CN220972396U - Damping structure and wafer finger and robot with same - Google Patents
Damping structure and wafer finger and robot with same Download PDFInfo
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- CN220972396U CN220972396U CN202322588058.XU CN202322588058U CN220972396U CN 220972396 U CN220972396 U CN 220972396U CN 202322588058 U CN202322588058 U CN 202322588058U CN 220972396 U CN220972396 U CN 220972396U
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- 238000013016 damping Methods 0.000 title claims abstract description 46
- 230000035939 shock Effects 0.000 claims abstract description 69
- 239000012636 effector Substances 0.000 claims abstract description 17
- 229920000742 Cotton Polymers 0.000 claims description 15
- 230000007246 mechanism Effects 0.000 claims description 8
- 230000008859 change Effects 0.000 abstract description 4
- 238000010521 absorption reaction Methods 0.000 abstract 3
- 230000005540 biological transmission Effects 0.000 abstract 1
- 238000012546 transfer Methods 0.000 description 5
- 230000001133 acceleration Effects 0.000 description 4
- 238000000034 method Methods 0.000 description 3
- 230000008569 process Effects 0.000 description 3
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 230000010355 oscillation Effects 0.000 description 2
- 238000004891 communication Methods 0.000 description 1
- 230000008602 contraction Effects 0.000 description 1
- 230000001419 dependent effect Effects 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000008034 disappearance Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000005484 gravity Effects 0.000 description 1
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- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Abstract
The utility model provides a shock absorption structure, a wafer finger with the shock absorption structure and a robot, wherein the shock absorption structure is arranged at the tail end of a manipulator end effector and comprises the following components: bottom plate, apron, damper, be equipped with first and second bradyseism groove on bottom plate and the apron respectively to define the shock attenuation chamber through first and second bradyseism groove when bottom plate and apron combine together, damper accomodates in the shock attenuation intracavity, wherein damper includes: the vibration piece vibrates in the damping cavity through the elastic piece, so that the problem of wafer position change caused by cantilever vibration during wafer transmission is solved.
Description
Technical Field
The utility model relates to a damping technology, in particular to a damping structure, a wafer finger with the damping structure and a robot.
Background
At present, the acceleration and deceleration process exists all the time in the wafer transfer process of the manipulator, so that the generated cantilever vibration is unavoidable. The conventional operation is to optimize the acceleration/deceleration curve and control the acceleration/deceleration time to improve the vibration condition of the end effector.
Generally, the end wafer of the atmospheric manipulator is clamped or vacuum adsorbed, so that the position of the wafer cannot be changed in the process of vibration and gradual disappearance. Therefore, only the sheet conveying precision of the manipulator needs to be considered. However, the vacuum robot is completely dependent on passive friction force for holding the wafer, and the wafer is subjected to vibration to cause position movement in addition to the accuracy of wafer transfer.
In view of the foregoing, there is a need in the art for a damping scheme to improve the vibration generated by the robot end effector during motion to optimize the wafer position variation caused by such vibration.
Disclosure of utility model
Therefore, the main objective of the present utility model is to provide a shock absorbing structure, a wafer finger and a robot with the shock absorbing structure, so as to improve the problem of wafer position variation caused by cantilever vibration during wafer transfer.
In order to achieve the above object, according to one aspect of the present utility model, there is provided a shock absorbing structure provided at a tail end of a robot end effector, comprising: bottom plate, apron, damper, the bottom plate is equipped with first bradyseism groove to define the shock attenuation chamber when bottom plate and apron meet, damper accomodates in the shock attenuation intracavity, wherein damper includes: the vibration piece vibrates in the damping cavity through the elastic piece.
Preferably, the elastic piece is a spring, the spring is arranged at two ends of the oscillating piece, and the oscillating piece oscillates in the damping cavity through the spring.
Preferably, the shock absorbing structure further comprises: the guide rail is arranged in the first cushioning groove, and the oscillating piece is provided with a sliding groove for being matched with the guide rail to form a guide rail sliding block mechanism.
Preferably, the shock absorbing structure further comprises: the guide rails are arranged in the first cushioning grooves at intervals in pairs, guide grooves are further formed in the first cushioning grooves at intervals of the guide rails for accommodating the elastic pieces, and sliding grooves are formed in the oscillating pieces for being matched with the guide rails to form a guide rail sliding block mechanism.
Preferably, the damping component comprises a plurality of oscillating pieces, wherein the plurality of oscillating pieces are connected in series through the elastic piece to form a group.
Preferably, the elastic piece is damping cotton, and damping cotton is filled between the vibration piece and the wall of the damping cavity so as to allow the vibration piece to vibrate in the damping cavity under the wrapping of the damping cotton.
Preferably, the vibration absorbing component comprises a plurality of vibration pieces, wherein the vibration pieces are separated by vibration absorbing cotton.
Preferably, the shock absorbing structure further comprises: the guide rail is arranged in the first cushioning groove, and the oscillating piece is provided with a sliding groove for being matched with the guide rail to form a guide rail sliding block mechanism.
In order to achieve the above object, according to another aspect of the present utility model, there is further provided a wafer finger, wherein the tail end of the wafer finger adopts the above shock absorbing structure.
In order to achieve the above object, there is also provided a robot according to another aspect of the present utility model, which includes: a body and an arm, wherein an end effector of the arm employs a wafer finger as described above.
According to the damping structure, the wafer finger and the robot with the damping structure, the damping cavity is skillfully formed in the tail end of the end effector, so that the damping assembly is stored to absorb vibration generated when the manipulator moves at a high speed and is dissipated in an oscillating mode, and therefore the vibration phenomenon generated when the manipulator end effector moves can be relieved in a narrow and compact space to a certain extent, and the problem of wafer position change caused by the vibration is solved.
Drawings
The accompanying drawings, which are included to provide a further understanding of the utility model and are incorporated in and constitute a part of this specification, illustrate embodiments of the utility model and together with the description serve to explain the utility model. In the drawings:
FIG. 1 is an exploded view of a shock absorbing structure on a wafer finger according to a first embodiment of the present utility model;
FIG. 2 is a schematic view of a damping structure on a wafer finger according to a second embodiment of the present utility model, wherein a cover plate is a perspective view;
FIG. 3 is an exploded view of a shock absorbing structure on a wafer finger according to a second embodiment of the present utility model;
FIG. 4 is an enlarged schematic view of a first shock absorbing groove and a guide rail in a shock absorbing structure on a wafer finger, and a partial enlarged view of the guide rail structure in accordance with a second embodiment of the present utility model;
FIG. 5 is a schematic diagram of a vibration member in a damping structure on a wafer finger according to a second embodiment of the present utility model;
FIG. 6 is an enlarged schematic view of a shock absorbing assembly of a shock absorbing structure on a wafer finger in accordance with a second embodiment of the present utility model disposed in an oscillation cavity having a guide rail and a guide slot;
Fig. 7 is a schematic view of the robot structure according to the present utility model.
Description of the reference numerals
The device comprises a bottom plate 1, a cover plate 2, a damping component 3, an end effector 4, a main body 8, an arm 9, a first damping groove 11, a guide groove 12, an elastic piece 31, a vibration piece 32, a guide rail 33 and a sliding groove 321.
Detailed Description
For the purpose of making the objects, technical solutions and advantages of the embodiments of the present utility model more apparent, the technical solutions of the embodiments of the present utility model will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present utility model, and it is apparent that the described embodiments are some embodiments of the present utility model, but not all embodiments of the present utility model. The components of the embodiments of the present utility model generally described and illustrated in the figures herein may be arranged and designed in a wide variety of different configurations.
Thus, the following detailed description of the embodiments of the utility model, as presented in the figures, is not intended to limit the scope of the utility model, as claimed, but is merely representative of selected embodiments of the utility model. All other embodiments, which can be made by those skilled in the art based on the embodiments of the utility model without making any inventive effort, are intended to be within the scope of the utility model.
It should be noted that: like reference numerals and letters denote like items in the following figures, and thus once an item is defined in one figure, no further definition or explanation thereof is necessary in the following figures.
In the description of the present utility model, it should be noted that, directions or positional relationships indicated by terms such as "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc., are directions or positional relationships based on those shown in the drawings, or are directions or positional relationships conventionally put in use of the inventive product, are merely for convenience of describing the present utility model and simplifying the description, and are not indicative or implying that the apparatus or element to be referred to must have a specific direction, be constructed and operated in a specific direction, and thus should not be construed as limiting the present utility model. Furthermore, the terms "first," "second," "third," and the like are used merely to distinguish between descriptions and should not be construed as indicating or implying relative importance. While the terms "comprising" and "having," and any variations thereof, are intended to cover a non-exclusive inclusion.
Furthermore, the terms "horizontal," "vertical," "overhang," and the like do not denote a requirement that the component be absolutely horizontal or overhang, but rather may be slightly inclined. As "horizontal" merely means that its direction is more horizontal than "vertical", and does not mean that the structure must be perfectly horizontal, but may be slightly inclined.
In the description of the present utility model, it should also be noted that, unless explicitly specified and limited otherwise, the terms "disposed," "configured," "mounted," "connected," and "connected" are to be construed broadly, and may be, for example, fixedly connected, detachably connected, or integrally connected; can be mechanically or electrically connected; can be directly connected or indirectly connected through an intermediate medium, and can be communication between two elements. The specific meaning of the above terms in the present utility model can be understood by those of ordinary skill in the art in view of the specific circumstances in combination with the prior art. Furthermore, embodiments of the utility model and features of the embodiments may be combined with each other without conflict. And one or more of the illustrated components may be necessary or optional, and the relative positional relationship between the various components illustrated above may be adjusted as desired.
In order to solve the problem of wafer position change caused by cantilever vibration during wafer transfer, as shown in fig. 1, the present utility model provides a shock absorbing structure, which is disposed at the tail end of a manipulator end effector 4, comprising: bottom plate 1, apron 2, damper 3, be equipped with first bradyseism groove 11, second bradyseism groove on bottom plate 1 and the apron 2 respectively to define out the shock attenuation chamber through first bradyseism groove 11, second bradyseism groove when bottom plate 1 and apron 2 meet, wherein damper 3 accomodates at the shock attenuation intracavity, just damper 3 includes: the vibration piece 32 vibrates in the damping cavity through the elastic piece 31.
Further in an alternative embodiment, the shock absorbing structure comprises: bottom plate 1, apron 2, damper 3, bottom plate 1 is equipped with first bradyseism groove 11 to define the shock attenuation chamber when bottom plate 1 and apron 2 meet, damper 3 accomodates in the shock attenuation intracavity, wherein damper 3 includes: the vibration piece 32 is connected with the damping cavity wall through the elastic piece 31 so as to allow the vibration piece 32 to vibrate in the damping cavity.
It can be seen that the damping cavity can be defined by providing a corresponding damping groove on one or both of the base plate 1 and the cover plate 2 according to the thickness adaptability, and the present example is not limited thereto.
Specifically, in the first preferred embodiment, as shown in fig. 1, the elastic member 31 may be exemplified as a spring, which is disposed at two ends of the oscillating member 32, where the spring may abut against the wall surface of the shock absorbing cavity, or may be connected to the wall surface of the shock absorbing cavity, so that when the end effector 4 of the manipulator moves to generate acceleration during wafer transfer, the spring may be compressed in a proper manner, so that the spring is stressed to deform, and the oscillating member 32 may also move along with it, and after a certain distance of movement, the spring may be pulled back and forth and the gravity of the spring may be applied to oscillate in the shock absorbing cavity, so that the shock absorbing assembly 3 may absorb or even counteract the shock caused by the movement of the end effector 4 at this time.
Furthermore, in the second preferred embodiment, as shown in fig. 2 to 6, in order to better guide the oscillation direction of the oscillating piece 32, the impact on the wall of the shock absorbing cavity is avoided, wherein the shock absorbing structure further comprises: the guide rail 33 is disposed in the first cushioning groove 11, and the oscillating member 32 is provided with a sliding groove 321 for being matched with the guide rail 33 to form a sliding block mechanism of the guide rail 33. With this arrangement, when the elastic member 31 pulls the oscillating member 32 to oscillate, it will move along the guide rail 33, and will not collide with the wall of the shock absorbing cavity any more, so as to improve the reliability of the shock absorbing structure.
Further, as shown in fig. 4, in another preferred embodiment, in order to better improve the guiding reliability and control the torsion of the elastic member 31, the guide rails 33 may be arranged in the first shock absorbing groove 11 in pairs at intervals, and the first shock absorbing groove 11 is further provided with guide grooves 12 at intervals of the guide rails 33, so that the spring is accommodated by the design of the clearance between the guide rails 33 and the guide grooves 12, thereby limiting the spring to keep a substantially linear elastic expansion and contraction in the space without knotting due to torsion, and in addition, the oscillating member 32 is provided with a sliding groove 321 for being matched with the guide rails 33 to form a sliding block mechanism of the guide rails 33, and by this arrangement, the moving direction of the elastic member 31 and the oscillating member 32 can be controlled to ensure the reliability and stability of the shock absorbing structure.
In addition, in a preferred embodiment, in order to improve the damping effect, the damping assembly 3 may include a plurality of oscillating members 32 as shown in fig. 3 and 6, where the plurality of oscillating members 32 are connected in series via the elastic member 31 and are disposed together in the damping cavity, so as to improve the damping capability.
On the other hand, in the third preferred embodiment, the elastic member 31 may be configured as damping cotton (not shown in the drawings), and damping cotton is filled between the oscillating member 32 and the wall of the damping cavity, so as to allow the oscillating member 32 to oscillate in the damping cavity under the wrapping of the damping cotton, on the one hand, a part of the vibration force can be absorbed through the damping cotton, and meanwhile, the damping cotton itself also has elasticity, and can also drive the elastic member 31 to oscillate between the damping cotton, so that the damping assembly 3 can absorb and even offset the vibration caused by the motion of the end effector 4 at this time.
Further, in a preferred example, the shock absorbing assembly 3 includes a plurality of shock absorbing members 32, where the shock absorbing members 32 are disposed in the shock absorbing cavity together with a shock absorbing cotton gap therebetween, so as to enhance shock absorbing capability.
On the other hand, as shown in fig. 1 and 2, the present utility model further provides a wafer finger, wherein the tail end of the wafer finger adopts any one of the above shock absorbing structures.
On the other hand, as shown in fig. 7, the present utility model further provides a robot corresponding to the above shock absorbing structure and wafer finger, which includes: a body 8 and an arm 9, wherein the end effector 4 of the arm employs a wafer finger as described above.
In summary, through the damping structure, the wafer finger and the robot with the damping structure provided by the utility model, the damping cavity is skillfully arranged at the tail end of the end effector 4 so as to accommodate the damping component 3 to absorb the vibration generated when the manipulator moves at a high speed and dissipate the vibration in a vibration mode, so that the vibration phenomenon generated when the manipulator end effector 4 moves can be relieved to a certain extent in a narrow and compact space, and the problem of wafer position change caused by the vibration is solved.
The preferred embodiments of the utility model disclosed above are intended only to assist in the explanation of the utility model. The preferred embodiments are not exhaustive or to limit the utility model to the precise form disclosed. Obviously, many modifications and variations are possible in light of the above teaching. The embodiments were chosen and described in order to best explain the principles of the utility model and the practical application, to thereby enable others skilled in the art to best understand and utilize the utility model. The utility model is to be limited only by the following claims and their full scope and equivalents, and any modifications, equivalents, improvements, etc., which fall within the spirit and principles of the utility model are intended to be included within the scope of the utility model.
In addition, any combination of various embodiments of the present utility model may be performed, so long as the concept of the embodiments of the present utility model is not violated, and the disclosure of the embodiments of the present utility model should also be considered.
Claims (10)
1. A shock-absorbing structure sets up at the tail end of manipulator end effector, its characterized in that includes: bottom plate, apron, damper, the bottom plate is equipped with first bradyseism groove to define the shock attenuation chamber when bottom plate and apron meet, damper accomodates in the shock attenuation intracavity, wherein damper includes: the vibration piece vibrates in the damping cavity through the elastic piece.
2. The shock absorbing structure of claim 1, wherein the elastic member is a spring, the spring is disposed at two ends of the oscillating member, and the oscillating member oscillates in the shock absorbing cavity through the spring.
3. The shock absorbing structure of claim 2, further comprising: the guide rail is arranged in the first cushioning groove, and the oscillating piece is provided with a sliding groove for being matched with the guide rail to form a guide rail sliding block mechanism.
4. The shock absorbing structure of claim 2, further comprising: the guide rails are arranged in the first cushioning grooves at intervals in pairs, guide grooves are further formed in the first cushioning grooves at intervals of the guide rails for accommodating the elastic pieces, and sliding grooves are formed in the oscillating pieces for being matched with the guide rails to form a guide rail sliding block mechanism.
5. The shock absorbing structure of claim 2, wherein the shock absorbing assembly comprises a plurality of oscillating members, wherein the plurality of oscillating members are connected in series via the elastic member.
6. The shock absorbing structure as defined in claim 1, wherein the elastic member is shock absorbing cotton, and shock absorbing cotton is filled between the shock absorbing member and the wall of the shock absorbing cavity to allow the shock absorbing member to vibrate in the shock absorbing cavity under the wrapping of the shock absorbing cotton.
7. The shock absorbing structure of claim 6, wherein the shock absorbing assembly comprises a plurality of shock absorbing members, wherein each shock absorbing member is spaced apart by a shock absorbing cotton.
8. The shock absorbing structure of claim 6, further comprising: the guide rail is arranged in the first cushioning groove, and the oscillating piece is provided with a sliding groove for being matched with the guide rail to form a guide rail sliding block mechanism.
9. A wafer finger, wherein the tail end of the wafer finger adopts the shock absorbing structure as claimed in any one of claims 1 to 8.
10. A robot, comprising: a body and arm, wherein the end effector of the arm employs a wafer finger as defined in claim 9.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202322588058.XU CN220972396U (en) | 2023-09-22 | 2023-09-22 | Damping structure and wafer finger and robot with same |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202322588058.XU CN220972396U (en) | 2023-09-22 | 2023-09-22 | Damping structure and wafer finger and robot with same |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN220972396U true CN220972396U (en) | 2024-05-17 |
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ID=91036201
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202322588058.XU Active CN220972396U (en) | 2023-09-22 | 2023-09-22 | Damping structure and wafer finger and robot with same |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN220972396U (en) |
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2023
- 2023-09-22 CN CN202322588058.XU patent/CN220972396U/en active Active
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