CN220850804U - High-sealing ultra-vacuum gate valve - Google Patents
High-sealing ultra-vacuum gate valve Download PDFInfo
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- CN220850804U CN220850804U CN202322599376.6U CN202322599376U CN220850804U CN 220850804 U CN220850804 U CN 220850804U CN 202322599376 U CN202322599376 U CN 202322599376U CN 220850804 U CN220850804 U CN 220850804U
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- 238000007789 sealing Methods 0.000 title claims abstract description 35
- 238000010008 shearing Methods 0.000 claims abstract 4
- 238000001816 cooling Methods 0.000 claims description 10
- 230000000694 effects Effects 0.000 description 6
- 238000001125 extrusion Methods 0.000 description 4
- 238000005260 corrosion Methods 0.000 description 2
- 230000007797 corrosion Effects 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
- 229910000838 Al alloy Inorganic materials 0.000 description 1
- 238000005299 abrasion Methods 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000005484 gravity Effects 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 230000007246 mechanism Effects 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 230000008439 repair process Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 230000009466 transformation Effects 0.000 description 1
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- Sliding Valves (AREA)
Abstract
The utility model discloses a high-sealing super-vacuum gate valve, which comprises a valve body, a channel arranged on the valve body, a valve cover arranged on the valve body, a valve plate arranged on the valve body in a sliding manner and a linear driving assembly arranged on the valve cover, wherein a shearing fork assembly is further arranged between the linear driving assembly and the valve plate, and the linear driving assembly drives the valve plate to reciprocate linearly along the valve body through the shearing fork assembly; the valve plate includes the support frame, rotatable leading wheel of installing in the support frame both sides, movable mounting valve plate main part on the support frame and the sealing member of setting on the valve plate main part, and support frame one end links to each other with cutting fork subassembly, after the vertical grafting of support frame put into place, can extrude the valve plate main part on the valve body, seal through the sealing member. The gate valve has the advantages of good tightness, high vacuum performance, high reliability, compact structure, small volume, large channel capacity, simple and convenient operation, long service life and wide application prospect, and can stably run for a long time.
Description
Technical Field
The utility model relates to the technical field of gate valves, in particular to a high-sealing ultra-vacuum gate valve.
Background
The ultra-vacuum gate valve is a valve widely applied to the fields of semiconductor manufacturing, coating technology, nuclear energy industry and other high-precision engineering, has wide application prospect and market demand, and plays an important role in various fields. The ultra-vacuum gate valve is mainly used for controlling the flow and pressure of gas or liquid in a vacuum environment. Thereby ensuring stability and reliability in the production process. The structure of the ultra-vacuum gate valve is generally composed of a valve body, a gate plate, a sealing ring, a driving mechanism and the like, and the valve body is generally made of an aluminum alloy material and has a light structure, and good corrosion resistance and wear resistance in a vacuum environment. The flashboard of the existing super-vacuum flashboard valve mostly adopts a straight up-down motion mode, the abrasion of the structure to a sealing element is excessive, the structure cannot stably run for a long time, and the service life is short; in order to improve the sealing capability, the volume of the plugboard is generally increased, so that the channel capability is reduced, and the use effect is affected. The utility model patent with the application number 202221874652.4 discloses an ultrahigh vacuum pneumatic gate valve, which achieves the effects of corrosion resistance, wear resistance and impact resistance by designing a three-layer valve plate, has better practicability, can be directly disassembled to repair or replace devices in use, increases convenience, but does not fundamentally solve the problem that the seal is easy to damage.
Disclosure of Invention
The utility model aims to provide a high-sealing super-vacuum gate valve which has the advantages of good sealing performance, high vacuum performance, high reliability, compact structure, small volume, large channel capacity, simple and convenient operation, long service life and wide application prospect, and can stably operate for a long time.
In order to achieve the above purpose, the present utility model adopts the following technical scheme:
the high-sealing super-vacuum gate valve comprises a valve body, a channel arranged on the valve body, a valve cover arranged on the valve body, a valve plate slidably arranged on the valve body, and a linear driving assembly arranged on the valve cover and used for driving the valve plate to move, wherein a scissor assembly is further arranged between the linear driving assembly and the valve plate, and the linear driving assembly drives the valve plate to reciprocate linearly along the valve body through the scissor assembly; the valve plate includes the support frame, rotatable leading wheel of installing in the support frame both sides, movable mounting valve plate main part on the support frame and the sealing member of setting on the valve plate main part, support frame one end links to each other with cutting fork subassembly, after the vertical grafting of support frame put in place, can extrude the valve plate main part on the valve body, through the sealing member seals.
Preferably, a connecting support is hinged to two sides of one end of the scissor assembly, and the connecting support is detachably arranged on the valve cover; the other end of the scissor assembly is hinged on the supporting frame.
Preferably, two adapters are hinged on the scissor assembly, the other ends of the two adapters are hinged on the adapter, the other end of the adapter is detachably arranged on the linear driving assembly, and when the linear driving assembly stretches out or retracts, the scissor assembly is driven to stretch out or retract through the adapter.
Preferably, the valve plate main body is connected with the supporting frame through a parallel four-bar assembly, a limiting block is arranged in the valve body, when the bottom of the valve plate main body is in contact with the limiting block, the valve plate main body can seal the channel, and the supporting frame continuously moves downwards and extrudes the valve plate main body on the valve body through the parallel four-bar assembly.
Preferably, the valve body is a hollow structure formed by a front panel, a rear panel and a U-shaped side plate and provided with a containing cavity, the containing cavity is provided with a top opening, and the scissor assembly and the valve plate are installed in the containing cavity through the opening and slide in the containing cavity.
Preferably, the front panel and the rear panel are respectively provided with a cooling pipe, and the cooling pipes are arranged in an S shape.
Preferably, the linear driving assembly is an air cylinder, a linear motor or a hydraulic cylinder.
According to the utility model, the connecting point between the linear driving assembly and the valve plate is increased by the arranged scissor assembly, so that the movement of the valve plate is more stable, the extrusion force of the linear driving assembly to the valve plate is more uniform, and the sealing effect is ensured. The valve plate main body and the support frame are movably connected through the parallel four-bar assembly, and in a normal state, the valve plate main body is separated from the inner wall of the valve body through gravity, so that the problem that the service life of the sealing element is influenced due to the fact that the sealing element is in an extrusion state in the up-and-down movement process of the valve plate is avoided, and the service life of the sealing performance is guaranteed. Under sealing state, through parallel four-bar assembly with valve plate main part extrusion mounting on the valve body inner wall, carry out circumference to the passageway through the sealing member and seal, parallel four-bar assembly provides forward extrusion force to valve plate main part, has very good sealed effect for it has high vacuum performance, has ultra-low leak rate, and the reliability is high, can be applicable to and uses under the vacuum environment of high requirement. The cooling pipe that sets up can reduce the temperature of this push-pull valve, improves its stability of using under high temperature environment, and adaptability is stronger.
Drawings
FIG. 1 is a schematic diagram of the overall structure of the present utility model;
FIG. 2 is a schematic view of a partial structure of the present utility model;
FIG. 3 is a schematic view of another partial structure of the present utility model;
FIG. 4 is a schematic cross-sectional view of a front panel of the present utility model;
FIG. 5 is a schematic cross-sectional view of the non-sealing state of the present utility model;
FIG. 6 is a schematic view in partial cross section of a sealed state of the present utility model;
In the figure: 1. a valve body; 2. a channel; 3. a valve cover; 4. a valve plate; 5. a linear drive assembly; 6. a scissors assembly; 7. a cooling tube; 9. a limiting block; 10. a front panel; 11. a rear panel; 12. a U-shaped side plate; 20. the connecting support is connected; 21. an adapter; 22. an adapter; 40. a support frame; 41. a guide wheel; 42. a valve plate main body; 43. a seal; 44. a parallel four bar assembly.
Description of the embodiments
The utility model is further described below with reference to the accompanying drawings:
The high-sealing ultra-vacuum gate valve as shown in fig. 1 to 6 comprises a valve body 1, a channel 2 integrally arranged on the valve body 1, a valve cover 3 fixedly arranged on the valve body 1 in a sealing way through a sealing gasket and a fastening piece, a valve plate 4 slidably arranged on the valve body 1 and a linear driving assembly 5 detachably arranged on the valve cover 3 through the fastening piece and used for driving the valve plate 4 to move, wherein the valve body 1 is of a hollow structure which is composed of a front panel 10, a rear panel 11 and a U-shaped side plate 12 and is provided with a containing cavity, the containing cavity is provided with a top opening, the valve cover 3 can seal the opening, and the scissor assembly 6 and the valve plate 4 are arranged in the opening and can slide in the containing cavity in a reciprocating linear way. In one embodiment, the linear driving assembly 5 is a cylinder, a linear motor, or a hydraulic cylinder, and in this embodiment, a cylinder is selected as the linear driving assembly 5. The inside of each of the front panel 10 and the rear panel 11 is internally provided with a cooling pipe 7, the cooling pipe 7 is arranged in an S shape, a water inlet of the cooling pipe 7 is arranged below one side of the valve body 1, and a water outlet of the cooling pipe 7 is arranged above the other side of the valve body 1.
The valve plate 4 comprises a support frame 40, guide wheels 41 rotatably arranged on two sides of the support frame 40, a valve plate main body 42 movably arranged on the support frame 40 and a sealing piece 43 arranged on the valve plate main body 42, one end of the support frame 40 is connected with the scissor assembly 6, and when the support frame 40 is vertically inserted in place, the valve plate main body 42 can be extruded on the inner wall of the valve body 1 and sealed through the sealing piece 43. Specifically, a mounting groove having a cross-sectional dimension larger than that of the passage 2 is provided in the valve plate main body 42, and the seal 43 is mounted in the mounting groove, and the seal 43 is integrally made of a rubber material. In a preferred embodiment, the valve plate main body 42 is movably connected with the supporting frame 40 through the parallel four-bar assembly 44, the limiting block 9 is installed at the lower end inside the valve body 1 through a fastener, when the bottom of the valve plate main body 42 is in contact with the limiting block 9, the valve plate main body 42 can seal the channel 2, the supporting frame 40 continues to move downwards, the valve plate main body 42 and the sealing piece 43 are extruded on the inner wall of the valve body 1 through the parallel four-bar assembly 44, sealing treatment of the channel 2 is achieved, the linear driving assembly 5 is in an extending state and can provide a retaining force for sealing of the valve plate main body 42, sealing performance is improved, the diameter of the guide wheel 41 is matched with the interval between the front panel 10 and the rear panel 11, the guide wheel 41 can improve the stability of the movement of the valve plate 4 on one hand, and can also provide stable support for sealing of the valve plate main body 42 on the other hand, and sealing effect is ensured.
A scissor assembly 6 is also arranged between the linear driving assembly 5 and the valve plate 4, and the linear driving assembly 5 drives the valve plate 4 to reciprocate linearly along the valve body 1 through the scissor assembly 6. In one embodiment, the connection support 20 is hinged at both sides of one end of the scissor assembly 6, the connection support 20 is detachably mounted on the valve cover 3 through bolts, and the other end of the scissor assembly 6 is hinged on top of the supporting frame 40. Two adapter pieces 21 are hinged on the scissor assembly 6, the other ends of the two adapter pieces 21 are hinged on an adapter 22, the other ends of the adapter 22 are detachably arranged on the extending end of the linear driving assembly 5 through threads, and when the linear driving assembly 5 extends or retracts, the scissor assembly 6 is driven to extend and retract through the two adapter pieces 21, so that motion control of the valve plate 4 is achieved. In this embodiment, the scissor assembly 6 is formed by two sets of articulated arms arranged in a crossed manner, each set of articulated arms comprising two connecting plates connected in a hinged manner, wherein two adapters 21 are respectively mounted in a hinged manner on the two sets of articulated arms. The corrugated pipe is arranged outside the extending end of the linear driving assembly 5, and can isolate the extending end of the linear driving assembly 5, so that the effect of sealing with the outside is achieved.
The above embodiments are only a few descriptions of the inventive concept and implementation, and are not limited thereto, and the technical solutions without substantial transformation remain within the scope of protection under the inventive concept.
Claims (7)
1. The utility model provides a high sealed super vacuum push-pull valve, includes the valve body, sets up passageway on the valve body, installs the valve gap on the valve body, slidable mounting valve plate on the valve body and install on the valve gap, be used for driving the straight line drive assembly of valve plate motion, its characterized in that: a shearing fork assembly is further arranged between the linear driving assembly and the valve plate, and the linear driving assembly drives the valve plate to reciprocate linearly along the valve body through the shearing fork assembly; the valve plate includes the support frame, rotatable leading wheel of installing in the support frame both sides, movable mounting valve plate main part on the support frame and the sealing member of setting on the valve plate main part, support frame one end links to each other with cutting fork subassembly, after the vertical grafting of support frame put in place, can extrude the valve plate main part on the valve body, through the sealing member seals.
2. The high seal ultra-vacuum gate valve of claim 1, wherein: a connecting support is hinged to two sides of one end of the scissor assembly, and the connecting support is detachably arranged on the valve cover; the other end of the scissor assembly is hinged on the supporting frame.
3. The high seal ultra-vacuum gate valve of claim 1, wherein: two adapter pieces are hinged to the scissor assembly, the other ends of the two adapter pieces are hinged to the adapter, the other ends of the adapter pieces are detachably arranged on the linear driving assembly, and when the linear driving assembly stretches out or retracts, the scissor assembly is driven to stretch out or retract through the adapter pieces.
4. The high seal ultra-vacuum gate valve of claim 1, wherein: the valve plate main body is connected with the support frame through the parallel four-bar assembly, a limiting block is arranged in the valve body, when the bottom of the valve plate main body is in contact with the limiting block, the valve plate main body can seal the channel, and the support frame continuously moves downwards and extrudes the valve plate main body on the valve body through the parallel four-bar assembly.
5. The high seal ultra-vacuum gate valve of claim 1, wherein: the valve body is a hollow structure which is composed of a front panel, a rear panel and a U-shaped side plate and is provided with a containing cavity, the containing cavity is provided with a top opening, and the scissor assembly and the valve plate are installed in the containing cavity through the opening and slide in the containing cavity.
6. The high-seal ultra-vacuum gate valve of claim 5, wherein: the front panel and the back panel are internally provided with cooling pipes, and the cooling pipes are arranged in an S shape.
7. The high seal ultra-vacuum gate valve of claim 1, wherein: the linear driving assembly is an air cylinder, a linear motor or a hydraulic cylinder.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202322599376.6U CN220850804U (en) | 2023-09-25 | 2023-09-25 | High-sealing ultra-vacuum gate valve |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202322599376.6U CN220850804U (en) | 2023-09-25 | 2023-09-25 | High-sealing ultra-vacuum gate valve |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN220850804U true CN220850804U (en) | 2024-04-26 |
Family
ID=90742962
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202322599376.6U Active CN220850804U (en) | 2023-09-25 | 2023-09-25 | High-sealing ultra-vacuum gate valve |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN220850804U (en) |
-
2023
- 2023-09-25 CN CN202322599376.6U patent/CN220850804U/en active Active
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