CN220943736U - Miniature automatic alignment mechanism and micro-jet laser processing equipment - Google Patents

Abstract

The utility model discloses a miniature automatic alignment mechanism and a miniature jet laser processing device, wherein the miniature automatic alignment mechanism comprises a camera module, a driving module and an adjusting mechanism, the camera module comprises a diaphragm arranged in front of a lens, and a reference mark is arranged in the middle of the diaphragm; the driving module comprises a driving unit and a display; the adjusting mechanism comprises a fixed plate, an adjusting unit and a sliding plate; the fixing plate is used for fixing the whole adjusting mechanism; an alignment mark is arranged on the sliding plate; the camera module enables the alignment mark on the sliding plate to present a clear mark image on the display through an automatic focusing technology; the driving unit controls the adjusting unit to automatically adjust the position of the sliding plate based on the imaging position of the marker image so as to enable the marker image to coincide with the center of the field of view of the reference marker, thereby realizing automatic alignment. The miniature automatic alignment mechanism provided by the utility model has the advantages of simple and compact structure, small volume, higher alignment precision and simple and convenient operation.

Description

Miniature automatic alignment mechanism and micro-jet laser processing equipment

Technical Field

The utility model belongs to the technical field of laser processing, and particularly relates to a miniature automatic alignment mechanism and micro-jet laser processing equipment.

Background

The micro-jet laser processing technology is a manufacturing processing technology which is developed rapidly in recent years, and is mainly a compound processing technology for cutting a workpiece to be processed by guiding a laser beam through water jet. The technology is widely used for processing in the semiconductor industry due to the advantages of low heat influence, high efficiency, large working distance, micron-sized processing size and the like. Visual alignment is an important link in the micro-jet laser processing technology, and directly influences processing precision and processing efficiency.

Conventional vision alignment systems typically employ a large X/Y motion stage and rely on lead screws or linear motors to drive the motion stage to achieve vision alignment. It still has some drawbacks. First, because conventional systems typically require a large X/Y motion stage, this results in a large overall system volume, which is disadvantageous for use in some space-constrained scenarios. Second, conventional systems may suffer from poor alignment accuracy, particularly where fine adjustment is required, and accuracy may not be adequate. In addition, conventional systems are relatively complex to operate and adjust, requiring relatively large amounts of manual intervention and adjustment, resulting in inefficiency. In addition, some conventional systems have problems of high cost, especially in the case of high-precision, large-volume equipment, which limits the application of the vision alignment system in some fields.

Thus, a more compact, efficient and accurate solution is needed to overcome these problems.

Disclosure of utility model

In order to solve the problems in the prior art, the utility model provides a miniature automatic alignment mechanism and a micro-jet laser processing device. The technical problems to be solved by the utility model are realized by the following technical scheme:

in a first aspect, the present utility model provides a miniature automatic alignment mechanism comprising a camera module, a drive module, and an adjustment mechanism; wherein,

The camera module comprises a diaphragm arranged in front of the lens, and a reference mark is arranged in the middle of the diaphragm;

the driving module comprises a driving unit and a display;

The adjusting mechanism comprises a fixed plate, an adjusting unit and a sliding plate; the fixed plate is used for fixing the whole adjusting mechanism, the adjusting unit is movably connected with the fixed plate, the sliding plate is movably connected with the adjusting unit, and the sliding plate is in sliding connection with the fixed plate; the slide plate is also provided with an alignment mark;

the camera module enables the alignment mark on the sliding plate to present a clear mark image on the display through an automatic focusing technology;

The driving unit controls the adjusting unit to automatically adjust the position of the sliding plate based on the imaging position of the marker image so as to enable the marker image to coincide with the center of the field of view of the reference marker, thereby realizing automatic alignment.

In one embodiment of the utility model, the diaphragm is screwed with the lens.

In one embodiment of the utility model, the fiducial markers and alignment markers are circular or cross-shaped.

In one embodiment of the utility model, the adjustment unit comprises a first adjustment unit and a second adjustment unit; the first adjusting unit is used for driving the sliding plate to move along a first direction under the control of the driving unit; the second adjusting unit is used for driving the sliding plate to move along a second direction under the control of the driving unit;

Wherein the first direction is perpendicular to the second direction;

and the first adjusting unit and the second adjusting unit both adopt a gear rack structure.

In one embodiment of the present utility model, the first direction is a left-right direction and the second direction is a front-back direction.

In one embodiment of the utility model, the first adjusting unit specifically comprises a first motor, a first coupler, a long rod gear and a first gear groove arranged on the fixed plate;

The first motor is in sliding connection with the fixed plate and is electrically connected with the driving unit;

Two ends of the first coupler are respectively connected with the first motor and one end of the long rod gear through shafts;

The other end of the long rod gear is in a gear structure so as to be meshed with the first gear groove;

When the driving unit controls the first motor to rotate, the fixed plate is fixed, the first coupler drives the long rod gear to move along the first gear groove, and then the sliding plate is driven to move left and right.

In one embodiment of the utility model, the second adjusting unit comprises a second motor, a second coupler, a driving gear, a driven gear and a second gear groove arranged on the slide plate;

The second motor is in sliding connection with the fixed plate and is electrically connected with the driving unit;

Two ends of the second coupler are respectively connected with the second motor and the driving gear shaft;

The driven gear is sleeved on the shaft of the long rod gear, and the driven gear and the long rod gear can rotate relatively and independently;

the upper end of the driven gear is meshed with the driving gear, and the lower end of the driven gear is meshed with the second gear groove;

When the driving unit controls the second motor to rotate, the fixed plate is fixed, the second coupler drives the driving gear to rotate and drives the driven gear, and then the sliding plate is driven to move back and forth along the direction of the second gear groove.

In one embodiment of the utility model, the first motor and the second motor are connected to the fixed plate by a guide rail, and the direction of the guide rail is the same as the direction of the first gear groove.

In one embodiment of the utility model, an upper angular contact bearing and a lower angular contact bearing are arranged between the long rod gear and the driven gear; wherein, the arc surface of the outer ring of the angular contact bearing at the lower part faces downwards, and the arc surface of the outer ring of the angular contact bearing at the upper part faces upwards; a bushing is also arranged between the two angular contact bearings;

When a compression nut sleeved on the long rod gear is locked, an upper angular contact bearing inner ring, a bushing and a lower angular contact bearing inner ring are sequentially compressed on a step shaft shoulder of the long rod gear, so that the inner rings of the two angular contact bearings are connected and fastened with the long rod gear to form a whole, and therefore, when the first motor locks the long rod gear through a first coupler and drives the long rod gear to rotate, the driven gear cannot rotate;

Meanwhile, the outer rings of the two angular contact bearings are also connected with the driven gear into a whole by virtue of the pressing force of the bearing steel balls, so that when the second motor locks the driving gear through the second coupler and drives the driven gear to rotate, the long rod gear cannot rotate.

In a second aspect, the present utility model provides a microfluidic laser processing apparatus comprising any one of the micro automatic alignment mechanisms provided in the first aspect of the present utility model.

The utility model has the beneficial effects that:

The miniature automatic alignment mechanism provided by the utility model enables the system to present clear images on a display by using an automatic focusing technology and arranging the diaphragm in front of a camera lens, thereby improving the alignment accuracy; meanwhile, the image position is automatically adjusted by using the driving module, so that manual intervention and complex manual adjustment are reduced, and the convenience and efficiency of operation are improved; the structure is simple and compact in design, a large-scale motion platform is not needed, and equipment integration in a scene with limited space is facilitated.

The present utility model will be described in further detail with reference to the accompanying drawings and examples.

Drawings

FIG. 1 is a schematic view of the overall structure of a micro automatic alignment mechanism according to an embodiment of the present utility model;

FIG. 2 is a top view of an adjustment mechanism provided by an embodiment of the present utility model;

FIG. 3 is a front view of an adjustment mechanism provided by an embodiment of the present utility model;

FIG. 4 is a side view of an adjustment mechanism provided by an embodiment of the present utility model;

Reference numerals illustrate:

100-camera module, 101-diaphragm, 102-lens, 103-camera;

200-a driving module;

300-adjusting mechanism, 301-fixing plate, 302-sliding plate, 303-alignment mark, 304-angular contact bearing, 305-bushing, 306-compression nut, 307-guide rail;

310-a first adjusting unit, 311-a first motor, 312-a first coupler, 313-a long bar gear, 314-a first gear groove;

320-second adjusting unit, 321-second motor, 322-second coupling, 323-driving gear, 324-driven gear, 325-second gear groove.

Detailed Description

The following description of the embodiments of the present utility model will be made clearly and completely with reference to the accompanying drawings, in which it is apparent that the embodiments described are only some embodiments of the present utility model, but not all embodiments. All other embodiments, which can be made by those skilled in the art based on the embodiments of the utility model without making any inventive effort, are intended to be within the scope of the utility model.

Example 1

Referring to fig. 1 to fig. 4 in combination, fig. 1 is a schematic overall structure of a micro automatic alignment mechanism according to an embodiment of the present utility model, fig. 2 is a top view of an adjustment mechanism according to an embodiment of the present utility model, fig. 3 is a front view of an adjustment mechanism according to an embodiment of the present utility model, and fig. 4 is a side view of an adjustment mechanism according to an embodiment of the present utility model. The micro automatic alignment mechanism provided in the present embodiment includes a camera module 100, a driving module 200, and an adjusting mechanism 300; wherein,

The camera module 100 comprises a diaphragm 101 arranged in front of a lens 102, and a reference mark is arranged in the middle of the diaphragm 101;

the driving module 200 includes a driving unit and a display;

The adjusting mechanism 300 includes a fixed plate 301, an adjusting unit, and a slide plate 302; the fixing plate 301 is used for fixing the whole adjusting mechanism 300, the adjusting unit is movably connected with the fixing plate 301, the sliding plate 302 is movably connected with the adjusting unit, and the sliding plate 302 is slidably connected with the fixing plate 301; the slide plate 302 is also provided with an alignment mark 303;

The camera module 100 causes the alignment marks 303 on the sled 302 to present a clear mark image on the display by an auto-focus technique;

the drive unit controls the adjustment unit to automatically adjust the position of the sled 302 based on the imaging position of the marker image so that the marker image coincides with the center of the field of view of the fiducial marker, thereby achieving automatic alignment.

Specifically, please continue to refer to fig. 1, wherein the camera module 100 includes a diaphragm 101, a lens 102, and a camera 103, the camera 103 is screwed to the lens 102, and the diaphragm 101 is screwed to the lens 102.

Alternatively, as an implementation, the reference marks on the diaphragm 101 and the alignment marks 303 on the sled 302 may be circular or cross-shaped.

Preferably, in this embodiment, a series of concentric circles a are provided in the center of the diaphragm 101 as reference marks, and correspondingly, a small hole is provided in the slide plate 302 as an alignment mark 303. The aperture 101 provided with the reference mark is placed in front of the lens 102, the camera 103 finds the aperture on the slide plate 302 through a large viewing angle, and then the lens 102 is adjusted to focus the enlarged aperture using an auto-focus technique so that it appears as a clearly small circle b on the display. In general, the small circle b at this time is not coaxial with the small circle a on the diaphragm 101, and adjustment is required to achieve automatic alignment.

Further, the driving module 200 includes a data processor, a driving unit, a display, etc.; the data processor is used for generating a driving instruction according to the imaging position on the display of the marked image, sending the driving instruction to the driving unit, and driving the adjusting unit to realize automatic alignment after the driving unit receives the instruction.

By using an automatic focusing technology and arranging a diaphragm in front of a camera lens, the system can present a clear image on a display, and based on the image position, automatic alignment is realized by using a driving unit, so that alignment accuracy is improved.

Further, referring to fig. 2 to 4, the adjusting mechanism 300 provided in this embodiment specifically includes a fixing plate 301 for fixing the whole device, a sliding plate 302 that can be used as a workbench or for placing the workbench, and two adjusting units, namely a first adjusting unit 310 and a second adjusting unit 320; the first adjusting unit 310 is configured to drive the sliding plate 302 to move along a first direction under the control of the driving unit; the second adjusting unit 320 is configured to drive the sliding plate 302 to move along the second direction under the control of the driving unit; wherein the first direction is perpendicular to the second direction.

Alternatively, as shown in fig. 2 and 3, in the present embodiment, the first direction is a horizontal direction, and the second direction is a front-rear direction.

Further, in the present embodiment, the first adjusting unit 310 and the second adjusting unit 320 may be implemented with a rack-and-pinion structure.

Specifically, please continue to refer to fig. 2 to 4, wherein the first adjusting unit 310 specifically includes a first motor 311, a first coupling 312, a long bar gear 313, and a first gear groove 314 provided on the fixed plate 301;

The first motor 311 is slidably connected with the fixed plate 301, and the first motor 311 is electrically connected with the driving unit;

two ends of the first coupler 312 are respectively connected with one ends of the first motor 311 and the long rod gear 313;

The other end of the long bar gear 313 has a gear structure to be engaged with the first gear groove 314;

When the driving unit controls the first motor 311 to rotate, the fixed plate 301 is fixed, and the first coupling 312 drives the long bar gear 313 to move left and right along the first gear slot 314 as shown in fig. 2, so as to drive the sliding plate 302 to move left and right.

Accordingly, the second adjusting unit 320 includes a second motor 321, a second coupling 322, a driving gear 323, a driven gear 324, and a second gear groove 325 provided on the slide plate 302;

the second motor 321 is slidably connected with the fixing plate 301, and the second motor 321 is electrically connected with the driving unit;

Both ends of the second coupling 322 are respectively connected with the second motor 321 and the driving gear 323 in a shaft manner;

The driven gear 324 is sleeved on the shaft of the long rod gear 313, and the driven gear 324 and the long rod gear 313 can rotate relatively and independently;

the driven gear 324 has an upper end engaged with the driving gear 323 and a lower end engaged with the second gear groove 325;

When the driving unit controls the second motor 321 to rotate, the fixed plate 301 is fixed, and the second coupling 322 drives the driving gear 323 to rotate and drives the driven gear 324, so as to drive the sliding plate 302 to move back and forth along the second gear slot 325 in the direction shown in fig. 2.

The first motor 311 and the second motor 321 are connected to the fixed plate 301 via the guide rail 307 so that the driving gear 323 and the driven gear 324 are always engaged. The direction of the guide rail 307 is the same as the direction of the first gear groove 314, so that when the long bar gear 313 rotates, the two motors are driven to move left and right along the guide rail 307.

Further, an upper angular contact bearing 304 and a lower angular contact bearing 304 are arranged between the long rod gear 313 and the driven gear 324; wherein, the arc surface of the outer ring of the angular contact bearing at the lower part faces downwards, and the arc surface of the outer ring of the angular contact bearing at the upper part faces upwards; a bushing 305 is also arranged between the two angular contact bearings;

When the compression nut 306 sleeved on the long rod gear 313 is locked, the upper inner ring of the angular contact bearing, the bushing 305 and the lower inner ring of the angular contact bearing are sequentially compressed on the step shaft shoulder of the long rod gear 313, so that the inner rings of the two angular contact bearings are connected and fastened with the long rod gear 313 to form a whole, and therefore, when the first motor 311 locks the long rod gear 313 through the first coupler 312 and drives the long rod gear 313 to rotate, the driven gear 324 cannot rotate;

Meanwhile, the outer rings of the two angular contact bearings are also connected with the driven gear 324 into a whole by virtue of the pressing force of the bearing steel balls, so that the long-rod gear 313 cannot rotate when the second motor 321 locks the driving gear 323 through the second coupler 322 and drives the driven gear 324 to rotate. Thereby realizing that the two motors respectively drive the sliding plate 302 to move along the left-right direction and the front-back direction.

The miniature automatic alignment mechanism provided by the utility model has the following beneficial effects:

First, the structural design effectively solves the problem of bulkiness in conventional vision alignment systems. And the design of the miniature automatic alignment mechanism is more compact, and is hopeful to be easily integrated into various devices, thereby saving space and increasing flexibility and applicability. Secondly, the structural design presents a sharp image on the display by utilizing auto-focus techniques and diaphragm adjustment, thereby achieving more accurate alignment, especially in cases where fine adjustment is required. In addition, the structure design can simplify operation and improve efficiency, reduces manual intervention and complex manual adjustment, improves convenience and efficiency of operation through automatic adjustment and simple structure of design, and reduces possibility of misoperation.

Another embodiment of the present utility model also provides a micro-jet laser processing apparatus, including any of the micro-auto-alignment mechanisms provided in the above embodiments. Therefore, the system also has the advantages of space saving, high precision, simplicity and convenience in operation and the like.

In addition, the miniature automatic alignment mechanism provided by the utility model can also play a role in other various scenes needing visual positioning and alignment, and improves the precision and efficiency. For example, in industrial automation, such miniature automatic alignment mechanisms may be used to automatically detect and align parts or components, improving assembly accuracy and efficiency on a production line. In the medical imaging field, such miniature automatic alignment mechanisms may be used in medical devices to assist doctors in focusing and aligning images to obtain clearer diagnostic results. In the aspect of robot navigation, the miniature automatic alignment mechanism can also be integrated into a robot system for accurate positioning and navigation, improving the operation precision of the robot in a complex environment and the like, and providing a more optimized visual alignment solution for equipment and systems in various industries.

In the description of the present utility model, it should be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", etc. indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings are merely for convenience in describing the present utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be configured and operated in a specific orientation, and thus should not be construed as limiting the present utility model.

Furthermore, the terms "first," "second," and the like, are used for descriptive purposes only and are not to be construed as indicating or implying a relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defining "a first" or "a second" may explicitly or implicitly include one or more such feature. In the description of the present utility model, the meaning of "a plurality" is two or more, unless explicitly defined otherwise.

In the present utility model, unless explicitly specified and limited otherwise, the terms "mounted," "connected," "secured," and the like are to be construed broadly, and may be, for example, fixedly connected, detachably connected, or integrally formed; can be mechanically or electrically connected; can be directly connected or indirectly connected through an intermediate medium, and can be communicated with the inside of two elements or the interaction relationship of the two elements. The specific meaning of the above terms in the present utility model can be understood by those of ordinary skill in the art according to the specific circumstances.

In the description of the present specification, a description referring to terms "one embodiment," "some embodiments," "examples," "specific examples," or "some examples," etc., means that a particular feature, structure, material, or characteristic described in connection with the embodiment or example is included in at least one embodiment or example of the present utility model. In this specification, schematic representations of the above terms are not necessarily directed to the same embodiment or example. Furthermore, the particular features, structures, materials, or characteristics described may be combined in any suitable manner in any one or more embodiments or examples. Further, one skilled in the art can engage and combine the different embodiments or examples described in this specification.

The foregoing is a further detailed description of the utility model in connection with the preferred embodiments, and it is not intended that the utility model be limited to the specific embodiments described. It will be apparent to those skilled in the art that several simple deductions or substitutions may be made without departing from the spirit of the utility model, and these should be considered to be within the scope of the utility model.

Claims (10)

1. The miniature automatic alignment mechanism is characterized by comprising a camera module, a driving module and an adjusting mechanism; wherein,

The camera module comprises a diaphragm arranged in front of the lens, and a reference mark is arranged in the middle of the diaphragm;

The driving module comprises a driving unit and a display;

The adjusting mechanism comprises a fixed plate, an adjusting unit and a sliding plate; the fixed plate is used for fixing the whole adjusting mechanism, the adjusting unit is movably connected with the fixed plate, the sliding plate is movably connected with the adjusting unit, and the sliding plate is slidably connected with the fixed plate; an alignment mark is also arranged on the sliding plate;

The camera module enables the alignment mark on the sliding plate to present a clear mark image on the display through an automatic focusing technology;

The driving unit controls the adjusting unit to automatically adjust the position of the sliding plate based on the imaging position of the mark image so as to enable the mark image to coincide with the center of the field of view of the reference mark, thereby realizing automatic alignment.

2. The miniature auto-alignment mechanism of claim 1, wherein said diaphragm is threadably connected to said lens.

3. The miniature automatic alignment mechanism according to claim 1, wherein said fiducial marks and said alignment marks are circular or cross-shaped.

4. The miniature automatic alignment mechanism according to claim 1, wherein said adjustment unit comprises a first adjustment unit and a second adjustment unit; the first adjusting unit is used for driving the sliding plate to move along a first direction under the control of the driving unit; the second adjusting unit is used for driving the sliding plate to move along a second direction under the control of the driving unit;

wherein the first direction is perpendicular to the second direction;

And the first adjusting unit and the second adjusting unit both adopt a gear rack structure.

5. The micro self-aligning mechanism of claim 4 wherein said first direction is a side-to-side direction and said second direction is a front-to-back direction.

6. The miniature automatic alignment mechanism according to claim 4, wherein said first adjustment unit comprises in particular a first motor, a first coupling, a long bar gear and a first gear slot provided on said fixed plate;

The first motor is in sliding connection with the fixed plate, and the first motor is electrically connected with the driving unit;

two ends of the first coupler are respectively connected with the first motor and one end of the long rod gear through shafts;

The other end of the long rod gear is of a gear structure and is meshed with the first gear groove;

When the driving unit controls the first motor to rotate, the fixed plate is fixed, and the first coupler drives the long rod gear to move along the first gear groove, so that the sliding plate is driven to move left and right.

7. The miniature automatic alignment mechanism according to claim 6, wherein said second adjustment unit comprises a second motor, a second coupling, a driving gear, a driven gear, and a second gear slot provided on said slide plate;

The second motor is in sliding connection with the fixed plate, and the second motor is electrically connected with the driving unit;

Two ends of the second coupler are respectively connected with the second motor and the driving gear shaft;

The driven gear is sleeved on the shaft of the long rod gear, and the driven gear and the long rod gear can rotate relatively and independently;

The upper end of the driven gear is meshed with the driving gear, and the lower end of the driven gear is meshed with the second gear groove;

When the driving unit controls the second motor to rotate, the fixed plate is fixed, the second coupler drives the driving gear to rotate and drives the driven gear, and then the sliding plate is driven to move back and forth along the direction of the second gear groove.

8. The miniature automatic alignment mechanism according to claim 7, wherein said first motor and said second motor are connected to said fixed plate by a guide rail, and wherein the direction of said guide rail is the same as the direction of said first gear slot.

9. The miniature automatic alignment mechanism according to claim 7, wherein an upper angular contact bearing and a lower angular contact bearing are arranged between the long rod gear and the driven gear; wherein, the arc surface of the outer ring of the angular contact bearing at the lower part faces downwards, and the arc surface of the outer ring of the angular contact bearing at the upper part faces upwards; a bushing is further arranged between the two angular contact bearings;

When a compression nut sleeved on the long rod gear is locked, an upper angular contact bearing inner ring, the bushing and a lower angular contact bearing inner ring are sequentially compressed on a step shaft shoulder of the long rod gear, so that the inner rings of the two angular contact bearings are connected and fastened with the long rod gear to form a whole, and therefore when the first motor locks the long rod gear through the first coupling and drives the long rod gear to rotate, the driven gear cannot rotate;

Meanwhile, the outer rings of the two angular contact bearings are also connected with the driven gear into a whole by means of the pressing force of the bearing steel balls, so that when the second motor locks the driving gear through the second coupler and drives the driven gear to rotate, the long rod gear cannot rotate.

10. A microfluidic laser processing device comprising a micro-automatic alignment mechanism according to any of claims 1-9.