CN220874010U

CN220874010U - Solid laser

Info

Publication number: CN220874010U
Application number: CN202322705537.5U
Authority: CN
Inventors: 邬洪亮
Original assignee: SHANGHAI RAYKEEN LASER TECHNOLOGY CO LTD
Current assignee: SHANGHAI RAYKEEN LASER TECHNOLOGY CO LTD
Priority date: 2023-10-09
Filing date: 2023-10-09
Publication date: 2024-04-30
Anticipated expiration: 2033-10-09

Abstract

The utility model discloses a solid laser, which comprises: the device comprises a light source emergent module, a scanning galvanometer, a first spectroscope, a power feedback module and a controller; the scanning galvanometer comprises a direction control end and a scanning reflecting surface; the power feedback module comprises a light receiving element and a power signal output end; the power feedback module is used for converting the light received by the light receiving element into a power signal; the controller comprises a power signal input end and a direction control signal output end; the power signal input end is electrically connected with the power signal output end, and the direction control signal output end is electrically connected with the direction control end; the laser beam emitted by the light source emitting module is reflected by the scanning reflecting surface and then converted into a scanning beam; the scanning light beam propagates to the light incident surface of the first spectroscope, and propagates to the light receiving element after being reflected by the light incident surface of the first spectroscope, and is received by the light receiving element. The technical scheme can improve the output power and stability of the scanning beam.

Description

Solid laser

Technical Field

The utility model relates to the technical field of optics, in particular to a solid laser.

Background

The crystal of the laser heats up by absorbing the pump radiation, while the heat dissipation requires cooling of its surface, both of which cause an uneven temperature distribution inside the laser material. The refractive index changes due to changes in temperature and stress, which in turn leads to distortion of the laser beam. Stress cracking of the laser medium is temperature dependent and thermal effects that occur in the laser material are thermal lens effects and thermally induced birefringence.

When the crystal of the solid laser works under the high-repetition frequency condition, the problems of obvious thermal lens effect, thermal aggregation of the center of the crystal and the like are solved, and stress cracks are easily generated on the crystal, so that the solid laser usually works under the low-power and low-frequency state. The power control method commonly adopted in the prior art realizes the control of output power through a feedback loop, has simple structure and low cost, and can not obtain high-frequency and high-power laser. Therefore, how to improve the laser output power and the laser output stability is a problem to be solved currently.

Disclosure of utility model

The utility model provides a solid laser which is used for solving the defects of the prior art and improving the output power and the stability of a scanning beam.

The present utility model provides a solid-state laser comprising: the device comprises a light source emergent module, a scanning galvanometer, a first spectroscope, a power feedback module and a controller;

The scanning galvanometer comprises a direction control end and a scanning reflecting surface;

the power feedback module comprises a light receiving element and a power signal output end; the power feedback module is used for converting the light received by the light receiving element into a power signal;

The controller comprises a power signal input end and a direction control signal output end; the power signal input end is electrically connected with the power signal output end, and the direction control signal output end is electrically connected with the direction control end;

The laser beam emitted by the light source emitting module is reflected by the scanning reflecting surface and then converted into a scanning beam; the scanning light beam propagates to the light incident surface of the first spectroscope, and propagates to the light receiving element after being reflected by the light incident surface of the first spectroscope, and is received by the light receiving element.

Optionally, the light source emitting module includes at least two solid laser sources and at least two adjustable total reflection mirrors arranged in one-to-one correspondence with each solid laser source;

And the laser beam emitted by the solid laser source is transmitted to the scanning reflecting surface after being reflected by the adjustable total reflection mirror.

Optionally, the solid-state laser further comprises: a second beam splitter;

The light incident surface of the second spectroscope is opposite to the light incident surface of the first spectroscope;

The reflected light beam reflected by the light incident surface of the first spectroscope is received by the light receiving element after being reflected by the light incident surface of the second spectroscope.

Optionally, the solid-state laser further comprises: a CCD module;

The CCD module comprises a light spot acquisition element and a light spot signal output end; the CCD module is used for converting the light beams acquired by the light spot acquisition element into light spot signals;

The controller also comprises a facula signal input end; the light spot signal output end is electrically connected with the light spot signal input end; the CCD module is positioned on the light-emitting surface side of the second beam splitter;

the reflected light beam reflected by the light incident surface of the first spectroscope also penetrates through the second spectroscope and is received by the light spot acquisition element after exiting from the light emergent surface of the second spectroscope.

Optionally, the solid-state laser further comprises: a shutter; the optical gate is positioned on the light-emitting surface side of the first spectroscope;

The scanning light beam also penetrates through the first spectroscope and exits through the light-emitting surface of the first spectroscope;

the controller also comprises a light gate control end; the control end of the optical shutter is electrically connected with the control end of the optical shutter.

Optionally, the solid-state laser further comprises: a power module; the light source emergent module comprises a power input end;

The power module comprises a power output end and a control signal input end; the power supply output end is electrically connected with the power supply input end;

The controller also comprises a power supply control end; the power supply control end is electrically connected with the control signal input end.

Optionally, the solid-state laser further comprises: an optical transmission structure;

the light transmission structure is coupled to the light emergent surface side of the first spectroscope;

The scanning light beam also passes through the first spectroscope, exits from the light-emitting surface of the first spectroscope, and is coupled into the light transmission structure for transmission.

Optionally, the solid-state laser further comprises: a collimating condensing lens group;

The collimating and condensing lens group is positioned between the light emergent surface side of the first spectroscope and the light transmission structure;

The light beams emitted from the light emitting surface of the first spectroscope are collimated and condensed by the collimating and condensing lens group and then coupled into the light transmission structure.

Optionally, the light transmission structure comprises an optical fiber or a light guiding arm.

Optionally, the solid-state laser further comprises:

The display module comprises a display signal input end; the controller also comprises a display control end; the display control end is electrically connected with the display signal input end; and/or the number of the groups of groups,

The alarm module comprises an alarm signal input end; the controller also comprises an alarm control end; the alarm control end is electrically connected with the alarm signal input end.

According to the technical scheme, the laser beam emitted by the light source emitting module is reflected by the scanning reflecting surface of the scanning galvanometer and then is transmitted to the light incident surface of the first spectroscope, and is transmitted to the light receiving element of the power feedback module after being reflected by the light incident surface of the first spectroscope, the power feedback module converts the light signal received by the light receiving element into a power signal and transmits the power signal to the controller, so that the controller determines a direction control signal output to the scanning galvanometer according to the power signal, the scanning galvanometer rotates by a certain angle according to the input direction control signal, and the scanning beam reflected by the scanning galvanometer after rotation has larger output power so as to improve the stability of the scanning beam.

Drawings

In order to more clearly illustrate the embodiments of the present utility model or the technical solutions of the prior art, a brief description will be given below of the drawings required for the embodiments or the description of the prior art, and it is obvious that although the drawings in the following description are specific embodiments of the present utility model, it is obvious to those skilled in the art that the basic concepts of the device structure, the driving method and the manufacturing method, which are disclosed and suggested according to the various embodiments of the present utility model, are extended and extended to other structures and drawings, and it is needless to say that these should be within the scope of the claims of the present utility model.

Fig. 1 is a schematic structural diagram of a solid-state laser according to an embodiment of the present utility model;

fig. 2 is a schematic structural diagram of another solid-state laser according to an embodiment of the present utility model;

FIG. 3 is a schematic diagram of another solid-state laser according to an embodiment of the present utility model;

Fig. 4 is a schematic structural diagram of another solid-state laser according to an embodiment of the present utility model.

Detailed Description

For the purpose of making the objects, technical solutions and advantages of the present utility model more apparent, the technical solutions of the present utility model will be clearly and completely described by means of implementation examples with reference to the accompanying drawings in the embodiments of the present utility model, and it is apparent that the described embodiments are some embodiments of the present utility model, not all embodiments. All other embodiments obtained by those skilled in the art based on the basic concepts disclosed and suggested by the embodiments of the present utility model are within the scope of the present utility model.

Fig. 1 is a schematic structural diagram of a solid-state laser according to an embodiment of the present utility model, as shown in fig. 1, where the solid-state laser includes: the device comprises a light source emergent module 10, a scanning galvanometer 20, a first spectroscope 30, a power feedback module 40 and a controller 50; the scanning galvanometer 20 comprises a direction control end P0 and a scanning reflecting surface 21; the power feedback module 40 includes a light receiving element 41 and a power signal output terminal 42; the power feedback module 40 is used for converting the light received by the light receiving element 41 into a power signal; the controller 50 includes a power signal input terminal P1 and a direction control signal output terminal P2; the power signal input end P1 is electrically connected with the power signal output end 42, and the direction control signal output end P2 is electrically connected with the direction control end P0; the laser beam emitted by the light source emitting module 10 is reflected by the scanning reflecting surface 21 and then converted into a scanning beam; the scanning beam propagates to the light incident surface of the first beam splitter 30, and propagates to the light receiving element 41 after being reflected by the light incident surface of the first beam splitter 30, and is received by the light receiving element 41.

The light source emitting module 10 includes a ruby laser, a helium-neon laser, a laser diode, and the like, and can control the scanning galvanometer 20 to rotate a certain angle through an external driving control device, so that the laser beams reaching the scanning reflecting surface 21 emit scanning beams at different deflection angles after being reflected by the scanning reflecting surface 21. The beam splitter can split an incident light beam into a transmitted light beam and a reflected light beam with a certain light intensity ratio, and comprises a fixed beam splitting ratio beam splitter and a variable beam splitting ratio beam splitter, and is generally used after being inclined, so that the beam splitter splits the incident light into a reflected light portion and a transmitted light portion. The power feedback module 40 includes an optical power meter, a photodiode, and the like, for converting light received by the light receiving element 41 into a power signal.

Specifically, the laser emitted from the light source emitting module 10 reaches the scanning reflecting surface 21 of the scanning galvanometer 20, the scanning reflecting surface 21 reflects the incident laser beam and outputs a scanning beam with a certain power density, the scanning beam propagates to the incident surface of the first spectroscope 30, the scanning beam can emit along the main optical axis 0 or emit at a certain angle with the main optical axis through the first spectroscope 30, the scanning beam can also reach the light receiving element 41 of the power feedback module 40 after being reflected by the light incident surface of the first spectroscope 30, the power feedback module 40 converts the received light signal into a power signal and transmits the power signal to the controller 50, the controller 50 determines a direction control signal output to the scanning galvanometer 20 according to the power signal, for example, a preset power range is stored in the controller 50, when the power signal obtained by the controller 50 is greater than or equal to the preset power, the controller 50 does not need to output a direction control signal to the scanning galvanometer 20, or the direction control signal output by the controller 50 can be a signal for controlling the scanning galvanometer 20 to keep the current state; when the power signal obtained by the controller 50 is smaller than the preset power, the controller 50 outputs a direction control signal to the scanning galvanometer 20 according to the internal control logic, wherein the direction control signal may be a signal for controlling the scanning galvanometer 20 to rotate by a preset angle along the direction perpendicular to the main optical axis 0, so that the scanning beam of the laser emitted by the light source emitting module 10 reflected by the scanning galvanometer 20 has a larger output power, and the stability of the scanning beam is improved.

Optionally, fig. 2 is a schematic structural diagram of another solid-state laser according to an embodiment of the present utility model, as shown in fig. 2, the light source emitting module 10 includes at least two solid-state laser sources (13 and 14) and at least two adjustable total reflection mirrors (17 and 18) disposed in one-to-one correspondence with the solid-state laser sources (13 and 14); the laser beams emitted by the solid laser sources (13 or 14) are reflected by the adjustable total reflection mirror (17 or 18) and then transmitted to the scanning reflection surface 21.

The solid laser source has the characteristics of small volume, convenient use and high output power. The solid laser source includes ruby laser, neodymium glass laser, calcium tungstate laser, yttrium aluminum garnet laser, etc., and can be selected according to practical needs without specific limitation

Specifically, when the number of the solid laser sources is two or more, on the premise that the positions of the scanning galvanometer 20 and the solid laser sources (13 and 14) are fixed, in order to make the laser emitted by the solid laser sources (13 and 14) reach the scanning reflecting surface 21 of the scanning galvanometer 20, each adjustable total reflection mirror may be disposed on the optical path of the laser emitted by the solid laser sources (13 and 14), that is, an adjustable total reflection mirror 17 is disposed on the optical path of the laser emitted by the solid laser source 13, an adjustable total reflection mirror 18 is disposed on the optical path of the laser emitted by the solid laser source 14, so that the laser emitted by the solid laser source 13 may be reflected to the scanning reflecting surface 21 of the scanning galvanometer 20 through the adjustable total reflection mirror 17, when the position of the solid laser source 13 reflected to the scanning reflecting surface 21 through the adjustable total reflection mirror 17 is the same as the position of the laser emitted by the solid laser source 14 through the adjustable total reflection mirror 18 to the scanning reflecting surface 21, and the laser emitted by the solid laser source 14 may reach the same position of the scanning reflecting surface 21 through the adjustable total reflection mirror or the scanning reflecting mirror 17 or the scanning reflecting surface 21 can be adjusted to the same angle as the position of the solid laser source (13) or the solid laser source (14).

It can be understood that on the premise of ensuring that the light beams emitted by the solid laser sources can be converged on the main optical axis 0 after being reflected by the adjustable total reflection mirror and the scanning galvanometer, the arrangement mode of the solid laser sources can be set according to actual needs, and the solid laser sources (13 and 14) can be arranged along the first direction X, so that the solid laser has the advantages of compact integral structure, small size and convenient use. The crystal inside the solid laser source has higher thermal lens effect when working under high-frequency conditions, and the center of the crystal is easy to generate heat aggregation and the like, so that the reliability of using a single solid laser is lower. The above description is only given by taking the number of the solid laser sources as 2 as an example, the number of the solid laser sources may be other, and may be set according to practical needs, and is not limited herein, and in another alternative embodiment, as shown in fig. 3, the number of the solid laser sources is 4, and the number of the adjustable total reflection mirrors is also 4, and the number of the adjustable total reflection mirrors is respectively 15, 16, 17 and 18.

Optionally, referring to fig. 2, the solid-state laser further includes: a second beam splitter 70; the light incident surface of the second beam splitter 70 is opposite to the light incident surface of the first beam splitter 30; the reflected light beam reflected by the light incident surface of the first beam splitter 30 is reflected by the light incident surface of the second beam splitter 70, and is received by the light receiving element 41.

Specifically, the reflected light beam reflected by the scanning galvanometer 20 and reflected by the light incident surface of the first beam splitter 30 may be received by the light receiving element 41 after being reflected by the light incident surface of the second beam splitter 70, so that after the second beam splitter 70 is added, the transmission path of the scanned light beam may be changed, that is, the light beam reflected by the light incident surface of the first beam splitter 30 to the power feedback module 40 is converted into the light beam reflected by the first beam splitter 30 to the light incident surface of the second beam splitter 70, and then reflected by the second beam splitter 70 to the light receiving element 41 of the power feedback module 40, so that the power feedback module 40 may receive the scanned light beam reflected by the scanning galvanometer 20, thereby determining the output power of the scanned light beam; by arranging the light receiving element 41 of the power feedback module 40 on the reflection light path of the second beam splitter 70, the light receiving element 41 of the power feedback module 40 is not arranged on the transmission light path of the second beam splitter 70, so that the overall structure of the solid state laser is compact, the size of the solid state laser is reduced, and the use convenience of the solid state laser is improved.

Optionally, referring to fig. 2, the solid-state laser further includes a CCD module 80; the CCD module 80 comprises a light spot acquisition element 81 and a light spot signal output end 82; the CCD module 80 is used for converting the light beam acquired by the light spot acquisition element 81 into a light spot signal; the controller 50 also includes a spot signal input F1; the light spot signal output end 82 is electrically connected with the light spot signal input end F1; the CCD module 80 is located on the light-emitting surface side of the second beam splitter 70; the reflected light beam reflected by the light incident surface of the first beam splitter 30 also passes through the second beam splitter 70, and is received by the light spot collecting element 81 after exiting from the light emergent surface of the second beam splitter 70.

The CCD module 80 includes a charge-coupled device (CCD) or the like, and the CCD may convert the acquired light beam into electrons and store the electrons in a potential well of a pixel, and the electrons are then transmitted to a readout region one by one along a transmission channel, and finally read out and converted into voltage signals, so as to form image data, so as to determine a light spot signal such as a light spot radius contained in a scanning light beam according to the image data.

Specifically, the light beam reflected by the first beam splitter 30 further passes through the second beam splitter 70 and exits from the light exit surface of the second beam splitter 70, and is received by the light spot collecting element 81, so that the CCD module 80 can obtain the light spot signal of the scanning light beam through the second beam splitter 70 and the first beam splitter 30, and transmit the light spot signal to the controller 50, so that the controller 50 performs corresponding operations according to the light spot signal, for example, the controller 50 includes a preset radius, when the light spot radius in the light spot signal is greater than or equal to the preset radius, the controller 50 can output an angle rotation signal to the adjustable total reflection mirror corresponding to the solid laser source of the current outgoing laser beam, so that the control end of the adjustable total reflection mirror rotates by a certain angle according to the angle rotation signal, so that the light spot radius in the scanning light beam is smaller than the preset radius, only the output power of the scanning light beam is improved, and the stability of the scanning light beam is improved.

It should be noted that, the above description is given by taking the example that the CCD module 80 is located on the light-emitting surface side of the second beam splitter 70 as an example, the second beam splitter 70 may also be located on the light-entering surface side of the first beam splitter 30, as shown in fig. 4, the light emitted through the light-emitting surface of the second beam splitter 70 is received by the light-entering surface of the first beam splitter 30, and the reflected light reflected by the light-entering surface of the second beam splitter 70 is received by the light spot collecting element 81.

Optionally, referring to fig. 2, the solid state laser further includes a shutter 90; the optical shutter 90 is located on the light-emitting surface side of the first spectroscope 30; the scanning beam also passes through the first spectroscope 30 and exits from the light exit surface of the first spectroscope 30; controller 50 also includes shutter control terminal C1; the shutter control terminal C1 is electrically connected to the control terminal of the shutter 90.

Wherein the shutter 90 may control a switching means through which an optical signal passes or is turned off, light on one side of the shutter 90 cannot propagate through the shutter 90 to the other side of the shutter 90 when the shutter 90 is in the closed state, and light on one side of the shutter 90 may propagate through the shutter 90 to the other side of the shutter 90 when the shutter 90 is in the on state.

Specifically, when the power of the scanning beam does not reach the preset power requirement or is under test, the controller 50 can control the shutter 90 to be in a closed state, so as to prevent the scanning beam which does not reach the power requirement or other index requirements from exiting; when the power of the scanning beam reaches the emission requirement such as the preset power, the controller 50 can control the shutter 90 to be in the on state, so that the scanning beam can emit.

Optionally, referring to fig. 2, the solid-state laser further includes: a power supply module 91; the light source emitting module 10 includes a power input terminal in; the power module 91 includes a power output out and a control signal input cin; the power output end out is electrically connected with the power input end in; the controller 50 also includes a power control terminal con; the power control terminal con is electrically connected with the control signal input terminal cin.

Specifically, when the number of solid laser sources in the light source emitting module 10 is at least 2, each solid laser source includes a power input terminal in, so that the controller 50 controls the power module 91 to supply power to each solid laser source according to the time-sharing control logic, thereby improving the control efficiency. Illustratively, taking the light source emitting module 10 including the solid laser source 13 and the solid laser source 14 as an example, in one control period T, the solid laser source 13 is controlled to operate in a first half period, and the solid laser source 14 is controlled to operate in a second half period, then the controller 50 controls the power supply module 91 to supply power to the solid laser source 13 in the first half period and supply power to the solid laser source 14 in the second half period, so that the solid laser sources 13 and 14 operate in stages, and the reliability and stability of the scanning beam are ensured.

Optionally, referring to fig. 2, the solid state laser further comprises an optical transmission structure 60; the light transmission structure 60 is coupled to the light-emitting surface side of the first beam splitter 30; the scanning beam further passes through the first beam splitter 30, exits from the light exit surface of the first beam splitter 30, and is coupled to the light transmission structure 60 for transmission.

Wherein the light transmission structure 60 comprises a light guide device or the like, optionally the light transmission structure 60 comprises an optical fiber or a light guide arm.

Specifically, when the light transmission structure 60 is a light guide arm, the light beam emitted by the light guide arm can be used in medical or optical detection scenes due to the characteristics of low attenuation, large transmission capacity, electromagnetic interference resistance and the like of the light guide arm.

Optionally, referring to fig. 2, the solid state laser further includes a collimating condenser lens group 92; the collimating and condensing lens group 92 is located between the light-emitting surface side of the first beam splitter 30 and the light transmission structure 60; the light beam exiting from the light exit surface of the first beam splitter 30 is collimated and condensed by the collimating and condensing lens group 92, and then coupled into the light transmission structure 60.

Specifically, the collimating and condensing lens group 92 includes a convex lens, etc., and the light beam exiting from the light exit surface of the first beam splitter 30 attenuates during the propagation process, so that the light propagating to the light transmission structure 60 has a certain divergence angle, and in order to reduce the divergence angle of the light beam entering the light transmission structure 60, the collimating and condensing lens group 92 is disposed on the light entrance side of the light transmission structure 60, so as to collimate and converge the light beam exiting from the light exit surface of the first beam splitter 30, and improve the beam collimation and the beam intensity entering the light transmission structure 60.

Optionally, referring to fig. 2, the solid-state laser further includes: the display module 93 includes a display signal input terminal x1; the controller 50 also includes a display control terminal x2; the display control end x2 is electrically connected with the display signal input end x1; and/or, the alarm module 94 includes an alarm signal input x3; the controller 50 also includes an alarm control terminal x4; the alarm control end x4 is electrically connected with the alarm signal input end x 3.

The display module 93 includes a display panel, etc., and the alarm module 94 includes a buzzer or a light emitting diode, etc.

Specifically, the controller 50 sends a display signal to the display module 93 through the display control end x2, where the display signal includes display content, so that the display module 93 can display through a display device such as a display panel, so that a user can obtain parameter signals such as a working state of the solid laser through the display module 93, and the user can use the solid laser conveniently; the controller 50 sends an alarm signal to the alarm module 94 through the alarm signal input end x3, wherein the alarm signal comprises voltage or current, etc., so that the alarm module 94 can send out alarm signals such as sound or light, etc., to draw attention of a user, so that the user can timely adjust the working state of related devices in the solid laser according to the alarm signals, and further the output scanning light beam has larger output power and stability.

Note that the above is only a preferred embodiment of the present utility model and the technical principle applied. It will be understood by those skilled in the art that the present utility model is not limited to the particular embodiments described herein, and that various obvious changes, rearrangements, combinations, and substitutions can be made by those skilled in the art without departing from the scope of the utility model. Therefore, while the utility model has been described in connection with the above embodiments, the utility model is not limited to the embodiments, but may be embodied in many other equivalent forms without departing from the spirit or scope of the utility model, which is set forth in the following claims.

Claims

1. A solid state laser, comprising: the device comprises a light source emergent module, a scanning galvanometer, a first spectroscope, a power feedback module and a controller;

2. The solid state laser of claim 1, wherein the light source exit module comprises at least two solid state laser sources and at least two adjustable total reflection mirrors arranged in one-to-one correspondence with each of the solid state laser sources;

And the laser beams emitted by the solid laser sources are reflected by the adjustable total reflection mirror and then transmitted to the scanning reflecting surface.

3. The solid state laser of claim 1, further comprising: a second beam splitter;

4. A solid state laser as claimed in claim 3, further comprising: a CCD module;

5. The solid state laser of claim 1, further comprising: a shutter; the optical gate is positioned on the light-emitting surface side of the first spectroscope;

6. The solid state laser of claim 1, further comprising: a power module; the light source emergent module comprises a power input end;

7. The solid state laser of claim 1, further comprising: an optical transmission structure;

8. The solid state laser of claim 7, further comprising: a collimating condensing lens group;

9. The solid state laser of claim 7, wherein the light transmission structure comprises an optical fiber or a light guiding arm.

10. The solid state laser of claim 1, further comprising: