CN221039184U - Electric needle seat control system - Google Patents
Electric needle seat control system Download PDFInfo
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- CN221039184U CN221039184U CN202322680940.7U CN202322680940U CN221039184U CN 221039184 U CN221039184 U CN 221039184U CN 202322680940 U CN202322680940 U CN 202322680940U CN 221039184 U CN221039184 U CN 221039184U
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- 238000012360 testing method Methods 0.000 abstract description 16
- 238000004519 manufacturing process Methods 0.000 abstract description 6
- 238000012827 research and development Methods 0.000 abstract description 4
- 238000011161 development Methods 0.000 description 2
- 230000017525 heat dissipation Effects 0.000 description 2
- 238000003384 imaging method Methods 0.000 description 2
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- 239000004065 semiconductor Substances 0.000 description 2
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Abstract
The utility model relates to the technical field of test equipment, in particular to an electric needle seat control system. The system comprises a control box body and an electric needle seat, wherein the electric needle seat comprises a triaxial motor and an XYZ-direction motor sliding table respectively connected with the triaxial motor; a control board connected with the electric needle seat is fixed in the control box body; the control box body is provided with a control area and a wiring area, and an L-shaped mounting piece and a rubber base are also arranged on the control box body; the control area is provided with a display control screen connected with the control panel and a power supply control switch; the wiring area is provided with at least one group of wiring terminals, at least one group of D-sub connectors, signal communication connectors and power connectors, the wiring terminals and the D-sub connectors are correspondingly connected with the XYZ motor sliding table, and the signal communication connectors are connected with the probe table. The electric needle seat control system provided by the utility model is an independent system, the number of the electric needle seats is not limited by the main control system of the probe station, the flexibility is higher, and the research and development and production cost of enterprises can be reduced.
Description
Technical Field
The utility model relates to the technical field of test equipment, in particular to an electric needle seat control system.
Background
The probe station is one of important detection equipment in the semiconductor industry, is widely applied to precise electrical measurement of complex and high-speed devices, ensures the quality and reliability of semiconductor components and circuits, and shortens the research and development time and the process cost of device manufacturing. The probe station mainly comprises a probe station main body, a microscopic imaging system, a slide bearing table, an electric needle seat and the like. When the bare chip is tested, the chip is adsorbed on the bearing table by applying vacuum, and the electric needle seat is regulated under the help of the microscopic imaging system, so that the probe fixed on the probe seat precisely and accurately moves and presses the pressure point of the bare chip to be tested, and the other end of the probe is connected with an instrument required by the test, thereby realizing the test of the bare chip.
However, the current electric needle stand must be matched with a specific probe stand device, and the test requirement of the bare chip is irregular, and multiple sets of electric needle stands are sometimes needed, because the electric needle stand which can be equipped with each probe stand device is limited by a main control system of the probe stand, the number of the electric needle stands cannot be increased according to the test requirement, the applicability of the probe stand is limited, in addition, the price of the probe stand is different from one hundred thousand yuan to millions, and each set of electric needle stand needs to be equipped with a complete probe stand, so that the research and development cost and the production cost of enterprises can be greatly increased.
Therefore, there is a need for an electric needle stand control system that is not limited by the main control system of the probe stand, so that the electric needle stand control system can be used with the probe stand, can be independently arranged on any working table, can be used with other manual test systems, and the like, and can increase or decrease the number of electric needle stands according to actual test requirements, thereby having more flexibility.
Disclosure of utility model
The utility model aims to solve the problems that the number of the electric needle seats can not be increased according to the test requirement, the applicability of a probe station is limited, and the research, development and production cost of enterprises are increased because the electric needle seats which can be equipped with the traditional probe station equipment are limited by a probe station main control system.
In order to achieve the above purpose, the technical scheme adopted by the utility model is as follows:
The electric needle seat control system comprises an electric needle seat, and is characterized by also comprising a control box body, wherein the control box body is provided with an accommodating space, and a control board connected with the electric needle seat is fixed in the accommodating space;
The control box body is provided with a plurality of side surfaces, a bottom surface and a top cover, the bottom surface is provided with a rubber support, a first side surface of the plurality of side surfaces is used as a control area, a second side surface is used as a wiring area, and a group of L-shaped mounting sheets are respectively arranged at the boundary between the first side surface and two adjacent side surfaces;
The control area is provided with a display control screen and a power supply control switch which are respectively connected with the control panel; the wiring area is provided with at least one group of wiring terminals, at least one group of D-sub connectors, signal communication connectors and power connectors, the wiring terminals and the D-sub connectors are respectively and correspondingly connected with the X-direction motor sliding table, the Y-direction motor sliding table and the Z-direction motor sliding table, and the signal communication connectors are connected with the probe table.
Optionally, two ends of the first side face are respectively provided with a U-shaped handrail, and the display control screen and the power supply control switch are positioned between the two U-shaped handrails; the two U-shaped armrests and the first side face integrally form a U-shaped control area.
Optionally, a buzzer alarm device connected with the control panel is further arranged on the first side surface.
Optionally, a ventilation fan for heat dissipation is provided on the third side.
Optionally, the signal communication connector adopts a gigabit RJ45 connector.
Optionally, the display control screen is an HMI screen.
Optionally, the electric needle stand further comprises a magnetic stand, an L-shaped adapter plate, a first adapter plate, a second adapter plate and a probe adapter; the X-direction motor sliding table and the Y-direction motor sliding table are mutually perpendicular and fixed on the magnetic seat along the horizontal direction; the L-shaped adapter plate is inversely arranged above the X-direction motor sliding table, a semi-enclosed space is formed below the L-shaped adapter plate, the magnetic seat is arranged in the semi-enclosed space, and the Z-direction motor sliding table is arranged on one side, far away from the semi-enclosed space, of the vertical surface of the L-shaped adapter plate along the vertical direction; the probe adapter is arranged on one side, far away from the Z-direction motor sliding table, of the first adapter plate in a sliding manner along the vertical direction through the second adapter plate; the X-direction motor sliding table, the Y-direction motor sliding table and the Z-direction motor sliding table are provided with high-precision grating ruler reading heads.
Optionally, the D-sub connector is inserted and pulled through a wall, and one end of the D-sub connector is connected with the high-precision grating ruler reading head; the number of the groups of the D-sub connectors is matched with the number of the electric needle seats, and each group of the electric needle seats adopts one group of the D-sub connectors according to XYZ three axes.
Optionally, the binding post is the plug-in type that exempts from to weld, and it is wall-through structure, binding post's group number with the quantity phase-match of electronic needle file, every set electronic needle file adopts a set of binding post according to XYZ triaxial.
Optionally, a driving controller, a motion control board card and a control power supply are distributed on the control board; one end of the driving controller is connected with the triaxial motor through the wiring terminal, and the other end of the driving controller is connected with the motion control board card; the motion control board is connected with the high-precision grating ruler reading head through the D-sub connector; one end of the control power supply is connected with the power supply connector, and the other end of the control power supply is respectively connected with the driving controller and the motion control board card.
The electric needle seat control system provided by the utility model is an independent system, is not directly connected with the probe station, can be matched with the probe station for use, can be independently arranged on any working table surface for use, is matched with other manual test systems and the like, is not limited by a main control system of the probe station, can be increased or reduced according to actual test requirements, has higher flexibility, expands the practical range of the electric needle seat, can meet the test requirements of more scenes, realizes miniaturization and integration of electric needle seat control, is simple and convenient to operate, and reduces the research, development and production cost of enterprises.
Drawings
In order to more clearly illustrate the technical solutions of the embodiments of the present utility model, the drawings that are needed in the embodiments or the description of the prior art will be briefly described below, it being obvious that the drawings in the following description are only some embodiments of the present utility model, and that other drawings may be obtained according to these drawings without inventive effort for a person skilled in the art.
Fig. 1 and fig. 2 are schematic perspective views of a control box of an electric hub control system according to a first embodiment of the present utility model;
fig. 3 is a schematic perspective view of an electric hub of the electric hub control system according to the first embodiment of the present utility model.
The attached drawings are used for identifying and describing:
1. A control box body; 11. displaying a control screen; 12. a power control switch; 13. a connection terminal; 14. a D-sub connector; 15. a signal communication connector; 16. a power supply connector; 17. an L-shaped mounting piece; 18. u-shaped armrests; 19. a buzzer alarm device;
2. An electric needle stand; 21. x-direction motor sliding table; 22. y-direction motor sliding table; 23. z-direction motor sliding table; 24. a magnetic base; 25. an L-shaped adapter plate; 26. a first adapter plate; 27. a second adapter plate; 28. a probe adapter.
Detailed Description
The present utility model will be described in further detail with reference to the accompanying drawings and examples of implementation in order to make the objects, technical solutions and advantages of the present utility model more apparent. It should be understood that the specific embodiments described herein are for purposes of illustration only and are not intended to limit the scope of the utility model.
It will be understood that when an element is referred to as being "fixed to" another element, it can be directly on the other element or intervening elements may also be present. When an element is referred to as being "connected" to another element, it can be directly connected to the other element or intervening elements may also be present. The terms "vertical," "horizontal," "left," "right," and the like are used herein for illustrative purposes only.
Furthermore, the terms "mounted," "configured," "provided," "connected," and "connected" are to be construed broadly. For example, it may be a fixed connection, a removable connection, or a unitary construction; may be a mechanical connection, or an electrical connection; may be directly connected, or indirectly connected through intervening media, or may be in internal communication between two devices, elements, or components. The specific meaning of the above terms in the present utility model can be understood by those of ordinary skill in the art according to the specific circumstances.
The current electric needle seat is a standard probe station accessory and consists of an XYZ three-axis motion mechanism and a probe adapter, one end of the probe adapter is provided with a radio frequency or direct current probe, and the other end of the probe adapter is connected with a testing instrument, and the XYZ three-axis motion mechanism is connected to a main control system of probe station equipment, so that the electric needle seat is required to be matched with the probe station equipment for use and cannot be operated independently of the probe station equipment.
The first embodiment of the utility model provides an electric needle seat control system, referring to fig. 1-3, comprising a control box 1 and an electric needle seat 2, wherein the electric needle seat 2 comprises a three-axis motor, an X-direction motor sliding table 21, a Y-direction motor sliding table 22 and a Z-direction motor sliding table 23 which are respectively connected with the three-axis motor, the control box 1 is provided with an accommodating space, and a control board connected with the electric needle seat 2 is fixed in the accommodating space;
The control box body 1 is provided with a plurality of side surfaces, a bottom surface and a top cover, a rubber support is arranged on the bottom surface, a first side surface of the plurality of side surfaces is used as a control area, a second side surface is used as a wiring area, and a group of L-shaped mounting sheets 17 are respectively arranged at the boundary between the first side surface and two adjacent side surfaces;
The control area is provided with a display control screen 11 and a power supply control switch 12 which are respectively connected with the control panel; the wiring area is provided with at least one group of wiring terminals 13, at least one group of D-sub connectors 14, signal communication connectors 15 and power connectors 16, the wiring terminals 13 and the D-sub connectors 14 are respectively and correspondingly connected with the X-direction motor sliding table 21, the Y-direction motor sliding table 22 and the Z-direction motor sliding table 23, and the signal communication connectors 15 are connected with the probe station.
Specifically, the control system sets a plurality of groups of D-sub connectors 14 for accurately reading XYZ three-axis motion data of the electric needle stand 2, wherein each group of D-sub connectors 14 comprises an X-axis connector, a Y-axis connector and a Z-axis connector, and the XYZ three-axis connectors are correspondingly connected with an X-direction motor sliding table 21, a Y-direction motor sliding table 22 and a Z-direction motor sliding table 23 respectively; each group of connecting terminals 13 comprises an X-axis connecting terminal, a Y-axis connecting terminal and a Z-axis connecting terminal, and the display control screen 11 is used for adjusting an XYZ three-axis movement mechanism of the electric needle stand 2 and reading movement data of the XYZ three-axis movement mechanism in real time; the power control switch 12 adopts a 220V boat-shaped button, so that an operator can conveniently control the power of the control system; the electric needle seat control system is independent of a probe station, and a signal communication joint 15 is arranged on a control box body 1 for ensuring the connection between an electric needle seat 2 and the probe station; the side surfaces and the bottom surface of the box body can be integrated, and the top cover is connected with the side surfaces through screws; the control panel can be fixed at a position close to the first side surface in the control box body 1 through a screw; the size of the L-shaped mounting piece is consistent with that of a standard cabinet machine, and meanwhile, the antistatic rubber support arranged at the bottom of the control box body 1 enables the control box body 1 to be mounted on the standard cabinet and placed on a working table, so that the use flexibility of the electric needle seat 2 is greatly improved.
The electric needle seat control system provided by the utility model is an independent system, has no direct connection with the probe station, can be matched with the probe station for use, can be independently arranged on any working table for use, can be matched with other manual test systems and the like, and has the advantages that the number of the electric needle seats 2 is not limited by the main control system of the probe station, can be increased or reduced according to actual test requirements, and has higher flexibility.
Further, two ends of the first side face are respectively provided with a U-shaped handrail 18, and the display control screen 11 and the power control switch 12 are positioned between the two U-shaped handrails 18; the two U-shaped armrests 18 and the first side face integrally form a U-shaped control area, so that the control of operators is facilitated.
Further, a buzzer alarm device 19 connected with the control panel is also arranged on the first side surface. The buzzer alarm device 19 is responsible for outputting the current state of the control system to the outside in real time, so that operators can find and process abnormal problems of the control system in time.
Further, a ventilation fan for heat dissipation is provided on the third side to dissipate heat of the entire control system.
Further, the signal communication connector 15 adopts a high protection giga RJ45 connector, so that the stable signal transmission capability of the electric needle seat 2 and the probe station is ensured, and the high frequency noise immunity and the electromagnetic interference protection capability are realized.
Further, the display control screen 11 is an HMI screen.
Further, the electric needle stand 2 further comprises a magnetic stand 24, an L-shaped adapter plate 25, a first adapter plate 26, a second adapter plate 27 and a probe adapter 28; the X-direction motor sliding table 21 and the Y-direction motor sliding table 22 are mutually vertical and are fixed on the magnetic seat 24 along the horizontal direction; the L-shaped adapter plate 25 is inversely arranged above the X-direction motor sliding table 21, a semi-enclosed space is formed below the L-shaped adapter plate 25, the magnetic seat 24 is arranged in the semi-enclosed space, and the Z-direction motor sliding table 23 is arranged on one side, far away from the semi-enclosed space, of the vertical surface of the L-shaped adapter plate 25 along the vertical direction; the first adapter plate 26 is arranged on one side of the Z-direction motor sliding table 23, which is far away from the L-shaped adapter plate 25, and the probe adapter 28 is arranged on one side of the first adapter plate 26, which is far away from the Z-direction motor sliding table 23, in a sliding manner along the vertical direction through the second adapter plate 27; the X-direction motor sliding table 21, the Y-direction motor sliding table 22 and the Z-direction motor sliding table (23) are provided with high-precision grating ruler reading heads.
The XYZ three-way motor slipway is driven by a high-torque stepping motor and is connected with a control system through a high-shielding wire harness; the XYZ three-way motor sliding table is also provided with a high-precision grating ruler reading head which is connected with the control system through a high shielding wire harness.
Further, the D-sub connector 14 is inserted and pulled through a wall, one end of the D-sub connector is connected with the high-precision grating ruler reading head, and the other end of the D-sub connector is connected with a control system; the number of the groups of the D-sub connectors 14 is matched with the number of the electric needle bases 2, namely, the D-sub connectors 14 with the corresponding number of the groups can be arranged according to the number of the electric needle bases 2, and each group of the electric needle bases 2 adopts one group of the D-sub connectors 14 according to XYZ three axes.
Further, the connection terminals 13 are of a plug-in type structure without welding, one end of each connection terminal is connected with the motor of the electric needle seat 2, the other end of each connection terminal is connected with the control system, the number of groups of the connection terminals 13 is matched with the number of the electric needle seats 2, namely, the connection terminals 13 with the corresponding number of groups can be arranged according to the number of the electric needle seats 2, and each group of the connection terminals 13 is adopted by the electric needle seats 2 according to XYZ three axes.
Further, a driving controller, a motion control board and a control power supply are distributed on the control board; one end of the driving controller is connected with the triaxial motor through the wiring terminal 13, and the other end of the driving controller is connected with the motion control board card and is used for controlling the positive and negative directions of the XYZ triaxial motor of the electric needle stand 2 to move and feeding back current motion data in real time; the motion control board is connected with the high-precision grating ruler reading head through the D-sub connector 14, and displays real-time motion data of the electric needle seat 2 on an HMI screen, so that an operator can conveniently set the motion position of the electric needle seat 2 and read the motion state of the electric needle seat 2 in real time; one end of the control power supply is connected with the power supply connector, and the other end of the control power supply is respectively connected with the driving controller and the motion control board card to provide the whole power supply for the control system.
The electric needle seat control system provided by the utility model expands the application range of the electric needle seat, can meet the test requirements of more scenes, realizes the miniaturization and integration of the electric needle seat control, is simple and convenient to operate, and reduces the research and development and production costs of enterprises.
The foregoing description of the preferred embodiments of the utility model is not intended to be limiting, but rather is intended to cover all modifications, equivalents, and alternatives falling within the spirit and principles of the utility model.
Claims (10)
1. The electric needle seat control system comprises an electric needle seat (2), wherein the electric needle seat (2) comprises a triaxial motor, an X-direction motor sliding table (21), a Y-direction motor sliding table (22) and a Z-direction motor sliding table (23) which are respectively connected with the triaxial motor, and the electric needle seat control system is characterized by also comprising a control box body (1), wherein the control box body (1) is provided with an accommodating space, and a control board connected with the electric needle seat (2) is fixed in the accommodating space;
The control box body (1) is provided with a plurality of side surfaces, a bottom surface and a top cover, the bottom surface is provided with a rubber support, a first side surface of the plurality of side surfaces is used as a control area, a second side surface is used as a wiring area, and a group of L-shaped mounting sheets (17) are respectively arranged at the boundary between the first side surface and two adjacent side surfaces;
The control area is provided with a display control screen (11) and a power supply control switch (12) which are respectively connected with the control panel; the wiring area is provided with at least one group of wiring terminals (13), at least one group of D-sub connectors (14), signal communication connectors (15) and power connectors (16), the wiring terminals (13) and the D-sub connectors (14) are respectively and correspondingly connected with the X-direction motor sliding table (21), the Y-direction motor sliding table (22) and the Z-direction motor sliding table (23), and the signal communication connectors (15) are connected with the probe table.
2. The electric needle seat control system according to claim 1, characterized in that two ends of the first side face are respectively provided with a U-shaped handrail (18), and the display control screen (11) and the power supply control switch (12) are positioned between the two U-shaped handrails (18); the two U-shaped armrests (18) and the first side face integrally form a U-shaped control area.
3. An electric needle stand control system according to claim 1, characterized in that a buzzer alarm device (19) connected to the control board is also provided on the first side.
4. The electrical hub control system of claim 1, wherein a ventilation fan for dissipating heat is disposed on the third side.
5. The electrical hub control system of claim 1, wherein the signal communication connector (15) is a gigabit RJ45 connector.
6. The electric hub control system according to claim 1, characterized in that the display control screen (11) is an HMI screen.
7. The electrical hub control system of claim 1, further comprising a magnetic hub (24), an L-shaped adapter plate (25), a first adapter plate (26), a second adapter plate (27), and a probe adapter (28); the X-direction motor sliding table (21) and the Y-direction motor sliding table (22) are mutually vertical and are fixed on the magnetic seat (24) along the horizontal direction; the L-shaped adapter plate (25) is inversely arranged above the X-direction motor sliding table (21), a semi-enclosed space is formed below the L-shaped adapter plate (25), the magnetic seat (24) is arranged in the semi-enclosed space, and the Z-direction motor sliding table (23) is arranged on one side, far away from the semi-enclosed space, of the vertical surface of the L-shaped adapter plate (25) along the vertical direction; the first adapter plate (26) is arranged on one side, far away from the L-shaped adapter plate (25), of the Z-direction motor sliding table (23), and the probe adapter (28) is arranged on one side, far away from the Z-direction motor sliding table (23), of the first adapter plate (26) in a sliding manner along the vertical direction through the second adapter plate (27); the X-direction motor sliding table (21), the Y-direction motor sliding table (22) and the Z-direction motor sliding table (23) are provided with high-precision grating ruler reading heads.
8. The electric needle stand control system according to claim 7, wherein the D-sub connector (14) is a wall-through plug type, and one end of the D-sub connector is connected with the high-precision grating ruler reading head; the number of the groups of the D-sub connectors (14) is matched with the number of the electric needle seats (2), and each group of the electric needle seats (2) adopts one group of the D-sub connectors (14) according to XYZ three axes.
9. The electric hub control system according to claim 7, wherein the connection terminals (13) are of a welding-free plug-in type structure, and are of a wall-penetrating type structure, the number of groups of the connection terminals (13) is matched with the number of the electric hubs (2), and each group of the electric hubs (2) adopts one group of connection terminals (13) according to XYZ three axes.
10. The electric hub control system of claim 7, wherein the control board is distributed with a drive controller, a motion control board card and a control power supply; one end of the driving controller is connected with the triaxial motor through the wiring terminal (13), and the other end of the driving controller is connected with the motion control board card;
the motion control board is connected with the high-precision grating ruler reading head through the D-sub connector (14);
One end of the control power supply is connected with the power supply connector, and the other end of the control power supply is respectively connected with the driving controller and the motion control board card.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202322680940.7U CN221039184U (en) | 2023-10-07 | 2023-10-07 | Electric needle seat control system |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202322680940.7U CN221039184U (en) | 2023-10-07 | 2023-10-07 | Electric needle seat control system |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN221039184U true CN221039184U (en) | 2024-05-28 |
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ID=91132109
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202322680940.7U Active CN221039184U (en) | 2023-10-07 | 2023-10-07 | Electric needle seat control system |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN221039184U (en) |
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2023
- 2023-10-07 CN CN202322680940.7U patent/CN221039184U/en active Active
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