bin 13 arranged on the right side of a drying box 23, an air outlet 11 and a heater 12 are arranged in the hot air bin 13, a blower 9 is arranged at the upper end of the drying box 23, an air outlet pipe 10 connected with the air outlet 11 is arranged on the blower 9, the blower 9 is driven, the air outlet pipe 10 discharges air from the air outlet 11, and after being heated by the heater 12, hot air can carry out quick drying treatment on parts.

Further, the left side wall of the drying box 23 is provided with a dehumidifier 5, the dehumidifier 5 is provided with a dehumidifier pipe 6 extending into the drying box 23, and the dehumidifier 5 is driven in the drying process, and the dehumidifier pipe 6 is used for extracting moisture generated in the drying process, so that the drying efficiency is further improved.

In summary, according to the semiconductor aluminum alloy part drying device, the parts are placed on the material placing tray 3, the screw rod 20 is rotated, the ventilation cover 4 is enabled to limit the parts, the blower 9 is driven, the air outlet pipe 10 is used for discharging the air from the air outlet 11, after the air outlet pipe is heated by the heater 12, the parts can be dried by hot air, the motor 14 is driven, the main rotating rod 16 drives the main conical teeth 17 to rotate, the main conical teeth 18 are meshed and pushed to rotate, the material placing tray 3 at the upper end can be driven by the main rotating rod 19 to rotate, the parts are controlled to rotate, the drying efficiency and uniformity of the parts are improved, the dehumidifier 5 is driven, the moisture generated in the drying process is extracted by the moisture extraction pipe 6, the drying efficiency of the parts is further improved, after the materials are dried, the screw rod 20 is reversed, the ventilation cover 4 is pushed to move upwards under the limit of the slide rod 21, and the materials are conveniently and rapidly taken out, the whole drying process is very convenient and efficient, and the device is more applicable.

It is noted that relational terms such as first and second, and the like are used solely to distinguish one entity or action from another entity or action without necessarily requiring or implying any actual such relationship or order between such entities or actions. Moreover, the terms "comprises," "comprising," or any other variation thereof, are intended to cover a non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements does not include only those elements but may include other elements not expressly listed or inherent to such process, method, article, or apparatus. Without further limitation, an element defined by the phrase "comprising one … …" does not exclude the presence of other like elements in a process, method, article, or apparatus that comprises the element.

Although embodiments of the present utility model have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations can be made therein without departing from the principles and spirit of the utility model, the scope of which is defined in the appended claims and their equivalents.

Claims (6)

1. The utility model provides a semiconductor aluminum alloy spare part drying device which characterized in that: the drying device comprises a drying box (23), wherein a baffle (1) is arranged in the drying box (23), a material placing disc (3) is arranged at the upper end of the baffle (1), a rotating piece for driving the material placing disc (3) to rotate is arranged at the lower end of the baffle, a covering device is arranged at the upper end of the material placing disc (3), and a drying device is arranged at the outer side of the drying box (23);

The cover closing device comprises a connecting frame (7) fixedly arranged on the left side of the material placing disc (3), a screw rod (20) is arranged on the connecting frame (7) in a threaded mode, a ventilation cover (4) is arranged at the lower end of the screw rod (20), and two groups of sliding rods (21) penetrating through the connecting frame (7) and movably connected with the connecting frame are fixedly arranged at the top of the ventilation cover (4).

2. The drying device for semiconductor aluminum alloy parts according to claim 1, wherein: the upper end of the screw rod (20) is provided with a handle (8), and the outer side of the slide rod (21) is sleeved with a spring (22).

3. The drying device for semiconductor aluminum alloy parts according to claim 1, wherein: the rotary part comprises a motor (14) arranged on the right side wall of a drying box (23), a main rotating rod (16) is arranged at the output end of the motor (14), main conical teeth (17) are arranged at the left end of the main rotating rod (16), a secondary rotating rod (19) connected with a material placing disc (3) is rotatably arranged on the baffle (1), and secondary conical teeth (18) meshed with the main conical teeth (17) are arranged at the bottom of the secondary rotating rod (19).

4. A semiconductor aluminum alloy component drying apparatus as recited in claim 3, wherein: the material placing tray is characterized in that supporting wheels (2) attached to the baffle plates (1) are arranged on two sides of the bottom of the material placing tray (3), and a righting frame (15) connected with a main rotating rod (16) in a rotating mode is arranged at the bottom of the baffle plates (1).

5. The drying device for semiconductor aluminum alloy parts according to claim 1, wherein: the drying device comprises a hot air bin (13) arranged on the right side of a drying box (23), an air outlet (11) and a heater (12) are arranged in the hot air bin (13), a blower (9) is arranged at the upper end of the drying box (23), and an air outlet pipe (10) connected with the air outlet (11) is arranged on the blower (9).

6. The drying device for semiconductor aluminum alloy parts according to claim 5, wherein: the left side wall of the drying box (23) is provided with a dehumidifier (5), and the dehumidifier (5) is provided with a dehumidifier pipe (6) extending into the drying box (23).