CN220942374U

CN220942374U - Polymer removing device for reaction cavity of semiconductor equipment

Info

Publication number: CN220942374U
Application number: CN202322781172.4U
Authority: CN
Inventors: 朱伟; 徐婉庭
Original assignee: Suzhou Xinrui Microelectronics Equipment Co ltd
Current assignee: Suzhou Xinrui Microelectronics Equipment Co ltd
Priority date: 2023-10-17
Filing date: 2023-10-17
Publication date: 2024-05-14
Anticipated expiration: 2033-10-17

Abstract

The utility model discloses a polymer removing device for a reaction cavity of semiconductor equipment, which comprises a barrel and a storage box, wherein one end of the barrel is fixedly communicated with a corrugated pipe, the other end of the barrel is clamped with a feeding pipe, the feeding pipe is fixedly communicated with the top of the storage box, one end of the corrugated pipe is fixedly communicated with a suction head, one end of the suction head is provided with a vacuum adsorption port, the bottom end of the suction head is fixedly connected with a plurality of clamps, the inside of the barrel is fixedly connected with a net rack, the inner wall of the net rack is fixedly provided with a motor, the output end of the motor is fixedly connected with a blade, and the top of one side of the storage box, which is far away from the barrel, is provided with an air outlet.

Description

Polymer removing device for reaction cavity of semiconductor equipment

Technical Field

The utility model relates to the technical field of removing devices, in particular to a polymer removing device for a reaction cavity of semiconductor equipment.

Background

Semiconductor devices are specialized equipment used to manufacture and process semiconductor materials and devices.

However, the existing method for removing polymer in the reaction cavity of the semiconductor device has the following defects:

(1) The existing polymer removing device has a simple structure, is generally manually peeled and cleaned, and then is wiped and cleaned by clean cloth, so that the working time is long;

(2) Polymer dust can permeate inside and around the cavity for a long time in the cleaning process, and the cleanliness of the working environment is affected.

Disclosure of utility model

The utility model aims to provide a polymer removing device for a reaction cavity of semiconductor equipment, which aims to solve the problems that the prior polymer removing device provided in the background art is simple in structure, is generally manually peeled and cleaned, and is wiped and cleaned by clean cloth, so that the working time is long, polymer dust can be diffused in and around the cavity for a long time in the cleaning process, and the cleanliness of the working environment is affected.

In order to achieve the above purpose, the present utility model provides the following technical solutions: the utility model provides a semiconductor equipment reaction chamber polymer remove device, includes barrel and receiver, the fixed intercommunication of one end of barrel has the bellows, the other end block of barrel has the inlet pipe, just the inlet pipe is fixed to be linked together in the top of receiver, the fixed intercommunication of one end of bellows has the suction head, the vacuum adsorption mouth has been seted up to the one end of suction head, the bottom fixedly connected with anchor clamps of suction head, the inside fixedly connected with rack of barrel, the inner wall fixed mounting of rack has the motor, the output fixedly connected with blade of motor, the air outlet has been seted up at the top that the receiver deviates from barrel one side, the surface block of air outlet has the filter screen, the equal fixedly connected with connecting seat in both sides of inlet pipe.

When the polymer removing device for the reaction cavity of the semiconductor equipment is used, the cleaning tool of the polymer removing device can be rapidly replaced through clamping, so that a large amount of time is saved, dust can be efficiently recovered while the polymer is cleaned, and the possibility of dust pollution to equipment is greatly reduced.

As a preferable technical scheme of the utility model, a threaded hole is formed in the middle of the connecting seat, a threaded rod is connected with the inner wall of the threaded hole in a threaded manner, one end of the threaded rod is rotatably connected with a limiting plate through a bearing, and limiting grooves are formed in one ends of two sides of the cylinder. The threaded rod can be rotated to drive the limiting plate to move.

As a preferable technical scheme of the utility model, the top end of the cylinder body is fixedly connected with a handle. The handle is arranged to facilitate carrying the device.

As a preferable technical scheme of the utility model, a control switch is fixedly arranged on one side of the front surface of the cylinder body, and the motor is electrically connected with an external power supply through the control switch. The operation of the motor is controlled by a control switch.

As a preferable technical scheme of the utility model, V-shaped grooves are formed between every two adjacent clamps. The V-shaped groove is arranged to facilitate the clamping and holding of the cleaning tool.

As a preferable technical scheme of the utility model, one end of the threaded rod, which is far away from the limiting plate, is fixedly connected with a knob. The knob is arranged to facilitate the rotation of the threaded rod.

As a preferable technical scheme of the utility model, the surface of the limiting plate is clamped with the limiting groove. The limiting plate is clamped on the limiting groove and can lock the cylinder body and the storage box.

As a preferable technical scheme of the utility model, the inner wall of the feeding pipe is fixedly connected with a sealing ring. The sealing washer improves the sealed effect that barrel and receiver are connected.

Compared with the prior art, the utility model has the beneficial effects that:

1. The cleaning tool of the polymer removing device can be rapidly replaced by clamping, so that a large amount of time is saved, and the working quality and efficiency are improved;

2. The polymer removing device can clean the polymer and efficiently recycle dust, so that the possibility of dust pollution to equipment is greatly reduced.

Drawings

FIG. 1 is a perspective view of the present utility model;

FIG. 2 is a plan view of the present utility model;

FIG. 3 is a cross-sectional view of the cartridge of the present utility model;

Fig. 4 is a side cross-sectional view of the present utility model at the feed tube.

In the figure: 1. a cylinder; 2. a bellows; 3. a suction head; 4. a vacuum adsorption port; 5. a clamp; 6. a net rack; 7. a motor; 8. a feed pipe; 9. a storage box; 10. an air outlet; 11. a filter screen; 12. a V-shaped groove; 13. a control switch; 14. a connecting seat; 15. a threaded hole; 16. a threaded rod; 17. a knob; 18. a limiting plate; 19. a limit groove; 20. a seal ring; 21. a blade; 22. a handle.

Detailed Description

The following description of the embodiments of the present utility model will be made clearly and completely with reference to the accompanying drawings, in which it is apparent that the embodiments described are only some embodiments of the present utility model, but not all embodiments. All other embodiments, which can be made by those skilled in the art based on the embodiments of the utility model without making any inventive effort, are intended to be within the scope of the utility model.

Referring to fig. 1-4, the utility model provides a polymer removing device for a reaction cavity of a semiconductor device, which comprises a barrel 1 and a storage box 9, wherein one end of the barrel 1 is fixedly communicated with a corrugated pipe 2, the other end of the barrel 1 is clamped with a feeding pipe 8, the feeding pipe 8 is fixedly communicated with the top of the storage box 9, one end of the corrugated pipe 2 is fixedly communicated with a suction head 3, one end of the suction head 3 is provided with a vacuum adsorption port 4, the bottom end of the suction head 3 is fixedly connected with a plurality of clamps 5 for clamping a cleaning tool, the inside of the barrel 1 is fixedly connected with a net rack 6, the inner wall of the net rack 6 is fixedly provided with a motor 7, the output end of the motor 7 is fixedly connected with a blade 21 for adsorbing dust, the top of one side of the storage box 9, which is away from the barrel 1, the surface of the air outlet 10 is clamped with a filter screen 11 for filtering dust, and both sides of the feeding pipe 8 are fixedly communicated with a connecting seat 14.

When the dust collector is used, the dust collector is held at the suction head 3 in a handheld manner in operation, a plurality of clamps 5 are arranged below the suction head 3, so that a blade, diamond sand paper and clean cloth can be clamped according to operation requirements, the blades 21 are driven to rotate by a starting motor 7 during cleaning of polymers in a reaction cavity of semiconductor equipment, dust is finally sucked into the storage box 9 from the vacuum suction port 4 through the corrugated pipe 2, sucked air is discharged from the air outlet 10, and the dust is filtered by the filter screen 11 and stored in the storage box 9;

The middle part of the connecting seat 14 is provided with a threaded hole 15, the inner wall of the threaded hole 15 is in threaded connection with a threaded rod 16, one end of the threaded rod 16 is rotationally connected with a limiting plate 18 through a bearing, one ends of two sides of the cylinder 1 are provided with limiting grooves 19, one end of the threaded rod 16, which is far away from the limiting plate 18, is fixedly connected with a knob 17, is convenient to rotate, and the surface of the limiting plate 18 is clamped with the limiting grooves 19 to play a locking role;

When the dust collecting box is used, the knob 17 at the two sides of the feeding pipe 8 is rotated to drive the threaded rod 16 to rotate, and then the limiting plates 18 at the two sides are driven to move, so that the two limiting plates 18 are separated from or clamped into the limiting grooves 19, and the collecting box 9 can be disassembled and assembled, so that dust in the box can be cleaned conveniently;

The top end of the cylinder body 1 is fixedly connected with a handle 22, so that the cylinder is convenient to carry, one side of the front surface of the cylinder body 1 is fixedly provided with a control switch 13, the motor 7 is electrically connected with an external power supply through the control switch 13 to control the opening and the closing, a V-shaped groove 12 is formed between every two adjacent clamps 5, the clamping is convenient, the inner wall of the feeding pipe 8 is fixedly connected with a sealing ring 20, and the sealing performance is improved;

When the cleaning tool is used, the lifting device can be conveniently lifted to a working place through the lifting handle 22, an external power supply is turned on, the motor 7 is started to operate by pressing the control switch 13, the cleaning tool is conveniently and firmly clamped by the V-shaped groove 12, and the sealing ring 20 prevents air leakage at the joint of the cylinder body 1 and the storage box 9.

When the polymer removing device for the reaction cavity of the semiconductor equipment is particularly used, the polymer removing device is held at the suction head 3 in a handheld manner during operation, a plurality of clamps 5 are arranged below the suction head 3, a blade, diamond sand paper and clean cloth can be clamped according to operation requirements, the polymer in the reaction cavity of the semiconductor equipment can be quickly replaced, a motor 7 is started to drive a blade 21 to rotate during cleaning of the polymer in the reaction cavity of the semiconductor equipment, dust is finally sucked into a storage box 9 from a vacuum suction port 4 through a corrugated pipe 2, sucked air is discharged from an air outlet 10, the dust can be filtered by a filter screen 11 and stored in the storage box 9, a knob 17 at two sides of a feed pipe 8 is rotated to drive a threaded rod 16 to rotate, two limiting plates 18 are driven to move, and the two limiting plates 18 are separated from or clamped into a limiting groove 19, so that the storage box 9 can be disassembled, and dust in the box can be cleaned conveniently.

Although the present utility model has been described with reference to the foregoing embodiments, it will be apparent to those skilled in the art that modifications may be made to the embodiments described, or equivalents may be substituted for elements thereof, and any modifications, equivalents, improvements and changes may be made without departing from the spirit and principles of the present utility model.

Claims

1. The utility model provides a semiconductor equipment reaction chamber polymer remove device, includes barrel (1) and receiver (9), its characterized in that: the utility model discloses a vacuum cleaner, including barrel (1), bellows (2) are fixed to one end of barrel (1), the other end block of barrel (1) has inlet pipe (8), just inlet pipe (8) fixed connection is in the top of receiver (9), the one end fixed connection of bellows (2) has the suction head (3), vacuum absorption mouth (4) have been seted up to the one end of suction head (3), the bottom fixedly connected with anchor clamps (5) of suction head (3), the inside fixedly connected with rack (6) of barrel (1), the inner wall fixed mounting of rack (6) has motor (7), air outlet (10) have been seted up at the output fixedly connected with blade (21) of motor (7), the surface block of air outlet (10) has filter screen (11), the both sides of inlet pipe (8) all are fixed connection and are connected with connecting seat (14).

2. A semiconductor device reaction chamber polymer removal apparatus as defined in claim 1, wherein: threaded holes (15) are formed in the middle of the connecting seat (14), threaded rods (16) are connected with the inner walls of the threaded holes (15) in a threaded mode, limiting plates (18) are connected to one ends of the threaded rods (16) in a rotating mode through bearings, and limiting grooves (19) are formed in one ends of two sides of the cylinder body (1).

3. A semiconductor device reaction chamber polymer removal apparatus as defined in claim 1, wherein: the top end of the cylinder body (1) is fixedly connected with a handle (22).

4. A semiconductor device reaction chamber polymer removal apparatus as defined in claim 1, wherein: a control switch (13) is fixedly arranged on one side of the front face of the cylinder body (1), and the motor (7) is electrically connected with an external power supply through the control switch (13).

5. A semiconductor device reaction chamber polymer removal apparatus as defined in claim 1, wherein: v-shaped grooves (12) are formed between every two adjacent clamps (5).

6. A semiconductor device reaction chamber polymer removal apparatus as defined in claim 2, wherein: one end of the threaded rod (16) far away from the limiting plate (18) is fixedly connected with a knob (17).

7. A semiconductor device reaction chamber polymer removal apparatus as defined in claim 2, wherein: the surface of the limiting plate (18) is clamped with the limiting groove (19).

8. A semiconductor device reaction chamber polymer removal apparatus as defined in claim 1, wherein: the inner wall of the feeding pipe (8) is fixedly connected with a sealing ring (20).