CN221016981U

CN221016981U - Gluing nozzle device

Info

Publication number: CN221016981U
Application number: CN202322123769.XU
Authority: CN
Inventors: 温殿金
Original assignee: Shanghai Zhonghong Semiconductor Equipment Co ltd
Current assignee: Shanghai Zhonghong Semiconductor Equipment Co ltd
Priority date: 2023-08-08
Filing date: 2023-08-08
Publication date: 2024-05-28
Anticipated expiration: 2033-08-08

Abstract

The application provides a gluing nozzle device, and relates to the technical field of semiconductor process equipment. The gluing nozzle device comprises a rubber tube and a nozzle which are communicated with each other, the rubber tube is arranged on a clamping piece, the lower part of the clamping piece is provided with an adapter piece, the nozzle is fixed through the adapter piece, the head part of a bead is clamped into the bottom outlet of the rubber tube, the tail part of the bead is clamped into the upper clamping groove of the nozzle, the overall tightness of the gluing nozzle device is improved, adverse phenomena such as water seepage and liquid leakage are avoided, the gluing sealing effect is optimized, and finally the gluing process efficiency is also improved.

Description

Gluing nozzle device

Technical Field

The application relates to the technical field of semiconductor process equipment, in particular to a gluing nozzle device.

Background

In the semiconductor device, the photoresist coating and developing device belongs to an important process device in a production line, and in the photoresist coating and developing process, the photoresist has strong corrosiveness and impurities, so that the process is greatly influenced, and the tightness during the photoresist coating is also very important. The prior gluing nozzle device generally simply adopts a bead-entering head to jack into the joint of a rubber tube and a nozzle, and then is sealed by a sealing ring, so that the sealing performance is not strong enough, and the phenomena of water seepage, liquid leakage and the like can easily occur in the using process.

Disclosure of utility model

In view of this, the embodiments of the present disclosure provide a glue spreading nozzle device, which improves the overall tightness of the glue spreading nozzle device and optimizes the glue spreading sealing effect thereof.

The embodiment of the specification provides the following technical scheme:

The utility model provides a rubber coating nozzle device, including rubber tube and the nozzle that communicates each other, the rubber tube is installed on the holder, the adaptor is installed to the holder lower part, through the adaptor is fixed the nozzle, go into the head card of pearl and go into the bottom export of rubber tube, go into the afterbody card of pearl and advance the upper portion draw-in groove of nozzle.

In some embodiments, the upper clamping groove has a circumferential inner conical surface, the middle of the bead has a circumferential outer conical surface adapted to the circumferential inner conical surface, and the circumferential outer conical surface is in sliding and pressing contact with the circumferential inner conical surface.

In some embodiments, the bottom of the upper clamping groove is further provided with a bottom groove, the tail of the bead has a tail shape matched with the bottom groove, and the tail and the bottom groove are in clamping extrusion contact.

In some embodiments, the contact surface between the bottom plane of the tail of the bead and the bottom groove is a clamping and pressing contact.

In some embodiments, the longitudinal cross-sectional shape of the circumferential inner conical surface is an isosceles trapezoid, and the included angle of the bottom surface of the isosceles trapezoid is 75 ° to 79 °.

In some embodiments, the undercut has a longitudinal cross-sectional shape of a V-groove, the V-groove having an included angle of 25 ° to 29 °.

Compared with the prior art, the beneficial effects that above-mentioned at least one technical scheme that this description embodiment adopted can reach include at least: in the matched structure of the gluing nozzle device, the part sealing matching structure and the sealing matching mode of the gluing nozzle device are improved and upgraded, so that the head part and the tail part of the bead are respectively in extrusion contact with the bottom outlet of the rubber inlet pipe with the adaptive shape and the upper clamping groove on the nozzle, the whole sealing performance of the gluing nozzle device is improved to a large extent, adverse phenomena such as water seepage and liquid leakage are avoided, the gluing sealing effect is optimized, and finally the gluing process efficiency is also improved.

Drawings

In order to more clearly illustrate the technical solutions of the embodiments of the present application, the drawings that are needed in the embodiments will be briefly described below, and it is obvious that the drawings in the following description are only some embodiments of the present application, and that other drawings can be obtained according to these drawings without inventive effort for a person skilled in the art.

Fig. 1 is a schematic structural diagram of a glue spreading nozzle device according to an embodiment of the present application;

Fig. 2 is a schematic structural diagram of a nozzle in the structure of a glue spreading nozzle device according to an embodiment of the present application;

FIG. 3 is a cross-sectional view of a nozzle along section line A-A in a construction of a glue dispensing nozzle device according to an embodiment of the present application;

fig. 4 is a schematic partial structure of a nozzle in the structure of the glue spreading nozzle device according to the embodiment of the present application.

Detailed Description

Embodiments of the present application will be described in detail below with reference to the accompanying drawings.

Other advantages and effects of the present application will become apparent to those skilled in the art from the following disclosure, which describes the embodiments of the present application with reference to specific examples. It will be apparent that the described embodiments are only some, but not all, embodiments of the application. The application may be practiced or carried out in other embodiments that depart from the specific details, and the details of the present description may be modified or varied from the spirit and scope of the present application. It should be noted that the following embodiments and features in the embodiments may be combined with each other without conflict. All other embodiments, which can be made by those skilled in the art based on the embodiments of the application without making any inventive effort, are intended to be within the scope of the application.

It is noted that various aspects of the embodiments are described below within the scope of the following claims. It should be apparent that the aspects described herein may be embodied in a wide variety of forms and that any specific structure and/or function described herein is merely illustrative. Based on the present disclosure, one skilled in the art will appreciate that one aspect described herein may be implemented independently of any other aspect, and that two or more of these aspects may be combined in various ways. For example, apparatus may be implemented and/or methods practiced using any number and aspects set forth herein. In addition, such apparatus may be implemented and/or such methods practiced using other structure and/or functionality in addition to one or more of the aspects set forth herein.

It should also be noted that the illustrations provided in the following embodiments merely illustrate the basic concept of the present application by way of illustration, and only the components related to the present application are shown in the drawings and are not drawn according to the number, shape and size of the components in actual implementation, and the form, number and proportion of the components in actual implementation may be arbitrarily changed, and the layout of the components may be more complicated.

In addition, in the following description, specific details are provided in order to provide a thorough understanding of the examples. However, it will be understood by those skilled in the art that the present invention may be practiced without these specific details.

As shown in fig. 1 to 4, the glue spreading nozzle device provided in the embodiment of the present application includes a glue tube 1 and a nozzle 2 that are communicated with each other, the glue tube is mounted on a clamping member 3, an adapter member 4 is mounted at the lower portion of the clamping member 3, the nozzle 3 (which can be exemplified by the outer wall of the nozzle 3 can be fixed) is fixed by the adapter member 4, the head 51 of the bead 5 is snapped into the bottom outlet of the glue tube 1, and the tail 52 of the bead 5 is snapped into the upper clipping groove 21 of the nozzle 2, so that the head and the tail of the bead 5 can be respectively and uniformly pressed and contacted with the bottom outlet of the glue tube 1 and the upper clipping groove 21 on the nozzle 2 with adaptive shapes, thereby improving the overall sealing performance of the glue spreading nozzle device.

In some embodiments, to further enhance the sealing effect of the assembly of the bead 5 with the hose 1 and the nozzle 2, the upper clamping groove 21 has a circumferential inner conical surface, the middle 53 of the bead 5 has a circumferential outer conical surface that fits with the circumferential inner conical surface, and the mating manner of both the circumferential outer conical surface and the circumferential inner conical surface is a sliding-in press contact manner.

Further preferably, the bottom of the clamping groove 21 at the upper part of the nozzle 2 is further provided with a bottom groove 22, the tail 52 of the bead 5 is provided with a tail shape matched with the bottom groove 22, the tail 52 and the bottom groove 22 are in clamping and extrusion contact, the arrangement of the matching structure enables the tightness of extrusion seal to be better, and the sealing effect is further optimized. Illustratively, the contact surface of the bottom plane of the tail 52 of the beads 5 with the bottom groove 22 is a snap-in press contact.

In some embodiments, the outer wall of the nozzle 2 is further provided with external threads 23 which fit with internal threads (not shown) on the adapter 4, so as to be screwed into the adapter 4, achieving good structural stability.

In some embodiments, the longitudinal section shape of the circumferential inner conical surface of the upper clamping groove 21 is an isosceles trapezoid with a wide upper part and a narrow lower part, and the included angle of the bottom surface of the isosceles trapezoid can be set to 75 ° to 79 °, so that a more excellent matching sealing effect can be achieved.

In some embodiments, also for better tightness, the longitudinal cross-section of the bottom groove 22 of the nozzle 2 is a V-groove, the included angle of which may be set between 25 ° and 29 °.

In some embodiments, the isosceles trapezoid may have a base side length of 6.7mm and a top side length of 5.3mm. It should be noted that the dimensional or angular settings herein are merely exemplary, and any other possible settings may be made without departing from the inventive concept.

In this specification, identical and similar parts of the embodiments are referred to each other, and each embodiment focuses on the differences from the other embodiments. Meanwhile, the specification uses specific words to describe the embodiments of the specification. Reference to "one embodiment," "an embodiment," and/or "some embodiments" means that a particular feature, structure, or characteristic is associated with at least one embodiment of the present description. Thus, it should be emphasized and should be appreciated that two or more references to "an embodiment" or "one embodiment" or "an alternative embodiment" in various positions in this specification are not necessarily referring to the same embodiment. Furthermore, certain features, structures, or characteristics of one or more embodiments of the present description may be combined as suitable.

Furthermore, the order in which the elements and sequences are processed, the use of numerical letters, or other designations in the description are not intended to limit the order in which the processes and methods of the description are performed unless explicitly recited in the claims. While certain presently useful inventive embodiments have been discussed in the foregoing disclosure, by way of various examples, it is to be understood that such details are merely illustrative and that the appended claims are not limited to the disclosed embodiments, but, on the contrary, are intended to cover all modifications and equivalent arrangements included within the spirit and scope of the embodiments of the present disclosure. For example, while the system components described above may be implemented by hardware devices, they may also be implemented solely by software solutions, such as installing the described system on an existing processing device or mobile device.

While the basic concepts have been described above, it will be apparent to those skilled in the art that the foregoing detailed disclosure is by way of example only and is not intended to be limiting. Although not explicitly described herein, various modifications, improvements, and adaptations to the present disclosure may occur to one skilled in the art. Such modifications, improvements, and modifications are intended to be suggested within this specification, and therefore, such modifications, improvements, and modifications are intended to be included within the spirit and scope of the exemplary embodiments of the present invention.

Claims

1. The utility model provides a rubber coating nozzle device, its characterized in that includes rubber tube and the nozzle that communicates each other, and the rubber tube is installed on the holder, the adaptor is installed to the holder lower part, through the adaptor is fixed the nozzle, go into the head card of pearl and go into the bottom export of rubber tube, go into the afterbody card of pearl and advance the upper portion draw-in groove of nozzle.

2. The glue nozzle device of claim 1, wherein the upper clamping groove has a circumferential inner conical surface, the middle of the bead has a circumferential outer conical surface adapted to the circumferential inner conical surface, and the circumferential outer conical surface is in sliding-in pressing contact with the circumferential inner conical surface.

3. The glue spreading nozzle device of claim 2, wherein the bottom of the upper clamping groove is further provided with a bottom groove, the tail of the bead has a tail shape adapted to the bottom groove, and the tail is in clamping and pressing contact with the bottom groove.

4. A glue nozzle device according to claim 3, wherein the contact surface of the bottom surface of the tail of the bead with the bottom groove is a snap-in squeeze contact.

5. A glue nozzle device according to any one of claims 2 to 4, wherein the longitudinal cross-sectional shape of the circumferential internal conical surface is an isosceles trapezoid, the base of which has an included angle of 75 ° to 79 °.

6. A glue nozzle device according to any of claims 3 or 4, wherein the longitudinal cross-sectional shape of the undercut groove is a V-groove, the included angle of the V-groove being 25 ° to 29 °.