CN220816723U - Metal diaphragm valve - Google Patents

Abstract

The application discloses a metal diaphragm valve, and relates to the technical field of valves. The application relates to a metal diaphragm valve which comprises a valve body, a valve groove, a diaphragm, an actuator, a valve cavity and a flow path, wherein the flow path is provided with a flow port communicated with the valve cavity, a valve seat is arranged in the valve cavity, the valve seat is annular and is wound on the periphery of the flow port, a mounting groove is formed in the valve seat along the surrounding direction of the valve seat, a soft valve core is embedded in the mounting groove, and the valve core protrudes out of the mounting groove. According to the metal diaphragm valve, the valve core replaces a valve seat I in the prior art, and the valve core is protected through the valve seat, so that fluid can only contact with the protruding end of the valve core when passing through a flow path, the flushing of the valve core by the fluid is reduced, the abrasion and aging of the valve core are reduced, and the stability of a CV value is improved; simultaneously, with the case holding in the mounting groove, the cell wall of mounting groove can wrap up the case, has effectually avoided the case to produce the deformation after long-term use, has further promoted the stability of CV value.

Description

Metal diaphragm valve

Technical Field

The application relates to the technical field of valves, in particular to a metal diaphragm valve.

Background

The metal diaphragm valve is a stop valve which uses diaphragm as opening and closing piece to close flow channel and cut off fluid and separate the valve body cavity from valve cover cavity. As shown in fig. 1, the conventional metal diaphragm valve comprises a valve body 100, a diaphragm 101 arranged in the valve body 100, a valve cavity 102 arranged below the diaphragm 101, an input flow path 103 and an output flow path 104 which are arranged in the valve body 100 and are communicated with the valve cavity 102, a valve seat 105 inscribed in the input flow path 103, and an actuator 106, wherein an output end of the actuator 106 is connected with a jack post 107, when the output end of the actuator 106 stretches out, the jack post 107 is driven to press the diaphragm 101 on the valve seat 105 and seal the input flow path 103, when the output end of the actuator 106 contracts, the jack post 107 is driven to separate from the diaphragm 101, the diaphragm 101 elastically resets upwards, and the input flow path 103 is relatively conducted with the valve cavity 102.

The metal diaphragm valve described above, however, has two drawbacks: first, the first valve seat 105 is connected in the input flow path 103, when the input flow path 103 is conducted, fluid continuously flows through the first valve seat 105, and as the first valve seat 105 is made of soft material, abrasion or aging can be generated under the flushing of the fluid, the CV value of the metal diaphragm valve is greatly affected; second, the output end of the first actuator 106 is directly connected to the first jack post 107, when the output end of the first actuator 106 contracts, the first jack post 107 immediately moves upward along with the output end of the first actuator 106, the first diaphragm 101 instantaneously loses the pressing force, so that the first diaphragm can quickly and elastically reset upwards under the impact of fluid and the action of self deformation force, and the first diaphragm 101 can excessively deform in the quick reset process, so that the CV value of the metal diaphragm valve is further affected. If the input fluid is a high temperature fluid, wear, aging, and deformation of the valve seat one 105 and the diaphragm one 101 are further accelerated.

Disclosure of utility model

In order to overcome the defects of the prior art, the application provides a metal diaphragm valve capable of maintaining the stability of a CV value.

The application provides a metal diaphragm valve which adopts the following technical scheme:

The utility model provides a metal diaphragm valve, includes the valve body, set up in valve channel on the valve body, locate deformable diaphragm in the valve channel, locate the valve channel top be used for pressing the executor of diaphragm, form in the diaphragm with the valve pocket between the tank bottom of valve channel, set up in the valve body and with the flow path of valve pocket intercommunication, the flow path have with the flow path mouth of valve pocket intercommunication, be equipped with the disk seat in the valve pocket, the disk seat is annular and around locating the week side of flow path mouth, the mounting groove has been seted up along its circumferencial direction on the disk seat, the mounting groove is embedded to be equipped with soft case, the case is outstanding the mounting groove sets up, the diaphragm can be stamped on the case and shelter from the flow path mouth, or break away from the case.

By adopting the technical scheme, the valve core is utilized to replace a valve seat I in the prior art, and the valve core is protected through the valve seat, so that fluid can only contact with the protruding end of the valve core when passing through a flow path, the flushing of the valve core by the fluid is reduced, the abrasion and aging of the valve core are lightened, and the stability of a CV value is improved; simultaneously, with the case holding in the mounting groove, the cell wall of mounting groove can wrap up the case, has effectually avoided the case to produce the deformation after long-term use, has further promoted the stability of CV value.

Preferably, the flow path includes a first flow path for inputting fluid, a second flow path for outputting fluid, the first flow path has a first flow port communicating with the valve chamber, the second flow path has a second flow port communicating with the valve chamber, the first flow port is disposed adjacent to the second flow port, and the valve seat surrounds the periphery of the first flow port.

By adopting the technical scheme, the diaphragm can thoroughly seal the first flow passage after being pressed on the valve core, so that fluid in the first flow passage is prevented from entering the second flow passage.

Preferably, one side of the valve seat is located between the first flow port and the second flow port, and a temporary storage cavity for temporarily storing fluid is formed between the other side of the valve seat and a cavity wall of the valve cavity.

By adopting the technical scheme, when the diaphragm is reset upwards and the first flow path is opened, the temporarily stored fluid in the temporary storage cavity can be used as the supplement of the fluid in the first flow path, so that the CV value when the metal diaphragm valve is opened initially is improved.

Preferably, the actuator comprises an execution module and a driving module for driving the execution module to lift, wherein the output end of the driving module is in contact with the upper end of the execution module, and the lower end of the execution module is pressed on or separated from the diaphragm.

Through adopting above-mentioned technical scheme, when drive module's output shrink and break away from execution module, execution module still presses on the diaphragm under its own gravity effect for the diaphragm need overcome execution module's gravity when upwards elasticity resets, effectually prevented that the diaphragm from losing the pressing force in the twinkling of an eye and resetting rapidly, thereby avoided the diaphragm to produce excessive deformation at quick in-process that resets, further promoted the stability of CV value.

Preferably, the valve groove is further internally provided with a gland for fixing the diaphragm, the gland comprises a cover body and a fixed ring arranged on the periphery of the bottom of the cover body in a surrounding mode, the fixed ring is propped against the periphery of the diaphragm, and a first movable groove is formed between the fixed ring and the bottom of the cover body.

By adopting the technical scheme, the first movable groove provides a deformation space for the diaphragm, so that the first flow path is ensured to be effectively conducted and closed.

Preferably, the bottom of the first movable groove is provided with a second movable groove, the execution module comprises a top column, the top column comprises a first column body penetrating through the bottom of the second movable groove and a second column body connected to the bottom end of the first column body, and the second column body is movably arranged in the second movable groove.

Through adopting above-mentioned technical scheme, the second movable groove provides the activity space for the second post, can ensure that the terminal effectively presses the diaphragm or breaks away from the diaphragm.

Preferably, the diameter of the second movable groove and the diameter of the second cylinder are gradually increased along the direction from the gland to the membrane, and the included angle between the groove walls at two sides of the second movable groove is smaller than the included angle between the two side walls of the second cylinder.

Through adopting above-mentioned technical scheme, the limit and the buffering to the both sides wall of the great second post of contained angle can be realized to the both sides wall in the second movable groove of contained angle less, avoid the both sides wall of second post to directly strike the both sides cell wall in the second movable groove in the in-process that rises, prolonged gland and jack-prop's life.

Preferably, the execution module further comprises a valve rod connected to the upper end of the first cylinder and a heat insulation sleeve covered on the valve rod, wherein a plurality of heat insulation rings are arranged on the outer peripheral side part of the valve rod along the axial direction of the valve rod at intervals, the heat insulation rings are abutted to the inner wall of the heat insulation sleeve, and a heat insulation cavity is formed between two adjacent heat insulation rings.

By adopting the technical scheme, on one hand, the valve rod and the heat insulation cavity can reduce the overall heat conductivity of the metal diaphragm valve, so that the metal diaphragm valve is more resistant to high temperature; on the other hand, the heat insulation sleeve can isolate the heat of the valve rod, so that operators are prevented from being scalded due to direct contact with the valve rod.

Preferably, the driving module comprises a shell with an inner cavity, a movable piston movably arranged in the inner cavity along the vertical direction, a first piston rod arranged on the upper part of the movable piston and extending upwards, a spring sleeved on the first piston rod and propped against the upper wall of the inner cavity, an air cavity formed on the lower part of the movable piston, and an air channel for introducing compressed air into the air cavity, wherein the lower part of the movable piston is connected with a second piston rod, and the second piston rod penetrates out of the shell to form the output end.

Through adopting above-mentioned technical scheme for the movable piston can go up and down under compressed air and the effect of spring, in order to realize pressing down to the diaphragm.

Preferably, the inner chamber upper portion is connected with the adjusting column, the adjusting column has offered the adjustment tank along vertical direction downwardly extending and in it, the notch has all been seted up at the upper and lower both ends of adjustment tank, first piston rod is inserted from the notch of lower extreme and is located in the adjustment tank, be provided with the internal thread in the adjustment tank, threaded connection has adjusting bolt in the internal thread, adjusting bolt's lower extreme keep out in the top of first piston rod.

By adopting the technical scheme, the adjusting bolt is screwed, and the adjusting bolt can be screwed up or down to increase or reduce the lifting space of the moving piston, so that the opening degree of the diaphragm can be adjusted through the change of the lifting space of the moving piston, and finally the CV value of the metal diaphragm valve is adjusted.

In summary, the present utility model includes at least one of the following beneficial technical effects:

According to the metal diaphragm valve, the valve core replaces a valve seat I in the prior art, and the valve core is protected through the valve seat, so that fluid can only contact with the protruding end of the valve core when passing through a flow path, the flushing of the valve core by the fluid is reduced, the abrasion and aging of the valve core are reduced, and the stability of a CV value is improved; simultaneously, with the case holding in the mounting groove, the cell wall of mounting groove can wrap up the case, has effectually avoided the case to produce the deformation after long-term use, has further promoted the stability of CV value.

Drawings

FIG. 1 is a schematic illustration of a prior art metal diaphragm valve;

FIG. 2 is a schematic view of a metal diaphragm valve in accordance with an embodiment of the present application in a closed state;

FIG. 3 is a schematic view of a metal diaphragm valve in an open state according to an embodiment of the present application;

fig. 4 is an enlarged schematic view at a of fig. 3.

The reference numerals in the drawings:

1. A valve body; 2. a valve spool; 3. a membrane; 4. an actuator; 41. an execution module; 411. a top column; 4111. a first column; 4112. a second column; 412. a valve stem; 4121. a heat insulating ring; 4122. a heat insulating chamber; 413. a heat insulating sleeve; 42. a driving module; 420. a housing; 421. an inner cavity; 422. a moving piston; 4221. a first piston rod; 4222. a second piston rod; 4223. an upper piston; 4224. a lower piston; 4225. a connecting rod; 423. a spring; 424. an air cavity; 425. an airway; 4251. a first airway; 4252. a second airway; 4253. a third airway; 426. an adjusting column; 4261. an adjustment tank; 427. an adjusting bolt; 428. a fixed piston; 429. an air source interface; 5. a valve cavity; 6. a flow path; 61. a first flow path; 611. a first flow port; 612. a fluid inlet; 62. a second flow path; 621. a second flow port; 622. a fluid outlet; 7. a valve seat; 8. a mounting groove; 9. a valve core; 10. a temporary storage cavity; 11. a gland; 111. a cover body; 112. a fixing ring; 113. a protrusion; 12. a first movable groove; 13. a second movable groove; 14. pressing a nut; 15. a carrier ring; 16. a receiving groove;

100. A valve body I; 101. a first membrane; 102. a valve cavity I; 103. an input flow path; 104. an output flow path; 105. a valve seat I; 106. an actuator I; 107. and a first prop.

Detailed Description

The utility model is described in further detail below with reference to fig. 2-4.

In the description of the present utility model, it should be understood that references to orientation descriptions such as upper, lower, front, rear, left, right, etc. are based on the orientation or positional relationship shown in the drawings, are merely for convenience of description of the present utility model and to simplify the description, and do not indicate or imply that the apparatus or elements referred to must have a particular orientation, be constructed and operated in a particular orientation, and thus should not be construed as limiting the present utility model.

Referring to fig. 2-4, there is shown a metal diaphragm valve, which comprises a valve body 1, a valve groove 2 formed on the valve body 1, a deformable diaphragm 3 arranged in the valve groove 2, an actuator 4 arranged above the valve groove 2 and used for pressing the diaphragm 3, a valve cavity 5 formed between the diaphragm 3 and the groove bottom of the valve groove 2, and a flow path 6 formed in the valve body 1 and communicated with the valve cavity 5, wherein the flow path 6 is provided with a flow port communicated with the valve cavity 5, a valve seat 7 is arranged in the valve cavity 5, the valve seat 7 is annular and is arranged around the periphery of the flow port, a mounting groove 8 is formed on the valve seat 7 along the surrounding direction thereof, a soft valve core 9 is embedded in the mounting groove 8, the valve core 9 protrudes out of the mounting groove 8, and the diaphragm 3 can cover the valve core 9 and shade the flow port or separate from the valve core 9.

Wherein, the initial state of the diaphragm 3 is in a bending shape, when the metal diaphragm valve is in a closed state, the actuator 4 presses the diaphragm 3 downwards, so that the diaphragm 3 is elastically deformed and is pressed on the valve core 9 in a plane shape, and the flow path 6 is closed; when the metal diaphragm valve is in an open state, the actuator 4 is separated from the diaphragm 3 upwards, and the diaphragm 3 is reset upwards and restores to a bent shape under the action of elastic reset of the actuator and the impact of fluid, so that the flow path 6 is communicated with the valve cavity 5.

In the scheme, the valve core 9 is used for replacing the valve seat I100 in the prior art, and the valve core 9 is protected through the valve seat 7, so that fluid can only contact with the protruding end of the valve core 9 when passing through the flow path 6, the flushing of the valve core 9 by the fluid is reduced, the abrasion and ageing of the valve core 9 are lightened, and the stability of a CV value is improved; simultaneously, hold case 9 in mounting groove 8, the cell wall of mounting groove 8 can wrap up case 9, has effectually avoided case 9 to produce the deformation after long-term use, has further promoted the stability of CV value.

In the present embodiment, the flow path 6 includes a first flow path 61 for inputting fluid, a second flow path 62 for outputting fluid, the first flow path 61 having a first flow port 611 communicating with the valve chamber 5, a fluid inlet 612 provided at one side wall of the valve body 1, the second flow path 62 having a second flow port 621 communicating with the valve chamber 5, a fluid outlet 622 provided at the other side wall of the valve body 1, the first flow port 611 being provided adjacent to the second flow port 621, and the valve seat 7 surrounding the circumferential side of the first flow port 611. The diaphragm 3, after pressing on the valve core 9, is able to completely close the first flow port 611 to prevent the fluid in the first flow path 61 from entering the second flow path 62.

In the present embodiment, as shown in connection with fig. 2 to 4, one side portion of the valve seat 7 is located between the first flow passage port 611 and the second flow passage port 621, and a temporary storage chamber 10 for temporarily storing fluid is formed between the other side portion of the valve seat 7 and the chamber wall of the valve chamber 5. When the diaphragm 3 is reset upward and opens the first flow path 61, the fluid temporarily stored in the temporary storage chamber 10 can supplement the fluid in the first flow path 61, and the CV value when the metal diaphragm valve is initially opened is increased.

The actuator 4 comprises an execution module 41 and a driving module 42 for driving the execution module 41 to lift, wherein the output end of the driving module 42 is in contact with the upper end of the execution module 41, and the lower end of the execution module 41 is pressed on the membrane 3 or separated from the membrane 3.

When the output end of the driving module 42 contracts and is separated from the executing module 41, the executing module 41 still presses the diaphragm 3 under the action of gravity of the executing module 41, so that the diaphragm 3 needs to overcome the gravity of the executing module 41 when elastically resetting upwards, the diaphragm 3 is effectively prevented from being quickly reset due to the instant loss of the pressing force, excessive deformation of the diaphragm 3 in the quick reset process is avoided, and the stability of the CV value is further improved.

In this embodiment, the valve spool 2 is further provided therein with a gland 11 for fixing the diaphragm 3, and a gland nut 14 for fixing the gland 11, the gland 11 includes a cover body 111, and a fixing ring 112 disposed around the bottom of the cover body 111, the fixing ring 112 being pressed against the peripheral side of the diaphragm 3, and a first movable groove 12 being formed between the fixing ring 112 and the bottom of the cover body 111. The first movable groove 12 provides a deformation space for the diaphragm 3, and ensures that the first flow path 61 can be effectively conducted and closed.

Further, as shown in fig. 4, a carrying ring 15 is disposed at the bottom peripheral side of the valve cavity 5, the fixing ring 112 and the carrying ring 15 respectively press against two sides of the diaphragm 3, a containing groove 16 for containing an end portion of the diaphragm 3 is disposed between the carrying ring 15 and a cavity wall of the valve cavity 5, and a protrusion 113 for pressing the end portion of the diaphragm 3 into the containing groove 16 is disposed on the fixing ring 112. The fixing strength of the diaphragm 3 in the valve cavity 5 can be greatly improved by the arrangement.

In the present embodiment, the second movable slot 13 is formed at the bottom of the first movable slot 12, the execution module 41 includes a top column 411, the top column 411 includes a first column 4111 penetrating through the bottom of the second movable slot 13, and a second column 4112 connected to the bottom of the first column 4111, where the second column 4112 is movably disposed in the second movable slot 13. The second movable groove 13 provides a movable space for the second column 4112, and can ensure that the top column 411 effectively presses the diaphragm 3 or disengages the diaphragm 3.

Further, the diameter of the second movable groove 13 and the diameter of the second column 4112 are gradually increased along the direction from the pressing cover 11 to the membrane 3, and the included angle between the two side walls of the second movable groove 13 is smaller than the included angle between the two side walls of the second column 4112. Limiting and buffering of two side walls of the second column 4112 with a larger included angle can be achieved by two side walls of the second movable groove 13 with a smaller included angle, two side walls of the second column 4112 are prevented from directly striking two side walls of the second movable groove 13 in the ascending process, and service lives of the pressing cover 11 and the jacking column 411 are prolonged.

In this embodiment, as shown in fig. 2-3, the execution module 41 further includes a valve rod 412 connected to the upper end of the first column 4111, and a heat insulation sleeve 413 covered on the valve rod 412, wherein a plurality of heat insulation rings 4121 are arranged on the outer peripheral side of the valve rod 412 along the axial direction of the valve rod, the heat insulation rings 4121 are abutted against the inner wall of the heat insulation sleeve 413, and a heat insulation cavity 4122 is formed between two adjacent heat insulation rings 4121.

By the arrangement of the above-mentioned scheme, on one hand, the valve rod 412 and the heat insulation cavity 4122 can reduce the overall heat conductivity of the metal diaphragm valve, so that the metal diaphragm valve of the application is more resistant to high temperature; on the other hand, the heat insulation sleeve 413 can insulate the heat of the valve rod 412, so as to avoid scalding the operator due to direct contact with the valve rod 412.

In this embodiment, the driving module 42 includes a housing 420 having an inner cavity 421, a moving piston 422 movably disposed in the inner cavity 421 along a vertical direction, a first piston rod 4221 disposed at an upper portion of the moving piston 422 and extending upward, a spring 423 sleeved on the first piston rod 4221 and abutting against an upper wall of the inner cavity 421, an air cavity 424 formed at a lower portion of the moving piston 422, and an air passage 425 for introducing compressed air into the air cavity 424, wherein a second piston rod 4222 is connected to a lower portion of the moving piston 422, the second piston rod 4222 penetrates out of the housing 420 to form an output end of the driving module 42, an upper end of a heat insulation sleeve 413 is covered at a lower end of the housing 420, and a lower end of the heat insulation sleeve 413 is inscribed in the gland nut 14.

Specifically, a fixed piston 428 is fixed in the inner cavity 421, the movable piston 422 includes an upper piston 4223 and a lower piston 4224 which are respectively movably disposed on the upper side and the lower side of the fixed piston 428, a connecting rod 4225 is disposed on the upper portion of the lower piston 4224, the connecting rod 4225 slidably passes through the fixed piston 428 and is connected with the upper piston 4223 at the end portion thereof, a first piston rod 4221 and a spring 423 are disposed on the upper portion of the upper piston 4223, a second piston rod 4222 is disposed on the lower portion of the lower piston 4224, an air source interface 429 for introducing compressed air is disposed on the top of the housing 420, and the air channel 425 includes a first air channel 4251 which is opened in the first piston rod 4221 and is communicated with the air source interface 429, a second air channel 4252 which is opened in the connecting rod 4225 and is communicated with the first air channel 4251, and a third air channel 4253 which is opened in the first piston rod 4221 and is respectively communicated with the second air channel 4252 and the air cavity 424 at the two ends thereof. When in use, compressed air is input through the air source interface 429 and then is input into the air cavity 424 through the first air passage 4251, the second air passage 4252 and the third air passage 4253, and the compressed air in the air cavity 424 can push the lower piston 4224 upwards, so that the execution module 41 is separated from the diaphragm 3, wherein the lower piston 4224 can drive the upper piston 4223 to move upwards and press the spring 423; the air source interface 429 is cut off, the lower piston 4224 loses the pushing force of compressed air, the upper piston 4223 moves downwards under the action of the elastic force of the spring 423, and the lower piston 4224 is driven to move downwards, so that the execution module 41 is driven to press the diaphragm 3.

In this embodiment, an adjusting column 426 is connected to the upper portion of the inner cavity 421, the adjusting column 426 extends downward along the vertical direction and has an adjusting slot 4261 formed therein, the upper and lower ends of the adjusting slot 4261 are both provided with notches, and the notch at the upper end of the adjusting slot 4261 is an air source interface 429. The first piston rod 4221 is inserted into the adjusting groove 4261 from a notch at the lower end, an internal thread is arranged in the adjusting groove 4261, an adjusting bolt 427 is connected in the internal thread in a threaded manner, and the lower end of the adjusting bolt 427 is resisted above the first piston rod 4221. By screwing the adjusting bolt 427, the adjusting bolt 427 can be screwed up or down to increase or decrease the lifting space of the moving piston 422, so that the opening degree of the diaphragm 3 can be adjusted by changing the lifting space of the moving piston 422, and finally, the adjustment of the CV value of the metal diaphragm valve is realized.

Through the arrangement, the CV value of the metal diaphragm valve is adjustable, the adjusting range is 0.9-1.8, and the application range is wider; meanwhile, the flow consistency of the metal diaphragm valve can be controlled within 6 percent.

In the present embodiment, the adjusting post 426, the moving piston 422, the first piston rod 4221, the second piston rod 4222, the fixed piston 428, the valve stem 412, and the jack post 411 are all coaxially disposed.

The metal diaphragm valve has the service life of tens of millions, and meets the process requirements of ALD (atomic layer deposition) process in the semiconductor chip manufacturing industry. The ultra-high cycle life maximizes the yield, reduces the cost, and has more than 3000 thousands of test data. The concrete steps are as follows: firstly, the valve core 9 can be protected by wrapping the valve core 9 by the valve seat 7, so that the service life of the valve core 9 is greatly prolonged; second, the second; the deformation protection of the diaphragm 3 through the valve rod 412 and the top column 411 can greatly prolong the service life of the diaphragm 3; third, the third; the valve body 1 is made of a stainless steel base metal of double smelting (VIM-VAR), the base metal of the valve body 1 is drawn and molded, the hardness of the valve body 1 is ensured, the processing consistency is ensured, the service life of the valve body 1 is prolonged, and meanwhile, the metal diaphragm valve can be suitable for high-temperature fluid and is very suitable for an atomic layer evaporation (ALD) process.

The metal diaphragm valve adopts special EP equipment and pollution-free electrolyte to carry out electrolytic polishing on the inner wall of the valve body 1, so that the Ra of the inner surface of the valve body 1 is less than 0.125, and the accuracy of CV value is effectively ensured; meanwhile, the valve body 1 is cleaned by ultrapure water, so that the cleaning grade of all parts is ensured; furthermore, the high-purity 316LVIM-VAR stainless steel valve body is adopted to resist corrosion-resistant media, so that the metal diaphragm valve has excellent corrosion resistance.

The metal diaphragm valve also adopts a high-precision electromagnetic valve to control the gas input of the actuator 4, so that the actuating switching speed of the actuator 4 is lower than 5 milliseconds, and the response speed is lower than 15 milliseconds.

The implementation principle of the metal diaphragm valve in the embodiment of the application is as follows: when the metal diaphragm valve is required to enter the opening state, compressed air is introduced into the air source interface 429, the compressed air drives the lower piston 4224 to move upwards, the second piston rod 4222 at the lower end of the lower piston 4224 is separated from the valve rod 412, and the valve rod 412 and the top column 411 are reset upwards under the elastic reset of the diaphragm 3 and the impact of fluid, so that the first flow path 61 is communicated with the valve cavity 5; when the metal diaphragm valve needs to be in a closed state, the air source connector 429 is cut off, the upper piston 4223 and the lower piston 4224 move downwards under the action of the elastic force of the spring 423, the second piston rod 4222 at the lower end of the lower piston 4224 presses the top column 411 downwards, and the top column 411 presses the diaphragm 3 on the valve seat 7, so that the first flow path 61 is closed.

The embodiments of the present utility model are all preferred embodiments of the present utility model, and are not intended to limit the scope of the present utility model in this way, therefore: all equivalent changes in structure, shape and principle of the utility model should be covered in the scope of protection of the utility model.

Claims (10)

1. The utility model provides a metal diaphragm valve, includes valve body (1), set up valve pocket (2) on valve body (1), locate deformable diaphragm (3) in valve pocket (2), locate valve pocket (2) top be used for pressing actuator (4) of diaphragm (3), form in valve pocket (5) between diaphragm (3) and the tank bottom of valve pocket (2), set up in valve body (1) and with flow path (6) of valve pocket (5) intercommunication, its characterized in that: the valve is characterized in that the flow path (6) is provided with a flow path opening communicated with the valve cavity (5), a valve seat (7) is arranged in the valve cavity (5), the valve seat (7) is annular and is wound on the periphery of the flow path opening, an installation groove (8) is formed in the valve seat (7) along the surrounding direction of the valve seat, a soft valve core (9) is embedded in the installation groove (8), the valve core (9) protrudes out of the installation groove (8), and the diaphragm (3) can cover and press the valve core (9) and shield the flow path opening or separate from the valve core (9).

2. A metal diaphragm valve according to claim 1, wherein: the flow path (6) comprises a first flow path (61) for inputting fluid and a second flow path (62) for outputting fluid, the first flow path (61) is provided with a first flow port (611) communicated with the valve cavity (5), the second flow path (62) is provided with a second flow port (621) communicated with the valve cavity (5), the first flow port (611) is arranged adjacent to the second flow port (621), and the valve seat (7) surrounds the periphery of the first flow port (611).

3. A metal diaphragm valve according to claim 2, wherein: one side part of the valve seat (7) is positioned between the first flow port (611) and the second flow port (621), and a temporary storage cavity (10) for temporarily storing fluid is formed between the other side part of the valve seat (7) and the cavity wall of the valve cavity (5).

4. A metal diaphragm valve according to claim 1, wherein: the actuator (4) comprises an execution module (41) and a driving module (42) for driving the execution module (41) to lift, wherein the output end of the driving module (42) is in contact with the upper end of the execution module (41), and the lower end of the execution module (41) is pressed on the membrane (3) or separated from the membrane (3).

5. A metal diaphragm valve according to claim 4, wherein: still be equipped with in valve channel (2) and be used for fixing gland (11) of diaphragm (3), gland (11) include lid body (111), encircle and locate fixed ring (112) of lid body (111) bottom week side, fixed ring (112) support press in the week lateral part of diaphragm (3), fixed ring (112) with form first movable groove (12) between lid body (111) bottom.

6. A metal diaphragm valve according to claim 5, wherein: the second movable groove (13) is formed in the groove bottom of the first movable groove (12), the execution module (41) comprises a jacking column (411), the jacking column (411) comprises a first column body (4111) penetrating through the groove bottom of the second movable groove (13), and a second column body (4112) connected to the bottom end of the first column body (4111), and the second column body (4112) is movably arranged in the second movable groove (13).

7. A metal diaphragm valve according to claim 6, wherein: the diameter of the second movable groove (13) and the diameter of the second column (4112) are gradually increased along the direction from the pressing cover (11) to the membrane (3), and the included angle between the groove walls at the two sides of the second movable groove (13) is smaller than the included angle between the two side walls of the second column (4112).

8. A metal diaphragm valve according to claim 6, wherein: the execution module (41) further comprises a valve rod (412) connected to the upper end of the first cylinder (4111) and a heat insulation sleeve (413) covered on the valve rod (412), wherein a plurality of heat insulation rings (4121) are arranged on the outer peripheral side part of the valve rod (412) along the axial direction of the valve rod at intervals, the heat insulation rings (4121) are abutted to the inner wall of the heat insulation sleeve (413), and a heat insulation cavity (4122) is formed between two adjacent heat insulation rings (4121).

9. A metal diaphragm valve according to claim 4, wherein: the driving module (42) comprises a shell (420) with an inner cavity (421), a movable piston (422) movably arranged in the inner cavity (421) along the vertical direction, a first piston rod (4221) arranged on the upper portion of the movable piston (422) and extending upwards, a spring (423) sleeved on the first piston rod (4221) and propped against the upper wall of the inner cavity (421), an air cavity (424) formed at the lower portion of the movable piston (422), and an air channel (425) for introducing compressed air into the air cavity (424), wherein the lower portion of the movable piston (422) is connected with a second piston rod (4222), and the second piston rod (4222) penetrates out of the shell (420) to form the output end.

10. A metal diaphragm valve according to claim 9, wherein: the inner chamber (421) upper portion is connected with adjusting column (426), adjusting column (426) has offered adjusting tank (4261) along vertical direction downwardly extending and in it, notch has all been seted up at the upper and lower both ends of adjusting tank (4261), first piston rod (4221) from the notch of lower extreme insert locate in adjusting tank (4261), be provided with the internal thread in adjusting tank (4261), threaded connection has adjusting bolt (427) in the internal thread, the lower extreme of adjusting bolt (427) keep out in the top of first piston rod (4221).