CN220834250U

CN220834250U - Drainage gas separation device

Info

Publication number: CN220834250U
Application number: CN202322208376.9U
Authority: CN
Inventors: 曹忱根; 张云飞; 吴胜荣
Original assignee: Jiejie Microelectronics Nantong Technology Co ltd
Current assignee: Jiejie Microelectronics Nantong Technology Co ltd
Priority date: 2023-08-16
Filing date: 2023-08-16
Publication date: 2024-04-26
Anticipated expiration: 2033-08-16

Abstract

The embodiment of the utility model provides a drainage gas separation device, and relates to the field of semiconductor liquid drainage. The water and gas discharging separation device comprises a reaction tank body, a slow discharging tank body and a main liquid discharging pipe, wherein the slow discharging tank body is arranged below the reaction tank body, the top of the slow discharging tank body is communicated with the reaction tank body, an exhaust port is formed in the top of the slow discharging tank body and used for discharging gas in liquid after the liquid in the reaction tank body enters the slow discharging tank body, so that water and gas separation is performed, and the main liquid discharging pipe is communicated with the bottom of the slow discharging tank body. The waste water drops downwards under the action of gravity for gas in the waste water flows upwards fast, and flows out from the gas vent of the bottom of slowly arranging the cell body, thereby realizes the water-gas separation, has avoided gas to take place to irritate the phenomenon slowly arranging the cell body and connect between reaction tank body and main fluid-discharge tube in the flowing back in-process easily, thereby can avoid a large amount of waste water direct flow direction in the reaction tank body to main fluid-discharge tube to block up in main fluid-discharge tube's entrance, thereby improves flowing back speed.

Description

Drainage gas separation device

Technical Field

The utility model relates to the technical field of semiconductor liquid discharge, in particular to a water and gas discharge separation device.

Background

At present, after the reaction is finished, the semiconductor is required to be subjected to wastewater discharge treatment, the wastewater discharge device in the prior art generally adopts a gravity quick discharge mode to perform liquid discharge treatment through an HF (high frequency) tank, directly discharges wastewater into a wastewater tank, and then discharges the wastewater from the wastewater tank to a wastewater discharge pipe to finish wastewater discharge treatment.

The waste water discharge device in the prior art has the problems that the liquid discharge is slow, and the reverse filling phenomenon of gas is easy to occur in the liquid discharge process, so that the pollution of products is caused.

Disclosure of utility model

The utility model provides a drainage gas separation device which can improve the drainage speed and avoid the phenomenon of reverse filling of gas in the drainage process, thereby ensuring the product quality, avoiding the pollution of the product and being more convenient and safer to use.

Embodiments of the utility model may be implemented as follows:

An embodiment of the present utility model provides a water discharge gas separation device including:

A reaction tank;

The slow-discharge groove body is arranged below the reaction groove body, the top of the slow-discharge groove body is communicated with the reaction groove body, the top of the slow-discharge groove body is provided with an exhaust port, and the exhaust port is used for exhausting gas in the liquid after the liquid in the reaction groove body enters the slow-discharge groove body, so that water-gas separation is performed;

The main liquid discharge pipe is communicated with the bottom of the slow discharge groove body.

Optionally, the exhaust port is disposed at a side of the slow-release tank body, which is close to the reaction tank body.

Optionally, the exhaust gas-water separation device further comprises an exhaust pipe, and the exhaust pipe is arranged at the exhaust port.

Optionally, the water and gas drainage separation device further comprises a liquid drainage pipeline, and two ends of the liquid drainage pipeline are respectively communicated with the reaction tank body and the slow drainage tank body.

Optionally, the liquid draining pipeline comprises a first pipeline and a second pipeline, the first pipeline is communicated with the second pipeline, the first pipeline is arranged at an angle with the second pipeline, the first pipeline is communicated with the reaction tank body, and the second pipeline is communicated with the slow draining tank body.

Optionally, the first pipe and the second pipe are disposed vertically.

Optionally, the first pipeline is communicated with the bottom of the reaction tank body, and the second pipeline is communicated with the top of the side wall of the slow-release tank body.

Optionally, the water and gas exhaust separation device further comprises a communicating pipe, one end of the communicating pipe is connected with the slow-drainage tank body, and the other end of the communicating pipe is communicated with the main liquid discharge pipe.

Optionally, one end of the communicating pipe is communicated with the bottom of the slow-discharge groove body, and the other end of the communicating pipe is communicated with the side wall of the main liquid discharge pipe.

Optionally, the slow-discharging groove body is of a square structure.

The drainage gas separation device provided by the embodiment of the utility model has the beneficial effects that:

The water and gas discharging separation device comprises a reaction tank body, a slow discharging tank body and a main liquid discharging pipe, wherein the slow discharging tank body is arranged below the reaction tank body, the top of the slow discharging tank body is communicated with the reaction tank body, an exhaust port is formed in the top of the slow discharging tank body and used for discharging gas in liquid after the liquid in the reaction tank body enters the slow discharging tank body, so that water and gas separation is performed, and the main liquid discharging pipe is communicated with the bottom of the slow discharging tank body. When the water and gas drainage separation device is used, the slow-release tank body is arranged below the reaction tank body, waste water firstly falls into the slow-release tank body and then falls downwards under the action of gravity, so that gas in the waste water flows upwards rapidly and flows out of an exhaust port at the bottom of the slow-release tank body, water-gas separation is realized, reverse filling phenomenon of gas in the liquid drainage process is avoided, product pollution is caused, meanwhile, the slow-release tank body is connected between the reaction tank body and a main liquid drainage pipe, a large amount of waste water in the reaction tank body directly flows to the main liquid drainage pipe to block the inlet of the main liquid drainage pipe, the liquid drainage speed is improved, and the water drainage device is more convenient and safer to use.

Drawings

In order to more clearly illustrate the technical solutions of the embodiments of the present utility model, the drawings that are needed in the embodiments will be briefly described below, it being understood that the following drawings only illustrate some embodiments of the present utility model and therefore should not be considered as limiting the scope, and other related drawings may be obtained according to these drawings without inventive effort for a person skilled in the art.

Fig. 1 is a schematic structural diagram of a water-gas separation device according to the present embodiment.

Icon: 10-a reaction tank body; 20-slow-discharge groove bodies; 21-an exhaust port; 30-a main drain; 40-a liquid discharge pipeline; 41-a first pipe; 42-a second conduit; 50-communicating pipe; 100-a water and gas drainage separation device.

Detailed Description

For the purpose of making the objects, technical solutions and advantages of the embodiments of the present utility model more apparent, the technical solutions of the embodiments of the present utility model will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present utility model, and it is apparent that the described embodiments are some embodiments of the present utility model, but not all embodiments of the present utility model. The components of the embodiments of the present utility model generally described and illustrated in the figures herein may be arranged and designed in a wide variety of different configurations.

Thus, the following detailed description of the embodiments of the utility model, as presented in the figures, is not intended to limit the scope of the utility model, as claimed, but is merely representative of selected embodiments of the utility model. All other embodiments, which can be made by those skilled in the art based on the embodiments of the utility model without making any inventive effort, are intended to be within the scope of the utility model.

It should be noted that: like reference numerals and letters denote like items in the following figures, and thus once an item is defined in one figure, no further definition or explanation thereof is necessary in the following figures.

In the description of the present utility model, it should be noted that, if the terms "upper", "lower", "inner", "outer", and the like indicate an azimuth or a positional relationship based on the azimuth or the positional relationship shown in the drawings, or the azimuth or the positional relationship in which the inventive product is conventionally put in use, it is merely for convenience of describing the present utility model and simplifying the description, and it is not indicated or implied that the apparatus or element referred to must have a specific azimuth, be configured and operated in a specific azimuth, and thus it should not be construed as limiting the present utility model.

Furthermore, the terms "first," "second," and the like, if any, are used merely for distinguishing between descriptions and not for indicating or implying a relative importance.

It should be noted that the features of the embodiments of the present utility model may be combined with each other without conflict.

The waste water discharge device in the related art has the problems of slow liquid discharge and easy reverse filling of gas in the liquid discharge process, thereby causing product pollution

Referring to fig. 1, the present embodiment provides a drainage gas separation device 100, which can effectively improve the above-mentioned technical problems, and can increase the drainage speed, and avoid the phenomenon of gas reverse filling in the drainage process, so as to ensure the product quality, avoid the pollution of the product, and make the use more convenient and safer.

Referring to fig. 1, the exhaust gas separation device 100 includes a reaction tank 10, a slow-release tank 20 and a main liquid discharge pipe 30, the slow-release tank 20 is disposed below the reaction tank 10, the top of the slow-release tank 20 is communicated with the reaction tank 10, the top of the slow-release tank 20 is provided with an exhaust port 21, the exhaust port 21 is used for discharging gas in the liquid after the liquid in the reaction tank 10 enters the slow-release tank 20, so as to perform water-gas separation, and the main liquid discharge pipe 30 is communicated with the bottom of the slow-release tank 20.

Specifically, when the waste water draining device in the prior art is used, waste water is directly drained in the HF groove by utilizing a gravity mode, and when the waste water is drained by utilizing the gravity mode, a large amount of waste water can flow to the drain port of the drain in a concentrated manner, so that the situation that the drain is slow, gas in the drain pipeline reversely flows into the HF process groove is caused, and the inside of the groove is polluted by dirty waste gas, so that the phenomenon of product pollution is caused. The pipe diameter of the discharge pipeline designed by the inspection equipment is smaller, and if the pipeline is changed, the economic cost and the time cost of the tank are required to be changed greatly, and the cost is high. In order to solve the technical problem, this embodiment provides a drainage gas separation device 100, this drainage gas separation device 100 is when using, because slow exhaust cell body 20 sets up in the below of reaction cell body 10, waste water gets into reaction cell body 10 earlier, then drop down and get into slow exhaust cell body 20, waste water drops down under the action of gravity, make the gas in the waste water flow upward fast, and flow out from the gas vent 21 of the bottom of slow exhaust cell body 20, thereby realize the aqueous vapor separation, the phenomenon of reverse filling is also avoided gaseous emergence easily in the flowing back, thereby cause product pollution, slow exhaust cell body 20 connects between reaction cell body 10 and main fluid-discharge tube 30 simultaneously, thereby can avoid the direct flow direction of a large amount of waste water in the reaction cell body 10 to main fluid-discharge tube 30 to block up in the entrance of main fluid-discharge tube 30, thereby improve the flowing back speed, and use is more convenient and safer.

Specifically, the exhaust port 21 is provided on a side of the slow-release tank 20 close to the reaction tank 10. So that the waste water can be discharged through the exhaust port 21 quickly when flowing into the slow-discharging groove body 20 from the reaction groove body 10, and further the pollution of the product caused by the reverse filling of the gas into the reaction groove body 10 is avoided.

As can be appreciated, the exhaust gas separation device 100 further includes an exhaust pipe provided at the exhaust port 21. Specifically, the exhaust pipe is a standpipe.

In this embodiment, the drainage gas separation device 100 further includes a drain pipe 40, and two ends of the drain pipe 40 are respectively communicated with the reaction tank 10 and the slow drain tank 20.

The drain pipe 40 includes a first pipe 41 and a second pipe 42, the first pipe 41 and the second pipe 42 are connected, the first pipe 41 and the second pipe 42 are arranged at an angle, the first pipe 41 is connected to the reaction tank 10, and the second pipe 42 is connected to the buffer tank 20.

In the present embodiment, the first duct 41 and the second duct 42 are disposed vertically. The first duct 41 is disposed in a vertical direction, and the second duct 42 is disposed in a horizontal direction.

Wherein the first pipe 41 is communicated with the bottom of the reaction tank 10, and the second pipe 42 is communicated with the top of the side wall of the buffer tank 20. So that the gas does not enter the second pipe 42 located at the side wall of the buffer tank 20 in case of upward flow, thereby further avoiding the gas from contaminating the product.

Further, the exhaust gas separation apparatus 100 further includes a communication pipe 50, one end of the communication pipe 50 is connected to the buffer tank 20, and the other end of the communication pipe 50 is communicated with the main drain pipe 30.

Specifically, one end of the communication pipe 50 communicates with the bottom of the drain tank 20, and the other end of the communication pipe 50 communicates with the side wall of the main drain pipe 30.

In this embodiment, the buffer tank 20 has a square structure. The reaction tank 10 has a square structure. In other embodiments, the buffer tank 20 and the reaction tank 10 may have a cylindrical structure or other structures, which are not limited herein.

In this embodiment, the diameter of the slow-discharge groove 20 is smaller than the diameter of the reaction groove 10, and the height of the slow-discharge groove 20 is smaller than the height of the reaction groove 10. In other embodiments, the diameter of the buffer tank 20 may be the same as the diameter of the reaction tank 10, and the height of the buffer tank 20 may be the same as the height of the reaction tank 10, which is not particularly limited herein.

Further, the pipe diameter of the communicating pipe 50 is smaller than that of the main drain pipe.

The drainage gas separation device 100 provided in this embodiment has at least the following advantages:

When the drainage gas separation device 100 is used, the slow drainage groove body 20 is arranged between the reaction groove body 10 and the main drainage pipe 30, so that a large amount of waste water is buffered to enter the main drainage pipe 30, and the problems of too slow drainage speed and too high overall transformation cost caused by the small pipe diameter of the main drainage pipe 30 are avoided. No modification of the drain 40 is required, reducing production costs.

The foregoing is merely illustrative of the present utility model, and the present utility model is not limited thereto, and any changes or substitutions easily contemplated by those skilled in the art within the scope of the present utility model should be included in the present utility model. Therefore, the protection scope of the present utility model shall be subject to the protection scope of the claims.

Claims

1. A water and gas discharge separation device, comprising:

A reaction tank (10);

the device comprises a slow-release groove body (20), wherein the slow-release groove body (20) is arranged below the reaction groove body (10), the top of the slow-release groove body (20) is communicated with the reaction groove body (10), an exhaust port (21) is arranged at the top of the slow-release groove body (20), and the exhaust port (21) is used for exhausting gas in liquid after the liquid in the reaction groove body (10) enters the slow-release groove body (20), so that water-gas separation is performed;

The main liquid discharge pipe (30), the main liquid discharge pipe (30) is communicated with the bottom of the slow discharge groove body (20).

2. The exhaust gas separation device according to claim 1, wherein the exhaust port (21) is provided at a side of the slow-release tank body (20) close to the reaction tank body (10).

3. The exhaust gas separation device according to claim 1, characterized in that the exhaust gas separation device (100) further comprises an exhaust pipe provided to the exhaust port (21).

4. The water and gas drainage separation device according to claim 1, wherein the water and gas drainage separation device (100) further comprises a liquid drainage pipe (40), and two ends of the liquid drainage pipe (40) are respectively communicated with the reaction tank body (10) and the slow drainage tank body (20).

5. The exhaust gas separation device according to claim 4, wherein the liquid discharge pipe (40) includes a first pipe (41) and a second pipe (42), the first pipe (41) and the second pipe (42) are communicated, and the first pipe (41) and the second pipe (42) are arranged at an angle, the first pipe (41) and the reaction tank (10) are communicated, and the second pipe (42) and the slow discharge tank (20) are communicated.

6. The exhaust gas separation device according to claim 5, characterized in that the first conduit (41) and the second conduit (42) are arranged vertically.

7. The apparatus according to claim 6, wherein the first pipe (41) is connected to the bottom of the reaction tank (10), and the second pipe (42) is connected to the top of the side wall of the buffer tank (20).

8. The exhaust gas separation device according to any one of claims 1 to 7, wherein the exhaust gas separation device (100) further comprises a communicating pipe (50), one end of the communicating pipe (50) is connected to the slow drain tank (20), and the other end of the communicating pipe (50) is connected to the main drain pipe (30).

9. The exhaust gas separation device according to claim 8, wherein one end of the communicating pipe (50) communicates with a bottom of the slow drain tank (20), and the other end of the communicating pipe (50) communicates with a side wall of the main drain pipe (30).

10. The water and gas drainage separator according to any one of claims 1 to 7, wherein the slow drainage tank (20) has a square structure.