CN220817448U - Water vapor supplementing device for vacuum cavity - Google Patents
Water vapor supplementing device for vacuum cavity Download PDFInfo
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- CN220817448U CN220817448U CN202322358036.4U CN202322358036U CN220817448U CN 220817448 U CN220817448 U CN 220817448U CN 202322358036 U CN202322358036 U CN 202322358036U CN 220817448 U CN220817448 U CN 220817448U
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- water vapor
- pipeline
- vacuum
- water
- storage tank
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- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Chemical compound O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 title claims abstract description 194
- 230000001502 supplementing effect Effects 0.000 title claims abstract description 30
- 230000007246 mechanism Effects 0.000 claims abstract description 65
- 238000003860 storage Methods 0.000 claims abstract description 52
- 238000004140 cleaning Methods 0.000 claims abstract description 21
- 238000010407 vacuum cleaning Methods 0.000 claims abstract description 16
- 239000003507 refrigerant Substances 0.000 claims description 54
- 238000012544 monitoring process Methods 0.000 claims description 4
- 230000000153 supplemental effect Effects 0.000 claims 6
- 239000007789 gas Substances 0.000 description 25
- 230000001276 controlling effect Effects 0.000 description 6
- 238000009413 insulation Methods 0.000 description 6
- 230000008020 evaporation Effects 0.000 description 3
- 238000001704 evaporation Methods 0.000 description 3
- 239000012535 impurity Substances 0.000 description 3
- 238000010926 purge Methods 0.000 description 3
- 238000000859 sublimation Methods 0.000 description 3
- 230000008022 sublimation Effects 0.000 description 3
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 2
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- 230000003749 cleanliness Effects 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000001105 regulatory effect Effects 0.000 description 2
- 239000013589 supplement Substances 0.000 description 2
- 229910052786 argon Inorganic materials 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
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- Cleaning By Liquid Or Steam (AREA)
Abstract
The utility model relates to the technical field of vacuum cavity water supplementing, in particular to a vacuum cavity water vapor supplementing device which comprises a vacuum cavity and a water vapor supplementing device, wherein the water vapor supplementing device is communicated with the vacuum cavity through a pipeline and conveys water vapor to the vacuum cavity, the water vapor supplementing device comprises a water tank, a vacuumizing mechanism, a vacuum cleaning mechanism, a water vapor generating mechanism and a water vapor conveying mechanism, the vacuumizing mechanism, the vacuum cleaning mechanism, the water vapor generating mechanism and the water vapor conveying mechanism are all communicated with the water tank, and the water tank is communicated with the vacuum cavity through the water vapor conveying mechanism. The water vapor supplementing device has a simple structure and is convenient to use, water vapor can be supplemented to the vacuum cavity, and cleaning gas is introduced through the arrangement of the vacuum cleaning mechanism, so that the miscellaneous gas in the water storage tank, especially the miscellaneous gas dissolved in water, can be removed, and the cleaning degree of the water vapor is greatly improved.
Description
Technical Field
The utility model relates to the technical field of vacuum cavity water supplementing, in particular to a vacuum cavity water vapor supplementing device.
Background
Production line PVD/CVD or other vacuum equipment requires the quantity of moisture, and in most cases, the vacuum chamber needs to be replenished with moisture. At present, the water storage container is directly vacuumized through a vacuum cavity, and water vapor naturally evaporates into the cavity through vacuum low pressure. However, the water vapor in the prior proposal is difficult to naturally evaporate into the cavity; the quantity of the entered water vapor cannot be quantitatively evaluated; the water vapor entering the cavity cannot ensure whether the cavity is clean.
Disclosure of utility model
Aiming at the defects in the prior art, the utility model aims to provide the vacuum cavity water vapor supplementing device which is simple in structure and convenient to use, is used for supplementing water vapor for the vacuum cavity and meets the requirements of the vacuum cavity.
In order to achieve the above purpose, the technical scheme of the utility model is as follows: the utility model provides a vacuum cavity steam supplementing device, includes vacuum cavity and steam supplementing device, steam supplementing device passes through pipeline and vacuum cavity intercommunication and carries steam to the vacuum cavity, and steam supplementing device includes water pitcher, evacuation mechanism, vacuum cleaning mechanism, steam generation mechanism and steam conveying mechanism, evacuation mechanism, vacuum cleaning mechanism, steam generation mechanism, steam conveying mechanism all communicate with the water pitcher, and the water pitcher passes through steam conveying mechanism and vacuum cavity intercommunication.
Further, the water tank comprises an inner water storage tank, an outer vacuum heat insulation layer and a cover body, wherein the outer vacuum heat insulation layer is coated in the inner water storage tank, the cover body is positioned above to seal the water tank, and the vacuumizing mechanism, the vacuum cleaning mechanism, the water vapor generating mechanism and the water vapor conveying mechanism are communicated with the inner water storage tank through the cover body.
Further, the vacuumizing mechanism comprises a vacuum pump, a first pipeline and a vacuum angle valve, one end of the first pipeline is positioned in the inner water storage tank, the other end of the first pipeline is positioned outside the inner water storage tank and communicated with the vacuum pump, and the vacuum angle valve is arranged on the first pipeline to control the on-off of the first pipeline.
Further, the water vapor supplementing device further comprises a film gauge, wherein the film gauge is positioned above the cover body of the water tank and is communicated with the inner-layer water storage tank to monitor the vacuum in the tank.
Further, the vacuum cleaning mechanism comprises a cleaning gas source, a second pipeline and a cleaning gas valve, one end of the second pipeline is communicated with the inner-layer water storage tank, the other end of the second pipeline is communicated with the cleaning gas source, and the cleaning gas valve is arranged on the second pipeline to control on-off of the pipeline.
Further, the water vapor generating mechanism comprises a refrigerant and a refrigerant pipeline, the refrigerant pipeline comprises a refrigerant inlet pipe, a refrigerant working pipe and a refrigerant outlet pipe, the refrigerant working pipe is vertically arranged in the inner water storage tank in a spiral shape, one end of the refrigerant inlet pipe is positioned outside the water storage tank and used for introducing the refrigerant, the other end of the refrigerant inlet pipe penetrates through the cover body to be communicated with the bottom of the refrigerant working pipe, the refrigerant outlet pipe is communicated with the top of the refrigerant working pipe, and the other end of the refrigerant outlet pipe penetrates out of the cover body.
Further, the steam conveying mechanism comprises a third pipeline and a needle valve, one end of the third pipeline is inserted into the inner water storage tank and is positioned above the water level in the inner water storage tank, the other end of the third pipeline is inserted into the vacuum cavity, and the needle valve is arranged on the third pipeline to control the on-off of the pipeline.
Further, the water vapor conveying mechanism further comprises a mass flowmeter, the mass flowmeter is installed at the outlet of the third pipeline and used for monitoring water vapor entering the vacuum cavity from the water tank, the needle valve is opened, and the water vapor in the inner-layer water storage tank enters the vacuum cavity through the third pipeline.
The technical scheme of the utility model has the advantages that:
according to the utility model, by introducing the cleaning gas, the miscellaneous gas in the water storage tank, especially the miscellaneous gas dissolved in the water, can be removed, so that the water vapor cleanliness is greatly improved; the generation of water vapor is actively controlled by controlling the temperature of the refrigerant, and the speed of water vapor supplement is regulated by controlling the pressure difference between the two vacuum cavities of the inner water storage tank and the inner water storage tank; the whole system is measured at a plurality of positions, and the amount of water vapor entering can be directly calculated through mathematical means.
Drawings
In order to more clearly illustrate the utility model or the technical solutions of the prior art, the drawings which are used in the description of the embodiments or the prior art will be briefly described, it being obvious that the drawings in the description below are only of the utility model and that other drawings can be obtained from them without inventive effort for a person skilled in the art.
FIG. 1 is a schematic view of a vacuum chamber water vapor replenishment apparatus of the present utility model;
FIG. 2 is a schematic diagram of a water vapor replenishment device according to the present utility model;
fig. 3 is a partial schematic view of a water vapor replenishment device of the present utility model.
The labels in the above figures are respectively: 1. a vacuum chamber; 2. a water tank; 21. an inner layer water storage tank; 22. an outer vacuum insulation layer; 23. a cover body; 31. a vacuum pump; 32. a first pipe; 33. a vacuum angle valve; 4. bao Mogui; 51. a source of purge gas; 52. a second pipe; 53. a purge gas valve; 61. a refrigerant pipe; 62. a refrigerant inlet pipe; 63. a refrigerant working tube; 64. a refrigerant outlet pipe; 71. a third conduit; 72. a needle valve; 73. a mass flowmeter.
Detailed Description
The present utility model will be further described in detail with reference to specific embodiments in order to make the objects, technical solutions and advantages of the present utility model more apparent.
It is to be noted that unless otherwise defined, technical or scientific terms used herein should be taken in a general sense as understood by one of ordinary skill in the art to which the present utility model belongs. The terms "first," "second," and the like, as used herein, do not denote any order, quantity, or importance, but rather are used to distinguish one element from another. The word "comprising" or "comprises", and the like, means that elements or items preceding the word are included in the element or item listed after the word and equivalents thereof, but does not exclude other elements or items. The terms "connected" or "connected," and the like, are not limited to physical or mechanical connections, but may include electrical connections, whether direct or indirect. "upper", "lower", "left", "right", etc. are used merely to indicate relative positional relationships, which may also be changed when the absolute position of the object to be described is changed.
As shown in fig. 1 to 3, a vacuum cavity water vapor supplementing device comprises a vacuum cavity 1 and a water vapor supplementing device, wherein the water vapor supplementing device is communicated with the vacuum cavity 1 through a pipeline and conveys water vapor to the vacuum cavity 1, the water vapor supplementing device comprises a water tank 2, a vacuumizing mechanism, a vacuum cleaning mechanism, a water vapor generating mechanism and a water vapor conveying mechanism, the vacuumizing mechanism, the vacuum cleaning mechanism, the water vapor generating mechanism and the water vapor conveying mechanism are all communicated with the water tank 2, and the water tank 2 is communicated with the vacuum cavity 1 through the water vapor conveying mechanism. The water vapor supplementing device has a simple structure and is convenient to use, water vapor can be supplemented to the vacuum cavity, and cleaning gas is introduced through the arrangement of the vacuum cleaning mechanism, so that the miscellaneous gas in the water storage tank, especially the miscellaneous gas dissolved in water, can be removed, and the cleaning degree of the water vapor is greatly improved.
The water tank 2 comprises an inner water storage tank 21, an outer vacuum heat insulation layer 22 and a cover body 23, wherein the outer vacuum heat insulation layer 22 is coated in the inner water storage tank 21, the cover body 23 is positioned above to seal the water tank, and the vacuumizing mechanism, the vacuum cleaning mechanism, the water vapor generating mechanism and the water vapor conveying mechanism are communicated with the inner water storage tank 21 through the cover body 23. The cover body 23 is used for sealing the water tank, and the outer vacuum heat insulation layer 22 is used for preserving heat and guaranteeing the temperature in the inner water storage tank 21.
The vacuumizing mechanism comprises a vacuum pump 31, a first pipeline 32 and a vacuum angle valve 33, one end of the first pipeline 32 is positioned in the inner water storage tank 21, the other end of the first pipeline 32 is positioned outside the inner water storage tank 21 and is communicated with the vacuum pump 31, and the vacuum angle valve 33 is arranged on the first pipeline 32 to control the on-off of the first pipeline 32. The vacuum pump 31 vacuums the inner tank 21 through the first pipe 32 by opening the vacuum angle valve 33.
The water vapor supplementing device further comprises a film gauge 4, wherein the film gauge 4 is positioned above the cover body 23 of the water tank 2, and the film gauge 4 is communicated with the inner water storage tank 21 and used for monitoring vacuum in the tank.
The vacuum cleaning mechanism comprises a cleaning gas source 51, a second pipeline 52 and a cleaning gas valve 53, one end of the second pipeline 52 is communicated with the inner water storage tank 21, the other end of the second pipeline 52 is communicated with the cleaning gas source 51, and the cleaning gas valve 53 is arranged on the second pipeline 52 to control on-off of the pipeline. The purge gas valve 53 is opened to charge the inside of the inner water storage tank 21.
The water vapor generating mechanism comprises a refrigerant and a refrigerant pipeline 61, the refrigerant pipeline 61 comprises a refrigerant inlet pipe 62, a refrigerant working pipe 63 and a refrigerant outlet pipe 64, the refrigerant working pipe 63 is vertically arranged in the inner water storage tank 21 in a spiral shape, one end of the refrigerant inlet pipe 62 is positioned outside the water tank 2 and used for introducing the refrigerant, the other end of the refrigerant inlet pipe 62 penetrates through the cover body 23 to be communicated with the bottom of the refrigerant working pipe 63, the refrigerant outlet pipe 64 is communicated with the top of the refrigerant working pipe 63, and the other end of the refrigerant outlet pipe 64 penetrates out of the cover body 23. The refrigerant is introduced into the inner water storage tank 21 to cool the water in the inner water storage tank 21, and the evaporation/sublimation speed of the water/ice in the inner water storage tank can be controlled by adjusting the temperature of the refrigerant; the refrigerant is typically ice.
The water vapor conveying mechanism comprises a third pipeline 71 and a needle valve 72, one end of the third pipeline 71 is inserted into the inner water storage tank 21 and is positioned above the water level in the inner water storage tank 21, the other end of the third pipeline 71 is inserted into the vacuum cavity 1, and the needle valve 72 is arranged on the third pipeline 71 to control the on-off of the pipeline.
The water vapor conveying mechanism further comprises a mass flowmeter 73, wherein the mass flowmeter 73 is arranged at the outlet of the third pipeline 71 to monitor water vapor entering the vacuum cavity 1 from the water tank 2, the needle valve 72 is opened, and the water vapor in the inner water storage tank 21 enters the vacuum cavity 1 through the third pipeline 71.
The working process of the vacuum cavity water vapor supplementing device comprises the following steps:
The water tank is vacuumized through the vacuum pump, the impurity gas in the inner water storage tank and the dissolved impurity gas in the water are pumped away, and the vacuum in the inner water storage tank is monitored by the film gauge. When the vacuum degree reaches a certain degree, closing the vacuum angle valve; opening a cleaning gas valve, inflating the inner layer water storage tank, closing the cleaning gas valve to a certain extent, continuously vacuumizing, and repeating for a plurality of times to ensure that no impurity gas irrelevant to the vacuum cavity exists in the tank; and (3) cooling the water tank to-60 ℃ by starting to fill refrigerant, continuously vacuumizing by a vacuum pump until the pressure is lower than 1pa, and closing the vacuum angle valve.
Opening a needle valve to start supplementing water vapor into the vacuum cavity 1, and monitoring the water vapor entering the vacuum cavity by a mass flowmeter between a water vapor outlet and the vacuum cavity to measure the flow of the water vapor entering the vacuum cavity; at the moment, the evaporation (sublimation) speed of water (ice) in the tank can be controlled by adjusting the temperature (-60 ℃ to 100 ℃) of the refrigerant, at the moment, the pressure in the vacuum tank starts to increase, the evaporation speed of water is faster when the temperature of the refrigerant is higher, the flow rate of water vapor entering the vacuum cavity is larger when the pressure in the tank is higher, and meanwhile, the conductance of the water vapor outlet can be changed by adjusting the needle valve, so that the flow rate of the water vapor is finely adjusted.
Specific: 1. the mechanical pump directly pumps water into a water tank, water is boiled and frozen, argon is used for cleaning, oxygen, nitrogen and the like dissolved in the water are firstly pumped out, and the water is completely converted into ice by matching with a temperature control system (-60 ℃), and the vacuum degree is less than 1pa at the moment; 2. closing the vacuum pump and the valve, keeping the vacuum in the tank, and slowly raising the temperature and the pressure in the tank; 3. the sublimation speed of ice is influenced by controlling the temperature in the tank, the pressure in the tank is controlled, and water vapor is sent into the PVD cavity by controlling the pressure difference between the water tank and the PVD cavity, so that the water content in the cavity is controlled.
According to the utility model, by introducing the cleaning gas, the miscellaneous gas in the water storage tank, especially the miscellaneous gas dissolved in the water, can be removed, so that the water vapor cleanliness is greatly improved; the generation of water vapor is actively controlled by controlling the temperature of the refrigerant, and the speed of water vapor supplement is regulated by controlling the pressure difference between the two vacuum cavities of the inner water storage tank and the inner water storage tank; the whole system is measured at a plurality of positions, and the amount of water vapor entering can be directly calculated through mathematical means.
Those of ordinary skill in the art will appreciate that: the discussion of any of the embodiments above is merely exemplary and is not intended to suggest that the scope of the utility model (including the claims) is limited to these examples; the technical features of the above embodiments or in the different embodiments may also be combined within the idea of the utility model, the steps may be implemented in any order and there are many other variations of the different aspects of the utility model as described above, which are not provided in detail for the sake of brevity.
The present utility model is intended to embrace all such alternatives, modifications and variances which fall within the broad scope of the appended claims. Therefore, any omission, modification, equivalent replacement, improvement, etc. of the present utility model should be included in the scope of the present utility model.
Claims (8)
1. A vacuum cavity water vapor supplementing device is characterized in that: including vacuum cavity (1) and steam supplementing device, steam supplementing device passes through pipeline and vacuum cavity (1) intercommunication and carries steam to vacuum cavity (1), and steam supplementing device includes water pitcher (2), evacuation mechanism, vacuum cleaning mechanism, steam generation mechanism and steam conveying mechanism, and evacuation mechanism, vacuum cleaning mechanism, steam generation mechanism, steam conveying mechanism all communicate with water pitcher (2), and water pitcher (2) are through steam conveying mechanism and vacuum cavity (1) intercommunication.
2. A vacuum chamber water vapor supplemental apparatus as in claim 1, wherein: the water tank (2) comprises an inner-layer water storage tank (21), an outer-layer vacuum heat-insulating layer (22) and a cover body (23), wherein the outer-layer vacuum heat-insulating layer (22) is coated in the inner-layer water storage tank (21), the cover body (23) is positioned above to seal the water tank, and the vacuumizing mechanism, the vacuum cleaning mechanism, the water vapor generating mechanism and the water vapor conveying mechanism are communicated with the inner-layer water storage tank (21) through the cover body (23).
3. A vacuum chamber water vapor supplemental apparatus as in claim 2, wherein: the vacuumizing mechanism comprises a vacuum pump (31), a first pipeline (32) and a vacuum angle valve (33), one end of the first pipeline (32) is located in the inner-layer water storage tank (21), the other end of the first pipeline (32) is located outside the inner-layer water storage tank (21) and is communicated with the vacuum pump (31), and the vacuum angle valve (33) is installed on the first pipeline (32) to control on-off of the first pipeline (32).
4. A vacuum chamber water vapor supplemental device as in claim 3, wherein: the water vapor supplementing device further comprises a film gauge (4), the film gauge (4) is located above the cover body (23) of the water tank (2), and the film gauge (4) is communicated with the inner water storage tank (21) and used for monitoring vacuum in the tank.
5. A vacuum chamber water vapor replenishment apparatus as defined in claim 3 or 4 wherein: the vacuum cleaning mechanism comprises a cleaning gas source (51), a second pipeline (52) and a cleaning gas valve (53), one end of the second pipeline (52) is communicated with the inner-layer water storage tank (21), the other end of the second pipeline (52) is communicated with the cleaning gas source (51), and the cleaning gas valve (53) is arranged on the second pipeline (52) to control on-off of the pipeline.
6. A vacuum chamber water vapor supplemental apparatus as in claim 4 wherein: the water vapor generating mechanism comprises a refrigerant and a refrigerant pipeline (61), the refrigerant pipeline (61) comprises a refrigerant inlet pipe (62), a refrigerant working pipe (63) and a refrigerant outlet pipe (64), the refrigerant working pipe (63) is vertically arranged in an inner-layer water storage tank (21) in a spiral mode, one end of the refrigerant inlet pipe (62) is located outside the water tank (2) and used for introducing the refrigerant, the other end of the refrigerant inlet pipe (62) penetrates through a cover body (23) to be communicated with the bottom of the refrigerant working pipe (63), the refrigerant outlet pipe (64) is communicated with the top of the refrigerant working pipe (63), and the other end of the refrigerant outlet pipe (64) penetrates out of the cover body (23).
7. A vacuum chamber water vapor supplemental apparatus as in claim 6 wherein: the water vapor conveying mechanism comprises a third pipeline (71) and a needle valve (72), one end of the third pipeline (71) is inserted into the inner water storage tank (21) and is located above the water level in the inner water storage tank (21), the other end of the third pipeline (71) is inserted into the vacuum cavity (1), and the needle valve (72) is installed on the third pipeline (71) to control the on-off of the pipeline.
8. A vacuum chamber water vapor supplemental apparatus as in claim 7 wherein: the water vapor conveying mechanism further comprises a mass flowmeter (73), the mass flowmeter (73) is arranged at the outlet of the third pipeline (71) to monitor water vapor entering the vacuum cavity (1) from the water tank (2), the needle valve (72) is opened, and the water vapor in the inner layer water storage tank (21) enters the vacuum cavity (1) through the third pipeline (71).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202322358036.4U CN220817448U (en) | 2023-08-31 | 2023-08-31 | Water vapor supplementing device for vacuum cavity |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202322358036.4U CN220817448U (en) | 2023-08-31 | 2023-08-31 | Water vapor supplementing device for vacuum cavity |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN220817448U true CN220817448U (en) | 2024-04-19 |
Family
ID=90673986
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202322358036.4U Active CN220817448U (en) | 2023-08-31 | 2023-08-31 | Water vapor supplementing device for vacuum cavity |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN220817448U (en) |
-
2023
- 2023-08-31 CN CN202322358036.4U patent/CN220817448U/en active Active
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