CN220835475U - Be used for ALD fluidized bed magnetic coupling agitating unit - Google Patents
Be used for ALD fluidized bed magnetic coupling agitating unit Download PDFInfo
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- CN220835475U CN220835475U CN202322498189.9U CN202322498189U CN220835475U CN 220835475 U CN220835475 U CN 220835475U CN 202322498189 U CN202322498189 U CN 202322498189U CN 220835475 U CN220835475 U CN 220835475U
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- sleeve
- rotor
- reaction kettle
- wheel
- sealing
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- 230000008878 coupling Effects 0.000 title claims abstract description 21
- 238000010168 coupling process Methods 0.000 title claims abstract description 21
- 238000005859 coupling reaction Methods 0.000 title claims abstract description 21
- 238000006243 chemical reaction Methods 0.000 claims abstract description 47
- 238000007789 sealing Methods 0.000 claims abstract description 43
- 238000003756 stirring Methods 0.000 claims abstract description 33
- 230000001360 synchronised effect Effects 0.000 claims abstract description 15
- 238000000231 atomic layer deposition Methods 0.000 claims description 25
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 claims description 8
- 239000002184 metal Substances 0.000 claims description 6
- 229910052751 metal Inorganic materials 0.000 claims description 6
- 229910001220 stainless steel Inorganic materials 0.000 claims description 5
- 239000010935 stainless steel Substances 0.000 claims description 5
- 229910052742 iron Inorganic materials 0.000 claims description 4
- 230000005389 magnetism Effects 0.000 claims description 2
- 239000011248 coating agent Substances 0.000 abstract description 7
- 238000000576 coating method Methods 0.000 abstract description 7
- 239000000428 dust Substances 0.000 abstract description 3
- 238000005243 fluidization Methods 0.000 abstract description 3
- 230000000694 effects Effects 0.000 abstract description 2
- 239000002245 particle Substances 0.000 abstract 1
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 20
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 10
- 229910052757 nitrogen Inorganic materials 0.000 description 10
- 239000000843 powder Substances 0.000 description 8
- 229910052786 argon Inorganic materials 0.000 description 5
- 238000010926 purge Methods 0.000 description 4
- 238000000151 deposition Methods 0.000 description 3
- 230000008021 deposition Effects 0.000 description 3
- 239000007789 gas Substances 0.000 description 3
- 239000002243 precursor Substances 0.000 description 3
- 238000000926 separation method Methods 0.000 description 3
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 239000001301 oxygen Substances 0.000 description 2
- 229910052760 oxygen Inorganic materials 0.000 description 2
- PXGOKWXKJXAPGV-UHFFFAOYSA-N Fluorine Chemical compound FF PXGOKWXKJXAPGV-UHFFFAOYSA-N 0.000 description 1
- 239000006227 byproduct Substances 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000005137 deposition process Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 239000011737 fluorine Substances 0.000 description 1
- 229910052731 fluorine Inorganic materials 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 238000002347 injection Methods 0.000 description 1
- 239000007924 injection Substances 0.000 description 1
- 238000003760 magnetic stirring Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 239000000243 solution Substances 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
Landscapes
- Mixers With Rotating Receptacles And Mixers With Vibration Mechanisms (AREA)
Abstract
The utility model relates to a magnetic coupling stirring device for an ALD fluidized bed, which comprises a gear motor arranged below the left side of a supporting plate, an outer magnetic expansion sleeve wheel connected with the gear motor through a synchronous belt and a synchronous pulley, wherein the outer magnetic expansion sleeve wheel is sleeved at the upper part of a sealing sleeve, a rotor is arranged in the sealing sleeve, the rotor is connected with a stirring rod through a coupler, the stirring rod is positioned in a reaction kettle, the upper part of the reaction kettle is connected with a flange, the convenient disassembly of the outer magnetic expansion sleeve wheel and the rotor is realized through the lower end of the reaction kettle mounting flange, the supporting plate, the sealing sleeve and other devices are locked and connected through screws, the vacuum environment of the reaction kettle is not damaged during the disassembly, and the stirring rod on the rotor is driven to stir dust in a reaction kettle cavity through a magnetic coupling principle, so that bubbles at the bottom of the rotor are scattered, the dust with larger particles are rapidly dispersed, and the fluidization coating effect is more evenly distributed.
Description
Technical Field
The utility model relates to the field of vacuum atomic deposition coating, in particular to a magnetic coupling stirring device for an ALD fluidized bed.
Background
In order to prevent medium leakage in the high-pressure stirring, a magnetic stirring device with an inner magnetic rotor and an outer magnetic rotor is commonly used at present, the outer magnetic rotor is driven to rotate through motor rotation, the inner magnetic rotor is driven to rotate through the outer magnetic rotor, the inner magnetic rotor and the outer magnetic rotor are separated through a separation sleeve, the separation sleeve is in sealing connection with a high-pressure reaction kettle, the inner magnetic rotor is sealed in the space of the high-pressure reaction kettle and the separation sleeve, and the medium in the high-pressure reaction kettle is prevented from leaking through a shaft seal or a threaded hole.
However, in the prior art, the motor and the inner magnetic rotor and the outer magnetic rotor are inconvenient to assemble and disassemble, so that other devices are often disassembled as soon as the motor and the inner magnetic rotor are disassembled, and the vacuum environment of the reaction kettle is damaged during the disassembly.
Disclosure of Invention
Aiming at the defects existing in the prior art, the utility model provides the magnetic coupling stirring device for the ALD fluidized bed, which can start a gear motor through a PLC (programmable logic controller) of a lower computer in real time under a vacuum environment of 300 ℃, wherein the gear motor is a driving source, the inside of a stainless steel synchronous belt expansion sleeve wheel is a strong magnet, a rotor is pure iron, a stirring rod connected with the rotor is driven by a magnetic coupling principle to stir dust in a reaction kettle cavity, the motor is arranged on a supporting plate through a screw and is connected with an outer magnetic expansion sleeve wheel through a synchronous belt, the reaction kettle is arranged at the lower end of a flange and is separated from the rotor and the outer magnetic expansion sleeve wheel, the disassembly of the motor and the inner magnetic rotor is convenient through disassembling a fixing screw and a bearing component, and the vacuum environment of the reaction kettle is maintained.
In order to achieve the above purpose, the present utility model adopts the following technical scheme:
The magnetic coupling stirring device for the ALD fluidized bed comprises a gear motor, an outer magnetic expansion sleeve wheel, a rotor, a stirring rod, a reaction kettle and a sealing sleeve, wherein the gear motor is fixedly connected with the sealing sleeve through a supporting plate, the outer magnetic expansion sleeve wheel is rotatably sleeved on the upper part of the sealing sleeve, and an output shaft of the gear motor drives the outer magnetic expansion sleeve wheel to rotate through a synchronous belt; the rotor is rotatably arranged in the sealing sleeve, and the lower end of the rotor is detachably connected with the stirring rod through the coupler; the upper end sealing connection flange of the reaction kettle is provided with a central hole and a through hole communicated with the vacuum generator, the lower end of the sealing sleeve is in sealing connection with the edge of the central hole of the flange, the stirring rod is positioned in the reaction kettle, and the bottom of the reaction kettle is communicated with an air inlet pipeline of the atomic layer deposition equipment through an air inlet pipe.
A fixed check ring is arranged between the first end of the supporting plate and the lower part of the outer magnetic expansion sleeve wheel, and the first end of the supporting plate is connected with the fixed check ring through a screw A; the second end of backup pad passes through screw A with gear motor and is connected, gear motor's output shaft passes through the flat key and is connected with synchronous pulley, and synchronous pulley, outer magnetism expand the cover wheel and encircle by the hold-in range jointly.
The edge of the central hole of the flange is connected with the lower end of the connecting sleeve A, the upper end of the connecting sleeve A is connected with the lower end of the sealing sleeve through sealing, the rotor is made of pure iron, the magnet is contained in the outer magnetic expanding sleeve wheel, and the sealing sleeve is made of nonmagnetic stainless steel; the upper end and the lower end of the rotor are rotationally connected with the sealing sleeve through a bearing A.
The upper end of the outer magnetic expansion sleeve wheel is connected with a bearing group, the bearing group comprises a bearing B and a bearing cover, the outer magnetic expansion sleeve wheel is connected with the bearing cover through a screw B, the central hole of the bearing cover is in clearance fit with the sealing sleeve, and the outer magnetic expansion sleeve wheel is in rotary connection with the sealing sleeve through the bearing B.
The edge of the upper end of the reaction kettle is fixedly connected with a connecting sleeve B, a flange is fixedly connected with the connecting sleeve B, and a compressed metal gasket B is arranged between the flange and the connecting sleeve B.
Compared with the prior art, the utility model has the following advantages:
According to the magnetic coupling stirring device for the ALD fluidized bed, powder coated by films with different characteristics is obtained according to actual requirements, the outer magnetic expansion sleeve wheel and the rotor can be conveniently detached through locking and mounting of the supporting plate, the bearing group and the screws, the reaction kettle is mounted at the lower end of the flange and separated from the rotor and the outer magnetic expansion sleeve wheel, and the vacuum environment of the reaction kettle can not be broken when the motor, the rotor and the outer magnetic sleeve wheel are detached.
Drawings
FIG. 1 is a schematic diagram of the structure of the device of the present utility model;
fig. 2 is a schematic structural view of an air inlet pipe for an atomic layer deposition apparatus.
The labels in the figures are as follows:
Gear motor 1, backup pad 2, screw A3, synchronous pulley 4, flat key 5, hold-in range 6, screw B7, bearing A8, for axle retaining ring 9, bearing B10, bearing cap 11, stainless steel hold-in range expanding sleeve wheel 12, rotor 13, fixed retaining ring 14, fixed cover 15, adapter sleeve A16, metal gasket A17, screw C18, screw D19, metal gasket B20, screw E21, shaft coupling 22, puddler 23, reation kettle 24, seal cover 25, flange 26, adapter sleeve B27.
Detailed Description
In order to make the objects, technical solutions and advantages of the present utility model more apparent, the present utility model will be explained in further detail with reference to the accompanying drawings.
Referring to fig. 1, a magnetic coupling stirring device for an ALD fluidized bed is shown, a gear motor 1 is connected to the lower part (second end) of the left side of a support plate 2 through a screw A3, an output shaft of the gear motor 1 is connected with a synchronous pulley 4 through a flat key 5, the synchronous pulley 4 and an outer magnetic expansion sleeve wheel 12 are jointly surrounded by a synchronous belt 6, a lower computer PLC is controlled in real time through a human-computer interface to start the gear motor 1 to rotate so as to drive the synchronous pulley 4 to drive the outer magnetic expansion sleeve wheel 12 to rotate, and the motor can be disassembled only through disassembling the screw A3;
Further, the outer magnetic expansion sleeve wheel 12 is rotatably sleeved on the periphery of the upper part of the sealing sleeve 25, the first end of the supporting plate 2 is fixed with the interruption of the sealing sleeve 25, a fixed retainer ring 14 is arranged between the lower part of the outer magnetic expansion sleeve wheel 12 and the first end of the supporting plate 2, the second end of the supporting plate 2 is connected with the fixed retainer ring 14 through a screw A3, the rotor 13 is rotatably arranged in the sealing sleeve 25, the lower end of the rotor 13 is detachably connected with the stirring rod 23 through a coupler 22, the lower end of the sealing sleeve 25 is connected with a fixed sleeve 15, the fixed sleeve 15 is tightly connected with the connecting sleeve A16 and tightly presses a metal gasket A17 between the fixed sleeve 15 and the stirring rod A16, the stirring rod 23 is positioned in the reaction kettle 24, the rotor 13 and the stirring rod 23 are rotated together due to the fact that the rotor 13 is purely iron, the inside the outer magnetic expansion sleeve wheel 12 is driven to rotate through the magnetic coupling principle, and the sealing sleeve 25 is not influenced by magnetic coupling due to the fact that the nonmagnetic stainless steel can not be directly separated from the stirrer through the coupler when the rotor is detached;
Further, the upper end of the reaction kettle 24 is connected with a flange 26 in a sealing manner, a central hole and a through hole which is communicated with a vacuum generator are arranged at the upper end of the flange 26, the lower end of the connecting sleeve A16 is connected with the edge of the central hole of the flange 26 in a sealing manner, the edge of the flange 26 is fixedly connected with a connecting sleeve B27 at the upper end edge of the reaction kettle 24, and a metal gasket B20 between the flange and the connecting sleeve B is tightly pressed. An air inlet pipe is arranged at the bottom of the reaction kettle 24, is communicated with an air inlet pipeline used for the atomic layer deposition equipment, and adopts an air inlet pipeline in 202223345111.5. The air inlet pipeline for the atomic layer deposition equipment comprises a main pipeline, wherein the right side of the main pipeline 100 is communicated with an air inlet pipe, a nitrogen purging valve 104 is arranged on the left side of the main pipeline 101, the left end of the main pipeline 100 is connected with an air inlet pipeline 103, one side, close to the nitrogen purging valve 104, of the main pipeline 100 is provided with a second one-way valve 107, the bottom end of the second one-way valve 107 is connected with an active bottle B113 through a pipeline, the main pipeline 100 on the right side of the second one-way valve 107 is provided with a first one-way valve 106, the bottom end of the first one-way valve 106 is connected with an active bottle A112 through a pipeline, a first ALD manual valve 108 is arranged below the first one-way valve 106, a first pneumatic valve 110 is arranged at the bottom of the first ALD manual valve 108, a second ALD manual valve 109 is arranged below the second one-way valve 107, and a second pneumatic valve 111 is arranged below the second ALD manual valve 109.
The upper end of the outer magnetic expansion sleeve wheel 12 is connected with a first bearing group, the first bearing group comprises a bearing B10 and a bearing cover 11, the outer magnetic expansion sleeve wheel 12 is connected with the bearing cover 11 through a screw B7, a central hole of the bearing cover 11 is in clearance fit with a sealing sleeve 25, and the outer magnetic expansion sleeve wheel 12 is rotationally connected with the sealing sleeve 25 through the bearing B10. The upper and lower ends of the rotor 13 are rotatably connected to the sealing sleeve 25 through a second bearing set.
The second bearing group includes: the upper end of the rotor 13 is fixedly provided with two check rings 9 which are mutually separated, the bearing A8 is sleeved on the periphery of the rotor 13 between the two check rings 9, the lower end of the rotor 13 is arranged in the same mode, the upper end and the lower end of the rotor 13 are all in rotary connection with the inner periphery of the sealing sleeve 25 through the bearing A8, and the periphery of the bearing A8 is in interference fit with the inner periphery of the sealing sleeve 25.
It should be specifically noted that the motion control system belongs to the prior art, and only needs to receive and complete the corresponding instruction, and the present utility model does not specifically protect and describe the control system/controller.
The magnetic coupling stirring device is used for coating powder in an atomic deposition process, and the deposited substances are plated on the surface of an object layer by layer in a monoatomic film mode.
The ALD fluidized bed magnetic coupling stirring device disclosed by the utility model is used for coating powder, and comprises the following steps of:
Step 1, opening an upper cover flange 26 of a reaction kettle 24;
And 2, placing the powder material into an ALD reaction kettle 24, and sealing an upper cover flange 26 of the reaction kettle after a vacuum gasket is additionally arranged at the upper end of the reaction kettle 24.
Step 3, starting a gear motor 1 through an upper computer of the equipment, driving an outer magnetic expansion sleeve wheel 12 by the gear motor 1 through a belt, driving an inner magnetic wheel 13 (rotor) to rotate together through the characteristic of magnetic coupling, and driving a stirring rod 23 fixed below the inner magnetic wheel 13 to stir powder materials in a reaction kettle 24;
Step 4, repeatedly vacuumizing, and injecting nitrogen from the bottom of the reaction kettle 24 for at least three times;
Step 5, injecting nitrogen or argon for fluidization from the bottom air inlet of the reaction kettle 24, and fluidizing the powder under the atmosphere of nitrogen or gas at the fluidization pressure of 1-1000torr to achieve the powder dispersing effect;
Step 6, selecting a reaction precursor according to the type of the deposited oxide coating, and setting parameters of an ALD reaction chamber, wherein the deposition temperature is 25-400 ℃ and the deposition pressure is 0.01-500 torr;
Step 7, introducing the precursor steam into the ALD reaction kettle 24 through an air inlet at the bottom of the reaction kettle 24 under the carrying of nitrogen or argon for 10-300 seconds:
Step 8, purging the reaction kettle 24 through a gas inlet at the bottom by using nitrogen or argon to take away the residual precursor;
Step 9, introducing oxygen source steam into the ALD reaction kettle 24 through an air inlet at the bottom of the reaction kettle 24 under the carrying of nitrogen or argon, and keeping for 10-300 seconds:
Step 10, purging the reaction kettle 24 with nitrogen or fluorine to take away excessive oxygen sources and byproducts.
The final steps are as follows: after the coating is completed, the heating is stopped, and the injection of the fluidizing gas into the bottom of the reaction vessel 24 is stopped. The operation of the external gear motor 1 is stopped by the upper computer, and the stirring rod 23 inside stops working.
Nitrogen or argon is injected from an air inlet at the bottom of the reaction kettle 24, so that the vacuum pressure in the reaction kettle 24 is restored to the atmospheric pressure, and the upper cover flange 26 of the reaction kettle can be opened, and the powder after coating is taken out.
The above description describes a preferred embodiment of the utility model and should not be viewed as limiting the scope of the claims. Any modifications, equivalent substitutions, and improvements without departing from the principles and spirit of the utility model should be considered within the scope of the claims.
Claims (5)
1. The magnetic coupling stirring device for the ALD fluidized bed comprises a gear motor (1), an external magnetic expansion sleeve wheel (12), a rotor (13), a stirring rod (23), a reaction kettle (24) and a sealing sleeve (25), and is characterized in that the gear motor (1) is fixedly connected with the sealing sleeve (25) through a supporting plate (2), the external magnetic expansion sleeve wheel (12) is rotatably sleeved on the upper part of the sealing sleeve (25), and an output shaft of the gear motor (1) drives the external magnetic expansion sleeve wheel (12) to rotate through a synchronous belt (6); the rotor (13) is rotatably arranged in the sealing sleeve (25), and the lower end of the rotor (13) is detachably connected with the stirring rod (23) through the coupler (22); the upper end of the reaction kettle (24) is connected with a flange (26) in a sealing way, a central hole and a through hole which is communicated with a vacuum generator are formed in the flange (26), the lower end of a sealing sleeve (25) is connected with the edge of the central hole of the flange (26) in a sealing way, a stirring rod (23) is positioned in the reaction kettle (24), and the bottom of the reaction kettle (24) is communicated with an air inlet pipeline of atomic layer deposition equipment through an air inlet pipe.
2. A magnetic coupling stirring device for ALD fluidized bed according to claim 1, characterized in that a fixed retainer ring (14) is mounted between the first end of the support plate (2) and the lower part of the outer magnetic expansion sleeve wheel (12), the first end of the support plate (2) is connected with the fixed retainer ring (14) by a screw a (3); the second end of backup pad (2) is connected through screw A (3) with gear motor (1), the output shaft of gear motor (1) is connected with synchronous pulley (4) through flat key (5), and synchronous pulley (4), outer magnetism expand sleeve wheel (12) are surrounded by hold-in range (6) jointly.
3. The magnetic coupling stirring device for the ALD fluidized bed according to claim 1, wherein the edge of a central hole of the flange (26) is connected with the lower end of a connecting sleeve A (16), the upper end of the connecting sleeve A (16) is connected with the lower end of a sealing sleeve (25) in a sealing way, the rotor (13) is made of pure iron, a magnet is arranged in an outer magnetic expansion sleeve wheel (12), and the sealing sleeve (25) is made of nonmagnetic stainless steel; the upper end and the lower end of the rotor (13) are rotationally connected with a sealing sleeve (25) through a bearing A (8).
4. The magnetic coupling stirring device for the ALD fluidized bed according to claim 1, wherein the upper end of the outer magnetic expansion sleeve wheel (12) is connected with a bearing group, the bearing group comprises a bearing B (10) and a bearing cover (11), the outer magnetic expansion sleeve wheel (12) is connected with the bearing cover (11) through a screw B (7), a central hole of the bearing cover (11) is in clearance fit with the sealing sleeve (25), and the outer magnetic expansion sleeve wheel (12) is rotationally connected with the sealing sleeve (25) through the bearing B (10).
5. The magnetic coupling stirring device for the ALD fluidized bed according to claim 1, wherein a connecting sleeve B (27) is fixedly connected to the edge of the upper end of the reaction kettle (24), a flange (26) is fixedly connected with the connecting sleeve B (27), and a compressed metal gasket B (20) is arranged between the flange (26) and the connecting sleeve B (27).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202322498189.9U CN220835475U (en) | 2023-09-14 | 2023-09-14 | Be used for ALD fluidized bed magnetic coupling agitating unit |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202322498189.9U CN220835475U (en) | 2023-09-14 | 2023-09-14 | Be used for ALD fluidized bed magnetic coupling agitating unit |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN220835475U true CN220835475U (en) | 2024-04-26 |
Family
ID=90787381
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202322498189.9U Active CN220835475U (en) | 2023-09-14 | 2023-09-14 | Be used for ALD fluidized bed magnetic coupling agitating unit |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN220835475U (en) |
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2023
- 2023-09-14 CN CN202322498189.9U patent/CN220835475U/en active Active
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