CN221055527U - Arc supporting table for horizontal sintering of molybdenum tube targets - Google Patents
Arc supporting table for horizontal sintering of molybdenum tube targets Download PDFInfo
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- CN221055527U CN221055527U CN202322973134.9U CN202322973134U CN221055527U CN 221055527 U CN221055527 U CN 221055527U CN 202322973134 U CN202322973134 U CN 202322973134U CN 221055527 U CN221055527 U CN 221055527U
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- arc
- arc supporting
- molybdenum tube
- supporting block
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- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 title claims abstract description 41
- 229910052750 molybdenum Inorganic materials 0.000 title claims abstract description 39
- 239000011733 molybdenum Substances 0.000 title claims abstract description 39
- 238000005245 sintering Methods 0.000 title claims abstract description 37
- MCMNRKCIXSYSNV-UHFFFAOYSA-N Zirconium dioxide Chemical compound O=[Zr]=O MCMNRKCIXSYSNV-UHFFFAOYSA-N 0.000 claims description 6
- 238000000034 method Methods 0.000 description 22
- 238000004519 manufacturing process Methods 0.000 description 4
- 239000000843 powder Substances 0.000 description 4
- 230000007547 defect Effects 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000003754 machining Methods 0.000 description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 239000011230 binding agent Substances 0.000 description 1
- 239000007767 bonding agent Substances 0.000 description 1
- 238000009694 cold isostatic pressing Methods 0.000 description 1
- 238000001125 extrusion Methods 0.000 description 1
- 238000005242 forging Methods 0.000 description 1
- 230000005484 gravity Effects 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 239000002994 raw material Substances 0.000 description 1
- 238000005477 sputtering target Methods 0.000 description 1
- 239000013077 target material Substances 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
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Abstract
The utility model discloses an arc-shaped supporting table for horizontal sintering of a molybdenum tube target, which comprises a plurality of sections of arc-shaped supporting blocks, wherein each arc-shaped supporting block is arranged in a horizontal sintering furnace, the distance between each arc-shaped supporting block is adjustable, and a molybdenum tube target blank to be sintered is placed on the arc surface of each arc-shaped supporting block. According to the utility model, when the molybdenum tube target pressed compact is sintered horizontally, the consistency of shrinkage deformation of the pressed compact along the circumferential direction is obviously improved through the support of the arc surface of the support table, the roundness of a sintered product is greatly ensured, the subsequent product processing amount is greatly reduced, and the final yield of a finished product is improved.
Description
Technical Field
The utility model belongs to the technical field of tubular target manufacturing, and particularly relates to an arc-shaped supporting table for horizontal sintering of a molybdenum tube target.
Background
In recent years, with the rapid development of the solar industry and the flat panel display industry, the market demand of molybdenum sputtering targets as important thin film materials is increasing. Meanwhile, the utilization rate of the tube targets is far higher than that of the planar targets, so that the market ratio of the molybdenum tube targets rises year by year.
At present, two methods of a deformation method and a powder sintering method are mainly used for manufacturing the molybdenum tube target material.
1. Deformation method: the method as adopted in publication number CN101259584 a: the molybdenum tube blank is manufactured by adopting a powder sintering method and is subjected to working procedures such as forging, extrusion, heat treatment, machining and the like. The method has the advantages that the molybdenum tube target meeting the use requirement can be produced, and the density reaches 10.0-10.2g/cm 3. However, the method has the defects of long process flow and high production cost.
2. Powder sintering method: the following two methods are available for powder sintering.
One is the method as employed in the patent application publication CN101642813 a: the molybdenum powder with certain granularity is added with water-based binding agent, and after being uniformly mixed, the molybdenum powder is centrifugally molded, degummed, presintered and sintered, and then is mechanically processed into a finished product. The method has the advantages of long process flow, lower product density, difficult control of ovality and flatness in the sintering process, high gas (C, N, O) content and reduced purity due to the addition of the water-based bonding agent. At present, the practical application of the method for producing the molybdenum tube target is few.
The other method comprises the following process flows: raw material molybdenum powder-cold isostatic pressing forming tubular-high-temperature sintering-processing-heat treatment-machining treatment. The method has the advantages of short process flow and easy control; but has the defects of low product density and high porosity.
In the high-temperature sintering link, the height of the hearth of the sintering furnace reduces the possibility of vertical sintering of the ultra-long target blank. Thus, horizontal sintering is not the option for sintering an ultralong target blank.
Currently, in the horizontal sintering process, a tube target blank is generally placed horizontally in a furnace. Due to self gravity, serious shrinkage deformation non-uniformity is easy to generate in a high-temperature stage, ovality of a sintered product is increased, subsequent processing amount is larger, product scrapping is caused when serious, and product yield is reduced.
Disclosure of utility model
The utility model mainly aims to provide an arc-shaped supporting table for horizontal sintering of a molybdenum tube target, wherein ovality of the molybdenum tube target is not increased during horizontal sintering of a target blank.
The arc-shaped supporting table for horizontal sintering of the molybdenum tube target provided by the utility model comprises a plurality of sections of arc-shaped supporting blocks, wherein each arc-shaped supporting block is arranged in a horizontal sintering furnace, the distance between each arc-shaped supporting block is adjustable, and a molybdenum tube target blank to be sintered is placed on the arc surface of each arc-shaped supporting block.
In one embodiment of the above support table, the arc support block is made of heavy zirconia, and an arc surface of the arc support block is smooth.
In one embodiment of the foregoing support table, the arc support block is a semicircular arc support block, and the radius of the arc is the same as the radius of the blank to be sintered of the molybdenum tube target.
In one embodiment of the foregoing support table, the semicircular arc support blocks are provided with 6 segments, which are juxtaposed one behind the other at a fixed pitch, and the pitch of which is adjustable.
In another embodiment of the foregoing support table, the arc support block is a quarter arc support block, two sections of the quarter arc support blocks may be combined side by side to form a half arc, and a distance between the two sections of the quarter arc support blocks may be adjusted.
In another embodiment of the foregoing support table, the radius of the arc of the quarter-arc support block is the same as the radius of the blank to be sintered of the molybdenum tube target.
In another embodiment of the foregoing support table, the quarter-arc support blocks are provided with 12 segments, two segments are arranged side by side and then arranged in front of and behind each other at a fixed interval, and the interval between the segments is adjustable.
The beneficial effects of the utility model are as follows:
1. When the molybdenum tube target pressed compact is sintered horizontally, the consistency of the pressed compact in the circumferential direction is obviously improved through the support of the arc surface of the support table, the roundness of a sintered product is greatly ensured, the subsequent product processing amount is greatly reduced, and the final yield of a finished product is improved.
2. The supporting length of the supporting table can be adjusted by adjusting the distance between the supporting blocks in the length direction, so that the length range of the sinterable tube target blank is enlarged.
Drawings
FIG. 1 is a schematic top view of an embodiment of the present utility model.
Fig. 2 is a schematic structural view of the semi-arc support block in fig. 1.
Fig. 3 is a schematic top view of another embodiment of the present utility model.
Fig. 4 is a schematic structural view of the quarter-arc supporting block in fig. 3.
Fig. 5 is a schematic diagram illustrating a use state of the embodiment of fig. 3.
Fig. 6 is a schematic diagram of the side view of fig. 5.
Detailed Description
Embodiment 1,
As can be seen from fig. 1 and 2, the arc-shaped support table for horizontal sintering of a molybdenum tube target disclosed in this embodiment includes 6 semicircular arc support blocks.
The semicircular arc supporting block is made of heavy zirconia and has a smooth surface. The arc surface of the semicircular arc supporting block is a contact surface and a supporting surface when the tube target pressed blank is sintered, and the radius of the arc surface is consistent with the radius of the molybdenum tube target pressed blank.
The length range of the semicircular arc supporting blocks is 150mm-200mm, and the supporting blocks are horizontally arranged at fixed intervals.
The spacing between each segment of support blocks can be adjusted between 0 and 50mm, and the actual number of support blocks in use can be determined according to the length of the target blank and the spacing between each segment of support blocks.
The length of the 6-section semicircular arc supporting block is 200mm, the distance between each two sections is 40mm, and the radius of the arc surface of the supporting block is 185mm. After arranging and placing 6 sections of supporting blocks to form a supporting table, placing 1 molybdenum tube target to be sintered on the supporting table.
The width of the hearth of the sintering furnace in the embodiment is 600mm, the length is 2000mm, and the depth is 500mm; the outer diameter of the blank to be sintered of the molybdenum tube target is 185mm, and the length is 1600mm.
The application method of the arc-shaped supporting table for horizontal sintering of the molybdenum tube target comprises the following steps:
Firstly, hoisting 6 sections of semicircular arc supporting blocks into a horizontal sintering furnace through a hoisting tool, placing the semicircular arc supporting blocks along a straight line in the length direction of a hearth bottom plate of the horizontal sintering furnace, hoisting a molybdenum tube target pressed compact to be sintered into the horizontal sintering furnace through the hoisting tool, placing the molybdenum tube target pressed compact on an arc supporting table, closing a furnace cover, and starting sintering.
The arc-shaped supporting table has the advantages that:
1. When the molybdenum tube target pressed compact is sintered horizontally, the consistency of the pressed compact in the circumferential direction is obviously improved through the support of the arc surface of the support table, the roundness of a sintered product is greatly ensured, the subsequent product processing amount is greatly reduced, and the final yield of a finished product is improved.
2. The supporting length of the supporting table can be adjusted by adjusting the distance between the supporting blocks in the length direction, so that the length range of the sinterable tube target blank is enlarged.
3. The supporting table has simple structure and low cost.
Referring to fig. 3 and 4, the second embodiment is the same as the first embodiment in that the description is not repeated, except that:
The arc supporting table of the embodiment is formed by combining 12 sections of quarter arc supporting blocks, every two sections of quarter arc supporting blocks can be combined into a semicircular arc supporting block in opposite directions, and six semicircular arc supporting blocks are arranged front and back to form the arc supporting table. The distance between the quarter circular arc supporting blocks which are placed in opposite directions is 20mm.
The length of the 12-section semicircular arc supporting block is 180mm, the distance between each two sections is 40mm, and the radius of the arc surface of the supporting block is 175mm.
The width of the hearth of the sintering furnace in the embodiment is 600mm, the length is 2000mm, and the depth is 500mm; the outer diameter of the molybdenum tube target blank to be sintered is 195mm, and the length is 1400mm.
As can be seen in conjunction with fig. 5 and 6, the arc-shaped support table of the present embodiment is in use.
Compared with the first embodiment, the present embodiment has the advantages that:
A semicircular arc is formed by the two sections of the quarter arc supporting blocks, and the radius of the arc supporting table is finely adjusted by adjusting the distance between the two sections of the quarter arc supporting blocks, so that the applicability is stronger.
Finally, it is noted that the above-mentioned embodiments are merely for illustrating the technical solution of the present utility model, and that other modifications and equivalents thereof by those skilled in the art should be included in the scope of the claims of the present utility model without departing from the spirit and scope of the technical solution of the present utility model.
Claims (7)
1. An arc supporting bench for horizontal sintering of molybdenum tube targets, which is characterized in that: the sintering furnace comprises a plurality of sections of arc supporting blocks, wherein each arc supporting block is arranged in the horizontal sintering furnace, the distance between each arc supporting block is adjustable, and a molybdenum tube target blank to be sintered is placed on the cambered surface of each arc supporting block.
2. The arc support for horizontal sintering of molybdenum tube targets as defined in claim 1, wherein: the arc supporting block is made of heavy zirconia, and the arc surface of the arc supporting block is smooth.
3. The arc support for horizontal sintering of molybdenum tube targets as defined in claim 2, wherein: the arc supporting block is a semicircular arc supporting block, and the arc radius of the arc supporting block is the same as the radius of the blank to be sintered of the molybdenum tube target.
4. An arcuate support for horizontal sintering of a molybdenum tube target as defined in claim 3, wherein: the semicircular arc supporting blocks are provided with 6 sections in total, the sections are arranged in parallel front and back at fixed intervals, and the intervals of the sections are adjustable.
5. The arc support for horizontal sintering of molybdenum tube targets as defined in claim 2, wherein: the arc supporting blocks are quarter arc supporting blocks, two sections of quarter arc supporting blocks can be combined side by side to form a semicircle, and the distance between the two sections of quarter arc supporting blocks can be adjusted.
6. The arc support for horizontal sintering of molybdenum tube targets as defined in claim 5, wherein: and the arc radius of the quarter arc supporting block is the same as the radius of the blank to be sintered of the molybdenum tube target.
7. The arc support for horizontal sintering of molybdenum tube targets as defined in claim 6, wherein: the quarter circular arc supporting blocks are provided with 12 sections in total, every two of the quarter circular arc supporting blocks are arranged side by side and then are arranged in front of and behind a fixed interval, and the interval of the quarter circular arc supporting blocks is adjustable.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202322973134.9U CN221055527U (en) | 2023-11-03 | 2023-11-03 | Arc supporting table for horizontal sintering of molybdenum tube targets |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202322973134.9U CN221055527U (en) | 2023-11-03 | 2023-11-03 | Arc supporting table for horizontal sintering of molybdenum tube targets |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN221055527U true CN221055527U (en) | 2024-05-31 |
Family
ID=91225610
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202322973134.9U Active CN221055527U (en) | 2023-11-03 | 2023-11-03 | Arc supporting table for horizontal sintering of molybdenum tube targets |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN221055527U (en) |
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2023
- 2023-11-03 CN CN202322973134.9U patent/CN221055527U/en active Active
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