CN220990345U - Purification device of electronic-grade tetramethyl ammonium hydroxide - Google Patents

Abstract

The utility model discloses a purifying device of electronic-grade tetramethylammonium hydroxide, which comprises a box body, a heating plate and an electrolysis rod, wherein the heating plate is arranged in the box body, the electrolysis rod is connected in the box body, a cation exchange membrane is arranged in the box body, an anion exchange membrane is arranged in the box body, the upper end of the box body is connected with a cover plate, the upper end of a charging port is connected with a sealing cover, the outer side of a stirring shaft is connected with a stirring rod, the lower end of the cover plate is connected with a sealing gasket, the lower end of the cover plate is connected with an insertion rod, and the box body is connected with a spring. This purification device of electronic grade tetramethyl ammonium hydroxide is provided with the (mixing) shaft, heats inside solution through the hot plate, later makes (mixing) shaft and puddler rotate through driving motor to make the solution of device inside flow, thereby make its heating more efficient, later can improve the purification efficiency to tetramethyl ammonium hydroxide, make it use conveniently.

Description

Purification device of electronic-grade tetramethyl ammonium hydroxide

Technical Field

The utility model relates to the technical field of tetramethyl ammonium hydroxide purification, in particular to a purification device of electronic-grade tetramethyl ammonium hydroxide.

Background

Tetramethyl ammonium hydroxide is an important basic key material in the electronic industry, and is an important supporting material in the electronic industry such as a semiconductor material, a novel panel, a high-efficiency lighting material, a high-performance packaging material, a large-size silicon epitaxial material, an intelligent LCD material, a chip, an integrated circuit and the like, and a purification device is required for purifying the electronic-grade tetramethyl ammonium hydroxide in the production process, so that the electronic-grade tetramethyl ammonium hydroxide is convenient to use.

But the purification device of electronic grade tetramethyl ammonium hydroxide is inconvenient to clear up its inside, and its inside is sealed, leads to opening the device inconvenient enough, and then its inside residual material influences its use next time, and its reaction efficiency is lower moreover, and it generally heats the solution, but the heating process is from outside to inside heating slowly to heating efficiency is lower, inconvenient use.

We have therefore proposed a purification device for electronic grade tetramethylammonium hydroxide in order to solve the problems set forth above.

Disclosure of utility model

The utility model aims to provide a purification device of electronic-grade tetramethylammonium hydroxide, which aims to solve the problems that the purification device of electronic-grade tetramethylammonium hydroxide is inconvenient to clean the inside of the purification device, the inside of the purification device is sealed, so that the purification device is inconvenient to open, the residual materials in the purification device further influence the next use of the purification device, the reaction efficiency of the purification device is low, the purification device generally heats a solution, but the heating process is gradually from outside to inside, so that the heating efficiency is low, and the purification device is inconvenient to use.

In order to achieve the above purpose, the present utility model provides the following technical solutions: the utility model provides a purification device of electronic grade tetramethyl ammonium hydroxide, includes box, hot plate and electrolytic rod, box internally mounted has the hot plate, box internally mounted has the electrolytic rod, box internally mounted has the cation exchange membrane, box internally mounted has the anion exchange membrane, box upper end is connected with the apron, and apron upper end installs driving motor, driving motor lower extreme is connected with the (mixing) shaft, the apron upper end is connected with the charge door, the charge door upper end is connected with sealed lid, the (mixing) shaft outside is connected with the puddler, the apron lower extreme is connected with sealed pad, the apron lower extreme is connected with the inserted bar, be connected with the spring on the box.

Preferably, the cover plate is fixedly connected with the insertion rod, the insertion rod is in contact connection with the box body, and the insertion rod forms a moving structure on the box body.

Preferably, the stirring shaft is fixedly connected with the stirring rod, the stirring rod forms a rotary structure in the box body, and the stirring shaft is arranged in the middle of the box body.

Preferably, the sealing gasket and the cover plate are connected in a cementing manner, the cover plate is connected with the cover plate through the sealing gasket, and the shape of the sealing gasket is the same as the shape of the section of the inner wall of the box body.

Preferably, the box body is connected with a movable rod.

Preferably, the connection mode of the movable rod and the box body is movable connection, the movable rod forms a movable structure on the box body, and the connection mode of the movable rod and the insertion rod is contact connection.

Compared with the prior art, the utility model has the beneficial effects that: the purifying device of the electronic grade tetramethyl ammonium hydroxide;

(1) Be provided with the (mixing) shaft, heat inside solution through the hot plate, then make (mixing) shaft and puddler rotate through driving motor to make the solution of device inside flow, thereby make its heating more efficient, afterwards can improve the purification efficiency to tetramethyl ammonium hydroxide, make it use conveniently.

(2) Be provided with the movable rod, through pulling the movable rod to make the movable rod remove the spacing to the inserted bar, make the inserted bar remove on the box, afterwards can conveniently dismantle the apron, thereby conveniently use, make it conveniently clear up the box is inside, avoid its residual material, make it use conveniently.

Drawings

FIG. 1 is a schematic view of the main section structure of the present utility model;

FIG. 2 is a schematic side sectional view of the present utility model;

FIG. 3 is a schematic top view of the present utility model;

Fig. 4 is a schematic diagram of the structure a in fig. 1 according to the present utility model.

In the figure: 1. a case; 2. a heating plate; 3. an electrolytic rod; 4. a cation exchange membrane; 5. an anion exchange membrane; 6. a cover plate; 7. a driving motor; 8. a stirring shaft; 9. a feed inlet; 10. sealing cover; 11. a stirring rod; 12. a sealing gasket; 13. an insertion rod; 14. a spring; 15. and (3) moving the rod.

Detailed Description

The following description of the embodiments of the present utility model will be made clearly and completely with reference to the accompanying drawings, in which it is apparent that the embodiments described are only some embodiments of the present utility model, but not all embodiments. All other embodiments, which can be made by those skilled in the art based on the embodiments of the utility model without making any inventive effort, are intended to be within the scope of the utility model.

Referring to fig. 1-4, the present utility model provides a technical solution: the utility model provides a purification device of electronic grade tetramethyl ammonium hydroxide, which comprises a box body 1, the hot plate 2, electrolytic rod 3, cation exchange membrane 4, anion exchange membrane 5, apron 6, driving motor 7, (mixing) shaft 8, charge door 9, sealed lid 10, puddler 11, sealed 12, insert pole 13, spring 14 and movable rod 15, box 1 internally mounted has hot plate 2, box 1 internally connected has electrolytic rod 3, box 1 internally mounted has cation exchange membrane 4, box 1 internally mounted has anion exchange membrane 5, box 1 upper end is connected with apron 6, and driving motor 7 is installed to apron 6 upper end, driving motor 7 lower extreme is connected with (mixing) shaft 8, apron 6 upper end is connected with charge door 9, charge door 9 upper end is connected with sealed lid 10, the (mixing) shaft 8 outside is connected with puddler 11, apron 6 lower extreme is connected with sealed 12, apron 6 lower extreme is connected with insert pole 13, be connected with spring 14 on the box 1.

The connection mode of apron 6 and inserted bar 13 is fixed connection, and the connection mode of apron 6 and inserted bar 13 makes the apron 6 more firm with the connection of inserted bar 13 to prevent that it from taking place to drop, influence its use, and the connection mode of inserted bar 13 and box 1 is contact connection, and inserted bar 13 constitutes the moving structure on box 1, and the connection mode of inserted bar 13 and box 1 makes inserted bar 13 can insert in the box 1, thereby conveniently installs apron 6 through inserted bar 13, makes it conveniently use.

The connecting mode of (8) stirring shaft and (11) stirring rod is fixed connection, and the connecting mode of (8) stirring shaft and (11) stirring shaft makes the (8) stirring shaft and (11) stirring rod be connected more firm to prevent that it from taking place to drop, influence its use, and stirring rod (11) constitutes revolution mechanic in box (1) inside, and (8) stirring shaft sets up at box (1) intermediate position, conveniently makes (8) stirring shaft and (11) stirring rod rotate through driving motor (7), thereby makes its inside solution flow.

The sealing gasket 12 is glued with the cover plate 6, the sealing gasket 12 is more firmly connected with the cover plate 6 by the aid of the sealing gasket 12 and the cover plate 6, so that the sealing gasket 12 is prevented from falling off, the sealing gasket is convenient to use, the cover plate 6 is connected with the cover plate 6 through the sealing gasket 12, the shape of the sealing gasket 12 is identical to the shape of the section of the inner wall of the box body 1, and the sealing gasket 12 is convenient to enable the joint of the box body 1 and the cover plate 6 to be more sealed, so that the sealing gasket is convenient to use.

The case 1 is connected with a moving rod 15.

The movable rod 15 is movably connected with the box body 1, the movable rod 15 can move on the box body 1 by the aid of the movable rod 15 and the box body 1, so that the movable rod is convenient to use, the movable rod 15 forms a movable structure on the box body 1, the movable rod 15 is in contact connection with the inserting rod 13, the movable rod 15 can be conveniently inserted into the inserting rod 13 by the aid of the movable rod 15 and the inserting rod 13, and the inserting rod 13 is conveniently limited by the aid of the movable rod 15, so that the cover plate 6 is convenient to install.

Working principle: when the electronic-grade tetramethylammonium hydroxide purifying device is used, firstly, the integrity of the device is checked, the device is transported to a corresponding working position, then the device is used, conductive medium is added to the left side of an anion exchange membrane 5, ionized water is added to a cation exchange membrane 4, a solution is added in the middle of the anion exchange membrane, then the solution is electrified, anions in the solution enter the left side of the anion exchange membrane 5 through the anion exchange membrane 5, cations are the same, thereby purifying tetramethylammonium hydroxide, facilitating the use of the tetramethylammonium hydroxide, heating the tetramethylammonium hydroxide through a heating plate 2, and a stirring shaft 8 and a stirring rod 11 are rotated through a driving motor 7, so that the purifying efficiency of the tetramethylammonium hydroxide can be improved.

When need clear up its inside, accessible pulling movable rod 15 makes movable rod 15 remove the spacing to insert pole 13 to conveniently dismantle apron 6, make it conveniently clear up the inside of box 1, avoid its inside material that remains, influence its next time use, and the content that does not describe in detail in this specification, such as driving motor 7 etc. all belong to the prior art that the expert in this field knows.

Although the present utility model has been described with reference to the foregoing embodiments, it will be apparent to those skilled in the art that modifications may be made to the embodiments described, or equivalents may be substituted for elements thereof, and any modifications, equivalents, improvements and changes may be made without departing from the spirit and principles of the present utility model.

Claims (6)

1. The utility model provides a purification device of electronic grade tetramethyl ammonium hydroxide, includes box (1), hot plate (2) and electrolytic rod (3), its characterized in that: the utility model provides a box, box (1) internally mounted has hot plate (2), box (1) internally connected has electrolysis stick (3), box (1) internally mounted has cation exchange membrane (4), box (1) internally mounted has anion exchange membrane (5), box (1) upper end is connected with apron (6), and apron (6) upper end installs driving motor (7), driving motor (7) lower extreme is connected with (mixing) shaft (8), apron (6) upper end is connected with charge door (9), charge door (9) upper end is connected with sealed lid (10), (mixing) shaft (8) outside is connected with puddler (11), apron (6) lower extreme is connected with sealed pad (12), apron (6) lower extreme is connected with insert pole (13), be connected with spring (14) on box (1).

2. The purification apparatus for electronic grade tetramethylammonium hydroxide according to claim 1 wherein: the cover plate (6) is fixedly connected with the insertion rod (13), the insertion rod (13) is in contact connection with the box body (1), and the insertion rod (13) forms a moving structure on the box body (1).

3. The purification apparatus for electronic grade tetramethylammonium hydroxide according to claim 1 wherein: the stirring shaft (8) is fixedly connected with the stirring rod (11), the stirring rod (11) forms a rotating structure inside the box body (1), and the stirring shaft (8) is arranged at the middle position of the box body (1).

4. The purification apparatus for electronic grade tetramethylammonium hydroxide according to claim 1 wherein: the sealing gasket (12) is glued with the cover plate (6), the cover plate (6) is connected with the cover plate (6) through the sealing gasket (12), and the shape of the sealing gasket (12) is the same as the shape of the section of the inner wall of the box body (1).

5. The purification apparatus for electronic grade tetramethylammonium hydroxide according to claim 1 wherein: the box body (1) is connected with a movable rod (15).

6. The purification apparatus for electronic grade tetramethylammonium hydroxide as recited in claim 5 wherein: the movable rod (15) is movably connected with the box body (1), the movable rod (15) forms a movable structure on the box body (1), and the movable rod (15) is in contact connection with the insertion rod (13).