CN220932755U - Light path self-stabilizing device - Google Patents
Light path self-stabilizing device Download PDFInfo
- Publication number
- CN220932755U CN220932755U CN202322548362.1U CN202322548362U CN220932755U CN 220932755 U CN220932755 U CN 220932755U CN 202322548362 U CN202322548362 U CN 202322548362U CN 220932755 U CN220932755 U CN 220932755U
- Authority
- CN
- China
- Prior art keywords
- laser
- component
- measuring
- assembly
- axis
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 239000000779 smoke Substances 0.000 claims abstract description 29
- 230000003287 optical effect Effects 0.000 claims abstract description 17
- 238000001514 detection method Methods 0.000 claims abstract description 16
- 238000005259 measurement Methods 0.000 claims description 21
- 230000001105 regulatory effect Effects 0.000 claims description 18
- 238000011105 stabilization Methods 0.000 claims description 7
- 230000009347 mechanical transmission Effects 0.000 claims description 6
- UGFAIRIUMAVXCW-UHFFFAOYSA-N Carbon monoxide Chemical compound [O+]#[C-] UGFAIRIUMAVXCW-UHFFFAOYSA-N 0.000 claims description 5
- 238000004458 analytical method Methods 0.000 claims description 5
- 239000003546 flue gas Substances 0.000 claims description 5
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 claims description 3
- 239000010931 gold Substances 0.000 claims description 3
- 229910052737 gold Inorganic materials 0.000 claims description 3
- 238000000034 method Methods 0.000 abstract description 6
- 230000008569 process Effects 0.000 abstract description 5
- 238000000862 absorption spectrum Methods 0.000 abstract description 3
- 230000005540 biological transmission Effects 0.000 description 6
- 239000007789 gas Substances 0.000 description 5
- 238000010586 diagram Methods 0.000 description 4
- 238000005516 engineering process Methods 0.000 description 4
- 230000002238 attenuated effect Effects 0.000 description 3
- 238000000041 tunable diode laser absorption spectroscopy Methods 0.000 description 3
- 230000009286 beneficial effect Effects 0.000 description 2
- 230000002596 correlated effect Effects 0.000 description 2
- 230000000875 corresponding effect Effects 0.000 description 2
- 238000004868 gas analysis Methods 0.000 description 2
- 238000012625 in-situ measurement Methods 0.000 description 2
- 238000001285 laser absorption spectroscopy Methods 0.000 description 2
- 238000010521 absorption reaction Methods 0.000 description 1
- 238000004364 calculation method Methods 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 238000002310 reflectometry Methods 0.000 description 1
- 230000004044 response Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
- 230000000087 stabilizing effect Effects 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
- 238000002834 transmittance Methods 0.000 description 1
Landscapes
- Investigating Or Analysing Materials By Optical Means (AREA)
Abstract
The utility model belongs to the technical field of laser absorption spectrum gas detection, and provides a light path self-stabilizing device which comprises a laser measuring component, a reflecting component, a position detecting component, a smoke analyzing component and a position adjusting component. The utility model provides a self-stabilizing device for an optical path, wherein laser is emitted by a measuring laser component, the laser is reflected by a reflecting component, and the position relation between the laser measuring component and the reflecting component is obtained by a position detecting component, so that the position adjusting component is used for adjusting the position according to the position relation, the optical path can be automatically stabilized, the automatic and stable self-stabilizing device is more efficient than manual adjustment, the precision is higher, and the use cost is low; by setting the coordinate system and allowing errors, the position adjusting assembly can adjust the X axis and the Y axis of the coordinate system according to the errors, and the process is circularly carried out, so that the automatic stability of the light path is facilitated.
Description
Technical Field
The utility model belongs to the technical field of laser absorption spectrum gas detection, and particularly relates to a light path self-stabilizing device.
Background
The TDLAS technology (tunable semiconductor laser absorption spectroscopy technology) is a laser absorption spectroscopy technology based on gas molecular characteristic absorption, and utilizes the wavelength tunable characteristic of a diode laser to obtain the characteristic absorption spectrum of the measured gas with high resolution, so as to quantitatively analyze the target gas. TDLAS technology is increasingly being used for concentration detection of various components in industry with its characteristics of high sensitivity, high selectivity, real-time on-line, etc.
When measuring the gas concentration in various kilns or flue gas pipelines, in order to reduce the measurement response time, an in-situ measurement mode is adopted; in the in-situ measurement TDLAS round-trip optical path scheme, a laser and a detector are positioned on the same side of a kiln or a flue, and an angle reflector is arranged on the other side of the kiln or the flue. In the use process, the optical paths on two sides are aligned and deviated from the original installation positions due to the thermal instability of the kiln or the flue and the on-site vibration, so that the detection signals of the detector are weak, even the condition of no detection light is detected, and the measurement error or the measurement error is introduced. At present, the light path is mainly manually readjusted by field personnel, and the personnel maintenance mode has the defects of low efficiency, high personnel cost, different adjustment precision and the like.
Disclosure of utility model
In order to solve at least one problem in the background art, the utility model provides a self-stabilizing device for an optical path.
In order to achieve the above purpose, the present utility model adopts the following technical scheme:
An optical path self-stabilization device, comprising:
the laser measuring assembly is used for emitting measuring laser and transmitting the measuring laser to the smoke to be measured;
The reflection assembly is positioned at one side of the laser measurement assembly and is used for reflecting the laser which passes through the smoke to be measured and enabling the laser to pass through the smoke to be measured again and reach the laser measurement assembly; the smoke to be measured is positioned between the laser measuring component and the reflecting component;
The position detection assembly is used for detecting the relative position between the reflecting assembly and the laser measurement assembly;
the smoke analysis component is used for analyzing the measuring laser reaching the laser measurement component and acquiring the components of the smoke to be measured;
The support table is used for installing the laser measurement assembly;
And the position adjusting assembly is used for adjusting the angle between the laser measuring assembly and the reflecting assembly according to the relative position between the reflecting assembly and the laser measuring assembly.
Preferably, the laser measurement assembly comprises a measurement laser, an off-axis concave mirror and a dichroic mirror which are arranged on the supporting table, and a through hole is formed in the center of the off-axis concave mirror;
The measuring laser is used for emitting measuring laser, and the measuring laser passes through the through hole of the off-axis concave mirror and then is transmitted to the smoke to be measured through the dichroic mirror.
Preferably, the off-axis concave mirror is an off-axis parabolic reflector, the through hole is parallel to the collimated light beam, the angle of deviation is 90 degrees, and the surface of the through hole is plated with a gold reflecting film; the dichroic mirror is a long-wave-pass dichroic mirror, the incident angle is 45 degrees, and the included angle between the two mirror surfaces of the dichroic mirror is 0.5 degrees.
Preferably, the reflecting assembly comprises a reflecting mirror and a supporting seat, and the reflecting mirror is mounted on the supporting seat.
Preferably, the position detection assembly comprises a position sensor and an indication light source;
the indicating light source is arranged on the reflecting component and is used for emitting indicating light to the dichroic mirror;
The position sensor is positioned on one side of the dichroic mirror and is used for receiving the indication light reflected by the dichroic mirror and acquiring the relative position between the reflecting component and the laser measuring component.
Preferably, the flue gas analysis assembly comprises a detector, wherein the detector is positioned at one side of the off-axis concave mirror and is used for acquiring the measuring laser reflected by the off-axis concave mirror.
Preferably, the position adjusting assembly comprises an X-axis adjusting motor, a Y-axis adjusting motor, a base, a first adjusting seat and a second adjusting seat;
The first adjusting seat is shaped like a Chinese character 'ji', and two ends of the first adjusting seat are rotatably connected with the base;
the second adjusting seat is rotatably arranged at the middle section of the first adjusting seat;
The X-axis regulating motor is used for driving the second regulating seat to rotate through mechanical transmission;
The Y-axis adjusting motor is used for driving the first adjusting seat to rotate through mechanical transmission.
The utility model has the beneficial effects that:
1. The utility model provides a self-stabilizing device for an optical path, wherein laser is emitted by a measuring laser component, the laser is reflected by a reflecting component, and the position relation between the laser measuring component and the reflecting component is obtained by a position detecting component, so that the position adjusting component is used for adjusting the position according to the position relation, the optical path can be automatically stabilized, the automatic and stable self-stabilizing device is more efficient than manual adjustment, the precision is higher, and the use cost is low;
2. The utility model provides a light path self-stabilizing device, which enables a position adjusting component to adjust an X axis and a Y axis of a coordinate system according to errors by setting the coordinate system and allowing the errors, and the process is circularly carried out, thereby being beneficial to automatically stabilizing a light path.
Additional features and advantages of the utility model will be set forth in the description which follows, and in part will be obvious from the description, or may be learned by practice of the utility model. The objectives and other advantages of the utility model may be realized and attained by the structure particularly pointed out in the written description and drawings.
Drawings
In order to more clearly illustrate the embodiments of the present utility model or the technical solutions of the prior art, the following description will briefly explain the drawings used in the embodiments or the description of the prior art, and it is obvious that the drawings in the following description are some embodiments of the present utility model, and other drawings can be obtained according to these drawings without inventive effort for a person skilled in the art.
FIG. 1 shows a schematic structure of an optical path self-stabilization device of the present utility model;
FIG. 2 illustrates a logic control block diagram of the present utility model;
FIG. 3 shows a light path self-stabilization control regulation flow chart of the present utility model;
FIG. 4 shows a schematic diagram of the off-axis concave mirror of the present utility model;
fig. 5 shows a simplified schematic of the structure of the dichroic mirror of the present utility model.
In the figure: 1. a measuring laser; 2. an off-axis concave mirror; 3. a detector; 4. a position sensor; 5. a dichroic mirror; 6. an X-axis regulating motor; 7. a Y-axis regulating motor; 8. a reflecting mirror; 9. a support table; 10. a support base; 11. an indication light source; 12. a base; 13. a first adjustment seat; 14. and a second adjusting seat.
Detailed Description
For the purpose of making the objects, technical solutions and advantages of the embodiments of the present utility model more apparent, the technical solutions of the embodiments of the present utility model will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present utility model, and it is apparent that the described embodiments are some embodiments of the present utility model, but not all embodiments of the present utility model. All other embodiments, which can be made by those skilled in the art based on the embodiments of the utility model without making any inventive effort, are intended to be within the scope of the utility model.
An optical path self-stabilization device, as shown in fig. 1, comprises a laser measuring component, a reflecting component, a position detecting component, a smoke analysis component, a supporting table 9 and a position adjusting component. The laser measuring assembly is used for emitting measuring laser and transmitting the measuring laser to the smoke to be measured; the reflection assembly is positioned at one side of the laser measurement assembly and is used for reflecting the laser which passes through the smoke to be measured and enabling the laser to pass through the smoke to be measured again and reach the laser measurement assembly; and the smoke to be measured is positioned between the laser measuring component and the reflecting component. The position detection component is used for detecting the relative position between the reflection component and the laser measurement component; the smoke analysis component is used for analyzing the measuring laser reaching the laser measurement component and obtaining the components of the smoke to be measured; the supporting table 9 is used for installing a laser measuring assembly; the position adjusting component is used for adjusting the angle between the laser measuring component and the reflecting component according to the relative position between the reflecting component and the laser measuring component.
It should be noted that, the smoke to be measured is set on the path from the laser measuring component to the reflecting component, when the measuring laser passes through the smoke containing the measuring component, the laser intensity will be attenuated, the attenuation intensity is related to the concentration, the specific measuring component only has attenuation function to the formulated laser wavelength, and finally the measuring laser can be inverted to obtain the component of the smoke after being received by the smoke analyzing component.
It should be further described that the device of the present utility model further includes a main control unit, where the main control unit includes an AD acquisition module and a main control chip. The main control unit is a part of the laser measuring assembly, the AD acquisition module acquires the signals of the detector 3 and the signals of the position sensor 4, and then the signals are sent to the main control chip for processing, so that the concentration of the components to be measured is inverted, the position change of the measuring assembly relative to the reflecting assembly is judged, and the X-axis regulating motor 6 and the Y-axis regulating motor 7 are controlled.
Further, the laser measuring assembly comprises a measuring laser 1, an off-axis concave mirror 2 and a dichroic mirror 5 which are sequentially arranged on a supporting table 9 along the linear direction, and a through hole is formed in the center of the off-axis concave mirror 2; wherein the measuring laser 1 is used for emitting measuring laser, and the measuring laser passes through the through hole of the off-axis concave mirror 2 and then is transmitted to the flue gas to be measured through the dichroic mirror 5.
It should be noted that, as shown in fig. 4, the off-axis concave mirror 2 is an off-axis parabolic mirror, the through hole is parallel to the collimated beam, the deviation angle is 90 °, and the surface is plated with a gold reflective film, so that the reflectivity of more than 96% can be realized within the range of 2-10 um; as shown in fig. 5, the dichroic mirror 5 is a long-pass dichroic mirror, the transmittance is more than 90% between 4 and 8um, the reflectance is more than 95% between 0.4 and 1um, the incident angle is 45 °, and the angle between the two mirror surfaces of the dichroic mirror 5 is 0.5 °.
Further, the reflecting assembly comprises a reflecting mirror 8 and a supporting seat 10, wherein the reflecting mirror 8 is arranged on the supporting seat 10, so that the reflecting mirror 8 and the laser measuring assembly are positioned at the same level. Specifically, the reflecting mirror 8 includes a center hole in the center of the reflecting mirror 8 and reflecting surfaces located on the peripheral side of the center hole.
It should be noted that, after the measuring laser reaches the reflecting mirror 8, part of the laser will be reflected by the reflecting mirror 8, so that the measuring laser passes through the smoke to be measured again, and finally reaches the position of the off-axis concave mirror 2.
Further, the position detection assembly comprises a position sensor 4 and an indication light source 11; wherein an indication light source 11 is mounted on the reflecting assembly for emitting indication light towards the dichroic mirror 5; the position sensor 4 is located on the side of the dichroic mirror 5, and is used for receiving the indication light reflected by the dichroic mirror 5 and acquiring the relative position between the reflecting component and the laser measuring component.
As shown, the indicating light source 11 is mounted on the reflecting mirror 8, the indicating light emitted from the indicating light source 11 reaches the dichroic mirror 5, then the dichroic mirror 5 reflects the indicating light to the position sensor 4, and then the position sensor 4 can obtain the relative position of the measuring component with respect to the reflecting component.
Further, the flue gas analysis assembly comprises a detector 3, wherein the detector 3 is positioned at one side of the off-axis concave mirror 2 and is used for acquiring the measuring laser reflected by the off-axis concave mirror 2.
Since the intensity of the measuring laser beam is attenuated when passing through the smoke containing the measuring component, the concentration and the component of the smoke to be measured can be measured according to the intensity of the laser beam when the detector 3 detects the attenuated laser beam.
Further, the position adjusting assembly comprises an X-axis adjusting motor 6, a Y-axis adjusting motor 7, a base 12, a first adjusting seat 13 and a second adjusting seat 14; wherein the base 12 is composed of a bottom cross plate and two vertical plates perpendicular to the cross plate. The first adjusting seat 13 is shaped like a Chinese character 'ji', and two ends of the first adjusting seat are rotatably connected with the base 12, in particular to a vertical plate. The second adjusting seat 14 is rotatably arranged at the middle section of the first adjusting seat 13; the Y-axis regulating motor 7 is arranged outside the base 12, and the rotating shaft drives the first regulating seat 13 to rotate through mechanical transmission (gear transmission, belt wheel transmission, chain wheel transmission and the like); the X-axis adjusting motor 6 is mounted in the middle of the first adjusting seat 13, and is used for driving the second adjusting seat 14 to rotate through mechanical transmission (gear transmission, belt wheel transmission, chain wheel transmission, etc.).
In the present utility model, the X-axis adjustment motor 6 and the Y-axis adjustment motor 7 mainly achieve the angle adjustment of the measuring laser 1. The coordinate adjustment mode of the present utility model is not limited to angle adjustment, and may be designed as a moving mode in which the measuring laser 1 is translated along X, Y and the Z axis by motor driving.
It should be further noted that, the X-axis adjusting motor 6 and the Y-axis adjusting motor 7 are controlled by a driving controller, and the base 12 of the present utility model corresponds to a pan-tilt, and integrates all the devices in fig. 1, including the driving controller not shown in the drawing.
As shown in fig. 2, which is a logic frame diagram of the optical path self-stabilization device, it can be seen from the diagram that the position sensor 4 collects the position information of the indication light from the laser side component, if the posture is changed (the position between the laser measuring component and the reflecting component is changed), the position sensor 4 will transmit the position information of the indication light to the main control unit, and the main control unit will control the X-axis adjusting motor 6 and the Y-axis adjusting motor 7 through the driving controller, so that the position relationship between the laser measuring component and the reflecting component accords with the expectations.
A self-stabilizing method for the light path is used for the self-stabilizing device of the light path, and comprises the following steps:
S1: constructing a coordinate system, wherein a detection surface of the position sensor 4 is taken as an XY coordinate plane, and the center of the detection surface is taken as a coordinate origin;
s2: after the detection component and the reflection component are installed and debugged, the coordinates of the indication light source 11 irradiated in the position sensor 4 after being reflected by the dichroic mirror 5 are initial coordinates;
S3: recording coordinates of the irradiation of the indicating light source 11 in the position sensor 4 representing the relative position between the laser measuring assembly and the reflecting assembly in real time by the position sensor 4;
S4: and comparing the real-time coordinates with the initialized coordinates, and if the error is larger than the set allowable deviation d 0, carrying out coordinate adjustment through the position adjustment component until the error between the real-time coordinates and the initialized coordinates is smaller than or equal to the allowable deviation d 0.
In addition, in steps S1 to S4, the initial coordinates should be within a range not exceeding 10% of the entire area of the detector 3 in the center position of the detector 3, so that the indication light does not strike a position other than the detection surface of the detector 3 when the optical path is shifted, and the position sensor 4 in the position detection unit mainly reflects the relative position between the reflection unit and the measurement unit by recording the coordinates of the indication light, as shown in fig. 3. And after each time of regulation by the X-axis regulation motor 6 and the Y-axis regulation motor 7, the position sensor 4 re-records the coordinates, and then verifies again whether the error is smaller than or equal to the allowable error d 0.
Further, the calculation formula of the error is:
Where x and y are real-time coordinate values and x 0 and y 0 are initial coordinate values.
Further, coordinate adjustment is performed by the position adjustment component until an error between the real-time coordinate and the initialized coordinate is less than or equal to a set deviation, including the following steps:
If (X-X 0) is larger than zero, the X-axis regulating motor 6 in the position regulating assembly rotates positively to drive the laser measuring assembly to rotate in the horizontal plane, so that Otherwise, the X-axis regulating motor 6 is reversed to drive the laser measuring assembly to rotate in the horizontal plane, so that/>Wherein d 0 is the allowable deviation;
If (Y-Y 0) is larger than zero, the Y-axis regulating motor 7 in the position regulating assembly rotates positively to drive the laser measuring assembly to rotate on the vertical plane, so that Otherwise, the Y-axis regulating motor 7 is reversed to drive the laser measuring assembly to rotate on the vertical plane, so that/>
The vertical plane refers to a plane perpendicular to the middle of the first adjustment seat 13 in fig. 1, and the horizontal plane refers to a plane perpendicular to the vertical plane. The callback rotation speed of the X-axis motor is proportional to |x-X 0 |, namely, the farther the current position deviates from the initial state, the quicker the callback speed is, and when the current position is closer to the initial state in the callback process, the corresponding callback speed is slower and slower, so that overshoot is avoided. The direction of rotation is positively and negatively correlated with (x-x 0).
The callback rotation speed of the Y-axis motor is proportional to |y-Y 0 |, namely, the farther the current position deviates from the initial state, the quicker the callback speed is, and when the current position is closer to the initial state in the callback process, the corresponding callback speed is slower and slower, so that overshoot is avoided. The direction of rotation is positively and negatively correlated with (y-y 0).
Although the utility model has been described in detail with reference to the foregoing embodiments, it will be understood by those of ordinary skill in the art that: the technical scheme described in the foregoing embodiments can be modified or some technical features thereof can be replaced by equivalents; such modifications and substitutions do not depart from the spirit and scope of the technical solutions of the embodiments of the present utility model.
Claims (7)
1. An optical path self-stabilization device, comprising:
the laser measuring assembly is used for emitting measuring laser and transmitting the measuring laser to the smoke to be measured;
The reflection assembly is positioned at one side of the laser measurement assembly and is used for reflecting the laser which passes through the smoke to be measured and enabling the laser to pass through the smoke to be measured again and reach the laser measurement assembly; the smoke to be measured is positioned between the laser measuring component and the reflecting component;
The position detection assembly is used for detecting the relative position between the reflecting assembly and the laser measurement assembly;
the smoke analysis component is used for analyzing the measuring laser reaching the laser measurement component and acquiring the components of the smoke to be measured;
a support table (9) for mounting a laser measuring assembly;
And the position adjusting assembly is used for adjusting the angle between the laser measuring assembly and the reflecting assembly according to the relative position between the reflecting assembly and the laser measuring assembly.
2. The light path self-stabilization device according to claim 1, wherein the laser measurement assembly comprises a measurement laser (1), an off-axis concave mirror (2) and a dichroic mirror (5) which are mounted on the support table (9), and a through hole is formed in the center of the off-axis concave mirror (2);
The measuring laser (1) is used for emitting measuring laser, and the measuring laser passes through a through hole of the off-axis concave mirror (2) and then is transmitted to the flue gas to be measured through the dichroic mirror (5).
3. An optical path self-stabilizing device according to claim 2, characterized in that said off-axis concave mirror (2) is an off-axis parabolic mirror, the through-hole is parallel to the collimated beam, deviating by 90 °, and the surface is coated with a gold reflective film; the dichroic mirror (5) is a long-wave-pass dichroic mirror, the incident angle is 45 degrees, and the included angle between two mirror surfaces of the dichroic mirror (5) is 0.5 degrees.
4. An optical path self-stabilizing arrangement according to claim 1, characterized in that the reflecting assembly comprises a mirror (8) and a support (10), the mirror (8) being mounted on the support (10).
5. An optical path self-stabilizing arrangement according to claim 2, characterized in that said position detection assembly comprises a position sensor (4) and an indicating light source (11);
The indicating light source (11) is arranged on the reflecting component and is used for emitting indicating light to the dichroic mirror (5);
The position sensor (4) is positioned on one side of the dichroic mirror (5) and is used for receiving the indication light reflected by the dichroic mirror (5) and acquiring the relative position between the reflecting component and the laser measuring component.
6. An optical path self-stabilizing device according to claim 2, wherein the smoke analysis assembly comprises a detector (3), and the detector (3) is located at one side of the off-axis concave mirror (2) and is used for acquiring the measuring laser reflected by the off-axis concave mirror (2).
7. A light path self-stabilizing arrangement according to any one of claims 1-6, wherein said position adjustment assembly comprises an X-axis adjustment motor (6), a Y-axis adjustment motor (7), a base (12), a first adjustment seat (13) and a second adjustment seat (14);
The first adjusting seat (13) is shaped like a Chinese character 'ji', and two ends of the first adjusting seat are rotatably connected with the base (12);
The second adjusting seat (14) is rotatably arranged at the middle section of the first adjusting seat (13);
the X-axis regulating motor (6) is used for driving the second regulating seat (14) to rotate through mechanical transmission;
The Y-axis regulating motor (7) is used for driving the first regulating seat (13) to rotate through mechanical transmission.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202322548362.1U CN220932755U (en) | 2023-09-19 | 2023-09-19 | Light path self-stabilizing device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202322548362.1U CN220932755U (en) | 2023-09-19 | 2023-09-19 | Light path self-stabilizing device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN220932755U true CN220932755U (en) | 2024-05-10 |
Family
ID=90933246
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202322548362.1U Active CN220932755U (en) | 2023-09-19 | 2023-09-19 | Light path self-stabilizing device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN220932755U (en) |
-
2023
- 2023-09-19 CN CN202322548362.1U patent/CN220932755U/en active Active
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| RU2709435C2 (en) | Smoke detector | |
| US4360275A (en) | Device for measurement of optical scattering | |
| FI90693C (en) | Methods and apparatus for determining parameters for gaseous substances | |
| US8237924B2 (en) | Long optical path gas monitor | |
| CA2159831A1 (en) | Self aligning in-situ ellipsometer and method of using for process monitoring | |
| CN110989695B (en) | Automatic sun tracking device and method on mobile platform | |
| CN112198169B (en) | Wafer detection device and on-line complete equipment | |
| CN115356022B (en) | Film stress measuring device and method based on white light source | |
| CN109490253A (en) | A kind of novel analog natural light bidirectional reflectance distribution function test device | |
| JPH0248054B2 (en) | ||
| CN220932755U (en) | Light path self-stabilizing device | |
| CN110411377B (en) | Right angle detection and adjustment system and method | |
| CN221260786U (en) | Light path alignment device of scanning type gas laser detection system | |
| CN112212857B (en) | High-precision free space type sun tracker and tracking method thereof | |
| EP3550289B1 (en) | Gas analysis device | |
| CN209513615U (en) | A kind of novel analog natural light bidirectional reflectance distribution function test device | |
| JP2002527744A (en) | In particular, optical measuring heads for automatic analyzers of chemical or biochemical reactions | |
| CN101324521B (en) | Light path system of interferometer | |
| CN1746657A (en) | Optical parameter absolute value measuring device and method thereof | |
| CN114354538A (en) | Laser gas sensing device and gas detection method | |
| CN221464565U (en) | Measuring device | |
| CN211856398U (en) | Detection device | |
| CN115290191B (en) | Extreme ultraviolet source normal position polarization detection device | |
| CN220063826U (en) | Water quality on-line monitoring device | |
| CN219573904U (en) | Angular resolution analyzer containing transreflective test |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant |