CN220812613U - Graphene preparation carrier and graphene preparation device - Google Patents
Graphene preparation carrier and graphene preparation device Download PDFInfo
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- CN220812613U CN220812613U CN202322593331.8U CN202322593331U CN220812613U CN 220812613 U CN220812613 U CN 220812613U CN 202322593331 U CN202322593331 U CN 202322593331U CN 220812613 U CN220812613 U CN 220812613U
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- pressing piece
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- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 title claims abstract description 108
- 229910021389 graphene Inorganic materials 0.000 title claims abstract description 104
- 238000002360 preparation method Methods 0.000 title claims abstract description 58
- 239000000758 substrate Substances 0.000 claims abstract description 87
- 238000003825 pressing Methods 0.000 claims abstract description 63
- 239000010453 quartz Substances 0.000 claims abstract description 29
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims abstract description 29
- 238000004519 manufacturing process Methods 0.000 claims abstract description 17
- 238000000034 method Methods 0.000 abstract description 21
- 230000008569 process Effects 0.000 abstract description 20
- 238000003475 lamination Methods 0.000 abstract description 18
- 230000010354 integration Effects 0.000 abstract description 5
- 230000003749 cleanliness Effects 0.000 abstract description 4
- 238000013329 compounding Methods 0.000 abstract 1
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 12
- 239000011889 copper foil Substances 0.000 description 12
- 239000000463 material Substances 0.000 description 9
- 230000004308 accommodation Effects 0.000 description 5
- 238000010586 diagram Methods 0.000 description 5
- 239000012535 impurity Substances 0.000 description 5
- 230000008901 benefit Effects 0.000 description 4
- 239000002131 composite material Substances 0.000 description 3
- 239000011229 interlayer Substances 0.000 description 3
- 239000010410 layer Substances 0.000 description 3
- 238000012986 modification Methods 0.000 description 3
- 230000004048 modification Effects 0.000 description 3
- 229910052799 carbon Inorganic materials 0.000 description 2
- 230000000149 penetrating effect Effects 0.000 description 2
- 229910000570 Cupronickel Inorganic materials 0.000 description 1
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 1
- 230000009471 action Effects 0.000 description 1
- 230000006978 adaptation Effects 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- 125000004432 carbon atom Chemical group C* 0.000 description 1
- 239000000969 carrier Substances 0.000 description 1
- 238000005229 chemical vapour deposition Methods 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- YOCUPQPZWBBYIX-UHFFFAOYSA-N copper nickel Chemical compound [Ni].[Cu] YOCUPQPZWBBYIX-UHFFFAOYSA-N 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000011888 foil Substances 0.000 description 1
- 229910002804 graphite Inorganic materials 0.000 description 1
- 239000010439 graphite Substances 0.000 description 1
- 230000002452 interceptive effect Effects 0.000 description 1
- 238000010030 laminating Methods 0.000 description 1
- 230000006911 nucleation Effects 0.000 description 1
- 238000010899 nucleation Methods 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 230000006798 recombination Effects 0.000 description 1
- 238000005215 recombination Methods 0.000 description 1
- 229910010271 silicon carbide Inorganic materials 0.000 description 1
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 1
- 239000002356 single layer Substances 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
Abstract
The utility model provides a graphene preparation carrier and a graphene preparation device, and relates to the technical field of graphene production and preparation. The graphene preparation carrier used for being placed in the quartz tube of the CVD equipment comprises a support, a slide bar, a pressing piece and a plurality of growth substrates, wherein the slide bar is arranged on the support, the pressing piece is sleeved on the slide bar and is in sliding fit with the slide bar, and the pressing piece plays roles in pressing and balance of the counterweight. The plurality of growth substrates and the pressing piece are arranged along the axial direction of the sliding rod and between the pressing piece and the bracket, and the growth substrates are sleeved on the sliding rod and are in sliding fit with the sliding rod. The support is configured to rotate relative to the quartz tube, so that the pressing piece slides along the sliding rod in a direction approaching to the growth substrate and presses the growth substrate. The growth and compounding integration of the graphene film are assisted, the risk of pollution to the surface of the graphene film is reduced, and the surface cleanliness of the graphene film and the process stability of the graphene film lamination are improved, so that the production quality of the graphene film is improved.
Description
Technical Field
The utility model relates to the technical field of graphene production and preparation, in particular to a graphene preparation carrier and a graphene preparation device.
Background
Graphene is a two-dimensional film material formed by stacking single-layer carbon atoms, and has excellent electrical, thermal, optical and mechanical properties, so that the graphene has a wide application prospect. Because the electrical property of graphene is far higher than that of copper foil, the electrical property of the copper foil can be effectively improved by the multi-layer copper foil graphene composite.
The existing multilayer two-dimensional film material preparation carrier has single function, and after the growth of the two-dimensional film material is finished, the function of laminating a growth substrate cannot be realized in one step, so that a plurality of layers of copper foils are stacked and laminated after the copper foils of the grown graphene are taken out, but in a non-clean laboratory, a plurality of impurities are introduced in the copper foil transfer process of the grown graphene, and the electric conductivity and the heat conductivity of the copper foils are reduced, so that the production quality of the graphene is influenced.
Disclosure of utility model
According to the graphene preparation carrier and the graphene preparation device provided by the utility model, the surface cleanliness of graphene is improved, so that the production quality of graphene is improved.
According to a first aspect of the present utility model, there is provided a graphene preparation carrier for placement within a quartz tube of a CVD apparatus, comprising:
A bracket;
The sliding rod is arranged on the bracket;
the pressing piece is sleeved on the sliding rod and is in sliding fit with the sliding rod;
The plurality of growth substrates and the pressing piece are arranged along the axial direction of the sliding rod and arranged between the pressing piece and the bracket, and the growth substrates are sleeved on the sliding rod and are in sliding fit with the sliding rod;
The support is configured to rotate relative to the quartz tube, so that the pressing piece slides along the sliding rod towards the direction approaching to the growth substrate and presses the growth substrate.
In some embodiments, the bracket is provided with a moving portion configured to move in a first direction and a rotating portion to rotate the rotating portion relative to a second direction;
The first direction, the second direction and the axial direction of the sliding rod are perpendicular to each other.
In some embodiments, the graphene preparation carrier further comprises a moving member, wherein one end of the moving member is arranged on the moving part in a penetrating manner, and the other end of the moving member can move along the first direction; and/or the number of the groups of groups,
The graphene preparation carrier further comprises a rotating piece, one end of the rotating piece penetrates through the rotating portion, and the other end of the rotating piece is fixedly connected to the quartz tube.
In some embodiments, the rotating portion and the moving portion are disposed on two sides of the support frame adjacent to each other.
In some of these embodiments, the stent comprises:
a first side plate;
The second side plate is connected with the first side plate, the sliding rod penetrates through the first side plate and the second side plate, and the pressing piece is arranged between the first side plate and the second side plate;
And an accommodating space is formed among the first side plate, the pressing piece and the second side plate, and the accommodating space is used for accommodating a plurality of growth substrates.
In some embodiments, the first side panel has a height in the first direction that is less than a height of the second side panel in the first direction;
The first direction is perpendicular to the axial direction of the sliding rod.
In some embodiments, the projection of the second side plate relative to the reference plane is an L-shaped structure;
the reference surface is a plane in which the first direction and the axial direction of the sliding rod are located.
In some embodiments, the first side plate and the second side plate are connected by a connector.
In some embodiments, the rotation angle of the bracket is alpha, wherein alpha is 0 deg. to 45 deg..
According to a second aspect of the present utility model, an embodiment of the present utility model further provides a graphene preparation apparatus, including a quartz tube, a CVD apparatus, and the graphene preparation carrier described above, where the CVD apparatus and the graphene preparation carrier are disposed in the quartz tube, and the pressing member of the graphene preparation carrier is used to press against a plurality of growth substrates.
One embodiment of the present utility model has the following advantages or benefits:
According to the graphene preparation carrier provided by the embodiment of the utility model, the slide bar is arranged on the support, the slide bar can suspend the pressing piece and the plurality of growth substrates, after the growth of the graphene film is finished, the support is rotated relative to the quartz tube, at the moment, the slide bar is in an inclined state, the pressing piece slides downwards along the slide bar and slides towards the direction close to the growth substrates, the pressing piece applies an acting force to the adjacent growth substrates, then the plurality of growth substrates which are overlapped are contacted with each other, and as the plurality of growth substrates are arranged between the pressing piece and the support, the pressing piece and the support play a role of clamping the growth substrates so as to compact the plurality of growth substrates and the graphene film. The production substrate does not need to be detached or removed from the sliding rod in the growth and lamination process of the graphene film, the growth and lamination integration of the graphene film are assisted, the risk of pollution to the surface of the graphene film is reduced, the surface cleanliness of the graphene film and the process stability of lamination of the graphene film are improved, and therefore the production quality of the graphene film is improved.
According to the graphene preparation device provided by the embodiment of the utility model, the graphene film can be prepared on the growth substrate of the graphene preparation carrier by using the CVD equipment, so that the growth process of the graphene film is realized. The lamination piece of the graphene preparation carrier is used for propping against a plurality of growth substrates so as to realize the lamination process of the graphene film, realize the functions of graphene film growth and lamination integration, effectively avoid introducing interlayer impurities in the lamination process and improve the preparation quality of the graphene film.
Drawings
For a better understanding of the utility model, reference may be made to the embodiments illustrated in the following drawings. The components in the drawings are not necessarily to scale and related elements may be omitted in order to emphasize and clearly illustrate the technical features of the present utility model. In addition, the relevant elements or components may have different arrangements as known in the art. Furthermore, in the drawings, like reference numerals designate identical or similar parts throughout the several views. The above and other features and advantages of the present utility model will become more apparent by describing in detail exemplary embodiments thereof with reference to the attached drawings.
Wherein:
Fig. 1 is a schematic structural diagram of a graphene preparation apparatus according to an embodiment of the present disclosure;
fig. 2 is a schematic structural diagram of a graphene preparation carrier according to an embodiment of the present disclosure;
Fig. 3 is a schematic diagram of a structure of a graphene preparation carrier with a growth substrate hidden in the carrier according to an embodiment of the present utility model;
fig. 4 is a schematic diagram showing a structure of a carrier for concealing a growth substrate for graphene preparation according to an embodiment of the present utility model;
fig. 5 is a schematic structural diagram of a graphene fabrication carrier according to an embodiment of the present disclosure.
Wherein reference numerals are as follows:
100. A quartz tube;
1. A slide bar; 2. a bracket; 3. pressing the piece; 4. a growth substrate; 5. a moving member; 6. a rotating member; 7. a connecting piece; 8. a first nut; 9. a second nut;
21. A first side plate; 211. a moving part; 22. a second side plate; 221. a rotating part;
Detailed Description
The technical solutions in the exemplary embodiments of the present utility model will be clearly and completely described below with reference to the accompanying drawings in the exemplary embodiments of the present utility model. The example embodiments described herein are for illustrative purposes only and are not intended to limit the scope of the present utility model, and it should be understood that various modifications and changes can be made to the example embodiments without departing from the scope of the utility model.
In the description of the present utility model, the terms "first," "second," and the like, are used for descriptive purposes only and are not to be construed as indicating or implying relative importance unless explicitly specified or limited otherwise; the term "plurality" refers to two or more than two; the term "and/or" includes any and all combinations of one or more of the associated listed items. In particular, references to "the/the" object or "an" object are likewise intended to mean one of a possible plurality of such objects.
Unless specified or indicated otherwise, the terms "connected," "fixed," and the like are to be construed broadly and are, for example, capable of being fixedly connected, detachably connected, or integrally connected, electrically connected, or signally connected; "coupled" may be directly coupled or indirectly coupled through intermediaries. The specific meaning of the above terms in the present utility model can be understood by those skilled in the art according to the specific circumstances.
Further, in the description of the present utility model, it should be understood that the terms "upper", "lower", "inner", "outer", and the like in the exemplary embodiments of the present utility model are described in terms of the drawings, and should not be construed as limiting the exemplary embodiments of the present utility model. It will also be understood that in the context of an element or feature being connected to another element(s) "upper," "lower," or "inner," "outer," it can be directly connected to the other element(s) "upper," "lower," or "inner," "outer," or indirectly connected to the other element(s) "upper," "lower," or "inner," "outer" via intervening elements.
Example embodiments will now be described more fully with reference to the accompanying drawings. However, the exemplary embodiments can be embodied in many forms and should not be construed as limited to the embodiments set forth herein; rather, these embodiments are provided so that this disclosure will be thorough and complete, and will fully convey the concept of the example embodiments to those skilled in the art. The same reference numerals in the drawings denote the same or similar structures, and thus detailed descriptions thereof will be omitted.
After the growth of the two-dimensional film material is finished, the conventional graphene preparation carrier cannot realize the function of pressing the growth substrate 4 in one step, so that impurities can be introduced in the process of preparing the graphene or copper foil composite material, and the production quality of the graphene or copper foil composite material is affected.
In order to solve this problem, as shown in fig. 1, the present embodiment provides a graphene preparation apparatus including a quartz tube 100, a CVD apparatus (not shown in the figure), and a graphene preparation carrier, both of which are disposed in the quartz tube 100, and a pressing member 3 of the graphene preparation carrier for pressing a plurality of growth substrates 4.
The quartz tube 100 provides accommodation space for CVD equipment and graphene fabrication carriers, and provides a growth environment for graphene. The CVD apparatus prepares the graphene film by a chemical vapor deposition method (hemical Vapor Deposition, CVD). Specifically, after the growth substrate 4 of the graphene preparation carrier is placed in the high-temperature chamber of the quartz tube 100, a carbon source and a reducing gas are introduced, and carbon source molecules are cracked into carbon fragments for nucleation, growth and splicing of graphene into a film, so that a graphene film is attached to the surface of the growth substrate 4.
It should be understood that the growth substrate 4 may be made of a material known in the art, such as copper foil, nickel foil, copper-nickel alloy foil, etc., and in the present utility model, the material of the growth substrate 4 is not particularly limited.
The graphene preparation device provided by the embodiment can prepare the graphene film on the growth substrate 4 of the graphene preparation carrier by using the CVD equipment so as to realize the growth process of the graphene film. The lamination piece 3 of the graphene preparation carrier is used for propping against a plurality of growth substrates 4 so as to realize the lamination process of the graphene film, realize the integrated functions of graphene film growth and lamination, effectively avoid introducing interlayer impurities in the lamination process and improve the preparation quality of the graphene film.
The present embodiment provides a graphene preparation carrier for placement within a quartz tube 100 of a CVD apparatus. As shown in fig. 1, the graphene preparation carrier comprises a support 2, a slide bar 1, a pressing piece 3 and a plurality of growth substrates 4, wherein the slide bar 1 is arranged on the support 2, the pressing piece 3 is sleeved on the slide bar 1 and is in sliding fit with the slide bar 1, and the pressing piece 3 plays roles in pressing and balance weight. The plurality of growth substrates 4 and the pressing piece 3 are arranged along the axial direction of the slide bar 1 and between the pressing piece 3 and the bracket 2, and the growth substrates 4 are sleeved on the slide bar 1 and are in sliding fit with the slide bar. Wherein the support 2 is configured to rotate relative to the quartz tube 100, so that the pressing member 3 slides along the slide bar 1 in a direction approaching the growth substrate 4 and presses against the growth substrate 4.
According to the graphene preparation carrier provided by the embodiment, the slide bar 1 is arranged on the support 2, the slide bar 1 can suspend the pressing piece 3 and the plurality of growth substrates 4, after the growth of the graphene film is finished, the support 2 is rotated relative to the quartz tube 100, at the moment, the slide bar 1 is in an inclined state, the pressing piece 3 slides downwards along the slide bar 1 and slides towards the direction close to the growth substrates 4, the pressing piece 3 applies an acting force to the adjacent growth substrates 4, and then the plurality of growth substrates 4 which are overlapped are contacted with each other. Since the plurality of growth substrates 4 are disposed between the pressing member 3 and the support 2, the pressing member 3 and the support 2 function to clamp the growth substrates 4 to compact the plurality of growth substrates 4 and the graphene film. The production substrate does not need to be detached or removed from the slide bar 1 in the growth and lamination process of the graphene film, the growth and lamination integration of the graphene film are assisted, the risk of pollution to the surface of the graphene film is reduced, the surface cleanliness of the graphene film and the process stability of lamination of the graphene film are improved, and therefore the production quality of the graphene film is improved.
It should be understood that the material of the support 2 may be selected from materials known in the art, such as graphite, quartz, silicon carbide, etc., and in this embodiment, the material of the support 2 is not particularly limited.
The axial direction of the quartz tube 100 is defined as a first direction, the axial direction of the slide rod 1 is defined as a third direction before the support 2 rotates, the first direction, the second direction and the third direction are perpendicular to each other, and the first direction, the second direction and the third direction only represent space directions and have no substantial meaning.
In one embodiment, a plurality of growth substrates 4 are arranged in parallel with the pressing member 3 at intervals along the axial direction of the slide bar 1. With the arrangement, the pressing piece 3 and the plurality of growth substrates 4 are uniformly hung on the slide bar 1, and the adjacent growth substrates 4 keep a certain distance, so that adhesion of the graphene film in the growth process is prevented.
In one embodiment, as shown in fig. 1-2, the bracket 2 includes a first side plate 21 and a second side plate 22, the first side plate 21 extending in a first direction, and the second side plate 22 being connected to the first side plate 21. The sliding rod 1 is arranged on the first side plate 21 and the second side plate 22 in a penetrating way, and the first side plate 21 and the second side plate 22 form a frame structure which provides a supporting position for the sliding rod 1. The pressing piece 3 is arranged between the first side plate 21 and the second side plate 22, and in the sliding process of the pressing piece 3 along the third direction, the first side plate 21 and the second side plate 22 play a role in limiting the pressing piece 3 and the plurality of growth substrates 4, so that the pressing piece 3 and the growth substrates 4 are prevented from falling out of the support 2.
Specifically, the first side plate 21 and the second side plate 22 are connected by the connecting member 7. Wherein, connecting piece 7 is the bolt specifically, utilizes connecting piece 7, fixes first curb plate 21 and second curb plate 22 into overall structure, and connecting piece 7 extends along the axial direction of slide bar 1 and sets up, and connecting piece 7 is screwed up fixedly through first nut 8 along the both ends of third direction, guarantees the connection stability between first curb plate 21 and the second curb plate 22.
Wherein, form accommodation space between first curb plate 21, pressfitting piece 3 and the second curb plate 22, accommodation space is used for holding a plurality of growth substrates 4. The accommodation space provides accommodation space for the plurality of growth substrates 4, and at the same time, in the third direction, one side of the pressing member 3 and the second side plate 22, which are close to each other, may press both sides of the plurality of growth substrates 4 to press the plurality of growth substrates 4 into a unitary structure.
Specifically, the pressing piece 3 is provided with a first through hole corresponding to the sliding rod 1, the growth substrate 4 is provided with a second through hole corresponding to the sliding rod 1, after the sliding rod 1 penetrates through the first through hole and the second through hole, two ends of the sliding rod 1 along the third direction are screwed and fixed through the second nut 9, and connection stability among the sliding rod 1, the first side plate 21 and the second side plate 22 is guaranteed.
The sliding rod 1 is in clearance fit with the first through hole, and the sliding rod 1 is in clearance fit with the second through hole. The cross section of the slide bar 1 may be circular or square, for example, when the cross section of the slide bar 1 is circular, the first through hole and the second through hole have a circular structure; when the cross-sectional shape of the slide bar 1 is square, the first through hole and the second through hole are square structures. The present embodiment is not particularly limited in the cross-sectional shape of the slide bar 1 as long as it can realize the support of the pressing member 3 and the growth substrate 4 and the sliding function.
In one embodiment, the height of the first side plate 21 in the first direction is smaller than the height of the second side plate 22 in the first direction.
If the first side plate 21 is longer along the height of the first direction, when the bracket 2 rotates by a small angle, the first side plate 21 will contact the quartz tube 100, for this reason, the heights of the first side plate 21 and the second side plate 22 along the first direction are different, that is, the first side plate 21 and the second side plate 22 are of asymmetric structures, when the bracket 2 rotates, the first side plate 21 and the quartz tube 100 are prevented from interfering, the rotation angle of the bracket 2 can be effectively increased, and therefore the lamination effect of the lamination element 3 on the growth substrate 4 is further ensured.
In one embodiment, the projection of the second side plate 22 with respect to the reference plane is an L-shaped structure; the reference plane is a plane in which the first direction and the axial direction of the sliding rod 1 are located.
In this way, the second side plate 22 and the first side plate 21 form a U-shaped structure with one end open, which wraps around the outside of the plurality of growth substrates 4, and ensures the flatness of the growth substrates 4 in the first direction, the third direction while protecting the growth substrates 4. Meanwhile, in the process of pressing the growth substrate 4 by the pressing member 3, the second side plate 22 also plays a role of bearing the growth substrate 4, and provides a certain supporting force for the growth substrate 4.
Since the support 2 is required to be rotated, if the support 2 is driven by a rotation driving device, the rotation driving device is placed in the quartz tube 100, and the movable space provided by the quartz tube 100 for the rotation driving device is relatively small, resulting in inconvenience in operation.
To solve this problem, as shown in fig. 2 to 3, the present embodiment provides a bracket 2 provided with a moving portion 211 and a rotating portion 221, the moving portion 211 being configured to move in a first direction to rotate the rotating portion 221 relative to a second direction.
When the moving part 211 is configured to move along the first direction, the support 2 is subjected to a tensile force along the first direction, the stress state of the support 2 changes, and the rotating part 221 deflects relative to the second direction.
If the rotating part 221 and the moving part 211 are provided at opposite sides of the bracket 2, when the moving part 211 moves in the first direction, the rotating movement of the rotating part 221 may be restricted because the rotating part 221 and the moving part 211 are similarly collinear. For this purpose, the rotating portion 221 and the moving portion 211 are provided on both sides adjacent to the bracket 2. When the moving part 211 moves in the first direction, since the rotating part 221 and the moving part 211 are at adjacent sides, the movement tendencies of the two do not interfere with each other, and as the moving part 211 moves up and down in the first direction, the rotating part 221 can freely deflect.
In one embodiment, the number of the moving parts 211 is one, the number of the rotating parts 221 is two, the two rotating parts 221 are disposed at two opposite sides of the bracket 2 along the second direction, and the moving part 211 is disposed between the two rotating parts 221. In this way, the balance of the bracket 2 during rotation is ensured.
Specifically, the moving portion 211 may be a pulling hole provided at the top of the first side plate 21 in the first direction, and the rotating portion 221 may be a rotating hole provided at the second side plate 22.
In one embodiment, as shown in fig. 1 to 4, the graphene preparation carrier further includes a moving member 5, where the moving member 5 is specifically an L-shaped hook structure, and one end of the moving member 5 is disposed through the moving portion 211, and the other end of the moving member can move along the first direction.
The operator pulls the other end of the moving member 5 to apply a pulling force to the moving member 5, which is transmitted to the first side plate 21 of the bracket 2 through the moving member 5, thereby driving the bracket 2 to move in the first direction.
In one embodiment, the graphene preparation carrier further includes a rotating member 6, the moving member 5 is specifically a U-shaped hook-shaped structure, one end of the rotating member 6 is disposed through the rotating portion 221, and the other end is fixedly connected to the quartz tube 100.
Along with the movement of the first side plate 21 along the first direction, the whole bracket 2, the pressing member 3 and the plurality of growth substrates 4 rotate around the rotating member 6, at this time, the sliding rod 1 and the third direction are not parallel to each other, but an included angle is formed between the sliding rod 1 and the third direction, the sliding rod 1 is in an inclined state, and then the pressing member 3 and the plurality of growth substrates 4 can slide down along the inclined sliding rod 1, so that the gap between two adjacent growth substrates 4 is reduced until the adjacent two growth substrates are mutually attached, and the pressing process of the graphene film is realized under the clamping action of the pressing member 3 and the second side plate 22.
It can be appreciated that the rotating portion 221 is disposed above the sliding rod 1 along the first direction, so that the pressing member 3 and the plurality of growth substrates 4 suspended on the sliding rod 1 can rotate around the rotating member 6.
In one embodiment, the rotation angle of the bracket 2 is alpha, wherein alpha is 0 deg. to 45 deg..
In other words, the angle α between the growth substrate 4 and the first direction in the support 2 is 0 ° to 45 °, i.e. the growth substrate 4 swings unidirectionally with respect to the first direction. The reason is that the moving part 211 of the holder 2, the rotating part 221 and the end of the slide bar 1 in the axial direction of the slide bar 1 can be simplified to the structure as shown in fig. 5, when the moving part 211 is pulled by the moving member 5 to move, unidirectional deflection occurs by the clockwise rotation of the holder 2 along the rotating member 6, the slide bar 1 is inclined obliquely downward, and the pressing member 3 impacts the growth substrate 4 along the slide bar 1.
It will be appreciated that the rotation angle α of the support 2 is adjustable, and is related to the dimensions of the rotation portion 221 and the movement portion 211, and the dimensions of the growth substrate 4, for example, the diameters of the pulling hole and the rotation hole are 9mm, the interval between the two holes is 20mm, the height of the growth substrate 4 in the first direction is about 40mm, and the width of the growth substrate 4 in the second direction is about 35mm. The dimensions of the rotating portion 221, the moving portion 211, and the growth substrate 4 are not limited in this embodiment, and may be adjusted according to actual production conditions.
The working process of the graphene preparation carrier provided by the embodiment is as follows:
1. sequentially hanging and placing the pressing piece 3 and the growth substrate 4 along the sliding rod 1;
2. the two ends of the slide bar 1 respectively pass through the first side plate 21 and the second side plate 22 and are fixed by the second nut 9;
3. the connecting piece 7 passes through the first side plate 21 and the second side plate 22 respectively and is screwed and fixed by the first nut 8;
4. The mover 5 passes through the moving part 211, and the rotator 6 passes through the rotating part 221;
5. Suspending the whole graphene preparation carrier in a quartz tube 100, after the growth of the graphene film is finished, pulling a moving rod to move up and down along a first direction by an operator, so that a bracket 2 rotates around a rotating piece 6, a pressing piece 3 and a plurality of growth substrates 4 synchronously slide along a sliding rod 1, the pressing piece 3 applies an acting force to the plurality of growth substrates 4, and the plurality of growth substrates 4 are compacted;
6. after the growth pressing is finished, the process of taking out the growth substrate 4 is opposite to the above steps, and is not described here again.
Compared with the prior art, the graphene preparation carrier provided by the utility model has the advantages that the growth and recombination integration of the multi-layer graphene copper foil is realized through the structural design, and interlayer impurities are effectively prevented from being introduced in the copper foil lamination process.
It should be noted here that the graphene preparation vehicle shown in the drawings and described in the present specification is only one example employing the principles of the present utility model. It will be clearly understood by those of ordinary skill in the art that the principles of the present utility model are not limited to any details or any components of the devices shown in the drawings or described in the specification.
It should be understood that the utility model is not limited in its application to the details of construction and the arrangement of components set forth in the specification. The utility model is capable of other embodiments and of being practiced and carried out in various ways. The foregoing variations and modifications are intended to fall within the scope of the present utility model. It should be understood that the utility model disclosed and defined in this specification extends to all alternative combinations of two or more of the individual features mentioned or evident from the text and/or drawings. All of these different combinations constitute various alternative aspects of the present utility model. The embodiments described in this specification illustrate the best mode known for carrying out the utility model and will enable those skilled in the art to make and use the utility model.
Other embodiments of the utility model will be apparent to those skilled in the art from consideration of the specification and practice of the utility model disclosed herein. This utility model is intended to cover any variations, uses, or adaptations of the utility model following, in general, the principles of the utility model and including such departures from the present disclosure as come within known or customary practice within the art to which the utility model pertains. The specification and example embodiments are to be considered exemplary only, with a true scope and spirit of the utility model being indicated by the following claims.
It is to be understood that the utility model is not limited to the precise arrangements and instrumentalities shown in the drawings, which have been described above, and that various modifications and changes may be effected without departing from the scope thereof. The scope of the utility model is limited only by the appended claims.
Claims (10)
1. A graphene preparation carrier for placement within a quartz tube of a CVD apparatus, comprising:
A bracket;
The sliding rod is arranged on the bracket;
the pressing piece is sleeved on the sliding rod and is in sliding fit with the sliding rod;
The plurality of growth substrates and the pressing piece are arranged along the axial direction of the sliding rod and arranged between the pressing piece and the bracket, and the growth substrates are sleeved on the sliding rod and are in sliding fit with the sliding rod;
The support is configured to rotate relative to the quartz tube, so that the pressing piece slides along the sliding rod towards the direction approaching to the growth substrate and presses the growth substrate.
2. The graphene-preparation carrier according to claim 1, wherein the support is provided with a moving portion and a rotating portion, the moving portion being configured to move in a first direction, rotating the rotating portion relative to a second direction;
The first direction, the second direction and the axial direction of the sliding rod are perpendicular to each other.
3. The graphene preparation carrier according to claim 2, further comprising a moving member, wherein one end of the moving member is penetrated through the moving portion, and the other end of the moving member is capable of moving along the first direction; and/or the number of the groups of groups,
The graphene preparation carrier further comprises a rotating piece, one end of the rotating piece penetrates through the rotating portion, and the other end of the rotating piece is fixedly connected to the quartz tube.
4. The graphene-preparation carrier according to claim 2, wherein the rotating portion and the moving portion are disposed at two sides adjacent to the support.
5. The graphene-fabrication vehicle of claim 1, wherein the scaffold comprises:
a first side plate;
The second side plate is connected with the first side plate, the sliding rod penetrates through the first side plate and the second side plate, and the pressing piece is arranged between the first side plate and the second side plate;
And an accommodating space is formed among the first side plate, the pressing piece and the second side plate, and the accommodating space is used for accommodating a plurality of growth substrates.
6. The graphene-fabrication vehicle of claim 5, wherein a height of the first side plate along a first direction is less than a height of the second side plate along the first direction;
The first direction is perpendicular to the axial direction of the sliding rod.
7. The graphene-fabrication vehicle of claim 5, wherein the projection of the second side plate with respect to the datum plane is an L-shaped structure;
the reference surface is a plane in which the first direction and the axial direction of the sliding rod are located.
8. The graphene-fabrication vehicle of claim 5, wherein the first side plate and the second side plate are connected by a connector.
9. The graphene-preparation carrier of any one of claims 1-8, wherein the rotation angle of the scaffold is α, wherein 0 ° is less than or equal to α is less than or equal to 45 °.
10. A graphene preparation device, characterized by comprising a quartz tube, a CVD apparatus and the graphene preparation carrier according to any one of claims 1 to 9, wherein the CVD apparatus and the graphene preparation carrier are disposed in the quartz tube, and the press-fit member of the graphene preparation carrier is used for pressing a plurality of growth substrates.
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