CN220818289U

CN220818289U - Silicon wafer flower basket microwave drying equipment

Info

Publication number: CN220818289U
Application number: CN202322659150.0U
Authority: CN
Inventors: 朱守权
Original assignee: Yangzhou Quanneng Photovoltaic Technology Co ltd
Current assignee: Yangzhou Quanneng Photovoltaic Technology Co ltd
Priority date: 2023-09-30
Filing date: 2023-09-30
Publication date: 2024-04-19
Anticipated expiration: 2033-09-30

Abstract

The utility model discloses a silicon wafer flower basket microwave drying device, which comprises a table plate, wherein a plurality of supporting legs are fixedly arranged on the bottom surface of the table plate, and a mounting plate is fixedly arranged on the top surface of the table plate. This silicon chip basket microwave drying equipment, through the conveying mechanism who sets up, can carry out quick reloading, place the silicon chip in the inside of silicon chip basket body, then start at uniform velocity motor drive driving shaft and drive the inside that the silicon chip basket body made the silicon chip enter into the stoving case through the conveyer belt then close at uniform velocity motor, let the stoving case dry it, conveyer belt also can stop carrying when closing at uniform velocity motor, at this moment can empty silicon chip basket body pack, after the silicon chip stoving is accomplished, restart at uniform velocity motor drives the silicon chip basket body and brings out the silicon chip that the stoving is good, can carry the inside to the stoving case with next group of silicon chip basket body simultaneously, do not need to take out the back and carry out reloading, the drying efficiency of equipment has been improved.

Description

Silicon wafer flower basket microwave drying equipment

Technical Field

The utility model relates to the technical field of silicon wafer production, in particular to a silicon wafer basket microwave drying device.

Background

The last step of cleaning the silicon wafer is drying of the silicon wafer, wherein the drying is caused by preventing the silicon wafer from recontamination and marking on the surface of the silicon wafer, and the microwave drying equipment is high-efficiency, energy-saving and pollution-free drying equipment used for drying silicon-based materials such as the silicon wafer, the solar cell and the like. The device adopts a microwave heating technology, and can evaporate moisture in the material in a very short time, thereby realizing a rapid drying effect. Chinese patent CN215892967U discloses a microwave-based silicon wafer drying apparatus, the microwave generating device generates microwaves in the drying space, the upper air inlet device provides air for the drying space, the bottom air outlet device extracts air from the drying space, the beneficial effects of the utility model are: and by utilizing microwave drying, high drying efficiency is provided, so that the productivity is improved, the electric energy consumption is reduced, the cleanliness is high, and the pollution risk of the silicon wafer is reduced. However, the device is not provided with a conveying device, when the drying space is opened after drying, the silicon wafers are reloaded through the mechanical arm, so that the reloading is time-consuming, the production efficiency is low, and the practicability is general.

Disclosure of utility model

Aiming at the defects of the prior art, the utility model provides a microwave drying device for a silicon wafer flower basket, which solves the problems that the production efficiency is low because the silicon wafer is replaced by a mechanical arm after drying and a drying space is opened again, and the time is wasted in replacement.

In order to achieve the above purpose, the utility model is realized by the following technical scheme: the utility model provides a silicon chip basket of flowers microwave drying equipment, includes the table, the bottom surface fixed mounting of table has a plurality of supporting legs, the top surface fixed mounting of table has the mounting panel, the top surface fixed mounting of mounting panel has the stoving case, one side fixed mounting of stoving case has the microwave generation controller, the top surface of mounting panel is provided with conveying mechanism, the top surface fixed mounting of stoving case has the outlet duct, the inboard movable mounting of outlet duct has the air discharge fan, the top fixed mounting of outlet duct has the filter screen, the equal fixed mounting in both sides of stoving case inner chamber has the mounting bracket, a plurality of holes have evenly been seted up to one side of mounting bracket, a plurality of equal fixed mounting in inside of hole has the magnetron, the both sides of stoving case all are provided with sealing mechanism.

Preferably, the conveying mechanism comprises two fixing plates arranged on the top surface of the mounting plate, two driving shafts are movably arranged on opposite sides of the fixing plates, a plurality of driven shafts are movably arranged on opposite sides of the fixing plates, a conveying belt is movably arranged on the outer side of the driving shafts, a plurality of mounting blocks are fixedly arranged on the outer side of the conveying belt, a plurality of silicon wafer flower basket bodies are fixedly arranged on the top surfaces of the mounting blocks, a uniform motor is fixedly arranged on one side of the top surface of the mounting plate, and two clamping grooves are formed in the top surfaces of the two fixing plates.

Preferably, two ends of the driving shaft are respectively supported on the two fixing plates, one end of the driving shaft extends out of the fixing plates and then is connected with an output shaft of the constant-speed motor, a plurality of driven shafts are linearly and uniformly distributed on opposite sides of the two fixing plates, and the outer sides of the driven shafts are attached to the inner sides of the conveying belt.

Preferably, the sealing mechanism comprises a notch formed in two sides of the drying box, a sealing plate is movably mounted in the notch, sliding grooves are formed in opposite sides of the notch, sliding blocks are fixedly mounted at two ends of the sealing plate, clamping plates are fixedly mounted at two ends of the sealing plate, a top plate is fixedly mounted at the top end of the sealing plate, and a handle is fixedly mounted on the top surface of the top plate.

Preferably, the outer side of the sliding block is slidingly installed inside the sliding groove.

Preferably, the input end of the magnetron is electrically connected with the output end of the microwave generation controller.

Advantageous effects

The utility model provides a microwave drying device for a silicon wafer flower basket. Compared with the prior art, the method has the following beneficial effects:

(1) This silicon chip basket microwave drying equipment, can carry out quick reloading to the silicon chip, place the inside at the silicon chip basket body with the silicon chip, then start at uniform velocity motor drive driving shaft and drive the inside that the silicon chip basket body made the silicon chip enter into the stoving case through the conveyer belt then close at uniform velocity motor, make the silicon chip dry in the inside of stoving case, stability when the driven shaft has increased the conveyer belt and has carried simultaneously avoids the silicon chip basket body to produce and rocks, the conveyer belt also can stop carrying when closing at uniform velocity motor, at this moment can empty silicon chip basket body pack, after the inside stoving of stoving case is accomplished, can carry the inside of stoving case with next group silicon chip basket body with the silicon chip basket body that will dry when restarting at uniform velocity motor drive the silicon chip basket body, need not take out the back again carry out and reload and stoving, save time, the drying efficiency of equipment has been improved.

(2) This silicon chip basket of flowers microwave drying equipment, through the sealing mechanism who sets up, be convenient for carry the silicon chip to the inside of stoving case through conveying mechanism, stoving case can carry out the stoving processing to it under confined state, alright hold the handle and pull up the closing plate through the slider when the stoving is accomplished and is needed carrying the silicon chip, alright start at the uniform velocity motor and carry the silicon chip afterwards, then put down the closing plate again, the inside that the draw-in groove can be blocked into to the cardboard simultaneously avoids the equipment to open at the closing plate when stoving in-process, convenient to use, practical function is good.

Drawings

FIG. 1 is a schematic view showing a side view and three-dimensional appearance structure of the present utility model,

FIG. 2 is a schematic side view in perspective and cross-sectional view of the present utility model,

FIG. 3 is a schematic top perspective sectional view of the present utility model,

Fig. 4 is an enlarged schematic view of the structure of fig. 3 a according to the present utility model.

In the figure: the microwave oven comprises a table plate, a 2-mounting plate, a 3-supporting leg, a 4-drying box, a 5-microwave generation controller, a 6-conveying mechanism, a 61-fixing plate, a 62-conveying belt, a 63-uniform motor, a 64-silicon wafer basket body, a 65-mounting block, a 66-clamping groove, a 67-driving shaft, a 68-driven shaft, a 7-sealing mechanism, a 71-sealing plate, a 72-sliding block, a 73-top plate, a 74-handle, a 75-clamping plate, a 76-notch, a 77-sliding groove, an 8-air outlet pipe, a 9-filter screen, a 10-exhaust fan, an 11-mounting frame, a 12-hole and a 13-magnetron.

Detailed Description

The following description of the embodiments of the present utility model will be made clearly and fully with reference to the accompanying drawings, in which it is evident that the embodiments described are only some, but not all embodiments of the utility model. All other embodiments, which can be made by those skilled in the art based on the embodiments of the utility model without making any inventive effort, are intended to be within the scope of the utility model.

As shown in fig. 1 to 4, the utility model discloses a silicon wafer flower basket microwave drying device, which comprises a table plate 1, wherein six supporting legs 3 are fixedly arranged on the bottom surface of the table plate 1, a mounting plate 2 is fixedly arranged on the top surface of the table plate 1, a drying box 4 is fixedly arranged on the top surface of the mounting plate 2, and a microwave generation controller 5 is fixedly arranged on one side of the drying box 4. The top surface of mounting panel 2 is provided with conveying mechanism 6, and the top surface fixed mounting of stoving case 4 has outlet duct 8, and the inboard movable mounting of outlet duct 8 has air discharge fan 10, and the top fixed mounting of outlet duct 8 has filter screen 9. The both sides of stoving case 4 inner chamber are all fixed mounting has mounting bracket 11, and a plurality of holes 12 have evenly been seted up to one side of mounting bracket 11, and the inside of a plurality of holes 12 is all fixed mounting has magnetron 13, and magnetron 13's input and microwave generation controller 5's output electric connection.

The both sides of stoving case 4 all are provided with sealing mechanism 7, conveying mechanism 6 is including installing two fixed plates 61 at mounting panel 2 top surface, two driving shafts 67 are installed to the opposite side movable mounting of two fixed plates 61, a plurality of driven shafts 68 are installed to the opposite side movable mounting of two fixed plates 61, the outside movable mounting of two driving shafts 67 has conveyer belt 62, the outside fixed mounting of conveyer belt 62 has a plurality of installation pieces 65, the equal fixed mounting of top surface of a plurality of installation pieces 65 has silicon chip basket body 64, one side fixed mounting of mounting panel 2 top surface has uniform velocity motor 63, two draw-in grooves 66 have all been seted up to the top surface of two fixed plates 61, the both ends of driving shaft 67 are supported respectively on two fixed plates 61, after stretching out fixed plate 61 with uniform motor 63's output shaft, a plurality of driven shafts 68 are linear evenly distributed in the opposite side of two fixed plates 61, the outside of a plurality of driven shafts 68 pastes the inboard at conveyer belt 62.

Through the conveying mechanism 6 that sets up, can carry out quick reloading to the silicon chip, place the inside at silicon chip basket body 64 with the silicon chip, then start up at the uniform velocity motor 63 and drive driving shaft 67 and drive silicon chip basket body 64 through conveyer belt 62 and make the silicon chip enter into the inside of stoving case 4 then close at the uniform velocity motor 63, make the silicon chip dry in the inside of stoving case 4, stability when the driven shaft 68 has increased conveyer belt 62 and has carried avoids silicon chip basket body 64 to produce rocking, conveyer belt 62 also can stop carrying when closing at the uniform velocity motor 63, at this moment can pack empty silicon chip basket body 64, after the inside stoving of stoving case 4 is accomplished, the time is saved again to the time of carrying out again and carrying next group's silicon chip basket body 64 to the inside of stoving case 4 when the stoving case 4 is carried out to the silicon chip basket body 64 again.

The sealing mechanism 7 comprises a notch 76 arranged at two sides of the drying box 4, a sealing plate 71 is movably arranged in the notch 76, sliding grooves 77 are respectively arranged at the opposite sides of the notch 76, sliding blocks 72 are respectively and fixedly arranged at two ends of the sealing plate 71, clamping plates 75 are respectively and fixedly arranged at the bottom ends of the two sides of the sealing plate 71, a top plate 73 is fixedly arranged at the top end of the sealing plate 71, a handle 74 is fixedly arranged at the top surface of the top plate 73, the outer sides of the sliding blocks 72 are slidably arranged in the sliding grooves 77,

Through the sealing mechanism 7 who sets up, be convenient for carry the silicon chip to the inside of stoving case 4 through conveying mechanism 6, stoving case 4 can carry out the stoving processing to it under confined state, alright hold handle 74 and pull up closing plate 71 through slider 72 when the stoving is accomplished and is carried the silicon chip, then alright start at uniform velocity motor 63 and carry the silicon chip, then put down closing plate 71 again, simultaneously cardboard 75 can block into the inside of draw-in groove 66 and avoid equipment to open when the stoving in-process closing plate 71, convenient to use, practical function is good.

Meanwhile, the contents which are not described in detail in the specification belong to the prior art known to the person skilled in the art, and model parameters of each electric appliance are not particularly limited and conventional equipment can be used.

When the device is used, a user connects electricity to the device, then places a silicon wafer in the silicon wafer basket body 64, holds the handle 74 and pulls up the sealing plate 71 through the sliding block 72, then starts the constant-speed motor 63 to drive the driving shaft 67 to drive the silicon wafer basket body 64 through the conveying belt 62 so that the silicon wafer enters the drying box 4, then puts down the sealing plate 71, simultaneously the clamping plate 75 is clamped into the clamping groove 66, then controls the magnetron 13 to generate microwave action to heat water molecules in the silicon wafer through the microwave generation controller 5 so as to evaporate the water molecules, then starts the exhaust fan 10 to discharge water vapor in the drying process out of the device through the air outlet pipe 8, and can fill the empty silicon wafer basket body 64 in the drying process, after the drying is completed, the constant-speed motor 63 is started to drive the silicon wafer basket body 64 to take the dried silicon wafer out of the drying box 4, and meanwhile, the next group of silicon wafer basket bodies 64 are conveyed into the drying box 4 to be dried, so that the drying efficiency of the device is improved.

It is noted that relational terms such as first and second, and the like are used solely to distinguish one entity or action from another entity or action without necessarily requiring or implying any actual such relationship or order between such entities or actions. Moreover, the terms "comprises," "comprising," or any other variation thereof, are intended to cover a non-exclusive inclusion, such that a process-method-article or apparatus that comprises a list of elements does not include only those elements but may include other elements not expressly listed or inherent to such process-method-article or apparatus.

Although embodiments of the present utility model have been shown and described, it will be understood by those skilled in the art that various changes-modifications-substitutions and alterations can be made to these embodiments without departing from the principles and spirit of the utility model, the scope of which is defined in the appended claims and their equivalents.

Claims

1. The utility model provides a silicon chip basket of flowers microwave drying equipment, includes table (1), the bottom surface fixed mounting of table (1) has a plurality of supporting legs (3), its characterized in that: the top surface of the table plate (1) is fixedly provided with a mounting plate (2), the top surface of the mounting plate (2) is fixedly provided with a drying box (4), and one side of the drying box (4) is fixedly provided with a microwave generation controller (5); the top surface of mounting panel (2) is provided with conveying mechanism (6), the top surface fixed mounting of stoving case (4) has outlet duct (8), the inboard movable mounting of outlet duct (8) has air discharge fan (10), the top fixed mounting of outlet duct (8) has filter screen (9), the equal fixed mounting in both sides of stoving case (4) inner chamber has mounting bracket (11), a plurality of holes (12) have evenly been seted up to one side of mounting bracket (11), a plurality of the equal fixed mounting in inside of hole (12) has magnetron (13), the both sides of stoving case (4) all are provided with sealing mechanism (7).

2. The silicon wafer flower basket microwave drying device according to claim 1, wherein: conveying mechanism (6) are including installing two fixed plates (61) at mounting panel (2) top surface, two opposite side movable mounting of fixed plate (61) has two driving shafts (67), two opposite side movable mounting of fixed plate (61) has a plurality of driven shafts (68), two the outside movable mounting of driving shaft (67) has conveyer belt (62), the outside fixed mounting of conveyer belt (62) has a plurality of installation piece (65), a plurality of the equal fixed mounting of top surface of installation piece (65) has silicon chip basket of flowers body (64), one side fixed mounting of mounting panel (2) top surface has uniform velocity motor (63), two draw-in grooves (66) have all been seted up to the top surface of fixed plate (61).

3. The silicon wafer flower basket microwave drying device according to claim 2, wherein: two ends of the driving shaft (67) are respectively supported on the two fixing plates (61), one end of the driving shaft (67) extends out of the fixing plates (61) and then is connected with an output shaft of the constant-speed motor (63), a plurality of driven shafts (68) are linearly and uniformly distributed on opposite sides of the two fixing plates (61), and the outer sides of the driven shafts (68) are attached to the inner sides of the conveying belt (62).

4. The silicon wafer flower basket microwave drying device according to claim 1, wherein: sealing mechanism (7) are including seting up notch (76) in stoving case (4) both sides, inside movable mounting of notch (76) has closing plate (71), spout (77) have all been seted up to the opposite side of notch (76), slider (72) are all fixed mounting in both ends of closing plate (71), cardboard (75) are all fixed mounting in the bottom of closing plate (71) both sides, the top fixed mounting of closing plate (71) has roof (73), the top surface fixed mounting of roof (73) has handle (74).

5. The silicon wafer flower basket microwave drying device according to claim 4, wherein: the outer side of the sliding block (72) is slidably arranged in the sliding groove (77).

6. The silicon wafer flower basket microwave drying device according to claim 1, wherein: the input end of the magnetron (13) is electrically connected with the output end of the microwave generation controller (5).