CN220942134U

CN220942134U - Slicing flushing device

Info

Publication number: CN220942134U
Application number: CN202322684498.5U
Authority: CN
Inventors: 朱仁德; 冯培良
Original assignee: Wuxi Jingyuntong Technology Co Ltd
Current assignee: Wuxi Jingyuntong Technology Co Ltd
Priority date: 2023-10-08
Filing date: 2023-10-08
Publication date: 2024-05-14
Anticipated expiration: 2033-10-08

Abstract

The utility model relates to a slicing flushing device which comprises a fixing mechanism and a flushing mechanism arranged on the fixing mechanism, wherein the flushing mechanism is arranged on the flushing mechanism, the fixing mechanism comprises a first movable base, the flushing mechanism comprises a water knife head arranged on the first movable base, a water outlet pipe and a recycling water pipe, the water knife head is connected with a water pump through the water outlet pipe, the cleaning mechanism comprises an electromagnetic valve and a high-pressure air pipe which is connected with the electromagnetic valve and the water outlet pipe, after the water knife works for a long time, the electromagnetic valve is controlled to open the high-pressure air pipe, air in the high-pressure air pipe is filled into the water outlet pipe to pressurize the water outlet pipe, impurities in the water outlet pipe are flushed out, the impurities are prevented from accumulating to influence the working efficiency of the water knife, the cleaning device is simple to operate, convenient and quick, the water outlet pipe can be cleaned quickly by using the material changing time, and normal slicing of a slicing machine cannot be influenced.

Description

Slicing flushing device

Technical Field

The utility model relates to the technical field of silicon wafer production, in particular to a slicing flushing device.

Background

The silicon ingot is cut into silicon slices and then needs to be photoresist removed, cleaned and sliced, and the existing slicing machine adopts a water knife to separate the silicon slices stuck together during slicing, and the separated silicon slices are conveyed to the inserting sheet device through the conveying device. Because a large amount of silicon powder can be produced when the silicon wafer is cut, the silicon powder cannot be cleaned completely in the cleaning step, so that in the subsequent slicing step, the water knife impacts the silicon wafer to separate the silicon wafers which are stuck together, and meanwhile, part of silicon powder can be flushed into the water tank, so that water resources are saved, water in the water tank can be recycled through the recycling water pipe and sprayed out by the water knife again, a large amount of silicon powder can be accumulated in a pipeline, particularly a water outlet pipe with a more complex inner pipeline, after the water knife works for a long time, the accumulated silicon powder can influence the working water pressure of the water knife, even the water outlet pipe is blocked, and the working efficiency of the slicing machine is seriously influenced.

Disclosure of utility model

In view of the foregoing shortcomings of the prior art, it is an object of the present utility model to provide a tile flushing device that solves one or more of the problems of the prior art.

In order to achieve the above purpose, the technical scheme of the utility model is as follows:

A burst flushing device comprising:

The water knife head is connected with a water pump through the water outlet pipe, and the cleaning mechanism comprises an electromagnetic valve, a high-pressure air pipe connected with the electromagnetic valve and the water outlet pipe.

Further, the fixing mechanism further comprises a second movable base arranged on the first movable base, and a second sliding groove is formed in the distal end of the second movable base along the length direction of the second movable base.

Further, the first movable base and the second movable base are vertically arranged, a first chute is formed in the distal end of the first movable base along the length direction of the first movable base, and the water jet cutter head is in sliding connection with the first chute.

Further, a bracket is arranged at the proximal end of the water jet scalpel head, a bending part is arranged at the proximal end of the bracket, and the bending part is in sliding connection with the first sliding groove.

Further, a manual valve and a pressure gauge are further arranged on the water outlet pipe, and the manual valve is arranged on the water outlet pipe between the water pump and the high-pressure air pipe.

Further, the fixing mechanism is also provided with a slicing mechanism, and the slicing mechanism comprises a conveying belt which is driven by a motor.

Further, the output of motor is connected with the driving shaft, be provided with the initiative gyro wheel on the driving shaft, the near-end of driving shaft still is provided with the driven shaft, the cover is equipped with driven gyro wheel on the driven shaft, the both ends of conveyer belt are overlapped respectively and are established on initiative gyro wheel, driven gyro wheel.

Further, a plurality of suckers are arranged on the outer surface of the conveyor belt.

Compared with the prior art, the utility model has the following beneficial technical effects:

(1) The utility model discloses a slicing flushing device, which is provided with a cleaning device, in particular to a high-pressure air pipe arranged on a water outlet pipe, an electromagnetic valve is arranged on the high-pressure air pipe, after a water knife works for a long time, the electromagnetic valve is controlled to open the high-pressure air pipe, gas in the high-pressure air pipe is filled into the water outlet pipe to pressurize the water outlet pipe, impurities in the water outlet pipe are flushed out, the work efficiency of the water knife is prevented from being influenced by impurity accumulation, and the cleaning device is simple to operate, convenient and quick, and can be used for quickly cleaning the water outlet pipe by utilizing the material changing time without influencing the normal slicing of a slicing machine.

(2) Further, the first sliding groove is formed in the far end of the first movable base along the length direction of the first movable base, and the water knife head is connected with the first sliding groove in a sliding mode, so that the position of the water knife head can be conveniently adjusted, and a better slicing effect is achieved.

(3) Further, a manual valve and a pressure gauge are further arranged on the water outlet pipe, the manual valve is arranged on the water outlet pipe between the water pump and the high-pressure air pipe, and if a flushing mechanism fails, the manual valve can be manually closed, so that the safety of the device is improved.

Drawings

Fig. 1 is a schematic perspective view of a slicing flushing device according to a first embodiment of the present utility model.

Fig. 2 shows a partial enlarged view at a of a tile flushing device according to a first embodiment of the present utility model.

The reference numerals in the drawings:

1. A fixing mechanism; 11. a first mobile base; 111. a first chute; 12. a second movable base; 121. a second chute; 13. a bracket; 131. a bending part; 2. a flushing mechanism; 21. a water jet cutter head; 22. a water outlet pipe; 221. a manual valve; 23. a water pump; 24. a recovery water pipe; 25. a pressure gauge; 3. a cleaning mechanism; 31. an electromagnetic valve; 32. a high pressure gas pipe; 4. a slicing mechanism; 41. a motor; 42. a driving shaft; 421. a driving roller; 43. a driven shaft; 431. a driven roller; 44. a conveyor belt; 45. and a sucking disc.

Detailed Description

For a better understanding of the utility model with objects, features and advantages, refer to the drawings. It should be understood that the structures, proportions, sizes, etc. shown in the drawings are for illustration purposes only and should not be construed as limiting the utility model to the extent that it would be understood by those skilled in the art, and that any structural modifications, proportional changes, or dimensional adjustments made in the drawings should not be construed as limiting the utility model to the full scope of the utility model without affecting the efficiency or reach of the utility model.

In the description of the present utility model, the positional or positional relationship indicated by the terms "center", "longitudinal", "transverse", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "top", "bottom", "inner", "outer", "axial", "radial", "circumferential", etc. are based on the positional or positional relationship shown in the drawings, are merely for convenience of describing the present utility model and simplifying the description, and do not indicate or imply that the apparatus or elements referred to must have a specific orientation, be constructed and operated in a specific orientation, and thus should not be construed as limiting the present utility model.

To more clearly describe the structure of the above-mentioned one of the segment flushing devices, the present utility model defines the terms "distal end" and "proximal end", specifically, "distal end" means an end far from the ground, and "proximal end" means an end close to the ground, taking fig. 2 as an example, an end of the bracket 13 close to the water jet cutter head 21 in fig. 2 is a distal end, and an end of the bracket 13 close to the first moving base 11 in fig. 2 is a proximal end.

Example 1

Please refer to fig. 1, 2, a fragment flushing device, including fixed establishment 1, the flushing mechanism 2 of setting on fixed establishment 1, set up on flushing mechanism 2 clearance mechanism 3, fixed establishment 1 includes first removal base 11 flushing mechanism 2 including set up in water sword tool bit 21, the water outlet pipe 22 and the recovery water pipe 24 of circulation setting on the first removal base 11, water sword tool bit 21 is connected with water pump 23 through water outlet pipe 22, clearance mechanism 3 includes solenoid valve 31, connects solenoid valve 31 and water outlet pipe 22's high-pressure air pipe 32. Specifically, the water flow flushed by the water knife head 21 flows into a water tank (not shown in the figure) at the near end of the fixing mechanism 1, one end of a recovery water pipe 24 extends into the water tank, the other end of the recovery water pipe 24 is connected with a water pump 23, the water in the water tank is pumped by the water pump 23 through the recovery water pipe 24, and the water pumped by the water pump 23 flows out of the water knife through a water outlet pipe 22 and finally flows into the water tank again to form water circulation.

The specific structure of the fixing mechanism 1 is described below:

Referring to fig. 1 and 2, the fixing mechanism 1 further includes a second moving base 12 disposed on the first moving base 11, and a second sliding slot 121 is formed at a distal end of the second moving base 12 along a length direction thereof. Specifically, the second chute 121 facilitates the movement of a feeding frame (not shown) along the second moving base 12 to feed the silicon wafer to the wafer slicing mechanism 4.

Referring to fig. 1 and 2, the first moving base 11 and the second moving base 12 are vertically disposed, a first sliding groove 111 is formed at a distal end of the first moving base 11 along a length direction thereof, and the water jet cutter head 21 is slidably connected with the first sliding groove 111. Specifically, the first chute 111 facilitates the movement of the water knife head 21 along the first moving base 11, so as to adjust the distance from the water knife to the silicon wafer, and achieve better slicing effect when slicing silicon wafers with different sizes.

Referring to fig. 1 and 2, a bracket 13 is disposed at a proximal end of the water jet cutter head 21, a bending portion 131 is disposed at a proximal end of the bracket 13, and the bending portion 131 is slidably connected with the first chute 111. Specifically, the first sliding groove 111 is a T-shaped groove, the bending portion 131 is penetrated by a bolt (not shown in the figure), the bolt head of the bolt is clamped into the first sliding groove 111, the threaded portion of the bolt is arranged on the bending portion 131 through a nut (not shown in the figure), the nut is screwed down, the positions of the water jet cutter head 21 and the first sliding groove 111 are relatively fixed, the nut is unscrewed, and the water jet cutter head 21 can slide along the first sliding groove 111.

The specific structure of the outlet water pipe 22 is described below:

Referring to fig. 1 and 2, the water outlet pipe 22 is further provided with a manual valve 221 and a pressure gauge 25, and the manual valve 221 is disposed on the water outlet pipe 22 between the water pump 23 and the high-pressure air pipe 32. Specifically, the pressure gauge 25 is used to monitor whether the pressure in the outlet pipe 22 exceeds a safe pressure value, and the manual valve 221 is used to emergency shut off the outlet pipe 22 when the flushing mechanism 2 fails.

The specific structure of the dicing mechanism 4 is described below:

Referring to fig. 1 and 2, the fixing mechanism 1 is further provided with a slicing mechanism 4, the slicing mechanism 4 includes a conveyor belt 44, the conveyor belt 44 is driven by a motor 41, and the conveyor belt 44 conveys the sliced silicon wafer to an inserting device (not shown in the drawings).

Referring to fig. 1 and 2, the output end of the motor 41 is connected with a driving shaft 42, a driving roller 421 is disposed on the driving shaft 42, a driven shaft 43 is further disposed at the proximal end of the driving shaft 42, a driven roller 431 is sleeved on the driven shaft 43, and two ends of the conveyor belt 44 are respectively sleeved on the driving roller 421 and the driven roller 431. Specifically, when the conveyor belt 44 conveys the silicon wafer, the motor 41 is started, the output end of the motor 41 drives the driving shaft 42 to rotate, the driving shaft 42 drives the driving roller 421 to rotate, the driving roller 421 drives the conveyor belt 44 to rotate, in the process, the driven roller 431 assists the conveyor belt 44 to rotate, and the driving shaft 42 and the driven shaft 43 are respectively and rotatably arranged on a frame (not shown in the figure) to realize the conveying of the silicon wafer.

Referring to fig. 2, a plurality of sucking discs 45 and 45 are further disposed on the outer surface of the conveyor belt 44, and the sucking discs 45 are tightly attached to the silicon wafer and drive the sucked silicon wafer to separate from the adjacent silicon wafer and move upwards to realize the slicing.

The specific working procedure of the utility model is as follows:

during slicing, the water pump 23 and the motor 41 are started, the feeding frame slides along the second sliding groove 121, the silicon wafers attached to the far end of the feeding frame enter the flushing area of the water knife head 21, the attached water knives are separated by water flow and then move into the near end of the conveying belt 44, the sucking discs 45 of the conveying belt adsorb single silicon wafers, the adsorbed silicon wafers move to the far end along with the conveying belt 44 and are sliced, a person opens the electromagnetic valve 31 in a gap of conveying the silicon wafers by the feeding frame, and gas in the high-pressure air pipe 32 is filled into the water outlet pipe 22 to pressurize the silicon wafers, so that impurities in the water outlet pipe 22 are flushed out.

Therefore, it can be seen that the above-mentioned burst washing unit is provided with cleaning device, specifically be provided with high-pressure air pipe 32 on play water pipe 22, be provided with solenoid valve 31 on the high-pressure air pipe 32, after the long-time work of water sword, control solenoid valve 31 opens high-pressure air pipe 32, the gas in the high-pressure air pipe 32 fills into water pipe 22 and pressurizes it, wash out the impurity in the play water pipe 22, prevent that impurity from piling up the work efficiency that influences the water sword, and this cleaning device easy operation, convenient and fast can utilize the reloading time to clear up fast to play water pipe 22, can not influence the normal burst of burst machine.

The technical features of the above-described embodiments may be arbitrarily combined, and all possible combinations of the technical features in the above-described embodiments are not described for brevity of description, however, as long as there is no contradiction between the combinations of the technical features, they should be considered as the scope of the description.

The above examples illustrate only a few embodiments of the utility model, which are described in detail and are not to be construed as limiting the scope of the utility model. It should be noted that it will be apparent to those skilled in the art that various modifications and improvements can be made without departing from the spirit of the utility model, which are within the scope of the utility model. Accordingly, the scope of protection of the present utility model is to be determined by the appended claims.

Claims

1. A fragment flushing device, characterized in that: including fixed establishment, the washing mechanism of setting on fixed establishment, set up the clearance mechanism on washing mechanism, fixed establishment include first removal base washing mechanism including set up in water sword tool bit on the first removal base, the water pipe and the recovery water pipe of circulating arrangement, the water sword tool bit has the water pump through water outlet pipe connection, clearance mechanism includes solenoid valve, connects solenoid valve and the high-pressure gas pipe of water outlet pipe.

2. The burst flushing device of claim 1, wherein: the fixing mechanism further comprises a second movable base arranged on the first movable base, and a second sliding groove is formed in the distal end of the second movable base along the length direction of the second movable base.

3. The burst flushing device of claim 2, wherein: the water jet cutter comprises a first movable base, a second movable base, a first chute and a water jet cutter head, wherein the first movable base and the second movable base are vertically arranged, the first chute is formed in the far end of the first movable base along the length direction of the first movable base, and the water jet cutter head is connected with the first chute in a sliding mode.

4. A tile flushing device as set forth in claim 3, wherein: the water sword tool bit's proximal end is provided with the support, the proximal end of support is provided with the portion of bending, the portion of bending sliding connection first spout.

5. The burst flushing device of claim 1, wherein: the water outlet pipe is also provided with a manual valve and a pressure gauge, and the manual valve is arranged on the water outlet pipe between the water pump and the high-pressure air pipe.

6. The burst flushing device of claim 1, wherein: the fixing mechanism is also provided with a slicing mechanism, and the slicing mechanism comprises a conveying belt which is driven by a motor.

7. The burst flushing device of claim 6, wherein: the output of motor is connected with the driving shaft, be provided with the initiative gyro wheel on the driving shaft, the near-end of driving shaft still is provided with the driven shaft, the cover is equipped with driven gyro wheel on the driven shaft, the both ends of conveyer belt are overlapped respectively and are established on initiative gyro wheel, driven gyro wheel.

8. The burst flushing device of claim 6, wherein: the outer surface of the conveyor belt is also provided with a plurality of suckers.