CN220863001U - Multi-beam light emitting device and laser processing equipment - Google Patents

Abstract

The utility model discloses a multi-beam light emitting device and laser processing equipment, wherein the multi-beam light emitting device comprises a laser generating component, a deflection component, a beam combining mirror and a light guide component, wherein the laser generating component is configured to provide at least two laser beams, and a first laser beam in the at least two laser beams enters the light guide component through the beam combining mirror; the rest laser beams in the at least two laser beams are respectively deflected by the deflection assemblies for each preset angle and then enter the light guide component through the beam combining mirror; the light guide component is configured to collect at least two received laser beams into at least two focusing light spots, and scan at least two processing tracks on the processing surface simultaneously. The multi-beam light emitting device can form at least two focusing light spots so as to scan at least two processing tracks on the processing surface simultaneously, thereby improving the working efficiency of laser processing, ensuring that the distance between each beam meets the processing requirement and improving the processing precision of laser processing equipment.

Description

Multi-beam light emitting device and laser processing equipment

Technical Field

The present utility model relates to a laser processing technology, and more particularly, to a multi-beam light emitting device and a laser processing apparatus.

Background

In laser machining, the galvanometer-field lens system is the most commonly used laser machining tool. In general, a collimated laser beam enters the galvanometer-field lens system, and after being converged by the field lens, a focusing light spot is formed, and the focusing light spot scans a required processing track on a processing surface along with the deflection of the laser beam by the galvanometer.

The single-beam incidence mode can only generate one processing track once scanned, and is limited by the scanning speed of a vibrating mirror (currently, the highest speed is 200 radians/second), so that the processing efficiency of single-beam incidence laser processing is limited. When a plurality of processing tracks are needed to be formed on the processing surface, the problem of low processing efficiency exists in a single-beam incidence mode, and the production requirement cannot be met.

Disclosure of utility model

The utility model aims to provide a multi-beam light emitting device which solves the problem of low working efficiency when a plurality of processing tracks are formed on a processing surface in the prior art. In addition, the utility model also provides laser processing equipment comprising the multi-beam light emitting device.

To achieve the purpose, the utility model adopts the following technical scheme:

A multi-beam light emitting device comprising a laser generating assembly, a deflection assembly, a beam combining mirror and a light guiding component, wherein the laser generating assembly is configured to provide at least two laser beams, and a first laser beam of the at least two laser beams enters the light guiding component through the beam combining mirror; the rest laser beams in the at least two laser beams are respectively deflected by the deflection assemblies for each preset angle and then enter the light guide component through the beam combining mirror; the light guide component is configured to collect at least two received laser beams into at least two focusing light spots, and scan at least two processing tracks on the processing surface simultaneously.

Through the cooperation of laser generation subassembly, deflection unit, beam combination mirror and light guide part, can form two at least focusing facula to scan out two piece at least processing tracks simultaneously on the machined surface, improved laser processing's work efficiency, realized simultaneously to the single angular adjustment of at least one light beam, according to actual application scenario, can carry out the single adjustment to the light beam that produces parallel offset and angular offset, in order to guarantee that the interval of laser beam accords with the processing requirement, guarantee laser processing equipment's machining precision.

Optionally, the laser generating component comprises a laser emitting light source, a reflecting mirror, a primary beam splitter and i secondary beam splitters, the deflection component comprises a rotating mirror and i rotating beam combining mirrors, i is a natural number greater than or equal to 0, wherein: the primary beam splitting mirrors and the beam combining mirrors are sequentially arranged according to a first straight line, the primary beam splitting mirrors, the i secondary beam splitting mirrors and the reflecting mirrors are sequentially arranged according to a second straight line perpendicular to the first straight line, the beam combining mirrors, the i rotary beam combining mirrors and the rotary mirrors are sequentially arranged according to a third straight line perpendicular to the first straight line, the i secondary beam splitting mirrors and the i rotary beam combining mirrors are oppositely arranged one by one, and the reflecting mirrors and the rotary mirrors are oppositely arranged; the laser emission light source emits a laser beam to the primary beam splitter; the primary beam splitter receives the laser beam emitted by the laser emission light source and splits the laser beam along a first straight line and a second straight line respectively;

for the ith secondary beam splitter, receiving the laser beam split by the primary beam splitter and propagating along the second straight line, splitting and transmitting the laser beam along the second straight line, and splitting and deflecting the laser beam and reflecting the laser beam to the corresponding ith rotary beam combiner;

The reflecting mirror deflects and reflects the received laser beam to the rotating mirror, and the rotating mirror deflects and transmits the received laser beam to the beam combining mirror;

For the ith rotary beam combiner, receiving the laser beam reflected from the ith secondary beam combiner, deflecting the laser beam, propagating the laser beam to the beam combiner, and transmitting other laser beams passing through the ith rotary beam combiner.

The single laser emission light source can generate at least two laser beams through the matching of the laser emission light source, the reflecting mirror, the primary beam splitter and the i secondary beam splitters, and the single angle adjustment of at least one laser beam is realized through the matching of the rotating mirror and the i rotating beam combiners.

Optionally, when the laser emission light source is located on the first straight line, the primary beam splitter is located between the laser emission light source and the beam combiner, the primary beam splitter receives the laser beam emitted by the laser emission light source, transmits the laser beam linearly and then propagates along the first straight line to the beam combiner, and further deflects the laser beam and then propagates along the second straight line to the reflector;

When the laser emission light source is positioned on the second straight line, the primary beam splitter is positioned between the laser emission light source and the reflecting mirror, the primary beam splitter receives the laser beam emitted by the laser emission light source, transmits the laser beam in a straight line and then propagates along the second straight line to the reflecting mirror, and further deflects the laser beam in a beam splitting manner and then propagates along the first straight line to the beam combiner.

The laser emission light sources are respectively arranged on the first straight line or the second straight line, so that two different forms of laser emission light paths are provided to meet the requirements of different application scenes.

Optionally, when the light guide component is located on the first straight line, the beam combining lens is located between the primary beam combining lens and the light guide component, at least a first laser beam of the two laser beams linearly passes through the beam combining lens and then enters the light guide component, and after the rest laser beams are deflected by a preset angle through the deflection component, the rest laser beams are reflected into the light guide component through the beam combining lens;

When the light guide component is positioned on the third straight line, the beam combining lens is positioned between the rotating lens and the light guide component, at least the first laser beam of the two laser beams is injected into the beam combining lens in a straight line, and enters the light guide component after being deflected by the beam combining lens by a preset angle;

The rest laser beams are deflected by a preset angle through the deflection component and then are injected into the beam combining lens, and then linearly pass through the beam combining lens and are injected into the light guide component.

The light guide components are respectively arranged on the first straight line or the third straight line, so that two different forms of laser emission light paths are provided to meet the requirements of different application scenes.

Optionally, the laser generating assembly includes n laser emitting light sources, the deflecting assembly includes a rotating mirror and n-2 rotating beam combining mirrors, n is a natural number >1, wherein:

The 1 st laser emission light source and the beam combining lens are sequentially arranged according to a fourth straight line, the beam combining lens, the n-2 rotating beam combining lenses and the rotating lens are sequentially arranged according to a fifth straight line perpendicular to the fourth straight line, the n-2 laser emission light sources in the middle are oppositely arranged with the n-2 rotating beam combining lenses one by one, and the n-th laser emission light source is oppositely arranged with the rotating lens;

the 1 st laser emission light source emits a laser beam to the beam combining mirror along the fourth straight line;

For the ith laser emission light source, emitting a laser beam to a corresponding ith rotary beam combining lens, wherein the ith rotary beam combining lens deflects and reflects the laser beam to the beam combining lens, the ith rotary beam combining lens also transmits other laser beams passing through the ith rotary beam combining lens, and i is a natural number which is more than 1 and less than n;

The nth laser emission light source emits a laser beam to the rotating mirror, and the rotating mirror deflects and reflects the laser beam to the beam combining mirror.

Through n laser emission light sources, n laser beams can be generated, n is a natural number which is more than 1, and through the cooperation of the rotary mirror and n-2 rotary beam combining mirrors, the independent angle adjustment of at least one laser beam is realized.

Optionally, when the light guide member is located on the fourth straight line, the beam combining lens is located between the 1 st laser emission light source and the light guide member, and the beam combining lens receives the laser beam emitted by the 1 st laser emission light source along the fourth straight line, and transmits the laser beam to the light guide member along the fourth straight line after transmitting the laser beam straight line;

When the light guide component is positioned on the fifth straight line, the beam combining lens is positioned between the rotary lens and the light guide component, and the beam combining lens receives the laser beam emitted by the 1 st laser emission light source along the fourth straight line and propagates the laser beam along the fifth straight line after reflecting the laser beam.

The light guide components are respectively arranged on the fourth straight line or the fifth straight line, and two different forms of laser emission light paths are provided so as to meet the requirements of different application scenes.

Optionally, the rotating beam combining lens can rotate by 360 degrees, so that the projection formed by the laser beams emitted by the multi-beam light emitting device on the surface to be processed of the material is one row of spots, at least two rows of spots, two groups of spots in a V shape, one circle of spots or multiple circles of spots. Can meet the processing requirements of different shapes and has wide application range.

Optionally, the laser generating assembly includes m laser emission light sources and m polarization adjustment components, the j polarization adjustment component is located at a laser emission end of the j laser emission light source, the j polarization adjustment component is used for adjusting a laser beam emitted by the j laser emission light source, m is a natural number greater than 0, and j is a natural number greater than 0 and less than or equal to m.

By arranging the polarization adjusting component at the laser emitting end of each laser emitting light source, the whole adjustment of the laser beams emitted by the laser emitting light sources is realized.

Optionally, the included angle between the laser beam which is deflected by the deflection component by a preset angle and is directly injected into the beam combining lens is within +/-5 degrees.

The laser processing equipment comprises the multi-beam light emitting device, a processing platform and a driving piece, wherein the processing platform is configured to bear a workpiece to be processed, the driving piece is used for driving the multi-beam light emitting device or the processing platform to slide linearly, so that the multi-beam light emitting device is positioned at a processing station, and the multi-beam light emitting device is configured to emit combined light beams so as to form a processing track on the surface to be processed of the workpiece to be processed.

The multi-beam light emitting device, the processing platform and the driving piece are matched, so that the automatic multi-track processing of the surface to be processed of the workpiece by laser is realized; meanwhile, the multi-beam light emitting device can independently adjust the light beams generating parallel offset and angular offset according to actual application scenes so as to ensure that the distance between the laser beams meets the processing requirements and further ensure the processing precision of laser processing equipment.

Drawings

Fig. 1 is a schematic structural diagram of a multi-beam light emitting device according to a first embodiment of the present utility model;

fig. 2 is a schematic structural diagram of a multi-beam light emitting device according to a second embodiment of the present utility model;

fig. 3 is a schematic structural view of a multi-beam light emitting device according to a third embodiment of the present utility model;

fig. 4 is a schematic structural view of a multi-beam light emitting device according to a fourth embodiment of the present utility model;

Fig. 5 is a schematic structural diagram of a multi-beam light emitting device according to a fifth embodiment of the present utility model;

Fig. 6 is a schematic structural diagram of a multi-beam light emitting device according to a sixth embodiment of the present utility model.

The following reference numerals are included in fig. 1 to 6:

A laser generating component 10, a laser emitting light source 11, a polarization adjusting component 12, a reflecting mirror 13, a primary beam splitter 14 and a secondary beam splitter 15;

A deflection unit 20, a rotary mirror 21, and a rotary beam combiner 22;

A beam combiner 30;

A light guide member 40;

A first sub-beam J1, a second sub-beam J2, a third sub-beam J3, and a fourth sub-beam J4;

the first laser beam G1, the second laser beam G2, and the third laser beam G3.

Detailed Description

In order that the above-recited objects, features and advantages of the present utility model will become more readily apparent, a more particular description of the utility model will be rendered by reference to the appended drawings and appended detailed description.

The utility model provides a multi-beam light emitting device for generating a plurality of parallel equidistant lasers meeting processing requirements, as shown in fig. 1, the multi-beam light emitting device provided by the embodiment of the utility model comprises a laser generating assembly 10, a deflection assembly 20, a beam combining mirror 30 and a light guide component 40, wherein the laser generating assembly 10 is configured to provide at least two laser beams, and a first laser beam of the at least two laser beams enters the light guide component 40 through the beam combining mirror 30; the rest laser beams in the at least two laser beams are respectively deflected by the deflection assemblies 20 for each preset angle and then enter the light guide component 40 through the beam combining mirror 30; the light guide member 40 is configured to collect the received at least two laser beams into at least two focused spots and scan at least two processing tracks on the processing surface simultaneously.

It can be seen that, through the cooperation of the laser generating assembly 10, the deflection assembly 20, the beam combining lens 30 and the light guide component 40, at least two focusing light spots can be formed, so that at least two processing tracks can be scanned on a processing surface simultaneously, the working efficiency of laser processing is improved, at least one single angle adjustment of the laser beam is realized, and according to practical application scenes, the laser beams generating parallel offset and angle offset can be independently adjusted, so that the distance between the laser beams meets the processing requirements, and the processing precision of laser processing equipment is ensured.

As one embodiment, the laser generating assembly 10 includes m laser light emitting sources 11 and m polarization adjustment members 12, where the j-th polarization adjustment member 12 is located at the laser light emitting end of the j-th laser light emitting source 11, and the j-th polarization adjustment member 12 is configured to adjust the laser beam emitted by the j-th laser light emitting source 11, where m is a natural number greater than 0, and j is a natural number greater than 0 and less than or equal to m.

Specifically, the light guide member 40 may be a field lens, and the polarization adjustment member 12 may be a galvanometer.

It can be seen that by providing the polarization adjustment member 12 at the laser emission end of each laser emission light source 11, the overall adjustment of the laser beam emitted from the laser emission light source 11 is achieved. In practical applications, the polarization adjustment component 12 is selectively used according to the type of the laser, and each laser beam can be individually fine-tuned by the polarization adjustment component 12 and the deflection assembly 20, so as to improve the flexibility of laser beam adjustment and further improve the accuracy of laser beam adjustment.

As an embodiment, the angle between the laser beam incident into the beam combining mirror 30 after being deflected by the deflection assembly 20 by a predetermined angle and the laser beam directly incident into the beam combining mirror 30 is within ±5°.

Referring to fig. 2, as an embodiment, the laser generating assembly 10 adopts a single laser emitting light source, the laser generating assembly 10 includes a laser emitting light source 11, a reflecting mirror 13, a primary beam splitter 14 and i secondary beam splitters 15, the deflection assembly 20 includes a rotating mirror 21 and i rotating beam combining mirrors 22, i is a natural number greater than or equal to 0, wherein:

The primary beam splitter 14 and the beam combiner 30 are sequentially arranged according to a first straight line, the primary beam splitter 14, the i secondary beam splitters 15 and the reflecting mirror 13 are sequentially arranged according to a second straight line perpendicular to the first straight line, the beam combiner 30, the i rotary beam combiners 22 and the rotary mirror 21 are sequentially arranged according to a third straight line perpendicular to the first straight line, the i secondary beam splitters 15 and the i rotary beam combiners 22 are oppositely arranged one by one, and the reflecting mirror 13 and the rotary mirror 21 are oppositely arranged; the laser emission light source 11 emits a laser beam to the primary beam splitter 14; the primary beam splitter 14 receives the laser beam emitted from the laser emission light source 11 and splits the laser beam along a first straight line and a second straight line, respectively;

for the ith secondary beam splitter 15, receiving the laser beam split from the primary beam splitter 14 and propagating along the second straight line, splitting the laser beam along the second straight line for transmission, and splitting the laser beam for deflection and reflection to the corresponding ith rotary beam combiner 22;

The reflecting mirror 13 deflects and reflects the received laser beam onto the rotating mirror 21, and the rotating mirror 21 deflects and propagates the received laser beam to the beam combining mirror 30;

for the ith rotary beam combiner 22, the laser beam reflected from the ith secondary beam splitter 15 is received and deflected to propagate toward the beam combiner 30, and the other laser beam passing through the ith rotary beam combiner is transmitted.

It can be seen that, by matching one laser emission light source 11, the reflecting mirror 13, the primary beam splitter 14 and the i secondary beam splitters 15, at least two laser beams can be generated by a single laser emission light source 11, and by matching the rotating mirror 21 and the i rotating beam combiners 22, the single angle adjustment of at least one laser beam is realized, and a multi-beam light emitting device using a single laser light source is provided, which is low in cost.

The multi-beam light emitting device of the present utility model employing a single laser emission light source will be described in exemplary detail by way of four embodiments.

Example 1

Referring to fig. 1 again, in the present embodiment, the multi-beam light emitting device is capable of generating two parallel laser beams by a single laser light source, the laser generating assembly 10 includes a laser light source 11, a polarization adjusting component 12, a reflecting mirror 13 and a primary beam splitter 14, the deflecting assembly 20 includes a rotating mirror 21, wherein the laser light source 11, the polarization adjusting component 12, the primary beam splitter 14, a beam combining mirror 30 and a light guiding component 40 are sequentially arranged according to a first straight line, the primary beam splitter 14 and the reflecting mirror 13 are sequentially arranged according to a second straight line perpendicular to the first straight line, the beam combining mirror 30 and the rotating mirror 21 are sequentially arranged according to a third straight line perpendicular to the first straight line, and the reflecting mirror 13 and the rotating mirror 21 are oppositely arranged.

The laser emission light source 11 emits a laser beam to the primary beam splitter 14; the primary beam splitter 14 receives the laser beam emitted by the laser emission light source 11, splits the laser beam along a first straight line and a second straight line to form a first sub-beam J1 and a second sub-beam J2, the first sub-beam J1 propagates along the first straight line and enters the beam combiner 30, the second sub-beam J2 propagates along the second straight line and enters the reflector 13, the reflector 13 deflects and reflects the received second sub-beam J2 onto the rotating mirror 21, the rotating mirror 21 deflects and reflects the received second sub-beam J2 by a preset angle onto the beam combiner 30, the beam combiner 30 combines the first sub-beam J1 and the second sub-beam J2 and then refracts the combined beam onto the light guide member 40, and the light guide member 40 converges the two sub-beams with a certain included angle into two focusing spots and scans two processing tracks on a processing surface.

In this embodiment, the first sub-beam J1 propagates along the first straight line and directly enters the beam combining lens 30, the second sub-beam J2 is reflected by the reflecting mirror 13 and then enters the beam combining lens 30 through the angle adjustment of the rotating mirror 21, and when the distance between the two emitted parallel laser beams needs to be adjusted, the angle of the J2 relative to the J1 can be adjusted by rotating the rotating mirror 21. The polarization state of the laser beam can also be directly adjusted by the polarization adjustment member 12 to change the intensity ratio of J1 and J2.

Example two

Referring to fig. 2 again, in the present embodiment, the multi-beam light emitting device is capable of generating three parallel laser beams by a single laser light source, the laser generating assembly 10 includes a laser light source 11, a polarization adjusting component 12, a reflecting mirror 13, a primary beam splitter 14 and a secondary beam splitter 15, and the deflecting assembly 20 includes a rotating mirror 21 and a rotating beam combiner 22, wherein: the laser emission light source 11, the polarization adjustment component 12, the primary beam splitter 14, the beam combiner 30 and the light guide component 40 are sequentially arranged according to a first straight line, the primary beam splitter 14, the secondary beam splitter 15 and the reflecting mirror 13 are sequentially arranged according to a second straight line perpendicular to the first straight line, the beam combiner 30, the rotary beam combiner 22 and the rotary mirror 21 are sequentially arranged according to a third straight line perpendicular to the first straight line, the secondary beam splitter 15 and the rotary beam combiner 22 are oppositely arranged, and the reflecting mirror 13 and the rotary mirror 21 are oppositely arranged.

The laser emission light source 11 emits a laser beam to the primary beam splitter 14; the primary beam splitter 14 receives the laser beam emitted by the laser emission light source 11, and splits the laser beam along a first straight line and a second straight line respectively to form a first sub-beam J1 and a second sub-beam J2, the first sub-beam J1 propagates along the first straight line to enter the beam combiner 30, the second sub-beam J2 propagates along the second straight line to enter the secondary beam splitter 15, the secondary beam splitter 15 splits the entered sub-beam to form a third sub-beam J3 and a fourth sub-beam J4, the third sub-beam J3 is reflected by the secondary beam splitter 15 and enters the rotary beam combiner 22, the third sub-beam J3 is deflected by the rotary beam combiner 22 and enters the beam combiner 30, the fourth sub-beam J4 propagates along the second straight line to enter the reflector 13, the reflector 13 deflects the received fourth sub-beam J4 to the rotary beam combiner 21, the rotary beam combiner 21 deflects the received fourth sub-beam J4 by a preset angle and then enters the rotary beam combiner 22, the rotary beam combiner 22 then transmits the entered fourth sub-beam J4 to enter the beam combiner 30, the third sub-beam J3 and the third sub-beam J4 are focused to form a focused beam 40, and the focused beam is processed by the third sub-beam combiner 40, and the focused beam is focused on the third sub-beam splitter 40.

On this basis, a group of sub-beam dividing lenses 15 and a rotating beam combining lens 22 are added between the laser generating assembly 10 and the deflection assembly 20, and each group of sub-beam dividing lenses 15 and the rotating beam combining lens 22 are arranged oppositely, so that the requirement of multiple beams (more than three sub-beams) can be met.

In this embodiment, the first sub-beam J1 propagates along the first straight line and directly enters the beam combining lens 30, and the third sub-beam J3 and the fourth sub-beam J4 enter the beam combining lens 30 through the angle adjustment of the rotating beam combining lens 22 and the rotating lens 21, respectively, so as to realize the pitch adjustment of the three parallel laser beams finally emitted. The laser emission angle of the laser light emitted from the laser emission light source 11 is directly adjusted by the polarization adjustment member 12.

Example III

Referring to fig. 3, the main difference between the present embodiment and the first embodiment is that: the laser emission light source 11, the polarization adjustment component 12, the primary beam splitter 14 and the reflecting mirror 13 are sequentially arranged according to a second straight line, the primary beam splitter 14 receives the laser beam emitted by the laser emission light source 11, and splits the laser beam along the first straight line and the second straight line to form a first sub-beam J1 and a second sub-beam J2, the second sub-beam J2 is transmitted in a straight line and then propagates along the second straight line to the reflecting mirror 13, and the first sub-beam J1 propagates along the first straight line to the beam combiner 30 after being split and deflected. Other structures and laser emission light paths are the same as those of the first embodiment, and will not be described here.

Example IV

Referring to fig. 4, the main difference between the present embodiment and the first embodiment is that: the light guide component 40, the beam combining lens 30 and the rotating lens 21 are sequentially arranged according to a third straight line, the first sub-beam J1 is injected into the beam combining lens 30 in a straight line, and enters the light guide component 40 after being deflected by the beam combining lens 30 by a preset angle; the second sub-beam J2 is deflected by the rotating mirror 21 by a predetermined angle and then enters the beam combining mirror 30, and then passes through the beam combining mirror 30 in a straight line and then enters the light guide member 40. Other structures and laser emission light paths are the same as those of the first embodiment, and will not be described here.

The third embodiment and the fourth embodiment expand possible structural forms of the multi-beam light emitting device respectively, so that the multi-beam light emitting device can be flexibly applied to different use scenes, and different installation space limitations are met.

Referring to fig. 6, as an embodiment, the laser generating assembly 10 employs multiple laser emitting light sources, the laser generating assembly 10 includes n laser emitting light sources 11, the deflection assembly 20 includes a rotating mirror 21 and n-2 rotating beam combining mirrors 22, n is a natural number >1, where: the 1 st laser emission light source 11, the polarization adjustment component 12, the beam combining lens 30 and the light guide component 40 are sequentially arranged according to a fourth straight line, the beam combining lens 30, the n-2 rotating beam combining lenses 22 and the rotating lens 21 are sequentially arranged according to a fifth straight line perpendicular to the fourth straight line, the n-2 laser emission light sources 11 in the middle are oppositely arranged with the n-2 rotating beam combining lenses 22 one by one, and the n-th laser emission light source 11 is oppositely arranged with the rotating lens 21;

The 1 st laser emission light source 11 emits a laser beam to the beam combining mirror 30 along the fourth straight line;

For the ith laser emission light source 11, emitting a laser beam to the corresponding ith rotary beam combining lens 22, the ith rotary beam combining lens 22 deflects and reflects the laser beam to the beam combining lens 30, the ith rotary beam combining lens 22 also transmits other laser beams passing through the ith rotary beam combining lens 22, and i is a natural number greater than 1 and less than n;

The nth laser emission light source 11 emits a laser beam toward the rotating mirror 21, and the rotating mirror 21 deflects and reflects the laser beam to the beam combining mirror 30.

It can be seen that n laser beams can be generated by n laser emission light sources 11, n is a natural number greater than 1, and by the cooperation of the rotary mirror 21 and n-2 rotary beam combining mirrors 22, the single angle adjustment of at least one laser beam is realized, and a multi-beam light emission device using at least two laser light sources is provided, which can provide laser beams with different powers and/or wavelengths according to processing requirements.

Hereinafter, the multi-beam light emitting device employing the multi-laser emission light source according to the present utility model will be described in exemplary detail by way of two embodiments.

Example five

Referring to fig. 5, in the present embodiment, the multi-beam light emitting device can generate two parallel laser beams by two laser light sources, the laser generating assembly 10 includes two laser light sources 11, a polarization adjustment component 12 is disposed behind each laser light source 11, the deflection assembly 20 includes a rotating mirror 21, the 1 st laser light source 11, the polarization adjustment component 12, a beam combining mirror 30 and a light guiding component 40 are sequentially arranged according to a fourth straight line, the beam combining mirror 30 and the rotating mirror 21 are sequentially arranged according to a fifth straight line perpendicular to the fourth straight line, and the 2 nd laser light source 11 is disposed opposite to the rotating mirror 21.

The 1 st laser emission light source 11 emits a first laser beam G1 to the beam combining mirror 30 along a fourth straight line, the 2 nd laser emission light source 11 emits a second laser beam G2 to the rotating mirror 21, the rotating mirror 21 deflects the laser beam to a preset angle and then reflects the laser beam to the beam combining mirror 30, the beam combining mirror 30 then combines the first laser beam G1 and the second laser beam G2 and then refracts the laser beam to the light guiding component 40, and the light guiding component 40 deflects two laser beams with a certain included angle into two parallel laser beams and irradiates the two parallel laser beams to the surface to be processed of the material.

In this embodiment, the first laser beam G1 propagates along the fourth straight line and directly enters the beam combining lens 30, the second laser beam G2 directly enters the rotating lens 21 and enters the beam combining lens 30 through the angle adjustment of the rotating lens 21, so as to realize the angle adjustment of the two parallel laser beams finally emitted. The first laser beam G1 and the second laser beam G2 directly adjust the polarization state, i.e., the polarization direction, of the laser light emitted from the corresponding laser emission light source 11 by the polarization adjustment member 12, thereby changing the direction of the laser beam passing through the beam combining mirror 30, the rotating mirror 21.

It should be noted that, according to the requirements of the practical application environment, the following embodiments may be adopted for the light guide member 40: the light guide member 40, the beam combining mirror 30 and the rotating mirror 21 are sequentially arranged according to a fifth straight line, and the first laser beam G1 is linearly injected into the beam combining mirror 30, deflected by the beam combining mirror 30 by a preset angle and then enters the light guide member 40; the second laser beam G2 is deflected by the rotating mirror 21 by a predetermined angle and then is incident into the beam combining mirror 30, and then is incident into the light guide member 40 after passing through the beam combining mirror 30 in a straight line.

Example six

Referring to fig. 6, in the present embodiment, the multi-beam light emitting device can generate three parallel laser beams by three laser light sources, the laser generating assembly 10 includes three laser light sources 11, a polarization adjustment component 12 is disposed behind each laser light source 11, the deflection assembly 20 includes a rotating mirror 21 and a rotating beam combining mirror 22, the 1 st laser light source 11, the polarization adjustment component 12, the beam combining mirror 30 and the light guiding component 40 are sequentially arranged according to a fourth straight line, the beam combining mirror 30, the rotating beam combining mirror 22 and the rotating mirror 21 are sequentially arranged according to a fifth straight line perpendicular to the fourth straight line, the 2 nd laser light source 11 is disposed opposite to the rotating beam combining mirror 22, and the 3 rd laser light source 11 is disposed opposite to the rotating mirror 21.

The 1 st laser emission light source 11 emits a first laser beam G1 to the beam combining mirror 30 along a fourth straight line, the 2 nd laser emission light source 11 emits a second laser beam G2 to the corresponding rotary beam combining mirror 22, the rotary beam combining mirror 22 deflects and reflects the second laser beam G2 to the beam combining mirror 30, the 3 rd laser emission light source 11 emits a third laser beam G3 to the rotary mirror 21, the rotary mirror 21 deflects the third laser beam G3 by a preset angle and then reflects the third laser beam G3 to the rotary beam combining mirror 22, the third laser beam is transmitted to the beam combining mirror 30 through the rotary beam combining mirror 22, the beam combining mirror 30 then refracts the first laser beam G1, the second laser beam G2 and the third laser beam G3 to the light guide component 40, and the light guide component 40 deflects three laser beams with certain included angles into three parallel laser beams and irradiates the surface to be processed of a material.

In this embodiment, the first laser beam G1 propagates along the fourth straight line and directly enters the beam combining lens 30, the second laser beam G2 directly enters the rotating beam combining lens 22 and is deflected and reflected to the beam combining lens 30 by the rotating beam combining lens 22, and the third laser beam G3 directly enters the rotating lens 21, is deflected and reflected to the rotating beam combining lens 22 by the rotating lens 21, and is transmitted to the beam combining lens 30 by the rotating beam combining lens 22. By adjusting the rotary beam combining mirror 22 and the rotary mirror 21 separately, the pitch adjustment of the three parallel laser beams finally emitted is realized. The first, second and third laser beams G1, G2 and G3 can also directly adjust the laser emission angles emitted from the corresponding laser emission light sources 11 by the polarization adjustment member 12.

On this basis, a group of laser emission light sources 11 and a rotating beam combining lens 22 are added between the beam combining lens 30 and the rotating lens 21, and each group of laser emission light sources 11 and the rotating beam combining lens 22 are arranged oppositely, so that the requirement of multiple laser beams (more than three laser beams) can be met.

It should be noted that, according to the requirements of the practical application environment, the following embodiments may be adopted for the light guide member 40: the light guide component 40, the beam combining lens 30, all the rotary beam combining lenses 22 and the rotary lens 21 are sequentially arranged according to a fifth straight line, and the first laser beam G1 is injected into the beam combining lens 30 in a straight line, deflected by the beam combining lens 30 for a preset angle and then enters the light guide component 40; the second laser beam G2 is linearly injected into the corresponding rotating beam combining lens 22, is deflected by the rotating beam combining lens 22 by a preset angle, is injected into the beam combining lens 30, and is then linearly injected into the light guide member 40 after passing through the beam combining lens 30; the third laser beam G3 is linearly incident into the rotating mirror 21, deflected by the rotating mirror 21 by a predetermined angle, reflected to the rotating beam combining mirror 22, transmitted to the beam combining mirror 30 by the rotating beam combining mirror 22, and incident into the light guide member 40 by the beam combining mirror 30 the linearly passing third laser beam G3.

It should be noted that the rotating mirror 21 and the rotating beam combining mirror 22 can rotate 360 ° independently, so that the projection of the laser beam emitted by the multi-beam light emitting device on the surface to be processed of the material is one row of spots, at least two rows of spots, two groups of spots in V shape, one circle of spots or multiple circles of spots, so as to meet different processing requirements.

The multi-beam light emitting device provided by the utility model has the following advantages:

1) At least two focusing light spots can be formed to scan out at least two processing tracks simultaneously on the processing surface, so that the working efficiency of laser processing is improved, at least one single angle of the laser beam can be adjusted simultaneously, and laser beams generating parallel offset and angle offset can be adjusted independently according to actual application scenes, so that the distance between the laser beams is ensured to meet the processing requirement, and the processing precision of laser processing equipment is ensured.

2) And a single laser emission light source is adopted, so that the cost is low.

3) With multiple laser emitting light sources, laser beams of different powers and/or wavelengths may be provided as required by the process.

4) The laser emission end of each laser emission light source is provided with a polarization adjusting component, so that the laser beams emitted by each laser emission light source can be integrally adjusted, and each laser beam can be independently and finely adjusted through the polarization adjusting component and the deflection component, so that the flexibility of laser beam adjustment is improved, and the accuracy of laser beam adjustment is further improved.

5) The rotary mirror and the rotary beam combining mirror can respectively and independently rotate 360 degrees, so that laser beams emitted by the multi-beam light emitting device form projections with different preset shapes on the processing surface, the processing requirements of different shapes can be met, and the application range is wide.

6) The light guide component can be a field lens, and the polarization adjusting component can be a vibrating lens. According to the characteristics of the field lens, the light beams after parallel incidence of the multiple light beams are converged at the same focus, and multiple focuses cannot be generated. When a plurality of beams of light are incident on the field lens at a small angle, a plurality of converging focuses can be formed after converging, and a plurality of processing tracks can be generated simultaneously by deflecting the beams of light through the vibrating mirror. Compared with the light splitting of an optical diffraction device, the light splitting method has the advantages that the incidence mode of the multiple light beams at a small angle is more flexible, the angle between the light beams can be freely adjusted, and the diffraction pattern does not need to be designed separately for each focus interval like the optical diffraction device. Meanwhile, the small angle among the multiple light beams ensures that a plurality of focused focuses are in a small range, and the focus at the central position can be corrected by the galvanometer-field lens system, so that the plurality of focuses can meet certain precision requirements.

The utility model also provides laser processing equipment, which comprises the multi-beam light emitting device, a processing platform and a driving piece, wherein the processing platform is configured to bear a workpiece to be processed, the driving piece is used for driving the multi-beam light emitting device or the processing platform to slide linearly, so that the multi-beam light emitting device is positioned at a processing station, and the multi-beam light emitting device is configured to emit combined light beams so as to form a processing track on the surface to be processed of the workpiece to be processed.

Therefore, the multi-track processing is automatically performed on the surface to be processed of the workpiece by laser through the matching of the multi-beam light emitting device, the processing platform and the driving piece; meanwhile, the multi-beam light emitting device can independently adjust the light beams generating parallel offset and angular offset according to actual application scenes, so that the distance between the laser beams is ensured to meet the processing requirements, and the processing precision of laser processing equipment is ensured.

The above embodiments merely illustrate the basic principles and features of the present utility model, and the present utility model is not limited to the above examples, but can be variously changed and modified without departing from the spirit and scope of the present utility model, which is within the scope of the present utility model as claimed. The scope of the utility model is defined by the appended claims and equivalents thereof.

Claims (10)

1. A multi-beam light emitting device is characterized in that the multi-beam light emitting device comprises a laser generating component, a deflection component, a beam combining mirror and a light guide component, wherein,

The laser generating assembly is configured to provide at least two laser beams, and a first laser beam of the at least two laser beams enters the light guide component through the beam combining mirror;

The rest laser beams in the at least two laser beams are respectively deflected by the deflection assemblies for preset angles and then enter the light guide component through the beam combining lens;

The light guide component is configured to collect at least two received laser beams into at least two focusing light spots, and scan at least two processing tracks on a processing surface at the same time.

2. A multi-beam light emitting device according to claim 1, wherein the laser generating assembly comprises a laser light source, a reflector, a primary beam splitter and i secondary beam splitters, the deflection assembly comprises a rotating mirror and i rotating beam combining mirrors, i is a natural number equal to or greater than 0, wherein:

The primary beam splitters, the i secondary beam splitters and the reflecting mirrors are sequentially arranged according to a first straight line, the primary beam splitters, the i rotary beam splitters and the rotary mirrors are sequentially arranged according to a second straight line perpendicular to the first straight line, the i secondary beam splitters and the i rotary beam splitters are sequentially arranged according to a third straight line perpendicular to the first straight line, the i secondary beam splitters and the i rotary beam splitters are oppositely arranged one by one, and the reflecting mirrors and the rotary mirrors are oppositely arranged;

the laser emission light source emits a laser beam to the primary beam splitter;

The primary beam splitter receives the laser beam emitted by the laser emission light source and splits the laser beam along the first straight line and the second straight line respectively;

For an ith secondary beam splitter, receiving the laser beam split by the primary beam splitter and propagating along the second straight line, splitting and transmitting the laser beam along the second straight line, and splitting and deflecting the laser beam and reflecting the laser beam to a corresponding ith rotary beam combiner;

the reflecting mirror deflects and reflects the received laser beam to the rotating mirror, and the rotating mirror deflects and then propagates the received laser beam to the beam combining mirror;

for the ith rotary beam combining lens, receiving the laser beam reflected from the ith secondary beam combining lens, deflecting the laser beam, transmitting the laser beam to the beam combining lens, and transmitting other laser beams passing through the ith rotary beam combining lens.

3. A multi-beam light emitting device according to claim 2, wherein when the laser light emitting source is located on the first straight line, the primary beam splitter is located between the laser light emitting source and the beam combining mirror, the primary beam splitter receives the laser beam emitted from the laser light emitting source, transmits the laser beam straight line and propagates along the first straight line to the beam combining mirror, and further deflects the laser beam and propagates along the second straight line to the reflecting mirror;

When the laser emission light source is located on the second straight line, the primary beam splitter is located between the laser emission light source and the reflecting mirror, the primary beam splitter receives the laser beam emitted by the laser emission light source, transmits the laser beam to the reflecting mirror along the second straight line after being transmitted in a straight line, and further deflects the laser beam to be transmitted to the beam combiner along the first straight line after being split and deflected.

4. The multiple beam light emitting device according to claim 2, wherein when the light guide member is located on a first straight line, the beam combining mirror is located between the primary beam splitting mirror and the light guide member, a first laser beam of the at least two laser beams passes through the beam combining mirror straight line and then enters the light guide member, and each remaining laser beam is deflected by the deflection assembly by a preset angle and then reflected by the beam combining mirror into the light guide member;

When the light guide component is positioned on a third straight line, the beam combining lens is positioned between the rotating lens and the light guide component, a first laser beam of the at least two laser beams is injected into the beam combining lens in a straight line, and enters the light guide component after being deflected by the beam combining lens by a preset angle;

The rest laser beams are deflected by the deflection assembly for a preset angle and then are injected into the beam combining lens, and then linearly pass through the beam combining lens and are injected into the light guide component.

5. A multi-beam light emitting device according to claim 1 wherein the laser light generating assembly comprises n laser light emitting sources, the deflection assembly comprises a rotating mirror and n-2 rotating beam combining mirrors, n being a natural number >1, wherein:

The 1 st laser emission light source and the beam combining lens are sequentially arranged according to a fourth straight line, the beam combining lens, the n-2 rotating beam combining lenses and the rotating lens are sequentially arranged according to a fifth straight line perpendicular to the fourth straight line, the n-2 laser emission light sources in the middle are oppositely arranged one by one with the n-2 rotating beam combining lenses, and the n-th laser emission light source is oppositely arranged with the rotating lens;

The 1 st laser emission light source emits a laser beam to the beam combining mirror along a fourth straight line;

For an ith laser emission light source, emitting a laser beam to a corresponding ith rotary beam combining lens, wherein the ith rotary beam combining lens deflects and reflects the laser beam to the beam combining lens, the ith rotary beam combining lens also transmits other laser beams passing through the ith rotary beam combining lens, and i is a natural number which is more than 1 and less than n;

The nth laser emission light source emits a laser beam to the rotating mirror, and the rotating mirror deflects and reflects the laser beam to the beam combining mirror.

6. A multi-beam light emitting apparatus according to claim 5, wherein when the light guide member is on a fourth straight line, the beam combining mirror is located between the 1st laser light emitting source and the light guide member, receives the laser beam emitted by the 1st laser light emitting source along the fourth straight line, and transmits the laser beam straight line along the fourth straight line to the light guide member;

When the light guide component is positioned on the fifth straight line, the beam combining lens is positioned between the rotary lens and the light guide component, and the beam combining lens receives the laser beam emitted by the 1 st laser emission light source along the fourth straight line and propagates the laser beam to the light guide component along the fifth straight line after reflecting the laser beam.

7. A multi-beam light emitting device according to any one of claims 2-6, wherein the rotating beam combiner is rotatable through 360 ° such that the projection of the laser beam emitted by the multi-beam light emitting device onto the surface to be processed of the material is one row of spots, at least two rows of spots, two groups of spots in a "V" shape, one circle of spots or a plurality of circles of spots.

8. A multi-beam light emitting device according to claim 1, wherein the laser generating assembly comprises m laser light emitting sources and m polarization adjustment members, the j polarization adjustment members being located at the laser light emitting ends of the j laser light emitting sources, the j polarization adjustment members being configured to adjust the laser beams emitted from the j laser light emitting sources, m being a natural number greater than 0, j being a natural number greater than 0 and less than or equal to m.

9. The multi-beam light emitting device according to claim 1, wherein an angle between the laser beam incident into the beam combiner after being deflected by the deflection assembly by a predetermined angle and the laser beam incident directly into the beam combiner is within ±5°.

10. A laser machining apparatus comprising a multi-beam light emitting device according to any one of claims 1-9, a machining platform configured to carry a workpiece to be machined, and a drive for driving the multi-beam light emitting device or the machining platform to slide linearly such that the multi-beam light emitting device is in a machining station, the multi-beam light emitting device being configured to emit a combined light beam to form a machining track on a surface to be machined of the workpiece to be machined.