CN220918193U - Ultrathin low-temperature cold trap - Google Patents
Ultrathin low-temperature cold trap Download PDFInfo
- Publication number
- CN220918193U CN220918193U CN202322214551.5U CN202322214551U CN220918193U CN 220918193 U CN220918193 U CN 220918193U CN 202322214551 U CN202322214551 U CN 202322214551U CN 220918193 U CN220918193 U CN 220918193U
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- cold trap
- pipe
- box body
- layer surrounding
- flow channel
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Links
- 238000001816 cooling Methods 0.000 claims abstract description 62
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims abstract description 29
- 239000000110 cooling liquid Substances 0.000 description 6
- 230000007812 deficiency Effects 0.000 description 2
- 239000007788 liquid Substances 0.000 description 2
- 230000000903 blocking effect Effects 0.000 description 1
- 230000005494 condensation Effects 0.000 description 1
- 238000009833 condensation Methods 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000002035 prolonged effect Effects 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
Landscapes
- Vaporization, Distillation, Condensation, Sublimation, And Cold Traps (AREA)
Abstract
The ultrathin low-temperature cold trap comprises a cold trap box body, wherein a water inlet collecting groove is fixedly arranged on the outer side wall of the cold trap box body, a water inlet pipe is arranged on the water inlet collecting groove, a multi-layer surrounding type cooling pipe is arranged in the cold trap box body, a flow channel is formed between the multi-layer surrounding type cooling pipes, an air inlet pipe is arranged on the cold trap box body at the center of the multi-layer surrounding type cooling pipe, a collecting pipe is arranged at the bottom of the cold trap box body at the outer tail end of the flow channel, the multi-layer surrounding type cooling pipe is a spiral ring pipe, one end of the center of the multi-layer surrounding type cooling pipe penetrates through the bottom wall of the cold trap box body and is provided with a water outlet pipe, and the outer tail end of the multi-layer surrounding type cooling pipe is communicated with the water inlet collecting groove.
Description
Technical Field
The utility model relates to the technical field of low-temperature cold traps, in particular to an ultrathin low-temperature cold trap.
Background
In high vacuum and ultra-high vacuum systems, in order to obtain a better vacuum environment, not only the gas in the vacuum chamber but also the water and oil vapor which are placed in the vacuum chamber and evaporated from the product are removed, the water and oil vapor are condensed into liquid and then removed; deaeration relies on a vacuum pump and deaeration relies on a cold trap or cold plate, with the usual approach being to install cold trap components between the main pump inlet and the vacuum chamber.
However, the cooling path of the existing cryotrap is long, so that the space occupied by the cryotrap is large, and the storage and the use of equipment are inconvenient.
Therefore, in order to solve the deficiencies of the prior art, it is necessary to provide an ultra-thin cryotrap to solve the deficiencies of the prior art.
Disclosure of utility model
The utility model aims to avoid the defects of the prior art and provide an ultrathin low-temperature cold trap, and the ultrathin low-temperature cold trap can ensure the length of a cooling path through a plurality of layers of surrounding cooling pipes so as to ensure the cooling efficiency of the low-temperature cold trap, and meanwhile, the height of the low-temperature cold trap can be greatly reduced, the occupied space is reduced, the storage and the use of equipment are convenient, and the practicability is higher.
The above object of the present utility model is achieved by the following means.
Providing an ultrathin low-temperature cold trap, wherein the ultrathin low-temperature cold trap comprises a cold trap box body, a water inlet collecting tank is fixedly arranged on the outer side wall of the cold trap box body, a water inlet pipe is arranged on the water inlet collecting tank, a plurality of layers of surrounding cooling pipes are arranged in the cold trap box body, a flow channel is formed between the plurality of layers of surrounding cooling pipes, an air inlet pipe is arranged on the cold trap box body at the center of the plurality of layers of surrounding cooling pipes, and a collecting pipe is arranged at the bottom of the cold trap box body at the outer tail end of the flow channel;
the multi-layer surrounding type cooling pipe is a spiral ring pipe, one end of the center of the multi-layer surrounding type cooling pipe penetrates through the bottom wall of the cold trap box body and is provided with a water outlet pipe, and the outer tail end of the multi-layer surrounding type cooling pipe is communicated with the water inlet collecting groove.
Specifically, the diameters of the inner walls of the air inlet pipe and the center of the multi-layer surrounding cooling pipe are the same, and the top and the bottom of the multi-layer surrounding cooling pipe are propped against the cold trap box body.
Preferably, the ends of the flow channels are provided with baffles on a multi-layer surrounding cooling tube, the collection tube being in communication with the flow channels.
In particular, the diameter of the collection tube is smaller than the width of the flow channel.
Further, the height of the baffle plate is the same as the height of the multi-layer surrounding cooling tube and the cross-sectional area of the entire flow channel is the same.
The utility model ensures that the low-temperature cold trap can ensure the length of a cooling path through the multi-layer surrounding cooling pipes so as to ensure the cooling efficiency of the low-temperature cold trap, can greatly reduce the height of the low-temperature cold trap, reduces the occupied space, is convenient for the storage and the use of equipment, and has strong practicability.
Drawings
The utility model is further illustrated by the accompanying drawings, which are not to be construed as limiting the utility model in any way.
FIG. 1 is a schematic perspective view of the ultra-thin cryogenic trap of the present utility model.
FIG. 2 is a schematic bottom cross-sectional view of the ultra-thin cryogenic trap of the present utility model.
FIG. 3 is a schematic side cross-sectional view of the ultra-thin cryotrap of the present utility model.
From fig. 1 to 3, it includes:
1. A cold trap box;
2. A water inlet collecting tank;
3. a water inlet pipe;
4. A multi-layer surrounding cooling tube;
5. a flow channel;
6. an air inlet pipe;
7. a collection pipe;
8. a water outlet pipe;
9. a baffle plate.
Detailed Description
The utility model will be further described with reference to the following examples.
Example 1.
As shown in fig. 1-3, the ultrathin low-temperature cold trap comprises a cold trap box body 1, wherein a water inlet collecting tank 2 is fixedly arranged on the outer side wall of the cold trap box body 1, a water inlet pipe 3 is arranged on the water inlet collecting tank 2, a multi-layer surrounding cooling pipe 4 is arranged in the cold trap box body 1, a flow channel 5 is formed between the multi-layer surrounding cooling pipes 4, an air inlet pipe 6 is arranged on the cold trap box body 1 at the center of the multi-layer surrounding cooling pipe 4, and a collecting pipe 7 is arranged at the bottom of the cold trap box body 1 at the outer tail end of the flow channel 5.
The application is used between the inlet of a main pump and a vacuum chamber to remove steam, firstly, the cold trap box body 1 is used for carrying out external covering and supporting equipment, then cooling liquid is introduced from the outside through the water inlet pipe 3 and enters the water inlet collecting tank 2 to uniformly convey the cooling liquid to the multi-layer surrounding cooling pipe 4, so that the inside of the whole cold trap box body 1 can be cooled, the center of the multi-layer surrounding cooling pipe 4 is a gas inlet discharged from the vacuum chamber, and the gas is cooled from the center of the multi-layer surrounding cooling pipe 4 through the forward cooling of the flow channel 5 in a circle until reaching the tail end of the flow channel 5 and flows into the collecting pipe 7 for condensation collection.
The multi-layer surrounding type cooling pipe 4 is a spiral ring pipe, one end of the center of the multi-layer surrounding type cooling pipe 4 penetrates through the bottom wall of the cold trap box body 1 and is provided with a water outlet pipe 8, and the outer tail end of the multi-layer surrounding type cooling pipe 4 is communicated with the water inlet collecting groove 2.
The multi-layer surrounding type cooling pipe 4 is a spiral ring pipe, so that the cooling path of gas can be prolonged by increasing the number of surrounding layers, the height of the multi-layer surrounding type cooling pipe 4 can be reduced, the height of the cold trap box body 1 is also reduced, the occupied space of equipment is reduced, the equipment is convenient to store and use, the flowing direction of cooling liquid of the multi-layer surrounding type cooling pipe 4 and the flowing direction of gas are opposite, the gas can be better condensed to form a hedging gesture, the cooling liquid is injected into the multi-layer surrounding type cooling pipe 4 through the water inlet collecting groove 2, and the flowing section of the cooling liquid can be increased by the water inlet collecting groove 2, so that the cooling liquid is identical to the section of the multi-layer surrounding type cooling pipe 4.
The inner wall diameters of the air inlet pipe 6 and the center of the multi-layer surrounding cooling pipe 4 are the same, and the top and the bottom of the multi-layer surrounding cooling pipe 4 are propped against the cold trap box body 1.
The gas entering through the gas inlet pipe 6 directly enters into the center of the multi-layer circulating cooling pipe 4 and then moves in the flow channel 5, so that the top and the bottom of the multi-layer circulating cooling pipe 4 are propped against the cold trap box 1 to prevent the gas from moving in order to enable the gas to move along the spiral path of the multi-layer circulating cooling pipe 4.
The end of the flow channel 5 is provided with a baffle 9 on the multi-layer surrounding cooling tube 4, and the collecting tube 7 is in communication with the flow channel 5.
The end of the flow channel 5 is provided with a baffle plate 9 for blocking in order to prevent gas from flowing into other positions, and the gas is condensed into liquid state through the multi-layer surrounding cooling tube 4 and enters the collecting tube 7 for collection.
The diameter of the collection tube 7 is smaller than the width of the flow channel 5.
The collector tube 7 only collects at the extreme end of the flow channel 5, so that the collector tube 7 does not cover other places, the diameter being smaller than the width of the flow channel 5.
The baffle 9 has the same height as the multilayer surrounding cooling tube 4 and the same cross-sectional area as the entire flow channel 5.
The baffle plate 9 completely closes the entire flow passage 5 in order to prevent the gas from flowing into other positions after cooling.
The multi-layer surrounding type cooling pipe 4 ensures that the low-temperature cold trap can ensure the length of a cooling path so as to ensure the cooling efficiency of the low-temperature cold trap, can greatly reduce the height of the low-temperature cold trap, reduces the occupied space, is convenient for the storage and use of equipment, and has strong practicability.
Finally, it should be noted that the above embodiments are only for illustrating the technical solution of the present utility model and not for limiting the scope of the present utility model, and although the present utility model has been described in detail with reference to the preferred embodiments, it should be understood by those skilled in the art that modifications or equivalent substitutions can be made to the technical solution of the present utility model without departing from the spirit and scope of the technical solution of the present utility model.
Claims (5)
1. The ultra-thin low temperature cold trap, its characterized in that: the cold trap comprises a cold trap box body, wherein a water inlet collecting groove is fixedly arranged on the outer side wall of the cold trap box body, a water inlet pipe is arranged on the water inlet collecting groove, a plurality of layers of surrounding cooling pipes are arranged in the cold trap box body, a flow channel is formed between the plurality of layers of surrounding cooling pipes, an air inlet pipe is arranged on the cold trap box body at the center of the plurality of layers of surrounding cooling pipes, and a collecting pipe is arranged at the bottom of the cold trap box body at the outer tail end of the flow channel;
The multi-layer surrounding type cooling pipe is a spiral ring pipe, one end of the center of the multi-layer surrounding type cooling pipe penetrates through the bottom wall of the cold trap box body and is provided with a water outlet pipe, and the outer tail end of the multi-layer surrounding type cooling pipe is communicated with the water inlet collecting groove.
2. The ultra-thin cryogenic cold trap of claim 1, wherein: the diameters of the inner walls of the air inlet pipe and the center of the multi-layer surrounding cooling pipe are the same, and the top and the bottom of the multi-layer surrounding cooling pipe are propped against the cold trap box body.
3. The ultra-thin cryogenic cold trap of claim 1, wherein: the end of the flow channel is provided with a baffle plate on the multi-layer surrounding cooling pipe, and the collecting pipe is communicated with the flow channel.
4. The ultra-thin cryogenic cold trap of claim 1, wherein: the diameter of the collection tube is smaller than the width of the flow channel.
5. The ultra-thin cryogenic cold trap of claim 3, wherein: the baffle plate has the same height as the multilayer surrounding cooling tube and the same cross-sectional area as the entire flow passage.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202322214551.5U CN220918193U (en) | 2023-08-17 | 2023-08-17 | Ultrathin low-temperature cold trap |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202322214551.5U CN220918193U (en) | 2023-08-17 | 2023-08-17 | Ultrathin low-temperature cold trap |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN220918193U true CN220918193U (en) | 2024-05-10 |
Family
ID=90940198
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202322214551.5U Active CN220918193U (en) | 2023-08-17 | 2023-08-17 | Ultrathin low-temperature cold trap |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN220918193U (en) |
-
2023
- 2023-08-17 CN CN202322214551.5U patent/CN220918193U/en active Active
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