CN220819350U - Helium inspection tool for soaking plate - Google Patents
Helium inspection tool for soaking plate Download PDFInfo
- Publication number
- CN220819350U CN220819350U CN202322419098.1U CN202322419098U CN220819350U CN 220819350 U CN220819350 U CN 220819350U CN 202322419098 U CN202322419098 U CN 202322419098U CN 220819350 U CN220819350 U CN 220819350U
- Authority
- CN
- China
- Prior art keywords
- helium
- sealing
- bearing seat
- soaking plate
- sealing assembly
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Links
- 239000001307 helium Substances 0.000 title claims abstract description 52
- 229910052734 helium Inorganic materials 0.000 title claims abstract description 52
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 title claims abstract description 52
- 238000002791 soaking Methods 0.000 title claims abstract description 19
- 238000007689 inspection Methods 0.000 title claims description 7
- 238000007789 sealing Methods 0.000 claims abstract description 81
- 238000001514 detection method Methods 0.000 claims abstract description 23
- 239000007789 gas Substances 0.000 claims description 13
- 238000001819 mass spectrum Methods 0.000 abstract description 3
- 239000000110 cooling liquid Substances 0.000 description 4
- 238000001704 evaporation Methods 0.000 description 3
- 230000008020 evaporation Effects 0.000 description 3
- 238000009833 condensation Methods 0.000 description 2
- 230000005494 condensation Effects 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 239000002826 coolant Substances 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- 230000002950 deficient Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000002309 gasification Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Examining Or Testing Airtightness (AREA)
Abstract
The utility model discloses a soaking plate helium detection tool which comprises a helium mass spectrometer leak detector, a bearing seat communicated with a helium mass spectrometer leak detector pipeline, an inflatable sealing assembly arranged on one side of the bearing seat, and a lifting sealing assembly arranged opposite to the bearing seat; be provided with the work piece standing groove on the bearing seat, work piece standing groove bottom is provided with the pipeline with helium mass spectrum leak detector intercommunication, and work piece standing groove one side is provided with the passageway with work piece standing groove intercommunication, and the body on the work piece passes the passageway and inserts in the inflation seal assembly, inflation seal assembly and passageway intercommunication set up, are provided with helium inflation joint on the inflation seal assembly. According to the scheme, the helium detection tool is used for detecting the air tightness of the soaking plate, the lifting sealing assembly is used for sealing a workpiece, helium is filled into the lifting sealing assembly, the helium mass spectrometer leak detector is used for detecting the soaking plate, the detection result is accurate, and the detection efficiency is high. Meanwhile, the device has compact structure, small occupied space and flexible movement, and is matched with a walking wheel structure.
Description
Technical Field
The utility model relates to the technical field of helium inspection tools, in particular to a helium inspection tool for a soaking plate.
Background
The vapor chamber is a vacuum chamber having a fine structure on the inner wall, and is usually made of copper. When heat is conducted from a heat source to an evaporation area, the cooling liquid in the cavity starts to generate the gasification phenomenon of the cooling liquid after being heated in the environment with low vacuum degree, at the moment, the cooling liquid absorbs heat energy and rapidly expands in volume, the whole cavity is rapidly filled with gas-phase cooling medium, and the phenomenon of condensation can be generated when the gas-phase working medium contacts a relatively cold area. By releasing heat accumulated during evaporation through condensation, the condensed cooling liquid returns to the evaporation heat source through the capillary channel of the microstructure, and the operation is repeated in the cavity.
The air tightness of the cavity of the heat homogenizing plate is one of key detection indexes of the heat homogenizing plate, the air tightness is required before the heat homogenizing plate comes out of the field, the existing detection mode is mainly water detection, the air tightness is judged by whether air bubbles exist outside, but the detection mode is required to be dried subsequently, the detection steps are complicated, and the efficiency is low.
Disclosure of utility model
The utility model aims to provide a helium inspection tool for a soaking plate, which is used for solving the technical problems in the background technology.
The utility model relates to a soaking plate helium detection tool, which comprises a helium mass spectrum leak detector, a bearing seat communicated with a helium mass spectrum leak detector pipeline, an inflatable sealing assembly arranged on one side of the bearing seat, and a lifting sealing assembly arranged opposite to the bearing seat;
The helium mass spectrometer leak detector comprises a bearing seat, and is characterized in that a workpiece placing groove is formed in the bearing seat, a pipeline communicated with the helium mass spectrometer leak detector is arranged at the bottom of the workpiece placing groove, a channel communicated with the workpiece placing groove is formed in one side of the workpiece placing groove, a pipe body on a workpiece penetrates through the channel and is inserted into an inflation sealing assembly, the inflation sealing assembly is communicated with the channel, and a helium inflation connector is arranged on the inflation sealing assembly.
In a preferred embodiment, the bottom of the workpiece placement groove is provided as an inclined downward surface, and the passage is provided obliquely, and the middle axial direction is parallel to the bottom surface of the workpiece placement groove.
In a preferred embodiment, the inflation sealing assembly comprises a first air cylinder, an air guide pipe arranged on an air cylinder push rod of the first air cylinder and a sealing piece arranged at the end part of the pipe body, the pipe body on the workpiece stretches into the air guide pipe, and the helium inflation joint is arranged on the air guide pipe and communicated with the air guide pipe.
In a preferred embodiment, the sealing element comprises a sealing plug and two O-shaped sealing rings positioned at two sides of the sealing plug, clamping grooves are formed in two sides of the sealing plug, and the O-shaped sealing rings are clamped at the clamping grooves and protrude out of the clamping grooves.
In a preferred embodiment, the lifting seal assembly includes a mount, a second cylinder disposed on the mount, and a seal housing disposed on the second cylinder.
In a preferred embodiment, a sealing strip is circumferentially arranged at the cover opening of the sealing cover.
The technical scheme of the utility model has the beneficial effects that:
1. According to the scheme, the helium detection tool is used for detecting the air tightness of the soaking plate, the lifting sealing assembly is used for sealing a workpiece, helium is filled into the lifting sealing assembly, the helium mass spectrometer leak detector is used for detecting the soaking plate, the detection result is accurate, and the detection efficiency is high. Meanwhile, the device has compact structure, small occupied space and flexible movement, and is matched with a walking wheel structure.
2. The O-shaped sealing ring is extruded through the first air cylinder to realize sealing, the sealing effect is good, the O-shaped sealing ring is pushed through the air duct on one hand, the O-shaped sealing ring is air-guiding on the other hand, and the structure is ingenious.
Drawings
Figure 1 is a schematic diagram of the overall structure of the utility model,
Figure 2 is a cross-sectional view of the carrier and inflatable seal assembly of the present utility model,
Figure 3 is an enlarged view of the utility model at T at a in figure 3,
FIG. 4 is a schematic view of a lifting seal assembly according to the present utility model.
Reference numerals illustrate: the device comprises a1 helium mass spectrometer leak detector, a2 bearing seat, a 3 workpiece placing groove, a 4 pipeline, a 5 channel, a 6 first cylinder, a 7 air duct, an 8 helium gas charging connector, a 9 sealing plug, a 10O-shaped sealing ring, an 11 mounting seat, a12 second cylinder, a 13 sealing cover, a 14 sealing strip and a 15 workpiece.
Detailed Description
The utility model will be described in further detail with reference to the drawings and the detailed description. The embodiments of the present utility model have been presented for purposes of illustration and description, and are not intended to be exhaustive or limited to the utility model in the form disclosed. Many modifications and variations will be apparent to those of ordinary skill in the art. The embodiments were chosen and described in order to best explain the principles of the utility model and the practical application, and to enable others of ordinary skill in the art to understand the utility model for various embodiments with various modifications as are suited to the particular use contemplated.
As shown in fig. 1-4, the soaking plate helium detection tool according to the technical scheme of the utility model comprises a helium mass spectrometer leak detector 1, a bearing seat 2 communicated with a pipeline 4 of the helium mass spectrometer leak detector 1, an inflatable sealing assembly arranged on one side of the bearing seat 2, and a lifting sealing assembly arranged opposite to the bearing seat 2. Be provided with work piece standing groove 3 on the carrier 2, work piece standing groove 3 bottom be provided with the pipeline 4 of helium mass spectrometer leak detector 1 intercommunication, work piece standing groove 3 one side be provided with the passageway 5 of work piece standing groove 3 intercommunication, the body on the work piece 15 passes passageway 5 inserts in the inflation seal assembly, inflation seal assembly with passageway 5 intercommunication sets up, be provided with helium inflation joint 8 on the inflation seal assembly.
The workpiece 15 to be inspected is placed in the workpiece placing groove 3 on the bearing seat 2, and meanwhile, the pipe body of the workpiece 15 is inserted into the inflatable sealing assembly through the channel 5, and the joint is sealed through the inflatable sealing assembly, so that the placing work of the workpiece 15 is completed. During detection, the lifting sealing assembly descends and covers the bearing seat 2 to cover the working sealing cover 13, so that the workpiece 15 is in a sealed environment. And then vacuumizing the inside of the cover body, after the vacuum standard is reached, filling helium into the pipe body of the workpiece 15 through the inflation sealing assembly, if the tightness of the workpiece 15 is good, the helium cannot leak, the helium mass spectrometer leak detector 1 cannot detect the helium, otherwise, the helium mass spectrometer leak detector 1 can detect the helium, and the fact that the workpiece 15 has leak holes is a defective product is indicated.
According to the scheme, the helium detection tool is used for detecting the air tightness of the soaking plate, the lifting sealing assembly is used for sealing the workpiece 15, helium is filled into the lifting sealing assembly, the helium mass spectrometer leak detector 1 is used for detecting the soaking plate, the detection result is accurate, and the detection efficiency is high. Meanwhile, the device has compact structure, small occupied space and flexible movement, and is matched with a walking wheel structure.
The bottom of the workpiece placing groove 3 is arranged to be an inclined surface which is inclined downwards, the channel 5 is arranged to be inclined, and the axial direction of the channel is parallel to the bottom of the workpiece placing groove 3. The work piece standing groove 3 that the slope set up can make work piece 15 expose work piece standing groove 3, conveniently gets the piece, also conveniently inserts in the inflation seal subassembly simultaneously the body on the vapor chamber.
The gas-filled sealing assembly comprises a first cylinder 6, a gas guide pipe 7 arranged on a cylinder push rod of the first cylinder 6 and a sealing piece arranged at the end part of the pipe body, the pipe body on a workpiece 15 stretches into the gas guide pipe 7, and the helium gas-filled joint 8 is arranged on the gas guide pipe 7 and communicated with the gas guide pipe 7. The sealing member includes sealing plug 9 and is located two O type sealing washer 10 of sealing plug 9 both sides, sealing plug 9 both sides are provided with the draw-in groove, O type sealing washer 10 card is in draw-in groove department and protrusion the draw-in groove sets up. After the workpiece 15 is placed, the air cylinder push rod of the first air cylinder 6 pushes outwards, so that the air duct 7 moves to further extrude the O-shaped sealing ring 10, the O-shaped sealing ring 10 deforms, the joint is plugged, a sealing environment is formed, and double sealing can be achieved by arranging the two sealing rings.
The lifting sealing assembly comprises a mounting seat 11, a second air cylinder 12 arranged on the mounting seat 11 and a sealing cover 13 arranged on the second air cylinder 12. Sealing strips 14 are circumferentially arranged at the cover opening of the sealing cover 13. The second cylinder 12 drives the sealing cover 13 to descend and then cover the bearing seat 2, and the sealing strip 14 arranged on the sealing cover can deform after being extruded by rubber materials, so that the tightness between the sealing cover 13 and the bearing seat 2 is ensured, the workpiece 15 in the cover body is in a sealing environment, and the interference of external air to a detection result is avoided.
It will be apparent that the described embodiments are only some, but not all, embodiments of the utility model. All other embodiments, which can be made by those skilled in the art and which are included in the embodiments of the present utility model without the inventive step, are intended to be within the scope of the present utility model. Structures, devices and methods of operation not specifically described and illustrated herein, unless otherwise indicated and limited, are implemented according to conventional means in the art.
Claims (6)
1. A soaking plate helium inspection tool is characterized in that: the device comprises a helium mass spectrometer leak detector, a bearing seat communicated with a helium mass spectrometer leak detector pipeline, an inflatable sealing assembly arranged on one side of the bearing seat, and a lifting sealing assembly arranged opposite to the bearing seat;
The helium mass spectrometer leak detector comprises a bearing seat, and is characterized in that a workpiece placing groove is formed in the bearing seat, a pipeline communicated with the helium mass spectrometer leak detector is arranged at the bottom of the workpiece placing groove, a channel communicated with the workpiece placing groove is formed in one side of the workpiece placing groove, a pipe body on a workpiece penetrates through the channel and is inserted into an inflation sealing assembly, the inflation sealing assembly is communicated with the channel, and a helium inflation connector is arranged on the inflation sealing assembly.
2. The soaking plate helium detection tool according to claim 1, wherein: the groove bottom of the workpiece placing groove is arranged to be an inclined surface which is inclined downwards, the channel is arranged in an inclined mode, and the middle axial direction of the channel is parallel to the groove bottom surface of the workpiece placing groove.
3. The soaking plate helium detection tool according to claim 1, wherein: the gas-filled sealing assembly comprises a first cylinder, a gas guide pipe arranged on a cylinder push rod of the first cylinder and a sealing piece arranged at the end part of the pipe body, the pipe body on the workpiece stretches into the gas guide pipe, and the helium gas-filled joint is arranged on the gas guide pipe and is communicated with the gas guide pipe.
4. A soaking plate helium inspection tool according to claim 3, wherein: the sealing member includes the sealing plug and is located two O type sealing washer of sealing plug both sides, the sealing plug both sides are provided with the draw-in groove, O type sealing washer card is in draw-in groove department and protrusion the draw-in groove sets up.
5. The soaking plate helium detection tool according to claim 1, wherein: the lifting sealing assembly comprises a mounting seat, a second air cylinder arranged on the mounting seat and a sealing cover arranged on the second air cylinder.
6. The soaking plate helium detection tool according to claim 5, wherein: sealing strips are circumferentially arranged at the cover opening of the sealing cover.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202322419098.1U CN220819350U (en) | 2023-09-06 | 2023-09-06 | Helium inspection tool for soaking plate |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202322419098.1U CN220819350U (en) | 2023-09-06 | 2023-09-06 | Helium inspection tool for soaking plate |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN220819350U true CN220819350U (en) | 2024-04-19 |
Family
ID=90708622
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202322419098.1U Active CN220819350U (en) | 2023-09-06 | 2023-09-06 | Helium inspection tool for soaking plate |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN220819350U (en) |
-
2023
- 2023-09-06 CN CN202322419098.1U patent/CN220819350U/en active Active
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