CN220869647U - Nitrogen sealing cavity structure of screw vacuum pump - Google Patents
Nitrogen sealing cavity structure of screw vacuum pump Download PDFInfo
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- CN220869647U CN220869647U CN202322346881.XU CN202322346881U CN220869647U CN 220869647 U CN220869647 U CN 220869647U CN 202322346881 U CN202322346881 U CN 202322346881U CN 220869647 U CN220869647 U CN 220869647U
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- vacuum pump
- flange
- transportation pipe
- gas transportation
- groove
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- 238000007789 sealing Methods 0.000 title claims abstract description 48
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 title claims abstract description 31
- 229910052757 nitrogen Inorganic materials 0.000 title claims abstract description 15
- 239000007789 gas Substances 0.000 claims abstract description 56
- 229910001873 dinitrogen Inorganic materials 0.000 claims description 2
- 238000010030 laminating Methods 0.000 claims 1
- 230000000694 effects Effects 0.000 abstract description 13
- 238000009434 installation Methods 0.000 abstract description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000000605 extraction Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 150000002829 nitrogen Chemical class 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
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Abstract
The utility model discloses a nitrogen sealing cavity structure of a screw vacuum pump, which comprises a gas transportation pipe flange and a screw vacuum pump exhaust flange detachably connected with the gas transportation pipe flange, wherein a connecting boss is arranged at the contact position of the gas transportation pipe flange and the screw vacuum pump exhaust flange, and the connecting boss is symmetrically arranged about the contact position of the gas transportation pipe flange and the screw vacuum pump exhaust flange. Through installing the contact position at gas transportation pipe flange and spiral vacuum pump exhaust flange with connecting the boss symmetry to set up first draw-in groove and spiral vacuum pump exhaust flange inner port department at gas transportation pipe flange inner port department and set up the second draw-in groove and connect the installation in the space that the mounting groove that the middle part of boss was seted up constitutes and install elastic seal circle, spring seal circle and first draw-in groove, second draw-in groove and mounting groove all laminate, can play better sealed effect to gas transportation pipe flange and spiral vacuum pump exhaust flange's contact position like this.
Description
Technical Field
The utility model relates to the technical field of vacuum pumps, in particular to a nitrogen sealing cavity structure of a screw vacuum pump.
Background
In the industries of pharmacy, chemical industry, semiconductors and the like, vacuum extraction operation is required, a screw vacuum pump is often used at the moment, a flange plate is often adopted at an air outlet of a traditional screw vacuum pump to be connected with a gas pipe, and leakage is easy to occur due to higher internal pressure in a sealing way at the connecting part.
The patent number CN208380858U discloses a screw vacuum pump seal structure, including screw vacuum pump exhaust flange, gas transportation pipe flange, elastic sealing washer, H type sealing ring, fixed double-screw bolt, screw vacuum pump exhaust flange outside has the connection boss, and the outside symmetric distribution elastic sealing washer groove of connection boss, elastic sealing washer embolias in the elastic sealing washer inslot, gas transportation pipe flange inside has the connection boss groove, inside has a H type sealing ring groove, and a H type sealing ring groove inside has No. two interior bulge grooves, and a H type sealing ring groove inside has a No. one interior bulge groove, and a H type sealing ring groove inside has a No. two H type sealing ring grooves, and No. two H type sealing ring groove inside has a No. one outer bulge groove, and a H type sealing ring outside has an outer bulge ring, and H type sealing ring inside has an interior bulge ring, and above-mentioned scheme is when carrying out screw vacuum pump exhaust flange and gas transportation pipe flange connected position's sealed, can not leak to the seal flange through the connection flange through H type to the connection flange and still can not guarantee that the seal effect is leaked to the seal assembly because of having the sealing flange between the vacuum pump. For this purpose, we propose a screw vacuum pump nitrogen seal chamber structure.
Disclosure of utility model
The utility model mainly aims to provide a nitrogen sealing cavity structure of a screw vacuum pump, which is characterized in that connecting bosses are symmetrically arranged at the contact positions of a gas transportation pipe flange and a screw vacuum pump exhaust flange, a first clamping groove is formed at the port of the inner wall of the gas transportation pipe flange, a second clamping groove is formed at the port of the inner wall of the screw vacuum pump exhaust flange, and an elastic sealing ring is arranged in a space formed by the mounting grooves formed in the middle of the connecting bosses, so that the problem that sealing effect is not guaranteed due to the fact that sealing components are not arranged at the contact positions of the gas transportation pipe flange, the connecting bosses and the screw vacuum pump exhaust flange is still caused, and the problem in the background technology can be effectively solved.
In order to achieve the above purpose, the technical scheme adopted by the utility model is as follows:
The utility model provides a screw vacuum pump nitrogen gas seal cavity structure, includes gas transportation pipe flange, still includes the spiral vacuum pump exhaust flange of dismantling the connection with gas transportation pipe flange, gas transportation pipe flange and spiral vacuum pump exhaust flange's contact position is equipped with the connection boss, the connection boss sets up with respect to gas transportation pipe flange and spiral vacuum pump exhaust flange's contact position symmetry, supporting boss groove has all been seted up to gas transportation pipe flange and spiral vacuum pump exhaust flange's inner wall, and the boss groove is close to gas transportation pipe flange and spiral vacuum pump exhaust flange's inner wall position and install the sealing washer, the mounting groove has been seted up to connection boss outer wall middle part position, the mounting groove endotheca is equipped with elastic sealing circle.
Further, a first clamping groove is formed in the port of the inner wall of the gas transportation pipe flange, the first clamping groove is attached to the elastic sealing ring, a second clamping groove is formed in the port of the inner wall of the exhaust flange of the spiral vacuum pump, and the second clamping groove is attached to the elastic sealing ring.
Further, the inner walls of the boss grooves of the gas transportation pipe flange and the spiral vacuum pump exhaust flange are provided with a plurality of hole grooves, and springs are arranged in the hole grooves.
Compared with the prior art, the utility model has the following beneficial effects: the connecting boss is symmetrically arranged at the contact position of the gas transportation pipe flange and the spiral vacuum pump exhaust flange, the first clamping groove is formed at the port of the inner wall of the gas transportation pipe flange, the second clamping groove is formed at the port of the inner wall of the spiral vacuum pump exhaust flange, the elastic sealing ring is arranged in a space formed by the mounting groove formed in the middle of the connecting boss, and the elastic sealing ring is attached to the first clamping groove, the second clamping groove and the mounting groove, so that a good sealing effect can be achieved on the contact position of the gas transportation pipe flange and the spiral vacuum pump exhaust flange; the inner walls of the boss grooves of the flange of the gas conveying pipe and the exhaust flange of the spiral vacuum pump are provided with a plurality of hole groove mounting springs, so that when the gas conveying pipe is impacted by high-pressure gas, the connecting boss is subjected to the effects of reducing shaking and air pressure impact, and then the sealing effect of the connecting boss is ensured.
Drawings
Fig. 1 is a schematic diagram of the overall structure of a nitrogen seal chamber structure of a screw vacuum pump.
Fig. 2 is a schematic plan view of a nitrogen seal chamber structure of a screw vacuum pump according to the present utility model.
Fig. 3 is an enlarged schematic view of the structure of the nitrogen sealing chamber of the screw vacuum pump at a position a in fig. 2.
Fig. 4 is an enlarged schematic view of the structure of the nitrogen seal chamber of the screw vacuum pump of fig. 2 at B.
In the figure: 1. a gas transport pipe flange; 2. an exhaust flange of the spiral vacuum pump; 3. a land groove; 4. a connecting boss; 5. a first clamping groove; 6. a second clamping groove; 7. an elastic sealing ring; 8. a mounting groove; 9. a hole groove; 10. and (3) a spring.
Detailed Description
The utility model is further described in connection with the following detailed description, in order to make the technical means, the creation characteristics, the achievement of the purpose and the effect of the utility model easy to understand.
As shown in fig. 1-4, a nitrogen sealing cavity structure of a screw vacuum pump comprises a gas transportation pipe flange 1, and further comprises a screw vacuum pump exhaust flange 2 detachably connected with the gas transportation pipe flange 1, wherein a connection boss 4 is arranged at the contact position of the gas transportation pipe flange 1 and the screw vacuum pump exhaust flange 2, the connection boss 4 is symmetrically arranged relative to the contact position of the gas transportation pipe flange 1 and the screw vacuum pump exhaust flange 2, matched boss grooves 3 are formed in the inner walls of the gas transportation pipe flange 1 and the screw vacuum pump exhaust flange 2, sealing rings are arranged at the positions, close to the inner walls of the gas transportation pipe flange 1 and the screw vacuum pump exhaust flange 2, of the boss grooves 3, a mounting groove 8 is formed in the middle of the outer wall of the connection boss 4, an elastic sealing ring 7 is sleeved in the mounting groove 8, a first clamping groove 5 is formed at the inner wall port of the gas transportation pipe flange 1, the first clamping groove 5 is attached to the elastic sealing ring 7, a second clamping groove 6 is formed at the inner wall port of the screw vacuum pump exhaust flange 2, and the second clamping groove 6 is attached to the elastic sealing ring 7; through with the contact position of connection boss 4 symmetry installation at gas transportation pipe flange 1 and spiral vacuum pump exhaust flange 2 to set up first draw-in groove 5 and spiral vacuum pump exhaust flange 2 inside port department at gas transportation pipe flange 1 inner wall port department and set up second draw-in groove 6 and install elastic sealing circle 7 in the space that the mounting groove 8 that the middle part of connection boss 4 was seted up constitutes, spring sealing circle 7 and first draw-in groove 5, second draw-in groove 6 and mounting groove 8 all laminate, can play better sealed effect to the contact position of gas transportation pipe flange 1 and spiral vacuum pump exhaust flange 2 like this.
The inner walls of the boss grooves 3 of the gas transportation pipe flange 1 and the spiral vacuum pump exhaust flange 2 are provided with a plurality of hole grooves 9, and springs 10 are arranged in the hole grooves 9; through the interior mounting spring 10 of a plurality of hole grooves 9 of seting up of boss groove 3 inner wall of gas transportation pipe flange 1 and spiral vacuum pump exhaust flange 2, when receiving high-pressure gas to strike, play the effect that reduces rocking and atmospheric pressure to connecting boss 4, guarantee the sealed effect of connecting boss 4 then.
In the nitrogen sealing cavity structure of the screw vacuum pump, during operation, each component is installed and connected, the connecting boss 4 is symmetrically installed at the contact position of the gas transportation pipe flange 1 and the spiral vacuum pump exhaust flange 2, the first clamping groove 5 is formed at the port of the inner wall of the gas transportation pipe flange 1, the second clamping groove 6 is formed at the port of the inner wall of the spiral vacuum pump exhaust flange 2, the elastic sealing ring 7 is installed in a space formed by the installing groove 8 formed in the middle of the connecting boss 4, and the elastic sealing ring 7 is attached to the first clamping groove 5, the second clamping groove 6 and the installing groove 8, so that a good sealing effect can be achieved on the contact position of the gas transportation pipe flange 1 and the spiral vacuum pump exhaust flange 2, and meanwhile, when high-pressure gas impact is received, the spring 10 installed in the hole groove 9 formed in the inner wall of the boss groove 3 of the gas transportation pipe flange 1 and the spiral vacuum pump exhaust flange 2 has an effect of reducing shaking and air pressure impact on the connecting boss 4, and then the sealing effect of the connecting boss 4 on the contact position of the gas transportation pipe flange 1 and the spiral vacuum pump exhaust flange 2 is guaranteed.
The foregoing has shown and described the basic principles and main features of the present utility model and the advantages of the present utility model. It will be understood by those skilled in the art that the present utility model is not limited to the embodiments described above, and that the above embodiments and descriptions are merely illustrative of the principles of the present utility model, and various changes and modifications may be made without departing from the spirit and scope of the utility model, which is defined in the appended claims. The scope of the utility model is defined by the appended claims and equivalents thereof.
Claims (4)
1. The utility model provides a screw vacuum pump nitrogen gas seal cavity structure, includes gas transportation pipe flange (1), its characterized in that still includes screw vacuum pump exhaust flange (2) of dismantling the connection with gas transportation pipe flange (1), the contact position of gas transportation pipe flange (1) and screw vacuum pump exhaust flange (2) is equipped with connection boss (4), connection boss (4) are about the contact position symmetry setting of gas transportation pipe flange (1) and screw vacuum pump exhaust flange (2), supporting boss groove (3) have all been seted up to the inner wall of gas transportation pipe flange (1) and screw vacuum pump exhaust flange (2), and boss groove (3) are close to the inner wall position of gas transportation pipe flange (1) and screw vacuum pump exhaust flange (2) and install the sealing washer, mounting groove (8) have been seted up to connection boss (4) outer wall middle part position, the endotheca is equipped with elastic seal circle (7).
2. The nitrogen seal chamber structure of a screw vacuum pump of claim 1, wherein: a first clamping groove (5) is formed in the port of the inner wall of the gas transportation pipe flange (1), and the first clamping groove (5) is attached to an elastic sealing ring (7).
3. The nitrogen seal chamber structure of a screw vacuum pump of claim 1, wherein: the spiral vacuum pump exhaust flange (2) inner wall port department has seted up second draw-in groove (6), second draw-in groove (6) and elastic sealing washer (7) laminating.
4. A screw vacuum pump nitrogen seal chamber arrangement according to claim 2, wherein: the inner walls of the boss grooves (3) of the gas transportation pipe flange (1) and the spiral vacuum pump exhaust flange (2) are provided with a plurality of hole grooves (9), and springs (10) are arranged in the hole grooves (9).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202322346881.XU CN220869647U (en) | 2023-08-30 | 2023-08-30 | Nitrogen sealing cavity structure of screw vacuum pump |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202322346881.XU CN220869647U (en) | 2023-08-30 | 2023-08-30 | Nitrogen sealing cavity structure of screw vacuum pump |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN220869647U true CN220869647U (en) | 2024-04-30 |
Family
ID=90816884
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202322346881.XU Active CN220869647U (en) | 2023-08-30 | 2023-08-30 | Nitrogen sealing cavity structure of screw vacuum pump |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN220869647U (en) |
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2023
- 2023-08-30 CN CN202322346881.XU patent/CN220869647U/en active Active
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