CN220867268U - Continuous melting furnace for producing semiconductor quartz tube - Google Patents
Continuous melting furnace for producing semiconductor quartz tube Download PDFInfo
- Publication number
- CN220867268U CN220867268U CN202321817550.3U CN202321817550U CN220867268U CN 220867268 U CN220867268 U CN 220867268U CN 202321817550 U CN202321817550 U CN 202321817550U CN 220867268 U CN220867268 U CN 220867268U
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- Prior art keywords
- cover plate
- feeding
- plate
- crucible
- furnace body
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- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 title claims abstract description 38
- 239000010453 quartz Substances 0.000 title claims abstract description 33
- 238000002844 melting Methods 0.000 title claims abstract description 22
- 230000008018 melting Effects 0.000 title claims abstract description 22
- 239000004065 semiconductor Substances 0.000 title claims abstract description 22
- 239000000463 material Substances 0.000 claims abstract description 21
- 238000007664 blowing Methods 0.000 claims abstract description 15
- 238000009413 insulation Methods 0.000 claims description 5
- 230000003044 adaptive effect Effects 0.000 claims 1
- 235000012239 silicon dioxide Nutrition 0.000 description 25
- 230000006978 adaptation Effects 0.000 description 6
- 238000007789 sealing Methods 0.000 description 3
- 229910000831 Steel Inorganic materials 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 239000010959 steel Substances 0.000 description 2
- 239000006004 Quartz sand Substances 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 239000004566 building material Substances 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 238000007599 discharging Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000010292 electrical insulation Methods 0.000 description 1
- 230000007613 environmental effect Effects 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000005272 metallurgy Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 238000000465 moulding Methods 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 239000002994 raw material Substances 0.000 description 1
- 239000004576 sand Substances 0.000 description 1
- 238000007493 shaping process Methods 0.000 description 1
- 239000000377 silicon dioxide Substances 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 238000002834 transmittance Methods 0.000 description 1
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
Abstract
The utility model discloses a continuous melting furnace for producing a semiconductor quartz tube, which comprises a furnace body, wherein a baffle plate is arranged above the furnace body, a large cover plate is arranged in the baffle plate, a cover plate snap ring is arranged on the surface of the large cover plate, a cover plate snap plate which is matched with the baffle plate is arranged in the cover plate snap ring, a small cover plate is arranged in the large cover plate, a cover plate pull ring is arranged on the surface of the small cover plate, a cover plate clamping rod which is matched with the cover plate snap ring is arranged in the cover plate pull ring, a feeding pipe is arranged on the surface of the small cover plate, the feeding pipe penetrates through the small cover plate and the feeding cover plate and stretches into a feeding device, a gas blowing pipe is arranged on the side edge of the furnace body, penetrates through the furnace body and a crucible and stretches into the crucible, a former is arranged at one end of the gas blowing pipe, a forming pipe is arranged at one end of the gas blowing pipe, a crucible is symmetrically arranged on the side edge of the crucible, a connecting plate is arranged on the crucible and the lower surface of the furnace body, a material table is arranged in the connecting plate, and the feeding device is arranged below the small cover plate.
Description
Technical Field
The utility model relates to the technical field of quartz tube production and processing, in particular to a continuous melting furnace for producing a semiconductor quartz tube.
Background
The quartz glass tube is special industrial technical glass manufactured by silicon dioxide, has a series of excellent physical and chemical properties such as high temperature resistance, corrosion resistance, good thermal stability, good light transmittance, good electrical insulation property and the like, and is widely applied to various fields such as electric light sources, semiconductors, optical communication, military industry, metallurgy, building materials, chemistry, machinery, electric power, environmental protection and the like.
The quality requirements of the quartz tube pair tubes for semiconductors and photovoltaics are higher, the uniformity of the tube wall of the quartz tube is required to be high, no bubble gas lines and no color lines are required, in the traditional quartz continuous melting tube drawing equipment, a material pile cover is easily formed in the feeding process, so that the quartz sand raw materials of the continuous melting furnace are unevenly distributed, excessive sand grains are accumulated to easily enable gas to be melted and wrapped by quartz, gas lines and bubbles are formed, the pressure of the quartz liquid surface in the furnace is uneven, the discharging molding of the quartz materials is influenced, and the quartz tube is deviated and the gas lines are excessive.
Accordingly, in order to solve the above problems, a continuous melting furnace for producing a semiconductor quartz tube with uniform charging has been proposed.
Disclosure of utility model
The utility model aims to provide a continuous melting furnace for producing a semiconductor quartz tube, which solves the problems in the background art.
In order to achieve the above purpose, the present utility model provides the following technical solutions: the utility model provides a continuous melting furnace for producing semiconductor quartz tube, including the furnace body, the furnace body top is equipped with the baffle, be equipped with big apron in the baffle, big apron surface is equipped with the apron snap ring, be equipped with the apron cardboard of looks adaptation in the apron snap ring, be equipped with little apron in the big apron, little apron surface is equipped with the apron pull ring, be equipped with the apron card pole with apron snap ring looks adaptation in the apron pull ring, little apron surface is equipped with the conveying pipe, the conveying pipe runs through little apron and conveying apron stretch into in the material feeding unit, the furnace body side is equipped with the gas-blowing pipe, the gas-blowing pipe runs through furnace body and crucible and stretches into in, gas-blowing pipe one end is equipped with the former, gas-blowing pipe one end is equipped with the shaping pipe, the furnace body inner wall is equipped with the crucible, crucible side symmetry is equipped with the thermal insulation board, crucible and furnace body below surface is equipped with the connecting plate, be equipped with the material table in the connecting plate, little apron below is equipped with material feeding unit, material feeding unit is including installing the motor on little apron surface, the motor passes through adapter electric connection power, the motor output shaft is equipped with the connecting axle, the connecting axle runs through the material feeding apron and is connected with the conveying board, conveying board side symmetry is equipped with the fixed plate, conveying board one end fixed connection is big, conveying board surface evenly is equipped with a plurality of holes, the conveying board side is equipped with the rotation apron, the side is equipped with the rotatory apron, and is equipped with the rotation axis and is equipped with the rotation.
Preferably, in order to meet the requirement of uniform feeding, a feeding device made of high-temperature-resistant steel materials is arranged in the crucible.
Preferably, in order to better seal the cover plate, a large cover plate and a small cover plate which are matched are respectively arranged.
Compared with the prior art, the utility model has the beneficial effects that:
(1) In order to meet even feeding, be equipped with high temperature resistant steel material feeding unit in the crucible, material feeding unit is including installing the motor on little apron surface, motor output shaft is equipped with the connecting axle, the connecting axle runs through the feeding apron and is connected with the delivery sheet, feeding apron side symmetry is equipped with the fixed plate, fixed plate one end fixed connection big apron, the delivery sheet surface evenly is equipped with a plurality of holes, the delivery sheet side is equipped with the swivelling band, the swivelling band is mutually supported with the rotation axis looks adaptation that the delivery sheet inner wall set up, make the motor drive the connecting axle through above-mentioned structure mutually supporting, drive the delivery sheet and rotate through swivelling band and rotation axis, when feeding quartz material from the conveying pipe, through the rotation of delivery sheet, reach even reinforced purpose.
(2) In order to meet better sealing the cover plate, set up big apron and little apron of looks adaptation respectively, wherein big apron surface is equipped with the apron snap ring, be equipped with the apron clamping lever of looks adaptation in the apron snap ring, be equipped with little apron in the big apron, little apron surface is equipped with the apron pull ring, be equipped with the apron clamping lever with apron snap ring looks adaptation in the apron pull ring, little apron surface is equipped with the conveying pipe, little apron below is equipped with material feeding unit, through above-mentioned structure mutually support, when using, be connected with the baffle through the apron cardboard that sets up big apron surface, be connected the apron clamping lever that little apron surface set up with the apron snap ring again, reach the better sealed purpose to the apron.
Drawings
FIG. 1 is a schematic diagram of a continuous melting furnace for producing semiconductor quartz tubes according to the present utility model;
FIG. 2 is a schematic view showing the internal structure of a continuous melting furnace for producing a semiconductor quartz tube according to the present utility model;
FIG. 3 is a schematic view of a crucible structure of a continuous melting furnace for producing semiconductor quartz tubes according to the present utility model;
Fig. 4 is a schematic structural diagram of a feeding device of a continuous melting furnace for producing semiconductor quartz tubes according to the present utility model.
In the figure: 1. a furnace body; 2. a baffle plate; 3. a material platform; 4. a large cover plate; 5. a small cover plate; 6. a feeding device; 7. a feed pipe; 8. an air blowing pipe; 9. a thermal insulation plate; 10. a crucible; 11. a connecting plate; 12. forming a tube; 13. a former; 401. a cover plate snap ring; 402. a cover plate clamping plate; 501. a cover plate pull ring; 502. a cover plate clamping rod; 601. a motor; 602. a connecting shaft; 603. a feeding cover plate; 604. a fixing plate; 605. a feeding plate; 606. rotating the belt; 607. holes.
Detailed Description
The following description of the embodiments of the present utility model will be made clearly and completely with reference to the accompanying drawings, in which it is apparent that the embodiments described are only some embodiments of the present utility model, but not all embodiments. All other embodiments, which can be made by those skilled in the art based on the embodiments of the utility model without making any inventive effort, are intended to be within the scope of the utility model.
Referring to fig. 1-4, the present utility model provides a technical solution: a continuous melting furnace for producing a semiconductor quartz tube comprises a furnace body 1, a baffle plate 2 is arranged above the furnace body 1, a large cover plate 4 is arranged in the baffle plate 2, a small cover plate 5 is arranged in the large cover plate 4, a feeding pipe 7 is arranged on the surface of the small cover plate 5, a gas blowing pipe 8 is arranged on the side edge of the furnace body 1, a forming device 13 is arranged at one end of the gas blowing pipe 8, a forming pipe 12 is arranged at one end of the gas blowing pipe 8, a crucible 10 is arranged on the inner wall of the furnace body 1, a heat insulation plate 9 is symmetrically arranged on the side edge of the crucible 10, a connecting plate 11 is arranged on the lower surface of the crucible 10 and the lower surface of the furnace body 1, a material table 3 is arranged in the connecting plate 11, a feeding device 6 is arranged below the small cover plate 5, the feeding device 6 comprises a motor 601 arranged on the surface of the small cover plate 5, the motor 601 is electrically connected with a power supply through an adapter, the connecting shaft 602 is installed on the output shaft of the motor 601, the connecting shaft 602 penetrates through the feeding cover plate 603 to be connected with the feeding plate 605, the fixing plate 604 is symmetrically installed on the side edge of the feeding cover plate 603, one end of the fixing plate 604 is fixedly connected with the large cover plate 4, a plurality of holes 607 are evenly installed on the surface of the feeding plate 605, the rotating belt 606 is installed on the side edge of the feeding plate 605, the rotating belt 606 is matched with the rotating shaft arranged on the inner wall of the feeding cover plate 603, and through the structure, the motor 601 drives the connecting shaft 602 to rotate during use, the feeding plate 605 is driven to rotate through the rotating belt 606 and the rotating shaft, quartz materials are fed from the feeding pipe 7, and the purpose of uniform feeding is achieved through the rotation of the feeding plate 605.
Referring to fig. 1-4, the present utility model provides a technical solution: a continuous melting furnace for producing a semiconductor quartz tube comprises a furnace body 1, a baffle plate 2 is arranged above the furnace body 1, a large cover plate 4 is arranged in the baffle plate 2, a cover plate clamping ring 401 is arranged on one end of the air pipe 8, a cover plate clamping plate 402 is arranged in the cover plate clamping ring 401, a small cover plate 5 is arranged in the large cover plate 4, a cover plate pull ring 501 is arranged on the surface of the small cover plate 5, a cover plate clamping rod 502 is arranged in the cover plate pull ring 501 and is matched with the cover plate clamping ring 401, a feeding pipe 7 is arranged on the surface of the small cover plate 5, the feeding pipe 7 penetrates through the small cover plate 5 and the feeding cover plate 603 and stretches into a feeding device 6, an air pipe 8 is arranged on the side edge of the furnace body 1, the air pipe 8 penetrates through the furnace body 1 and a crucible 10 and stretches into the crucible 10, a shaper 13 is arranged at one end of the air pipe 8, a crucible 10 is arranged on the inner wall of the furnace body 1, a heat insulation plate 9 is symmetrically arranged on the side edge of the crucible 10 and the lower surface of the furnace body 1, a connecting plate 11 is arranged on the lower surface of the crucible 10, a material table 3 is arranged in the connecting plate 11, a feeding device 6 is arranged below the small cover plate 5, and the lower surface of the small cover plate 4 is mutually matched with the cover plate through the structure, and the cover plate clamping rod 502 is connected with the baffle plate 2 arranged on the surface of the large cover plate 4 and the baffle plate and the cover plate is better in sealing effect when the sealing device is used.
Working principle: when the crucible 10 is used, the crucible 10 is heated through the furnace body 1, the motor 601 is operated to drive the connecting shaft 602 to rotate through the motor 601, the feeding plate 605 is driven to rotate according to the rotating belt 606 and the rotating shaft, then quartz materials are fed from the feeding pipe 7, and the quartz materials enter the crucible 10 according to the holes 607 through the rotation of the feeding plate 605, so that the purpose of uniformly feeding the quartz materials in the crucible 10 is achieved.
It will be evident to those skilled in the art that the utility model is not limited to the details of the foregoing illustrative embodiments, and that the present utility model may be embodied in other specific forms without departing from the spirit or essential characteristics thereof. The present embodiments are, therefore, to be considered in all respects as illustrative and not restrictive, the scope of the utility model being indicated by the appended claims rather than by the foregoing description, and all changes which come within the meaning and range of equivalency of the claims are therefore intended to be embraced therein. Any reference sign in a claim should not be construed as limiting the claim concerned.
Claims (7)
1. A continuous melting furnace for producing semiconductor quartz tubes, comprising a furnace body (1), characterized in that: the furnace comprises a furnace body (1), and is characterized in that a baffle plate (2) is arranged above the furnace body (1), a large cover plate (4) is arranged in the baffle plate (2), a small cover plate (5) is arranged in the large cover plate (4), an air blowing pipe (8) is arranged on the side edge of the furnace body (1), a crucible (10) is arranged on the inner wall of the furnace body (1), heat insulation plates (9) are symmetrically arranged on the side edge of the crucible (10), a connecting plate (11) is arranged on the surfaces below the crucible (10) and the furnace body (1), and a feeding device (6) is arranged below the small cover plate (5);
The feeding device is characterized in that the feeding device (6) comprises a motor (601) arranged on the surface of the small cover plate (5), the motor (601) is electrically connected with a power supply through an adapter, an output shaft of the motor (601) is provided with a connecting shaft (602), the connecting shaft (602) penetrates through the feeding cover plate (603) to be connected with the feeding plate (605), fixing plates (604) are symmetrically arranged on the side edges of the feeding cover plate (603), one end of each fixing plate (604) is fixedly connected with the large cover plate (4), a plurality of holes (607) are uniformly formed in the surface of the feeding plate (605), rotating belts (606) are arranged on the side edges of the feeding plate (605), and the rotating shafts are matched with the inner walls of the feeding cover plate (603).
2. A continuous melting furnace for producing semiconductor quartz tubes as defined in claim 1, wherein: the surface of the small cover plate (5) is provided with a feeding pipe (7), and the feeding pipe (7) penetrates through the small cover plate (5) and the feeding cover plate (603) and stretches into the feeding device (6).
3. A continuous melting furnace for producing semiconductor quartz tubes as defined in claim 2, wherein: the large cover plate (4) is provided with a cover plate clamping ring (401) on the surface, and an adaptive cover plate clamping plate (402) is arranged in the cover plate clamping ring (401).
4. A continuous melting furnace for producing semiconductor quartz tubes as defined in claim 3, wherein: the surface of the small cover plate (5) is provided with a cover plate pull ring (501), and a cover plate clamping rod (502) matched with the cover plate clamping ring (401) is arranged in the cover plate pull ring (501).
5. A continuous melting furnace for producing semiconductor quartz tubes as recited in claim 4, wherein: the air blowing pipe (8) penetrates through the furnace body (1) and the crucible (10) and stretches into the crucible (10), and a former (13) is arranged at one end of the air blowing pipe (8).
6. A continuous melting furnace for producing semiconductor quartz tubes as defined in claim 5, wherein: a material table (3) is arranged in the connecting plate (11).
7. A continuous melting furnace for producing semiconductor quartz tubes as defined in claim 6, wherein: one end of the air blowing pipe (8) is provided with a forming pipe (12).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202321817550.3U CN220867268U (en) | 2023-07-11 | 2023-07-11 | Continuous melting furnace for producing semiconductor quartz tube |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202321817550.3U CN220867268U (en) | 2023-07-11 | 2023-07-11 | Continuous melting furnace for producing semiconductor quartz tube |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN220867268U true CN220867268U (en) | 2024-04-30 |
Family
ID=90811977
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202321817550.3U Active CN220867268U (en) | 2023-07-11 | 2023-07-11 | Continuous melting furnace for producing semiconductor quartz tube |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN220867268U (en) |
-
2023
- 2023-07-11 CN CN202321817550.3U patent/CN220867268U/en active Active
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