CN220902172U - Laser boron doping equipment with efficient dust removal system - Google Patents

Abstract

The utility model discloses laser boron doping equipment with an efficient dust removing system, which comprises a laser light path system, a laser processing platform, an upper and lower material runner, a complete machine shell and a dust removing system, wherein the dust removing system comprises a table top dust removing device, an ion air knife device, a runner dust removing device and an air filtering device, and the table top dust removing device is arranged between the laser light path system and the laser processing platform and is used for sucking dust-carrying gas generated in the laser processing process; the ion air knife device is arranged on the feeding and discharging flow passage and is used for carrying out static electricity removal and dust removal on the workpiece; the runner dust removing device is arranged on the upper and lower runners and is used for sucking dust on a workpiece; the air filtering device is arranged on the whole machine shell and is used for providing clean air; be equipped with many dust collector in the whole laser boron doping equipment, can use different modes to remove dust repeatedly at each station, dust removal effect is splendid, very big improvement product processingquality and machining efficiency, the effectual healthy of environmental protection and operating personnel.

Description

Laser boron doping equipment with efficient dust removal system

Technical Field

The utility model relates to laser boron doping equipment, in particular to laser boron doping equipment with various dust removal devices and capable of realizing efficient dust removal.

Background

In the laser processing process of doping technology by laser processing equipment, a lot of dust is generated in the laser processing process of doping the diffusion surface by laser. If the dust does not pass through the space inside the airflow cleaning device, the dust generated in the processing process is easily absorbed on the surface of the wafer to be processed, and the processing efficiency and the processing precision are affected. The dust is light and affects the processing technology, and the dust is heavy and affects the surrounding personnel and even the environment. Therefore, in order to protect the environment and the health of workers, dust removing equipment in a laser processing device is very important.

In the prior art, a single type of dust removal device is adopted to remove dust from the whole machine, so that unstable dust removal components and substandard dust removal indexes are often caused. After dust still deposits, manual cleaning mesa and marble need stop the maintenance, and waste time and energy, and there is the potential safety hazard of nonstandard operation, influences equipment open probability.

Disclosure of utility model

In order to solve the defects that a dust removing component is unstable during working, dust removing indexes are not up to standard, manual cleaning is required to be stopped after dust deposition and the like in the prior art, the utility model provides laser boron doping equipment with an efficient dust removing system, which comprises a laser light path system, a laser processing platform, a feeding and discharging runner, a complete machine shell and a dust removing system, wherein the dust removing system comprises a table top dust removing device, an ion air knife device, a runner dust removing device and an air filtering device, and the table top dust removing device is arranged between the laser light path system and the laser processing platform and is used for sucking dust-carrying gas generated in the laser processing process; the ion air knife device is arranged on the upper and lower material flow channels and is used for carrying out static electricity removal and dust removal on workpieces in the upper and lower material flow channels; the runner dust removing device is arranged on the upper and lower runners and is used for sucking dust-carrying gas on a workpiece in the upper and lower runners; the air filtering device is arranged on the whole machine shell and is used for providing filtered clean air.

The table top dust removing device comprises a dust removing box, a protective cover and a dust collecting pipe; the dust removing box is covered on the laser processing platform to form a processing space, and an access door is arranged on at least one side wall of the dust removing box; the protective cover is connected between the top plate of the dust removing box and the laser light path system; the dust collection pipe is arranged on one side wall of the dust collection box and is used for sucking dust-carrying gas.

The dust collection pipe is arranged on one side wall of the dust collection box 1, and a dust collection air knife is arranged on the other opposite side wall; the access door is made of a light filtering material; the upper edge of the access door is hinged to the side wall of the dust removal box 1 through a hinge, and a magnet and/or a handle is arranged between the lower edge of the access door and the side wall of the dust removal box.

Two protective covers are arranged on the top plate of the dust removing box, so that two sets of laser optical path systems can be conveniently connected and processed simultaneously; two dust collection pipes 4 are correspondingly arranged on the side wall of the dust collection box 1 so as to suck dust-carrying gas generated during processing of the two sets of laser light path systems.

The ion air knife device comprises a mounting frame, at least one upper ion air knife and at least one lower ion air knife, wherein the upper ion air knife and the lower ion air knife are horizontally arranged on the mounting frame, the upper and lower material flowing channels pass through between the upper ion air knife and the lower ion air knife, and the air outlet of the upper ion air knife faces downwards and the air outlet of the lower ion air knife faces upwards.

The installation frame comprises an upright post and an installation plate, the upright post is vertically fixed on two side edges of the upper material flowing channel and the lower material flowing channel, the installation plate is horizontally fixed on the upright post, the upper ion air knife or the lower ion air knife is installed on the installation plate, two ends of the installation plate are connected with the upright post through angle adjusting seats, the installation plate is rotationally connected with the angle adjusting seats, and the angle of the installation plate can be adjusted through the angle adjusting seats.

The runner dust collector comprises a mounting seat, two vertical plates and an air suction cover, wherein the mounting seat is fixed on one side of an upper blanking runner, the two vertical plates are vertically arranged at two ends of the mounting seat, and the air suction cover is fixed at the top ends of the two vertical plates; the air suction cover is provided with at least one air suction opening and one air collection opening, the air suction opening is aligned to a workpiece positioned on the upper and lower material flow channels and is used for absorbing dust-carrying gas on the workpiece, and the dust-carrying gas is discharged through the air collection opening.

The runner dust collector still includes the blast apparatus of installing go up unloading runner opposite side, blast apparatus includes blowing pipe and blowing pipe mounting bracket.

The air filtering device comprises a filtering unit body and a mounting frame, wherein the filtering unit body is fixed in the mounting frame, and the mounting frame is fixed in a window reserved in the whole machine shell.

The air filtering device is arranged at the top of the whole machine shell, and the ion air knife device and the runner dust removing device are arranged in series in the feeding and discharging runners.

The technical scheme provided by the utility model has the beneficial effects that:

1. Be equipped with many dust collector in the whole laser boron doping equipment, adopted the overall arrangement of subregion dust pelletizing system and follow-up dust removal dust extraction system: the air filter device is responsible for top dust removal and equipment internal environment dust removal, the ion air knife device and the runner dust removal device are used for carrying out dust removal along with the feeding and discharging runners, and the table cover dust removal assembly is used for removing dust in a table area. The utility model can repeatedly remove dust in different modes at each station, has excellent dust removal effect, greatly improves the processing quality and processing efficiency of products, and effectively protects the environment and the health of operators.

2. The dust removing system has reasonable overall design structure, has the functions of bidirectional correspondence of blowing and dust extraction, can avoid secondary dust emission, and ensures that dust cannot fly freely in a working environment; the pollution to the working environment is reduced, and the frequency of manual maintenance and cleaning is reduced; the method is convenient for field operation, reduces labor cost, reduces frequency of shutdown maintenance, saves production line time, and improves normal operation time of equipment (uptime).

3. The dust removing system provided by the utility model has the advantages that the staff performs comprehensive test and inspection; the dust removal rate of the laser boron doping device is improved to 95% at present, the dust removal rate of the laser boron doping device is improved to 95% remarkably, the dust removal level of the device required by a customer deviation meter can be finally met, the index of 1000-level clean room use is met, and the effect is continuous and stable.

Drawings

The utility model is described in detail below with reference to examples and figures, wherein:

FIG. 1 is a schematic side view of the whole machine of the present utility model;

FIG. 2 is a schematic diagram of a table top dust collector assembly;

FIG. 3 is an exploded view of the tabletop dust-removing device;

FIG. 4 is a schematic diagram showing the layout of an ion air knife in the feeding and discharging flow channels;

FIG. 5 is a schematic diagram of an ion air knife structure;

FIG. 6 is a schematic diagram of a mounting frame for an ionic wind blade;

FIG. 7 is a schematic view of the suction side structure of the flow path dust collector;

FIG. 8 is a schematic diagram of the overall structure of a flow channel dust collector;

FIG. 9 is a schematic view of an air filtration device;

Description of the reference numerals: the dust removal box (1), cabin door (1 a), safety cover (2), dust removal air knife (3), dust absorption pipe (4), main pipe (5), branch pipe (6), handle (7), mounting (8), hinge (9), magnet keep away position (10), go up unloading runner (11), complete machine shell (12), filter screen (13), side (14), go up ion air knife (21), lower ion air knife (22), stand (23), mounting panel (24), angle adjusting seat (25), wind power governing valve (26), mount pad (41), riser (42), suction hood (43), inlet scoop (44), collection wind gap (45), blowing pipe (46), blowing pipe mounting bracket (47), filter unit body (61), mount frame (62), mesa dust collector (100), ion air knife device (200), runner dust collector (400), air filter device (600).

Detailed Description

The present utility model will be described in further detail with reference to the drawings and examples, in order to make the objects, technical solutions and advantages of the present utility model more apparent. It should be understood that the specific embodiments described herein are for purposes of illustration only and are not intended to limit the scope of the utility model.

The utility model discloses laser boron doping equipment with an efficient dust removing system, which is shown by referring to a side view schematic diagram of a whole machine in fig. 1, and comprises a laser light path system, a laser processing platform, an upper and lower material flow channel 11, a whole machine shell 12 and a dust removing system, wherein the dust removing system comprises a table top dust removing device 100, an ion air knife device 200, a flow channel dust removing device 400 and an air filtering device 600, and the table top dust removing device 100 is arranged between the laser light path system and the laser processing platform and is used for sucking dust-carrying gas generated in the laser processing process; the ion air knife device 200 is arranged on the upper and lower material flow channels 11 and is used for carrying out static electricity removal and dust removal on workpieces positioned in the upper and lower material flow channels 11; the runner dust removing device 400 is arranged on the upper and lower runners 11 and is used for sucking dust-carrying gas on a workpiece in the upper and lower runners 11; the air filter device 600 is mounted on the complete machine housing 12 for providing filtered clean air.

Referring to the general assembly schematic of the table top dust removing device shown in fig. 2, the table top dust removing device 100 includes a dust removing box 1, a protective cover 2, and a dust collecting pipe 4.

Wherein the dust removing box 1 is covered on the laser processing platform to form a processing space, and at least one side wall of the side walls of the dust removing box 1 is provided with an access door 1a. In the laser processing, in fewer cases, there are broken battery pieces on the laser processing platform, and the laser processing and the rapid removal of broken battery pieces can be observed through the access door 1a.

The protective cover 2 is connected between the top plate of the dust removal box 1 and the laser path system; the suction pipe 4 is installed at one side wall of the dust box 1 to suck dust-carrying gas. The laser beam produces dust during processing of a workpiece (a so-called workpiece, in most cases a solar cell), and the dust is collected in the dust box 1 and does not contaminate other parts of the laser processing apparatus. The laser path system comprises a field lens, a vibrating lens or other lens groups, the protective cover 2 and the dust removal box 1 are communicated with each other, and laser beams emitted by the laser path system penetrate through the hollow protective cover 2 and irradiate on a workpiece from top to bottom to process the workpiece.

Referring to an exploded view of the table dust removing apparatus shown in fig. 3, the dust removing box 1 has a rectangular parallelepiped shape, and a dust suction pipe 4 is installed on one sidewall of the dust removing box 1 to suck dust-carrying gas; on the other side wall opposite to the dust removing air knife 3, the dust removing air knife 3 is arranged for electrostatic dust removal of the workpiece entering the dust removing box 1. The dust removal air knife 3 is arranged at the lower edge of the side wall and has two functions, namely, the electrostatic dust removal is carried out on the battery piece which is about to enter the dust removal box 1; secondly, the battery piece in the processing in the dust removal box 1 is blown to remove dust, and the dust suction pipe 4 can timely suck the blown dust.

Referring to the schematic diagram of the table top dust removing device shown in fig. 2, after the dust suction pipe 4 sucks dust, the dust needs to be conveyed to the outside of the laser processing equipment, so the table top dust removing device further comprises a dust removing pipeline, the dust removing pipeline comprises a main pipe 5 and a branch pipe 6 which are communicated with each other, the end of the branch pipe 6 is connected with the dust suction pipe 4, and the main pipe 5 discharges dust-carrying gas.

In the preferred embodiment, the access door 1a is made of a filter material to facilitate the observation of the condition of the laser machining table. In order to facilitate observation of the inside of the dust box 1 from a plurality of angles and to handle the work pieces in the dust box 1, in a preferred embodiment (see fig. 2 or 3), the access door 1a is installed on 3 side walls of the dust box 1.

Referring to the preferred embodiment shown in fig. 3, a handle 7 is provided on the top plate of the dust box 1 to facilitate the movement and adjustment of the dust box 1 to an accurate position by the handle 7 during installation or to move the dust box 1 during maintenance of an important abnormality.

The top plate and/or the side wall of the dust removing box 1 are/is provided with a fixing piece 8, and the dust removing box 1 is arranged on the shell of the laser processing equipment through the fixing piece 8.

Referring to the preferred embodiment shown in fig. 3, a window is formed in the sidewall of the dust box 1, and an access door 1a is installed in the window. The dust removal box 1 is provided with a rim 14 around the side wall. When the access door 1a is closed, the access door 1a is in close contact with the leaning edge 14, so that good sealing and dust prevention effects can be achieved. Referring to fig. 3, the dust removing air knife 3 is mounted on a side edge 14 of the lower side wall.

Referring to the dust box explosion schematic shown in fig. 3, the upper edge of the access door 1a is hinged on the side wall of the dust box 1 through a hinge 9, and a magnet 11 and/or a handle is arranged between the lower edge of the access door 1a and the side wall of the dust box 1. The icon 10 indicates that the magnet is avoiding. So arranged, the access door 1a is conveniently opened and firmly closed. The icon 12 in fig. 2 and 3 is a handle for opening and closing the access door 1a.

The icon 13 in fig. 3 is a filter screen, and is installed at the front end of the dust collection tube 4, and is used for filtering and adsorbing large-particle dust, so as to prevent the large particles from entering the dust collection tube 4 to block the dust collection tube 4. The illuminator and the light receiver of the light path sensor are respectively arranged on two opposite side walls of the dust removing box 1, which are clung to the filter screen. The light emitter generates coded infrared light beams, and the light receiver receives corresponding light beams; a rectangular protection area is generated between the light emitter and the light receiver. When an opaque object such as dust enters the area, the corresponding light beam is blocked, the light emitter or the light receiver generates a shading signal and outputs the shading signal to the controller, the shading signal is finally converted into an alarm signal, and an audible and visual alarm is sent out through the alarm to remind an operator to process.

In order to improve the processing efficiency, in the preferred embodiment, two protection covers 2 are arranged on the top plate of the dust removing box 1, so that two sets of laser light path systems can be conveniently connected for processing simultaneously; two dust collection pipes 4 are correspondingly arranged on the side wall of the dust collection box 1 so as to suck dust-carrying gas generated during processing of the two sets of laser light path systems. In the embodiment shown in fig. 2, there are two sets of dust-removing boxes 1, which can process 4 battery pieces at the same time.

Referring to fig. 4, an ion air knife arrangement schematic diagram in the feeding and discharging flow channel is shown, and an ion air knife device 200 is installed on the feeding and discharging flow channel 11 to perform static electricity removal and dust removal on the workpiece located in the feeding and discharging flow channel 11. Referring to the schematic structure of the ionic wind knife shown in fig. 5, the ionic wind knife device 200 includes a mounting frame, at least one upper ionic wind knife 21 and at least one lower ionic wind knife 22, wherein the upper ionic wind knife 21 and the lower ionic wind knife 22 are horizontally installed on the mounting frame, the upper and lower material flow channels 11 pass through between the upper ionic wind knife 21 and the lower ionic wind knife 22, the air outlets of the upper ionic wind knife 21 face downwards, and the air outlets of the lower ionic wind knife 22 face upwards. The two sides of the workpiece can be blown from the upper and lower directions. The upper and lower runner 11 is divided into an upper runner section for feeding and a lower runner section for discharging, wherein the ion air knife device 200 of the lower runner section for discharging has the functions of removing static electricity and dust, and can remove the dust possibly remained after laser processing of the battery piece and the fragments and dust missed by the dust removing equipment, and keep the surface of the battery piece as clean as possible during discharging.

See the mounting bracket schematic diagram of ion air knife that fig. 6 shows, the mounting bracket includes stand 23 and mounting panel 24, and the stand is vertical to be fixed in the both sides limit of last unloading runner 11, and mounting panel 24 level is fixed on stand 23, goes up ion air knife 21 or lower ion air knife 22 and installs on mounting panel 24, and the both ends of mounting panel 24 are all connected with stand 23 through angle adjustment seat 25, and mounting panel 24 rotates with angle adjustment seat 25 to be connected, can adjust the angle of mounting panel 24 through angle adjustment seat 25. Icon 26 is a wind regulating valve.

Referring to fig. 7, which shows a schematic view of an air suction side structure of a flow channel dust removing device, the flow channel dust removing device 400 includes a mounting seat 41, two vertical plates 42 and an air suction cover 43, wherein the mounting seat 41 is fixed on one side of an upper and a lower material flow channels 11, the two vertical plates 42 are erected at two ends of the mounting seat 41, and the air suction cover 43 is fixed at the top ends of the two vertical plates 42; the suction hood 43 is provided with at least one suction inlet 44 and one air collection inlet 45, the suction inlet 44 is aligned with the workpiece positioned on the feeding and discharging runner 11 and is used for absorbing dust-carrying gas on the workpiece, and the dust-carrying gas is discharged through the air collection inlet 45.

Referring to fig. 8, a schematic view of the overall structure of the flow path dust removing device is shown, and the flow path dust removing device 400 further includes a blower device installed at the other side of the feeding and discharging flow path 11, and the blower device includes a blower pipe 46 and a blower pipe mounting frame 47. The feeding and discharging runner 11 is arranged between the blowing pipe 46 and the air suction cover 43, the blowing pipe 46 is connected with a fan, clean air is blown out, and dust on a workpiece is blown up by the clean air. The air collection port 45 is connected with a suction fan, and sucks dust-carrying air away through the air suction cover 43.

Referring to fig. 9, which is a schematic structural diagram of an air filtering device, an air filtering device 600 includes a filtering unit body 61 and a mounting frame 62, wherein the filtering unit body 61 is fixed in the mounting frame 62, and the mounting frame 62 is fixed in a window reserved in the whole machine housing 12. The air filtration device is also known in the industry as FFU, english is known as FAN FI LTER U nits, chinese means "fan filter unit (unit)". That is, the fan and filter (high efficiency filter (H EPA) or ultra high efficiency filter (U LPA)) are combined to form a self-powered end purification device. In particular to a modular terminal air supply device with self-powered and filtering effects.

Referring to the preferred embodiment shown in fig. 1, the air filter 600 is installed at the top of the whole machine housing 12, and can be provided with 1-2 air filters, so that the occurrence of deposition of dust due to gravity can be reduced, clean air flow in the laser boron doping device is ensured, and air flow can flow in a specific direction according to the dust removal requirement during dust removal. The ion air knife device 200 and the runner dust removing device 400 are arranged in the upper and lower runners 11 in series, multiple groups can be arranged, and the high-speed transported battery piece can be quickly blown when passing through the station, so that the purpose of removing dust and static electricity on the upper and lower surfaces of the battery piece is achieved.

The above examples are illustrative only and are not intended to be limiting. Any equivalent modifications or variations to the present application without departing from the spirit and scope of the present application are intended to be included in the scope of the following claims.

Claims (10)

1. The utility model provides a take high-efficient dust pelletizing system's laser boron to mix equipment, includes laser light path system, laser processing platform, goes up unloading runner (11) and complete machine shell (12), its characterized in that: the dust removing system comprises a table top dust removing device (100), an ion air knife device (200), a runner dust removing device (400) and an air filtering device (600), wherein

The table top dust removing device (100) is arranged between the laser light path system and the laser processing platform and is used for sucking dust-carrying gas generated in the laser processing process;

The ion air knife device (200) is arranged on the upper and lower material flow channels (11) and is used for carrying out static electricity removal and dust removal on workpieces in the upper and lower material flow channels (11);

The runner dust removing device (400) is arranged on the upper and lower runners (11) and is used for sucking dust-carrying gas on a workpiece in the upper and lower runners (11);

The air filter device (600) is mounted on the complete machine housing (12) for providing filtered clean air.

2. The laser boron doping apparatus with high efficiency dust removal system of claim 1, wherein: the table top dust removing device (100) comprises a dust removing box (1), a protective cover (2) and a dust collecting pipe (4); wherein the method comprises the steps of

The dust removing box (1) is covered on the laser processing platform to form a processing space, and an access door (1 a) is arranged on at least one side wall of the dust removing box (1);

The protective cover (2) is connected between the top plate of the dust removal box (1) and the laser light path system;

The dust collection pipe (4) is arranged on one side wall of the dust collection box (1) and is used for sucking dust-carrying gas.

3. The laser boron doping apparatus with high efficiency dust removal system of claim 2, wherein: the dust collection box (1) is in a cuboid shape, the dust collection pipe (4) is arranged on one side wall of the dust collection box (1), and the dust collection air knife (3) is arranged on the other opposite side wall; the access door (1 a) is made of a filter material; the upper edge of the access door (1 a) is hinged to the side wall of the dust removal box (1) through a hinge (9), and a magnet and/or a handle are arranged between the lower edge of the access door (1 a) and the side wall of the dust removal box (1).

4. The laser boron doping apparatus with high efficiency dust removal system of claim 3, wherein: the top plate of the dust removal box (1) is provided with two protective covers (2), so that two sets of laser light path systems can be conveniently connected for simultaneous processing; two dust collection pipes (4) are correspondingly arranged on the side wall of the dust collection box (1) so as to suck dust-carrying gas generated during processing of the two sets of laser light path systems.

5. The laser boron doping apparatus with high efficiency dust removal system of claim 1, wherein: the ion air knife device (200) comprises a mounting frame, at least one upper ion air knife (21) and at least one lower ion air knife (22), wherein the upper ion air knife (21) and the lower ion air knife (22) are horizontally arranged on the mounting frame, the upper and lower material flow channels (11) pass through the space between the upper ion air knife (21) and the lower ion air knife (22), and the air outlet of the upper ion air knife (21) faces downwards and the air outlet of the lower ion air knife (22) faces upwards.

6. The laser boron doping apparatus with high efficiency dust removal system of claim 5, wherein: the installation frame comprises an upright post (23) and an installation plate (24), wherein the upright post (23) is vertically fixed on two side edges of the upper and lower material flow channels (11), the installation plate (24) is horizontally fixed on the upright post (23), the upper ion air knife (21) or the lower ion air knife (22) is installed on the installation plate (24), two ends of the installation plate (24) are connected with the upright post (23) through angle adjusting seats (25), and the installation plate (24) is rotationally connected with the angle adjusting seats (25) and can adjust the angle of the installation plate (24) through the angle adjusting seats (25).

7. The laser boron doping apparatus with high efficiency dust removal system of claim 1, wherein: the runner dust collector (400) comprises a mounting seat (41), two vertical plates (42) and an air suction cover (43), wherein the mounting seat (41) is fixed on one side of an upper blanking runner (11), the two vertical plates (42) are vertically arranged at two ends of the mounting seat (41), and the air suction cover (43) is fixed at the top ends of the two vertical plates (42); the air suction cover (43) is provided with at least one air suction opening (44) and one air collection opening (45), and the air suction opening (44) is aligned to a workpiece positioned on the feeding and discharging runner (11) and is used for absorbing dust-carrying gas on the workpiece, and the dust-carrying gas is discharged through the air collection opening (45).

8. The laser boron doping apparatus with high efficiency dust removal system of claim 7, wherein: the runner dust collector (400) further comprises a blowing device arranged on the other side of the feeding and discharging runner (11), and the blowing device comprises a blowing pipe (46) and a blowing pipe mounting frame (47).

9. The laser boron doping apparatus with high efficiency dust removal system of claim 1, wherein: the air filtering device (600) comprises a filtering unit body (61) and a mounting frame (62), wherein the filtering unit body (61) is fixed in the mounting frame (62), and the mounting frame (62) is fixed in a window reserved in the whole machine shell (12).

10. The laser boron doping apparatus with high efficiency dust removal system of claim 1, wherein: the air filtering device (600) is arranged at the top of the whole machine shell (12), and the ion air knife device (200) and the runner dust removing device (400) are arranged in the upper and lower runners (11) in series.