CN220855082U - Chip detection device - Google Patents

Abstract

The utility model relates to the technical field of chip detection devices and discloses a chip detection device which comprises a base, a clamp unit, a detection unit and a position adjusting unit arranged on the base, wherein the clamp unit comprises a supporting plate and an adjusting part arranged on the base, and a limit groove is formed in the top surface of the supporting plate; the detecting portion of the detecting unit is provided on the position adjusting unit and located directly above the support plate. The chip is limited by the cooperation between the supporting plate and the adjusting part, the degree of freedom of the chip in the limiting groove in the horizontal direction is limited under the resistance of the inner wall of the limiting groove, and the chip is ensured not to generate position deviation; and the freedom degree of the supporting plate in the horizontal direction is limited so as to replace the supporting plates with different sizes and shapes, so that the whole fixture unit can be suitable for chip detection under different conditions such as bare chips, chips on circuit boards and the like, the detection difficulty of various chips is greatly reduced, and unnecessary troubles are reduced.

Description

Chip detection device

Technical Field

The present utility model relates to a chip detection device.

Background

At present, a packaged common electronic component is often tested through a plurality of test jigs or customized jigs, and when a bare chip is tested, practical test jigs and test means are often not available.

Particularly, for the individual very small bare chip units cut from the wafer, the test of the bare chips and the whole wafer on a common process line are very different, for the wafer test, the size of the wafer is generally 4 inches, 6 inches and 8 inches or more because the single chip is in an uncut state on the wafer, the size is relatively determined, the fixing and the accurate positioning are easier to carry out in the actual test, and for the single bare chip unit, the size difference of the shape and the size is larger because the size of the single bare chip unit is smaller, the traditional clamp obviously cannot fix the single bare chip unit, and the force of a probe for the test easily causes the chip to displace when the probe for the test contacts the chip in the test; for the inspection of the chip soldered on the circuit board, an additional fixture is required for fixing.

Disclosure of utility model

Aiming at the defects in the prior art, the utility model aims to solve the technical problems that: a chip inspection apparatus capable of fixing and inspecting a single bare chip and a chip on a circuit board is provided.

In order to solve the technical problems, the utility model adopts a technical scheme that: the chip detection device comprises a base, a clamp unit, a detection unit and a position adjustment unit, wherein the clamp unit comprises a support plate and an adjustment part which is arranged on the base and used for limiting the support plate in the horizontal direction, a limit groove which is matched with the outside of a bare chip is formed in the top surface of the support plate, the limit groove is used for limiting the bare chip, no matter what chip is, the support plate can be provided with the limit groove which is matched with the bare chip, the positioning of various chips with different sizes is realized, the chip is prevented from shifting, the adjustment part can be used for limiting the support plate and is convenient for the replacement of the support plate, and therefore, the device can be used for the detection and the limitation of different chips; the detection unit is used for detecting the electrical property of the chip; the position adjusting unit is arranged on the base, the detecting part of the detecting unit is arranged on the position adjusting unit and is positioned right above the supporting plate, and the position adjusting unit is used for driving the detecting unit to move along an X axis, a Y axis and a Z axis relative to the supporting plate, so that the detecting unit can achieve the purpose of completing the electrical property test of the chip by aligning the bare chip through the detecting part to contact with the test pad (i nput/output port of the chip), and the chip on the circuit board is monitored.

Further, the detection unit comprises a control part arranged on the base and a probe electrically connected with the control part; the position adjusting unit comprises a first supporting seat arranged on the base in a sliding mode along an X axis, a second supporting seat arranged on the first supporting seat in a sliding mode along a Y axis direction and a first driving part driving the first supporting seat to move along the X axis and driving the second supporting seat to move along the Y axis, a second driving part is arranged on the second supporting seat in the Z axis direction, a test frame which is connected to the second supporting seat in a sliding mode along the Z axis direction is arranged at the output end of the second driving part, the test frame is located right above the supporting plate, and the probe is arranged on the test frame and the detection end is arranged towards the supporting plate, so that the position between the probe and the supporting plate can be adjusted, the probe can be aligned with a chip through adjusting the position, and the accuracy of data after chip testing is guaranteed.

Further, the test frame is provided with a plurality of adjusting and limiting parts which are arranged along the Z-axis direction and can move along the Z-axis direction to be abutted against the support plate, so as to limit the degree of freedom of the support plate in the Z-axis direction.

Further, the chip detection device also comprises sensing units arranged on the side walls of the base, and the sensing units are used for detecting whether people or objects approach or not and giving out prompts when people or objects approach to avoid influencing the chip detection.

Further, the adjusting part comprises a bottom plate, a plurality of limiting blocks and a plurality of locking structures, wherein the bottom plate is arranged on the top surface of the base and provided with a supporting plane, the limiting blocks are arranged on the supporting plane of the bottom plate in a sliding manner and are distributed at intervals along the outer side of the bottom plate, the limiting blocks are arranged in the bottom plate and are matched with the limiting blocks, the locking structures are used for limiting the sliding of the limiting blocks, one part of the limiting blocks are respectively arranged on two sides of the supporting plate along an X axis and slide along the X axis, and the other part of the limiting blocks are respectively arranged on two sides of the supporting plate along a Y axis and slide along the Y axis, so that the supporting plates with different sizes can be placed between the limiting blocks to limit chips under different conditions; the adjusting part further comprises traction structures which are arranged on the base and are respectively connected with the locking structures, one ends of the traction structures extend out of the base, and the traction structures are used for contacting the locking structures to lock the limiting blocks.

Further, the position department that the inside of bottom plate corresponds to each stopper has all offered spacing chamber, each locking structure sets up in each spacing intracavity the position department that corresponds each spacing chamber on the top surface of bottom plate is provided with respectively along the slip direction that corresponds the stopper and communicates spacing chamber, the bottom activity of each stopper passes corresponding spout and extends to spacing intracavity, the stopper extend to the part in spacing chamber with locking structure meshing cooperation, the stopper can be inwards slided along the slip direction for locking structure, locking structure can restrict the stopper and outwards slide along the slip direction to restrict the bearing plate after the stopper supports the bearing plate.

Further, the locking structure comprises a first self-recovery spring and a rack, wherein the first self-recovery spring and the rack are arranged in the limiting cavity along the sliding direction of the limiting block, the first self-recovery spring is positioned on one outwards side of the limiting block, two ends of the first self-recovery spring are respectively connected with the inner wall of the limiting cavity and the limiting block, when the limiting block is positioned at one outwards-end of the sliding chute, the first self-recovery spring is in a normal state, after the limiting block slides inwards, the first self-recovery spring is in a stretching state and always pulls the limiting block, and when the limiting block is unlocked on the rack, the first self-recovery spring can enable the limiting block to quickly retract and be far away from the supporting plate; the top surface of the rack is provided with an inwardly inclined meshing tooth, and a meshing groove which is in meshing fit with the meshing tooth is formed on one side of the limiting block facing the rack; the rack slides along the Z axis direction and sets up in spacing intracavity the bottom of rack is provided with the second from restoring spring that both ends are connected in rack and spacing intracavity wall respectively along the Z axis direction, the second is from restoring spring and is in compressed state to push the rack towards rack one side all the time, so alright make the rack support tightly in the stopper all the time and lock the stopper.

Further, a placing cavity is formed in the base, and first perforations are formed in the top of the placing cavity, corresponding to the positions right below the racks, in a penetrating manner along the Z-axis direction; the traction structure comprises a roller group arranged in the placement cavity in a rotating manner and a plurality of pull ropes which are arranged on the roller group in a winding manner, wherein one end of each pull rope is connected with the corresponding rack, the other end of each pull rope penetrates through the first perforation and is wound on the roller group, one end of each pull rope, which is far away from the rack, is converged into one strand, and then is movably penetrated out of the base, so that unlocking of each limiting block can be realized only by pulling the pull rope, and the operation is convenient and simple.

Further, a second perforation communicated with the placing cavity is formed on the outer wall of the base; the traction mechanism further comprises pull rings with diameters larger than the diameters of the second holes, one ends of the pull ropes, far away from the racks, of the pull ropes movably penetrate through the second holes and are connected to the pull rings, so that all the pull ropes can be pulled by pulling one pull ring to unlock all the limiting blocks, the limiting blocks are reset under the action of the first self-recovery springs to facilitate the removal of the supporting plates, and meanwhile, the operation process of the pull ropes can be simplified due to the arrangement of the pull rings, and the pull ropes are prevented from being hurt by pulling.

Further, an elastic pad is arranged on one side surface of each limiting block, which faces the supporting plate, so that the limiting block can be prevented from pressing the supporting plate after abutting against the supporting plate.

The chip detection device provided by the utility model has at least the following beneficial effects:

Through the cooperation between the supporting plate and the adjusting part, a limit groove matched with the outline of the chip is formed for limiting the chip, the chip in the limit groove is limited in the freedom degree in the horizontal direction under the resistance of the inner wall of the limit groove, and the detection unit is ensured not to generate position deviation when detecting the chip; the setting of the adjusting part can be used for limiting the freedom degree of the supporting plate in the horizontal direction, so that the supporting plates with different sizes and shapes can be replaced, and even a circuit board needing to detect chips can be directly placed, so that the whole fixture unit can be suitable for chip detection under different conditions such as bare chips, chips on the circuit board and the like, the detection difficulty of various chips is greatly reduced, and unnecessary troubles are reduced; meanwhile, for the detachable support plate, the circuit board to be detected can be limited on the adjusting part after the support plate is detached so as to detect the chip on the circuit board, and the multifunctional and multi-range use is realized.

Drawings

The accompanying drawings, which are included to provide a further understanding of the application and are incorporated in and constitute a part of this specification, illustrate embodiments of the application and together with the description serve to explain the application and do not constitute a limitation on the application. In the drawings:

FIG. 1 is a front view of a chip inspection device of the present utility model;

FIG. 2 is a right side view of the chip inspection apparatus of the present utility model;

FIG. 3 is a top view of the chip test device of the present utility model;

FIG. 4 is a partial right side cross-sectional view of the stopper of the clamp unit of the present utility model in an initial position;

FIG. 5 is a partial right side cross-sectional view of the clamp unit of the present utility model after the stopper slides inwardly;

fig. 6 is a partial right side cross-sectional view of the clamp unit of the present utility model in the stopper reset after the pull cord is pulled.

The meaning of the reference numerals in the drawings are:

A base-1; a first perforation-11; placing the cavity-12;

A clamp unit-2; an adjusting part-21; a base plate-211; a spacing cavity-2111; chute-2112; slide bar-2113; a limited block-212; a first slider-2121; engagement groove-2122; a locking structure-213; a first self-restoring spring-2131; rack-2132; meshing teeth-2133; inclined plane-2133 a; vertical plane-2133 b; a second self-restoring spring-2134; traction structure-214; roller set-2141; pull rope-2142; pull ring-2143; an elastic pad-215;

A detection unit-3; a control unit (31); a probe-32;

A position adjustment unit-4; a second support base-41; a third slide rail-411; a first driving section-42; a second driving section-43; test rack-44; adjusting the limit part-45;

A sensing unit-5.

Detailed Description

The utility model is further described below with reference to the accompanying drawings.

Referring to fig. 1 to 6, the chip inspection apparatus of the present utility model includes a base 1, a clamp unit 2 provided on the base 1 for confining a chip, an inspection unit 3 provided on the base 1 for inspecting an electrical property of the chip, and a position adjusting unit 4 provided on the base 1.

On the top surface of the base 1 is located a horizontal plane for supporting the respective units. The fixture unit 2 comprises a supporting plate (not shown in the figure) with a plate-shaped structure and an adjusting part 21 arranged on the top surface of the base 1, the supporting plate is arranged on the adjusting part 21, and a limiting groove which is consistent with the outer contour of the bare chip and is matched with the bare chip is formed in the top surface of the supporting plate, the groove depth of the limiting groove can be consistent with the thickness of the bare chip and can be larger than the thickness of the bare chip, so that after the bare chip is arranged in the limiting groove in a clamping manner, the side wall of the limiting groove in the horizontal direction can limit the bare chip from the horizontal direction, the use of the limiting groove is avoided because the position of the bare chip is offset due to the contact of the detecting unit 3 after the bare chip contacts with the detecting unit 3, and for the bare chip with small size and thin size, the possibility that the fixture directly acts on the bare chip to damage the bare chip is avoided while the movement of the bare chip is limited, and the bare chip is well protected, and the bare chip is prevented from being damaged during detection; the adjustment 21 limits the degrees of freedom of the support plate in the X-axis and the Y-axis, i.e. in the horizontal direction, so that the stability of the support plate of the detection unit 3 during the detection of the chip is ensured, so that the position of the chip is further ensured not to deviate. Meanwhile, the arrangement of the adjusting part 21 and the supporting plate enables the supporting plate to be replaced, and limit grooves matched with the external contours of different bare chips are formed on the same supporting plate or different supporting plates aiming at chips with different sizes and shapes, namely, a plurality of same or different limit grooves can be formed on one supporting plate, so that the purpose of limiting different chips is achieved; the detection of some chips is to detect the chips on the circuit board after the bare chips are welded on the circuit board, and the use of the supporting plate is obviously not applicable any more, so that the supporting plate can be directly taken down and the circuit board needing to detect the chips is directly placed on the adjusting part 21 and limited, thereby realizing the performance detection of the bare chips with different shapes and sizes and the chips under different conditions, realizing the purposes of multiple functions, having wider application range, saving the cost and reducing the trouble compared with the detection of different chips by preparing different fixtures or detection equipment.

The supporting plate is of a rectangular sheet structure, and the limiting grooves are formed on the top surface of the supporting plate and are formed into a plurality of limiting grooves corresponding to the outer contours of the bare chips, so that the bare chips are placed in the limiting grooves matched with the limiting grooves when different chips are detected, and the bare chips are limited. Because the positions of different limit grooves are different, after the corresponding bare chips are installed in the corresponding limit grooves, the positions of the bare chips on the supporting plate and the detecting units 3 can be adjusted through the adjusting parts 21, so that the bare chips at different positions on the supporting plate can be adjusted in position relative to the detecting units 3, and the detection of the bare chips can be normally performed.

The adjusting part 21 comprises a bottom plate 211 arranged on the top surface of the base 1 and provided with a supporting plane, a plurality of limiting blocks 212 which are arranged on the supporting plane of the bottom plate 211 in a sliding manner and are distributed at intervals along the outer side of the bottom plate 211 and used for supporting the supporting plate, a plurality of locking structures 213 which are arranged in the bottom plate 211 and are matched with the limiting blocks 212 and are used for limiting the sliding of the limiting blocks 212, and a traction structure 214 which is arranged on the base 1 and is respectively connected with the locking structures 213, wherein the bottom plate 211 is used for supporting the supporting plate and the limiting blocks 212, the locking structures 213 are used for limiting the limiting blocks 212 to move continuously after the limiting blocks 212 support the supporting plate, so that the limiting blocks 212 can limit the freedom degree of the supporting plate in the horizontal direction, and the traction structure 214 is used for unlocking the locking structures 213 on the limiting blocks 212, so that the supporting plate and the chip are convenient to detach.

The bottom plate 211 is in a plate-shaped structure, the bottom surface of the bottom plate 211 is connected to the top surface of the base 1, the top surface of the whole bottom plate 211 is a supporting plane, a limiting cavity 2111 is formed in the bottom plate 211 and corresponds to the position right below each limiting block 212, sliding grooves 2112 communicated with the limiting cavities 2111 are respectively formed in the top surface of the bottom plate 211 and correspond to the position right above each limiting cavity 2111, the bottoms of each limiting block 212 are respectively arranged in each sliding groove 2112 and penetrate into the limiting cavities 2111, each locking structure 213 is arranged in each limiting cavity 2111 and is respectively located right below each limiting block 212, the bottoms of the limiting blocks 212 extending to the limiting cavities 2111 are respectively matched with each locking structure 213, so that each locking structure 213 can respectively limit different limiting blocks 212. The number of the limiting chambers 2111 may be plural corresponding to each locking structure 213, or may be only one and extend below each limiting block 212.

At least two, preferably at least four, of the stoppers 212 are arranged, wherein a part of the stoppers 212 are arranged on two sides of the support plate along the X axis, corresponding sliding grooves 2112 of the stoppers 212 arranged on two sides of the support plate along the X axis are arranged along the X axis so that the positioned stoppers 212 can slide along the X axis, the rest of the stoppers 212 are arranged on two sides of the support plate along the Y axis, corresponding sliding grooves 2112 of the stoppers 212 arranged on two sides of the support plate along the Y axis are arranged along the Y axis so that the positioned stoppers 212 can slide along the Y axis, and at least one stopper 212 is arranged on four sides of the support plate, so that each stopper 212 can slide inwards from four sides of the support plate until the support plate is propped against the support plate when the support plate needs to be limited, the stopper 212 is limited to slide outwards along the sliding direction by a locking structure 213, and the stoppers 212 are locked to position the support plate. A vertical plane is formed on the side of the stopper 212 facing the support plate to be able to abut against the side of the support plate or the circuit board. Preferably, an elastic pad 215 is disposed on a vertical plane of each limiting block 212 facing the supporting plate, the elastic pad 215 may be made of rubber, silica gel, or other materials, or a structure such as a sponge, an air bag, or the like may be used, so that when the limiting block 212 abuts against the supporting plate or the circuit board, the limiting block 212 or the edge of the circuit board is not deformed or pressed, especially for the circuit board, the circuit board is thin, the edge is easily deformed or paint removed under direct extrusion of the limiting block 212 with high hardness, so that the damage of the circuit board is caused, the quality of the circuit board is affected, and the elastic pad 215 plays a buffering role while the limiting block 212 is guaranteed to abut against the circuit board when the limiting block 212 extrudes the circuit board, so that the edge of the circuit board and the supporting plate is protected. It should be noted that the outward end of the chute 2112 is the end of the chute 2112 away from the midpoint of the bottom plate 211, the inward end of the chute 2112 is the end of the chute 2112 near the midpoint of the bottom plate 211, and the freedom of the stopper 212 in the Z-axis direction is limited by the chute 2112.

The number of the locking structures 213 is consistent with that of the limiting blocks 212, each locking structure 213 comprises a first self-restoring spring 2131 arranged in the limiting cavity 2111 along the sliding direction of the corresponding limiting block 212 and a rack 2132 arranged in the limiting cavity 2111 along the sliding direction of the limiting block 212, wherein the first self-restoring spring 2131 is positioned on one outward side of the limiting block 212, and two ends of the first self-restoring spring 2131 are respectively connected with the limiting cavity 2111 and the inner wall and the outer wall of the limiting block 212, and when the limiting block 212 is positioned on one outward end side of the sliding groove 2112, the first self-restoring spring 2131 is in a normal state or a compressed state, preferably, the first self-restoring spring 2131 is in a normal state so as to ensure that the service life of the first self-restoring spring 2131 is longer; the top surface of the rack 2132 has engaging teeth 2133 protruding along the length direction of the rack 2132, wherein the side of each engaging tooth 2133 away from the rack 2132 is a gradually narrowing sharp side, the engaging teeth 2133 are inclined toward the inner side, i.e. the top surface of the engaging teeth 2133 is inclined from the top surface of the rack 2132 toward the side away from the rack 2132 from the outer side to the inner side along the length direction of the rack 2132 to form an inclined surface 2133a, and the side of each engaging tooth 2133 toward the inner side is perpendicular to the top surface of the rack 2132 to form a vertical surface 2133b. A first sliding block 2121 is formed on the bottom surface of the limiting block 212, the first sliding block 2121 movably passes through the sliding groove 2112 and extends into the limiting cavity 2111, an engaging groove 2122 which is in line with the top surface contour of the engaging tooth 2133 for engaging engagement is formed on the bottom surface of the first sliding block 2121, the inclined surface 2133a enables the first sliding block 2121 to move smoothly when moving inwards along the sliding direction, and the vertical surface 2133b enables the first sliding block 2121 not to slide outwards along the sliding direction for engaging engagement of the limiting block 212 and the locking structure 213.

A sliding rod 2113 is vertically arranged in the position corresponding to the two ends of each rack 2132 in the limiting cavity 2111 along the Z-axis direction, a third perforation is penetratingly arranged in the position corresponding to the sliding rod 2113 on the two ends of each rack 2132 along the Z-axis direction, and the two ends of each rack 2132 are slidably sleeved on the corresponding sliding rod 2113 on the sliding rod 2113 through the third perforation so that the racks 2132 can slide along the Z-axis. A plurality of second self-restoring springs 2134 distributed along the Z-axis direction are arranged between the bottom of the rack 2132 and the bottom wall of the limiting cavity 2111, two ends of the second self-restoring springs 2134 are respectively connected to the bottoms of the rack 2132 and the limiting cavity 2111, and the second self-restoring springs 2134 are always in a compressed state so as to squeeze the rack 2132 to enable the rack 2132 to be always pressed towards one side of the first sliding block 2121 and meshed with the tooth grooves.

When the support plate or the circuit board is placed on the bottom plate 211, each of the limiting blocks 212 is located at an initial position at an outward end of the chute 2112, and then the limiting blocks 212 are pushed inwards in sequence, the inclined surface 2133a enables the limiting block 212 moving inwards to press the rack 2132 and enable the rack 2132 to slide downwards, so that edges of the limiting blocks 212 can slide inwards until the limiting blocks 212 respectively abut against four sides of the support plate or the circuit board, and the vertical plane always limits the limiting blocks 212 to slide outwards while limiting the limiting blocks 212 to slide inwards, so that the freedom degree of movement of the support plate in the horizontal direction is limited, and the positions of the support plate and the chip are ensured to be relatively fixed.

A placement cavity 12 is formed in the base 1, a first through hole 11 is formed on the top surface of the placement cavity 12 corresponding to the position right below each rack 2132 in a penetrating manner along the Z-axis direction, and the first through hole 11 is opposite to the midpoint of the rack 2132 and is communicated with the limiting cavity 2111 and the placement cavity 12. The pulling structure 214 includes a roller set 2141 rotatably disposed in the placement cavity 12, a plurality of pull ropes 2142 having one ends disposed corresponding to the racks 2132 and the other ends passing through the first through holes 11 and wound around the roller set 2141, and pull rings 2143 connected to one end of each pull rope 2142 far from the racks 2132, wherein the roller set 2141 is used for guiding each pull rope 2142, and the pull ropes 2142 are convenient to operate, and the pull ropes 2142 pull the racks 2132 to slide along the Z-axis direction towards the side far from the first sliding block 2121 so that the engaging teeth 2133 are far from the engaging grooves 2122 to contact the engaged state between the limiting blocks 212 and the racks 2132, so that the limiting blocks 212 which are released from constraint slide outwards rapidly in the sliding direction under the action of the first self-restoring springs 2131 until the limiting blocks 212 are restored to the initial position, so as to remove the supporting plates or circuit boards.

The roller set 2141 includes a plurality of first rollers respectively disposed directly below the first through holes 11 and rotatably connected to the placement cavity 12, and at least one second roller disposed below the first rollers and rotatably connected to the placement cavity 12, where the number of the first rollers is consistent with the number of the locking structures 213 to adapt to each other. Corresponding to each first roller and each second roller in the placing cavity 12, rollers can be horizontally arranged in the placing cavity 12 along the X axis or the Y axis, and each first roller and each second roller are respectively sleeved on the rollers in a rotating way so as to realize the rotating connection between the first roller and the second roller and the placing cavity 12. One end of each pull rope 2142 is respectively connected to the center of the bottom surface of each rack 2132, the other end of each pull rope 2142 is movably passed through each first through hole 11 and then is respectively wound on each first roller, when the second roller is arranged to be one, each pull rope 2142 continues to extend and is converged into a strand to be connected with the pull ring 2143 after bypassing the first roller, when the second roller is arranged to be two or more, the number of the second rollers which can be installed by each pull rope 2142 is respectively wound on different second rollers and is connected with the pull ring 2143, so that when the limit of the limit block 212 to the supporting plate or the circuit board is required to be contacted, the pull ring 2143 is required to pull each rack 2132 towards one side far away from each limit block 212 through the pull rope 2142 so as to release the lock of the limit block 212.

Preferably, a second through hole communicating with the placement cavity 12 is formed on the outer wall of the base 1, the diameter of the pull ring 2143 is larger than that of the second through hole, one end of each pull rope 2142 far away from the rack 2132 is gathered into a strand after bypassing the second roller and passes through the second through hole to penetrate out of the base 1, the pull ring 2143 is located out of the base 1, one end of each pull rope 2142 penetrating out of the base 1 is connected to the pull ring 2143, and the pull ropes 2142 are limited out of the base 1 by the second through hole to facilitate operation.

Compared with the prior art, the chip detection device provided by the utility model has the advantages that the cost is lower, the position relationship between the chip and the detection unit 3 and the position relationship between the support plate or the circuit board and the bottom plate 211 can be adjusted according to the self conditions of the support plate and the circuit board when the chip detection device is corresponding to support plates or circuit boards with different shapes and sizes, the positioning limit of the support plate or the circuit board is ensured, and compared with the mechanized operation, the chip detection device can ensure that the support plate or the circuit board is not damaged, and data is not required to be debugged and recorded in advance, so that unnecessary troubles are reduced.

The detecting unit 3 includes a control part 31 provided on the base 1 and a probe 32 electrically connected to the control part 31, the probe 32 being provided on the position adjusting unit 4 and located at a position directly above the support plate so as to be able to be used for performing an electrical performance test on the support plate or the chip on the circuit board. The control part 31 is composed of a test data acquisition box, a communication control box, a probe connecting wire and a communication connecting wire, and is used for collecting and storing chip performance data acquired by the probe 32. A sensor for detecting whether the probe 32 contacts the chip is provided on the probe 32 of the detecting unit 3 or the position adjusting unit 4, and the sensor and the control part 31 are controlled by a controller, and after the sensor detects that the probe 32 contacts the chip, a signal is sent out and the controller controls the probe 32 to operate to detect the chip.

The position adjusting unit 4 comprises a first supporting seat arranged on the base 1 in a sliding manner along an X axis, a second supporting seat 41 arranged on the first supporting seat in a sliding manner along a Y axis, a first driving part 42 driving the first supporting seat to move along the X axis and driving the second supporting seat 41 to move along the Y axis, and a second driving part 43 arranged on the second supporting seat 41 in a Z axis direction, wherein a test frame 44 is arranged on an output shaft of the second driving part 43, the test frame 44 is connected to the second supporting seat 41 in a sliding manner along the Z axis direction, the test frame 44 is positioned right above the supporting plate, the probe 32 is arranged on the test frame 44 in the Z axis direction, and a detection end of the probe 32 is arranged towards one side of the supporting plate so as to drive the probe 32 to move along the X axis, the Y axis and the Z axis relative to the supporting plate, and is matched with the clamp unit 2, so long as a chip on the clamp unit 2 is positioned in a moving range of the probe 32, the position adjusting unit 4 can enable the detection end of the probe 32 to be always positioned right above the chip and contacted with the test point, thereby ensuring that the chip can be accurately positioned, and the chip can be accurately detected.

The base 1 is provided with a first sliding rail along the X-axis direction, the bottom of the first supporting seat is fixedly connected with a second sliding block, and the second sliding block is slidably connected to the first sliding rail so that the first supporting seat can slide along the X-axis direction relative to the base 1. The first support seat is fixedly provided with a second sliding rail along the Y-axis direction, the bottom of the second support seat 41 is fixedly connected with a third sliding block, and the third sliding block is slidably connected to the second sliding rail so that the second support seat 41 can slide along the Y-axis direction relative to the base 1. The first driving portion 42 may include two stepper motors, where the two stepper motors are mounted on the base 1 and the output shafts drive the first supporting seat and the second supporting seat 41 to move along corresponding sliding rails respectively through gear transmission, and the first driving portion 42 may also be configured as driving devices such as two first cylinders or electric push rods, where one first cylinder is disposed on the base 1 along the X axis and the output shaft is connected to the first supporting seat, and the other first cylinder is disposed on the first supporting seat along the Y axis and the output shaft is connected to the second supporting seat 41, and the first driving portion 42 is also electrically connected to the controller to enable the controller to control the operation of the first driving portion 42 so as to adjust the horizontal position of the probe 32 relative to the chip. The second driving part 43 includes a second cylinder disposed on the second supporting seat 41 along the Z axis direction, a third sliding rail 411 is vertically disposed on the second supporting seat 41 along the Z axis direction, a fourth through hole through which the third sliding rail 411 slides is disposed on the test frame 44 along the Z axis direction, so that the test frame 44 is slidably disposed on the second supporting seat 41 along the Z axis, when the first driving part 42 and the second driving part 43 respectively operate, the test frame 44 can be controlled to move along the X axis, the Y axis and the Z axis relative to the supporting plate, so that the detecting ends of the probes 32 on the test frame 44 can be aligned with the test points on the chip, the number and the positions of the test points are fixed, and when the chip has a plurality of test points, the position adjusting unit 4 can adjust the positions in time after testing any one test point. And after the detection of the probe 32 is completed, the detection data of the probe 32 is recorded and exported by the test data acquisition box, so that the chip quality can be conveniently judged.

A plurality of adjustment limiting portions 45 which are arranged along the Z-axis direction and can move along the Z-axis direction to abut against the support plate are provided on the test stand 44 for limiting the degree of freedom of the support plate in the Z-axis direction. The adjusting and limiting part 45 comprises four adjusting screws which are arranged on the test frame 44 along the Z-axis direction, and after the position between the test frame 44 and the supporting plate is adjusted by the position adjusting unit, the contact distance and the contact force between the probe 32 and the chip contact part can be adjusted by manually rotating the adjusting screws.

The induction unit 5 is further arranged on each side wall of the base 1, the induction unit 5 comprises an induction sensor (such as a proximity switch or an infrared sensor) and an alarm, when the induction unit 5 induces that an external object is close to the base 1, according to the distance between the external object detected by the induction unit 5 and the base 1, when the external object is close enough, the alarm generates an alarm sound and stops the operation of the whole equipment under the control of the controller. And the base 1 is also provided with an emergency stop button, so that the whole equipment can be manually stopped when the whole detection process is abnormal, and further loss is prevented.

One embodiment of the chip detection device of the utility model works as follows: the circuit board or the supporting plate provided with the chip to be tested is placed on the bottom plate 211, limit adjustment is carried out through the movable limiting blocks 212 around according to the specific size of the circuit board or the supporting plate, the controller sends out instructions to control the operation of the first driving part 42 and the second driving part 43 so as to realize the movement of the test frame 44 on the X axis, the Y axis and the Z axis, after the probe 32 on the test frame 44 contacts the chip to be tested, the adjusting screw around the test frame 44 can be adjusted, the contact position and the contact force between the probe 32 and the test point of the chip to be tested can be finely adjusted, the contact condition of the probe 32 and the test point of the chip to be tested is observed, when the probe 32 is in perfect contact with the chip to be tested, the starting equipment is electrified with an external power supply to apply working power supply voltage to the chip to be tested, so that the chip enters a working state, at the moment, test parameter data detected by the probe 32 are stored in a test data acquisition box through a probe connecting wire, and data transmission is carried out in real time through a communication control box and a communication connecting wire, and thus the electric performance test of the chip is finished.

Claims (10)

1. A chip inspection apparatus, comprising:

a base;

The fixture unit comprises a supporting plate and an adjusting part which is arranged on the base and used for limiting the supporting plate in the horizontal direction, and a limiting groove which is matched with the external contour of the bare chip is formed in the top surface of the supporting plate;

The detection unit is used for detecting the electrical property of the chip; and

The position adjusting unit is arranged on the base, the detecting part of the detecting unit is arranged on the position adjusting unit and is positioned right above the supporting plate, and the position adjusting unit is used for driving the detecting unit to move along the X axis, the Y axis and the Z axis relative to the supporting plate.

2. The chip testing device of claim 1, wherein:

The detection unit comprises a control part arranged on the base and a probe electrically connected with the control part;

The position adjusting unit comprises a first supporting seat arranged on the base in a sliding mode along an X axis, a second supporting seat arranged on the first supporting seat in a sliding mode along a Y axis direction and a first driving part driving the first supporting seat to move along the X axis and driving the second supporting seat to move along the Y axis, a second driving part is arranged on the second supporting seat in the Z axis direction, a testing frame which is connected to the second supporting seat in a sliding mode along the Z axis direction is arranged at the output end of the second driving part, the testing frame is located right above the supporting plate, and the probe is arranged on the testing frame and the detection end of the probe is arranged towards the supporting plate.

3. The chip testing device of claim 2, wherein: the test frame is provided with a plurality of adjusting limiting parts which are arranged along the Z-axis direction and can move along the Z-axis direction to be propped against the supporting plate, so as to be used for limiting the freedom degree of the supporting plate in the Z-axis direction.

4. The chip testing device of claim 3, wherein: the induction unit is arranged on each side wall of the base.

5. The chip testing apparatus according to any one of claims 1 to 4, wherein:

The adjusting part comprises a bottom plate, a plurality of limiting blocks and a plurality of locking structures, wherein the bottom plate is arranged on the top surface of the base and is provided with a supporting plane, the limiting blocks are arranged on the supporting plane of the bottom plate in a sliding manner and are distributed at intervals along the outer side of the bottom plate, the limiting blocks are arranged in the bottom plate and are matched with the limiting blocks, the locking structures are used for limiting the sliding of the limiting blocks, one part of the limiting blocks are respectively arranged on two sides of the supporting plate along an X axis and slide along the X axis, and the other part of the limiting blocks are respectively arranged on two sides of the supporting plate along a Y axis and slide along the Y axis;

the adjusting part further comprises traction structures which are arranged on the base and are respectively connected with the locking structures, and one ends of the traction structures extend out of the base.

6. The chip testing device according to claim 5, wherein: the bottom of each limiting block movably penetrates through the corresponding sliding groove and extends into the limiting cavity, the part of the limiting block extending into the limiting cavity is meshed with the locking structure, the limiting block can slide inwards relative to the locking structure along the sliding direction, and the locking structure can limit the limiting block to slide outwards along the sliding direction.

7. The chip testing device of claim 6, wherein: the locking structure comprises a first self-recovery spring and a rack which are arranged in the limiting cavity along the sliding direction of the limiting block, wherein the first self-recovery spring is positioned on one side of the limiting block facing outwards, two ends of the first self-recovery spring are respectively connected with the inner wall of the limiting cavity and the limiting block, and when the limiting block is positioned at one end of the sliding groove facing outwards, the first self-recovery spring is in a normal state; the top surface of the rack is provided with an inwardly inclined meshing tooth, and a meshing groove which is in meshing fit with the meshing tooth is formed on one side of the limiting block facing the rack; the rack slides along the Z axis direction and is arranged in the limiting cavity, the bottom of the rack is provided with a second self-recovery spring, two ends of the second self-recovery spring are respectively connected with the rack and the inner wall of the limiting cavity along the Z axis direction, and the second self-recovery spring is in a compressed state.

8. The chip testing device of claim 7, wherein: a placing cavity is formed in the base, and first perforations are formed in the top of the placing cavity, corresponding to the positions right below each rack, in a penetrating manner along the Z-axis direction; the traction structure comprises a roller group which is arranged in the placing cavity in a rotating mode and a plurality of pull ropes which are arranged corresponding to the racks, one ends of the pull ropes are connected to the corresponding racks, the other ends of the pull ropes penetrate through the first perforation and are wound on the roller group, and one ends of the pull ropes, far away from the racks, are converged into one strand and then movably penetrate out of the base.

9. The chip testing device of claim 8, wherein: a second perforation communicated with the placing cavity is formed on the outer wall of the base; the traction mechanism further comprises pull rings with diameters larger than the diameters of the second through holes, and one end, far away from the rack, of each pull rope movably penetrates out of the second through holes and is connected with the pull rings.

10. The chip testing device of claim 9, wherein: an elastic pad is arranged on one side surface of each limiting block, which faces the supporting plate.