CN220819808U

CN220819808U - Movable sample table for film growth experiment

Info

Publication number: CN220819808U
Application number: CN202322398689.5U
Authority: CN
Inventors: 董顺
Original assignee: Shenyang Pengcheng Vacuum Technology Co ltd
Current assignee: Shenyang Pengcheng Vacuum Technology Co ltd
Priority date: 2023-09-05
Filing date: 2023-09-05
Publication date: 2024-04-19
Anticipated expiration: 2033-09-05

Abstract

The utility model discloses a movable sample stage for a film growth experiment, which comprises a base and a sample stage, wherein the top of the base is fixedly provided with a transverse plate, the inside of the sample stage is rotatably provided with a rotary lifting mechanism, the top of the base is provided with a bidirectional moving mechanism, the movable sample stage for the film growth experiment drives a gear A to rotate through a first motor to drive a gear B to rotate, a rotating rod rotates, a rotating block rotates to standby sample stage to rotate, a researcher can observe 360 degrees, the movable sample stage is more convenient and fast, an electric telescopic rod is started to enable a second lifting column to move to drive the first lifting column to move, the height of the sample stage is changed, the movable sample stage is applicable to observe from any height, a second motor is started to enable a threaded rod A to rotate to drive a sliding block to move, the sample stage is enabled to move left and right, and a third motor is started to enable the threaded rod B to rotate, and the sample stage can move forwards and backwards.

Description

Movable sample table for film growth experiment

Technical Field

The utility model relates to the technical field of film growth experiment sample tables, in particular to a movable sample table for film growth experiments.

Background

Researchers can put the film into the sample box when observing the film growth process, then observe, because the height and the fixed position of sample box when observing for observe inconvenient, consequently just developed the removal sample platform for the film growth experiment.

The patent net discloses a three-dimensional moving sample stage (CN 207850900U) in a vacuum device for film growth experiments, which is described in the patent net, and relates to an experimental device, wherein the sample stage comprises three cylindrical guide rails arranged at the bottom of a vacuum chamber, a fixed flat plate is arranged on the cylindrical guide rails, and the fixed flat plate is connected with the cylindrical guide rails through linear bearings; the fixed flat plate is provided with a screw nut which is matched with a feed screw rod; an X-axis movable supporting plate is arranged below the fixed flat plate, and the X-axis movable supporting plate is limited by a precision micrometer; a Y-axis movable supporting plate is arranged below the X-axis movable supporting plate, and the Y-axis movable supporting plate is provided with a precision micrometer limit; a support tube of a three-dimensional sample table is arranged on the Y-axis movable supporting plate, the three-dimensional sample table is fixed, a group of ceramics Feng Dianji is arranged below the support tube, and a heating wire and a connecting wire of a temperature sensor are led out. The three-dimensional sample stage moves in three dimensions in the vacuum equipment, thereby providing possibility for online observation and providing convenient experimental conditions for research and development personnel. ".

With respect to the above description, the applicant believes that the following problems exist:

In the use process of the utility model, the three-dimensional position of the sample stage is changed through the three arranged cylindrical guide rails, however, the device can perform three-dimensional position change, if a back sample needs to be observed, an observer needs to carry the observation device to shift the position, the observation speed is slow, and therefore, the moving sample stage for film growth experiments needs to be changed to solve the problems.

Disclosure of utility model

The utility model aims to provide a movable sample stage for film growth experiments, which solves the problems in the background technology.

In order to achieve the above purpose, the present utility model provides the following technical solutions: the utility model provides a removal sample platform for film growth experiments, includes base and sample platform, the top fixed mounting of base has the diaphragm, the inside rotation of sample platform is installed rotatory elevating system, the top of base is provided with two-way moving mechanism.

The rotary lifting mechanism comprises a rotary component and a lifting component, and the lifting component is fixedly arranged at the bottom of the rotary component.

Preferably, the rotating assembly comprises a shell, the shell is rotatably mounted in the sample stage, a disc is fixedly mounted in the shell, a rotating block is fixedly mounted at the bottom of the sample stage, a first motor is fixedly mounted in the shell, a gear A is fixedly mounted at the output end of the first motor, a gear B is meshed with the outer portion of the gear A, and a rotating rod is fixedly mounted at the top of the gear B, so that the gear B rotates to drive the rotating rod to rotate.

Preferably, the shell is rotatably mounted with the rotating block, a rotating shaft is fixedly mounted in the gear A, the rotating shaft is rotatably mounted in the rotating block, the rotating rod is slidably mounted in the rotating block, the rotating block is driven to rotate, and the sample table is driven to rotate for displaying.

Preferably, the lifting assembly comprises a first lifting column, the first lifting column is fixedly arranged at the bottom of the shell, a second lifting column is slidably arranged outside the first lifting column, a fixed column is slidably arranged outside the second lifting column, a gear C is rotatably arranged inside the second lifting column, a rack A is fixedly arranged outside the first lifting column, a rack B is fixedly arranged inside the fixed column, a cross rod is fixedly arranged at the bottom of the second lifting column, and an electric telescopic rod is fixedly arranged inside the fixed column to drive the second lifting column to lift.

Preferably, the output end of the electric telescopic rod is fixedly arranged with the cross rod, the gear C is meshed with the rack B, and the gear C is meshed with the rack A, so that the second lifting column is driven to move when moving.

Preferably, the bidirectional moving mechanism comprises two rectangular blocks A and rectangular blocks B, wherein the rectangular blocks A are fixedly arranged at the top of the base, the rectangular blocks B are fixedly arranged at the top of the base, a second motor is fixedly arranged at the top of the base, a leather wheel A is fixedly arranged at the output end of the second motor, a threaded rod A is fixedly arranged on the right side of the leather wheel A, a belt is arranged on the outer transmission of the leather wheel A, a leather wheel B is fixedly arranged on the left side of the rectangular blocks A, a limiting rod is fixedly arranged between the rectangular blocks B and the transverse plate, a sliding block is arranged on the outer thread of the threaded rod A, a third motor is fixedly arranged on the front surface of the sliding block, and the output end of the third motor is fixedly provided with the threaded rod B to drive the threaded rod B to rotate, so that the sample table moves.

Preferably, the slider slidable mounting is outside the gag lever post, leather wheel B and belt drive installation, threaded rod B rotates and installs inside the slider, threaded rod B screw thread installs inside the fixed column, and threaded rod B rotates and drives the fixed column and remove, drives the sample platform and reciprocates.

Compared with the prior art, the utility model provides a movable sample stage for film growth experiments, which has the following beneficial effects:

1. This removal sample platform for film growth experiments drives gear A through first motor and rotates, drives gear B and rotates for the dwang rotates, makes the dwang rotate for the sample platform that stands by rotates, makes the researcher can 360 observe, and is more convenient, starts electric telescopic handle and makes the second lift post remove and drive first lift post and remove, makes the sample platform highly change, is suitable for the researcher and observes from any height.

2. This removal sample platform for film growth experiments starts the second motor and makes threaded rod A rotate and drive the slider and remove for the sample platform moves about, starts the third motor and makes threaded rod B rotate, makes the sample platform can carry out the back-and-forth movement.

Drawings

For a clearer description of the technical solutions of the embodiments of the present utility model, the drawings that are needed in the description of the embodiments will be briefly described below, it will be apparent that the drawings in the description below are only some embodiments of the present utility model, and that other drawings can be obtained according to these drawings without inventive effort for a person skilled in the art:

FIG. 1 is a schematic view of the appearance structure of the present utility model;

FIG. 2 is a schematic view of the appearance of the rotary lifting mechanism of the present utility model;

FIG. 3 is a schematic view of the appearance and structure of a rotary assembly according to the present utility model;

FIG. 4 is a schematic view of the bottom appearance of the rotary assembly according to the present utility model;

fig. 5 is a schematic view of the appearance structure of the bi-directional moving mechanism of the present utility model.

In the figure: 1. a base; 2. a cross plate; 3. a sample stage; 4. a rotary lifting mechanism; 41. a rotating assembly; 411. a housing; 412. a disc; 413. a rotating block; 414. a first motor; 415. a gear A; 416. a gear B; 417. a rotating lever; 42. a lifting assembly; 421. a first lifting column; 422. a second lifting column; 423. fixing the column; 424. a gear C; 425. a rack A; 426. a rack B; 427. a cross bar; 428. an electric telescopic rod; 5. a bidirectional moving mechanism; 51. rectangular block A; 52. a second motor; 53. a leather wheel A; 54. a leather wheel B; 55. a belt; 56. a threaded rod A; 57. rectangular blocks B; 58. a limit rod; 59. a slide block; 510. a third motor; 511. and a threaded rod B.

Detailed Description

The following description of the embodiments of the present utility model will be made clearly and completely with reference to the accompanying drawings, in which it is apparent that the embodiments described are only some embodiments of the present utility model, but not all embodiments. All other embodiments, which can be made by those skilled in the art based on the embodiments of the utility model without making any inventive effort, are intended to be within the scope of the utility model.

In the present utility model, unless explicitly specified and limited otherwise, the terms "mounted," "connected," "secured," and the like are to be construed broadly, and may be, for example, fixedly connected, detachably connected, or integrally formed; can be mechanically or electrically connected; can be directly connected or indirectly connected through an intermediate medium, and can be communicated with the inside of two elements or the interaction relationship of the two elements. The specific meaning of the above terms in the present utility model can be understood by those of ordinary skill in the art according to the specific circumstances.

Embodiment one:

Referring to fig. 1-4, the present utility model provides a technical solution: the utility model provides a removal sample platform for film growth experiments, includes base 1 and sample platform 3, and the top fixed mounting of base 1 has diaphragm 2, and rotation elevating system 4 is installed in the inside rotation of sample platform 3, and the top of base 1 is provided with two-way moving mechanism 5.

The rotary lifting mechanism 4 comprises a rotary component 41 and a lifting component 42, and the lifting component 42 is fixedly arranged at the bottom of the rotary component 41.

Further, the rotating assembly 41 includes a housing 411, the housing 411 is rotatably mounted in the sample stage 3, a disc 412 is fixedly mounted in the housing 411, a rotating block 413 is fixedly mounted at the bottom of the sample stage 3, a first motor 414 is fixedly mounted in the housing 411, a gear a415 is fixedly mounted at the output end of the first motor 414, a gear B416 is meshed with the gear a415, and a rotating rod 417 is fixedly mounted at the top of the gear B416, so that the gear B416 rotates to drive the rotating rod 417 to rotate.

Further, the shell 411 and the rotating block 413 are rotatably mounted, a rotating shaft is fixedly mounted in the gear A415, the rotating shaft is rotatably mounted in the rotating block 413, the rotating rod 417 is slidably mounted in the rotating block 413, the rotating block 413 is driven to rotate, and the sample table 3 is driven to rotate and display in 360 degrees.

Further, the lifting assembly 42 includes a first lifting column 421, the first lifting column 421 is fixedly mounted at the bottom of the housing 411, a second lifting column 422 is slidably mounted on the outer portion of the first lifting column 421, a fixing column 423 is slidably mounted on the outer portion of the second lifting column 422, a gear C424 is rotatably mounted in the second lifting column 422, a rack a425 is fixedly mounted on the outer portion of the first lifting column 421, a rack B426 is fixedly mounted in the fixing column 423, a cross rod 427 is fixedly mounted at the bottom of the second lifting column 422, and an electric telescopic rod 428 is fixedly mounted in the fixing column 423 to drive the second lifting column 422 to lift.

Further, the output end of the electric telescopic rod 428 is fixedly mounted with the cross rod 427, the gear C424 is meshed with the rack B426, and the gear C424 is meshed with the rack a425, so that the second lifting column 422 drives the first lifting column 421 to move when moving.

Embodiment two:

Referring to fig. 5, and in combination with the first embodiment, further obtained, the bidirectional moving mechanism 5 includes two rectangular blocks a51 and a rectangular block B57, the rectangular block a51 is fixedly installed at the top of the base 1, the rectangular block B57 is fixedly installed at the top of the base 1, the second motor 52 is fixedly installed at the top of the base 1, the pulley a53 is fixedly installed at the output end of the second motor 52, the threaded rod a56 is fixedly installed at the right side of the pulley a53, the belt 55 is installed at the external transmission of the pulley a53, the pulley B54 is fixedly installed at the left side of the rectangular block a51, the limit rod 58 is fixedly installed between the rectangular block B57 and the transverse plate 2, the sliding block 59 is installed at the external thread of the threaded rod a56, the third motor 510 is fixedly installed at the front of the sliding block 59, the threaded rod B511 is fixedly installed at the output end of the third motor 510, and the threaded rod B511 is driven to rotate, so that the sample stage 3 moves.

Further, the sliding block 59 is slidably mounted outside the limiting rod 58, the pulley B54 is in transmission mounting with the belt 55, the threaded rod B511 is rotatably mounted inside the sliding block 59, the threaded rod B511 is threadedly mounted inside the fixed column 423, and the threaded rod B511 rotates to drive the fixed column 423 to move and drive the sample stage 3 to move back and forth.

In the actual operation process, when the device is used, the second motor 52 is started to enable the leather wheel A53 to rotate, the leather wheel B54 is enabled to rotate through the belt 55, the two threaded rods A56 are driven to rotate, the sliding block 59 is slidably installed at the top of the base 1, the fixed column 423 is enabled to move left and right, the third motor 510 is started to enable the threaded rod B511 to rotate, the fixed column 423 is enabled to move back and forth, the electric telescopic rod 428 is started to enable the second lifting column 422 to move upwards to drive the gear C424 to rotate, the first lifting column 421 is enabled to lift, when three-dimensional position adjustment is completed and the optimal observation position is reached, the first motor 414 is started to enable the gear A415 to rotate to drive the gear B416 to rotate, the rotating rod 417 is enabled to slide in the rotating block 413, the rotating block 413 is enabled to rotate to drive the sample table 3 to rotate 360 degrees, the whole observation can be achieved, and the growth condition of each point of the film can be observed conveniently through a microscope.

It is noted that relational terms such as first and second, and the like are used solely to distinguish one entity or action from another entity or action without necessarily requiring or implying any actual such relationship or order between such entities or actions. Moreover, the terms "comprises," "comprising," or any other variation thereof, are intended to cover a non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements does not include only those elements but may include other elements not expressly listed or inherent to such process, method, article, or apparatus. Without further limitation, an element defined by the phrase "comprising one does not exclude the presence of other like elements in a process, method, article, or apparatus that comprises an element.

Claims

1. The utility model provides a removal sample platform for film growth experiments, includes base (1) and sample platform (3), its characterized in that: the top of the base (1) is fixedly provided with a transverse plate (2), the inside of the sample table (3) is rotatably provided with a rotary lifting mechanism (4), and the top of the base (1) is provided with a bidirectional moving mechanism (5);

The rotary lifting mechanism (4) comprises a rotary component (41) and a lifting component (42), and the lifting component (42) is fixedly arranged at the bottom of the rotary component (41).

2. A mobile sample stage for thin film growth experiments as claimed in claim 1, wherein: the rotary component (41) comprises a shell (411), the shell (411) is rotatably arranged in the sample table (3), a disc (412) is fixedly arranged in the shell (411), a rotary block (413) is fixedly arranged at the bottom of the sample table (3), a first motor (414) is fixedly arranged in the shell (411), a gear A (415) is fixedly arranged at the output end of the first motor (414), a gear B (416) is meshed with the outer part of the gear A (415), and a rotary rod (417) is fixedly arranged at the top of the gear B (416).

3. A mobile sample stage for thin film growth experiments as claimed in claim 2, wherein: the shell (411) is rotatably mounted with the rotating block (413), a rotating shaft is fixedly mounted in the gear A (415), the rotating shaft is rotatably mounted in the rotating block (413), and the rotating rod (417) is slidably mounted in the rotating block (413).

4. A mobile sample stage for thin film growth experiments as claimed in claim 1, wherein: lifting assembly (42) are including first lift post (421), first lift post (421) fixed mounting is in the bottom of shell (411), the outside slidable mounting of first lift post (421) has second lift post (422), the outside slidable mounting of second lift post (422) has fixed column (423), gear C (424) are installed in the inside rotation of second lift post (422), the outside fixed mounting of first lift post (421) has rack A (425), the inside fixed mounting of fixed column (423) has rack B (426), the bottom fixed mounting of second lift post (422) has horizontal pole (427), the inside fixed mounting of fixed column (423) has electric telescopic handle (428).

5. The mobile sample stage for thin film growth experiments of claim 4, wherein: the output end of the electric telescopic rod (428) is fixedly arranged with the transverse rod (427), the gear C (424) is meshed with the gear 429, and the gear C (424) is meshed with the rack A (425).

6. A mobile sample stage for thin film growth experiments as claimed in claim 1, wherein: the bidirectional moving mechanism (5) comprises two rectangular blocks A (51) and rectangular blocks B (57), wherein the rectangular blocks A (51) are fixedly arranged at the top of the base (1), the rectangular blocks B (57) are fixedly arranged at the top of the base (1), a second motor (52) is fixedly arranged at the top of the base (1), a leather wheel A (53) is fixedly arranged at the output end of the second motor (52), a threaded rod A (56) is fixedly arranged on the right side of the leather wheel A (53), a belt (55) is arranged on the outer transmission of the leather wheel A (53), a leather wheel B (54) is fixedly arranged on the left side of the rectangular blocks A (51), a limiting rod (58) is fixedly arranged between the rectangular blocks B (57) and the transverse plate (2), a sliding block (59) is arranged on the outer thread of the threaded rod A (56), a third motor (510) is fixedly arranged on the front side of the sliding block (59), and a threaded rod B (511) is fixedly arranged at the output end of the third motor (510).

7. The mobile sample stage for thin film growth experiments of claim 6, wherein: the sliding block (59) is slidably mounted outside the limiting rod (58), the leather wheel B (54) is in transmission mounting with the belt (55), the threaded rod B (511) is rotatably mounted inside the sliding block (59), and the threaded rod B (511) is in threaded mounting inside the fixing column (423).