CN2208271Y - Vertical probe for scanning microscope - Google Patents
Vertical probe for scanning microscope Download PDFInfo
- Publication number
- CN2208271Y CN2208271Y CN94217067U CN94217067U CN2208271Y CN 2208271 Y CN2208271 Y CN 2208271Y CN 94217067 U CN94217067 U CN 94217067U CN 94217067 U CN94217067 U CN 94217067U CN 2208271 Y CN2208271 Y CN 2208271Y
- Authority
- CN
- China
- Prior art keywords
- probe
- swing handle
- screw thread
- thread pair
- adjusting
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
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Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
- G01Q10/00—Scanning or positioning arrangements, i.e. arrangements for actively controlling the movement or position of the probe
- G01Q10/02—Coarse scanning or positioning
Abstract
The utility model relates to a vertical probe for scanning probe microscope SPM. A rotary handle 4 is used for simultaneously adjusting two fulcrums on the upper part of a support probe to move through a slide mechanism 5. A rotary handle 6 is used for driving a screw thread pair 7 and adjusting another fulcrum. Simultaneously the flexing of the electrical feedback of a piezoelectric device 3 is matched to complete the tasks of measuring and adjusting SPM. Compared with the existing adjusting device, the utility model overcomes the defects of complication and time waste during the tests and adjustment of samples, and achieves the aims of convenient and time saving adjustment.
Description
The present invention relates to a kind of microscope regulating device, especially the vertical probe of the micro-quasi-instrument of scan-probe (as scanning tunnel microscope, atomic force microscope, magnetic force microscopy and laser detection atomic force microscope etc.).
The vertical probe of current scanline probe microscope (SPM), as commercially available U.S. Nanoscope I. II and III type, for ease of installing and using, they are the probe bottom II two parts that probe are divided into the probe top I that probe 1 is housed and sample 2 and piezoelectric device 3 are housed, probe bottom II is fixed with three screw thread pairs as adjustable three fulcrums, probe top I is positioned at the top of probe bottom II, and three screw thread pairs are respectively drawn the swing handle of an input motion along its axis direction, realize the thick of 1 pair of sample 2 of probe by these three swing handles of turn, thin tuning.
Generally speaking, this adjusting is arrived certain limit at the following probe 1 of optical loupes with sample 2 coarse adjustment earlier often, and then drive wherein a screw rod with stepping motor 10 and make thin tuning, the electricity feedback that is equipped with piezoelectric device 3 simultaneously is flexible, probe 1 is transferred to the position that can carry out the SPM test to sample 2.
Usually the vertical probe of SPM is under optical loupes in other words, regulates two fulcrums that support probe top I respectively by two swing handles and finishes manual coarse adjustment work.In this adjustment process, the optical loupes of use will be done the match and regulate of focal length at any time, could pass through to regulate two fulcrums that support probe top I, determines the relative position of probe to sample, and it is time-consuming complicated again making like this and regulating operation element.
The purpose of this invention is to provide the vertical probe of a kind of SPM, it only uses a swing handle, can regulate two fulcrums that support probe top I simultaneously moves, with of the coarse adjustment of convenient probe 1 with sample 2 spacings, overcome the time-consuming and complicated of former governor motion, make and regulate that operation element promptly saves time and easy.
For reaching above-mentioned target, solution of the present invention is that the slide mechanism that adopts screw thread pair to drive serves as two fulcrums that support probe top I with its sliding component, handled by a swing handle, to carry out the thick of probe 1 relative sample 2 spacings or fine tuning operation.The another one fulcrum of probe top I still adopts independent screw thread pair to regulate, and is equipped with the flexible SPM test adjustment process of finishing of electricity feedback of piezoelectric device.
The vertical probe of scanning probe microscopy of the present invention (SPM) has the probe top I that needle point 1 is installed, and the probe bottom II of sample 2 and piezoelectric device 3 is installed, and is fixed on the governor motion on the II of probe bottom.On probe bottom II, swing handle 4 and swing handle 6 be as the motion input, between swing handle 4 and swing handle 6 and the screw thread pair that is connected, connects transmission component 8 and transmission component 9 respectively, draws (as shown in the figure) by transmission component 8 and transmission component 9.On swing handle 4 and the screw thread pair that is connected a slide mechanism 5 is housed, the secondary mechanism 7 of swing handle 6 connecting threads, the below of probe 1 is a piezoelectric device 3, sample 2 is contained on the piezoelectric device 3.When carrying out SPM test adjusting, probe top I is put into the adjusting that approaches of carrying out 1 pair of sample 2 of probe on the II of probe bottom, earlier by swing handle 4 through transmission component 8, the slide mechanism 5 that drives by screw thread pair, make its sliding component, regulated simultaneously as two fulcrums that support probe top I.To realize the distance between coarse adjustment probe 1 and the sample 2, next drive swing handle 6 by stepping motor 10, drive another fulcrum that screw thread pair 7 is regulated probe top I by transmission component 9, the electricity feedback that is equipped with piezoelectric device 3 simultaneously is flexible, carry out the distance between fine tuning probe 1 and the sample 2, finish SPM test adjustment process.
Swing handle 4 and swing handle 6 also can be without transmission component 8 and transmission components 9 as the motion input, and swing handle 4 directly links to each other respectively with the screw thread pair that is connected with swing handle 6, draws along its axis of thread direction.
Swing handle 4 or swing handle 6 are connected with stepping motor.When stepping motor 10 is connected with swing handle 6, do thin tuning with screw thread pair 7, the slide mechanism 5 that the screw thread pair that swing handle 4 is handled drives is done coarse adjustment and is used.
Make thin tuning when stepping motor 10 is connected with swing handle 4,6 of swing handles become the coarse adjustment manual rotating handle.
For increasing the stability of regulating and locating, at the sliding component of slide mechanism 5 and the probe contacted position of I, top and screw thread pair 7 and the probe contacted position of I, top, all can adopt permanent magnet component to increase the power that is adjacent between probe top I and the probe bottom II.
Because the present invention is to the improvement of the vertical probe governor motion of probe microscope (SPM), make it when sample test is operated, overcome the time-consuming and complicated of original governor motion, can a hand adjustment save the optical loupes focal length, another hand coarse adjustment swing handle is finished coarse adjustment work continuously, accomplish to save time with easy, and clear picture.
The vertical probe of SPM of the present invention successfully is applied in the middle of scanning tunnel microscope and the laser detection atomic force microscope by us, and all can stably obtain the clear test pattern of graphite sample atomic resolution.
Accompanying drawing is the vertical probe sectional side elevation of scanning probe microscopy.
Claims (4)
1, the vertical probe of a kind of scanning probe microscopy, its parts have the probe top I that probe (1) is housed, the probe bottom II of sample (2) and piezoelectric device (3) is housed, and be fixed on governor motion on the probe bottom II, it is characterized in that in the described governor motion, on probe swing handle (4) and the screw thread pair that is connected a slide mechanism (5) is housed, swing handle (6) connecting thread pair mechanism (7), the below of probe (1) is piezoelectric device (3).
2, the vertical probe of scanning probe microscopy according to claim 1 is characterized in that described swing handle (4) or swing handle (6) are connected with stepping motor (10).
3, the vertical probe of scanning probe microscopy according to claim 1 is characterized in that connecting transmission component (8) and transmission component (9) respectively between described swing handle (4) and swing handle (6) and the screw thread pair that is connected.
4, the vertical probe of scanning probe microscopy according to claim 1 is characterized in that described swing handle (4) and swing handle (6) and the screw thread pair that is connected, and directly links to each other respectively.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN94217067U CN2208271Y (en) | 1994-07-21 | 1994-07-21 | Vertical probe for scanning microscope |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN94217067U CN2208271Y (en) | 1994-07-21 | 1994-07-21 | Vertical probe for scanning microscope |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN2208271Y true CN2208271Y (en) | 1995-09-20 |
Family
ID=33832608
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN94217067U Expired - Fee Related CN2208271Y (en) | 1994-07-21 | 1994-07-21 | Vertical probe for scanning microscope |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN2208271Y (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108780033A (en) * | 2018-04-13 | 2018-11-09 | 深圳达闼科技控股有限公司 | A kind of device that method, detection device and the control of control probe are popped one's head in |
-
1994
- 1994-07-21 CN CN94217067U patent/CN2208271Y/en not_active Expired - Fee Related
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108780033A (en) * | 2018-04-13 | 2018-11-09 | 深圳达闼科技控股有限公司 | A kind of device that method, detection device and the control of control probe are popped one's head in |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| C19 | Lapse of patent right due to non-payment of the annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |