CN220802430U - Back-flushing type waste gas filtering device - Google Patents
Back-flushing type waste gas filtering device Download PDFInfo
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- CN220802430U CN220802430U CN202322383888.9U CN202322383888U CN220802430U CN 220802430 U CN220802430 U CN 220802430U CN 202322383888 U CN202322383888 U CN 202322383888U CN 220802430 U CN220802430 U CN 220802430U
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- exhaust gas
- cartridge
- gas filtering
- blowing
- carbon filter
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- 238000001914 filtration Methods 0.000 title claims abstract description 123
- 239000002912 waste gas Substances 0.000 title claims abstract description 37
- 238000011010 flushing procedure Methods 0.000 title claims description 5
- 239000007789 gas Substances 0.000 claims abstract description 125
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims abstract description 100
- 238000007664 blowing Methods 0.000 claims abstract description 57
- 239000005046 Chlorosilane Substances 0.000 claims abstract description 48
- KOPOQZFJUQMUML-UHFFFAOYSA-N chlorosilane Chemical compound Cl[SiH3] KOPOQZFJUQMUML-UHFFFAOYSA-N 0.000 claims abstract description 48
- 229910052799 carbon Inorganic materials 0.000 claims abstract description 32
- 239000001257 hydrogen Substances 0.000 claims abstract description 29
- 229910052739 hydrogen Inorganic materials 0.000 claims abstract description 29
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 claims abstract description 27
- 230000000149 penetrating effect Effects 0.000 claims abstract description 6
- 238000004140 cleaning Methods 0.000 claims description 19
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims description 14
- 230000007246 mechanism Effects 0.000 claims description 8
- 238000007789 sealing Methods 0.000 claims description 8
- 239000010865 sewage Substances 0.000 claims description 8
- 229910052757 nitrogen Inorganic materials 0.000 claims description 7
- 238000004891 communication Methods 0.000 claims description 4
- 239000002910 solid waste Substances 0.000 abstract description 8
- 230000007062 hydrolysis Effects 0.000 abstract description 6
- 238000006460 hydrolysis reaction Methods 0.000 abstract description 6
- 239000002699 waste material Substances 0.000 abstract description 6
- 238000007599 discharging Methods 0.000 description 19
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 16
- 239000000377 silicon dioxide Substances 0.000 description 8
- 235000012239 silicon dioxide Nutrition 0.000 description 8
- 239000007788 liquid Substances 0.000 description 7
- VEXZGXHMUGYJMC-UHFFFAOYSA-N Hydrochloric acid Chemical compound Cl VEXZGXHMUGYJMC-UHFFFAOYSA-N 0.000 description 6
- 239000003513 alkali Substances 0.000 description 4
- 230000007613 environmental effect Effects 0.000 description 4
- 238000010926 purge Methods 0.000 description 4
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 4
- 238000012986 modification Methods 0.000 description 3
- 230000004048 modification Effects 0.000 description 3
- 229920006395 saturated elastomer Polymers 0.000 description 3
- 230000002159 abnormal effect Effects 0.000 description 2
- 150000002431 hydrogen Chemical class 0.000 description 2
- IXCSERBJSXMMFS-UHFFFAOYSA-N hydrogen chloride Substances Cl.Cl IXCSERBJSXMMFS-UHFFFAOYSA-N 0.000 description 2
- 229910000041 hydrogen chloride Inorganic materials 0.000 description 2
- 230000003301 hydrolyzing effect Effects 0.000 description 2
- 239000012535 impurity Substances 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 230000003472 neutralizing effect Effects 0.000 description 2
- 239000002245 particle Substances 0.000 description 2
- 239000002994 raw material Substances 0.000 description 2
- 238000001179 sorption measurement Methods 0.000 description 2
- GUHQUYWPKXZPPW-UHFFFAOYSA-N [C].Cl[SiH3] Chemical compound [C].Cl[SiH3] GUHQUYWPKXZPPW-UHFFFAOYSA-N 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000012530 fluid Substances 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 238000004064 recycling Methods 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
Landscapes
- Treating Waste Gases (AREA)
Abstract
The application discloses a back-blowing type waste gas filtering device, which relates to the technical field of filtering devices, and comprises a waste gas filtering filter cartridge, a plurality of active carbon filter cores, a back-blowing component, a plurality of venturi tubes, a first end socket and a second end socket, wherein the active carbon filter cores are arranged in the waste gas filtering filter cartridge at intervals; the back-blowing component is arranged on the side wall of the exhaust gas filtering filter cartridge in a penetrating way; the venturi tubes are arranged in one-to-one correspondence with the active carbon filter cores; the first end socket is sealed at the bottom of the waste gas filtering filter cartridge, and the active carbon filter cartridge is used for filtering the waste gas containing hydrogen conveyed in through a feed inlet on the waste gas filtering filter cartridge to obtain target chlorosilane; the second head cover is located the top of exhaust gas filtration filter cartridge, has seted up the discharge gate on the second head, and target chlorosilane exports through the discharge gate. The application recycles the chlorosilane in the hydrogen-containing waste gas, reduces the hydrolysis amount of the chlorosilane, reduces the solid waste discharge amount and can realize changing waste into valuables.
Description
Technical Field
The application relates to the technical field of filtering devices, in particular to a back-blowing type waste gas filtering device.
Background
In the related art, the treatment principle of the hydrogen-containing waste gas containing a trace amount of chlorosilane is as follows: firstly, hydrolyzing hydrogen-containing waste gas into hydrogen chloride and silicon dioxide, then neutralizing hydrochloric acid by alkali liquor, and then discharging the hydrogen-containing waste gas into the atmosphere at a high point after absorbing the hydrogen-containing waste gas by a water sealed tank.
However, the treatment of this hydrogen-containing off-gas containing a trace amount of chlorosilane has the following problems: a large amount of factory water and 32% liquid alkali are consumed, so that raw material consumption is increased, and the generation amount of solid waste is increased; the hydrolysis generates a large amount of silicon dioxide, and the silicon dioxide is used as solid waste for landfill after being filtered by a filter press, so that the environmental protection disposal cost is increased; the particle size of the silicon dioxide is small, and the conventional filter press cannot effectively remove suspended matters in the effluent, so that the suspended matters in the effluent cannot reach the emission standards, the environmental impact is caused, and the treatment difficulty is increased; chlorosilanes are treated as waste and cannot be effectively utilized.
Disclosure of utility model
The present application aims to solve at least one of the technical problems existing in the prior art. Therefore, the application provides a back-blowing type waste gas filtering device which is used for recycling hydrogen-containing waste gas containing chlorosilane, reducing the hydrolysis amount of the chlorosilane and the solid waste discharge amount, and changing waste into valuables.
The application provides a back-blowing type waste gas filtering device, which comprises:
The exhaust gas filtering filter cartridge is provided with a feed inlet on the side wall;
The active carbon filter elements are arranged in the exhaust gas filtering filter cartridge at intervals;
The back-blowing assembly is arranged on the side wall of the exhaust gas filtering filter cartridge in a penetrating manner, a plurality of back-blowing openings are formed in the back-blowing assembly, each back-blowing opening is arranged in one-to-one correspondence with the active carbon filter element, and the back-blowing assembly is used for introducing nitrogen into the exhaust gas filtering filter cartridge;
The venturi tubes are arranged in one-to-one correspondence with the active carbon filter cores, are arranged at the tops of the corresponding active carbon filter cores, and are arranged close to the blowback openings corresponding to the active carbon filter cores;
The first end socket is sealed at the bottom of the exhaust gas filtering filter cylinder, a drain outlet is formed in the first end socket, and the active carbon filter element is used for filtering the exhaust gas containing hydrogen conveyed in through the feed inlet to obtain target chlorosilane;
The second head is covered on the top of the exhaust gas filtering filter cylinder, one end of the back blowing component, which is positioned inside the exhaust gas filtering filter cylinder, is arranged between the active carbon filter core and the second head, a discharge hole is formed in the second head, and the target chlorosilane is output through the discharge hole.
The back-blowing type waste gas filtering device provided by the embodiment of the application has at least the following beneficial effects: the method comprises the steps that a plurality of active carbon filter cores are arranged in the middle of an exhaust gas filtering filter cylinder at intervals, a first end socket and a second end socket are arranged at two ends of the exhaust gas filtering filter cylinder, the exhaust gas filtering filter cylinder is sealed, hydrogen-containing waste gas containing chlorosilane is introduced into the active carbon filter core through a feed inlet, the hydrogen-containing waste gas is sequentially pressurized and cooled, then the active carbon is used for adsorbing the chlorosilane, after the active carbon is adsorbed and saturated with the chlorosilane, nitrogen is introduced into a blowback port for purging, the adsorbed active carbon chlorosilane is regenerated, and the regenerated target chlorosilane is output through a discharge port. Through the arrangement, the hydrogen-containing waste gas containing chlorosilane is recycled, so that the hydrolysis amount of the chlorosilane is reduced, the solid waste discharge amount is reduced, and waste materials can be changed into things of value.
According to some embodiments of the application, the blowback assembly comprises a first blowback pipe and a second blowback pipe, the first blowback pipe and the second blowback pipe are symmetrically arranged on two side walls penetrating through the exhaust gas filtering filter cartridge, a plurality of blowback openings are respectively formed in one side, close to the activated carbon filter cartridge, of the first blowback pipe and the second blowback pipe, and each activated carbon filter cartridge is arranged opposite to the corresponding blowback opening.
According to some embodiments of the application, the blowback exhaust gas filtration apparatus further comprises a cartridge support member provided on an outer sidewall of the exhaust gas filtration cartridge, and the cartridge support member is located at a middle position of the exhaust gas filtration cartridge.
According to some embodiments of the application, two filter cartridge supports are provided, and the two filter cartridge supports are symmetrically arranged on two outer side walls of the exhaust gas filtering filter cartridge.
According to some embodiments of the application, the exhaust gas filter cartridge is provided with a plurality of differential pressure gauge interfaces.
According to some embodiments of the application, the first end enclosure is of an inverted conical structure, a cleaning opening is further formed in the side wall, close to the sewage outlet, of the first end enclosure, and the back-blowing type waste gas filtering device further comprises a cleaning structure, and the cleaning structure penetrates through the side wall of the first end enclosure through the cleaning opening and is arranged close to the sewage outlet.
According to some embodiments of the application, the back-flushing exhaust gas filtering device further comprises an observation mechanism, wherein the observation mechanism is arranged on the side wall of the first sealing head.
According to some embodiments of the application, the blowback exhaust gas filtration apparatus further comprises a feed structure coupled to the exhaust gas filtration cartridge and in communication with the plurality of activated carbon cartridges through the feed port, the feed structure for delivering the hydrogen-containing exhaust gas into the exhaust gas filtration cartridge through the feed port.
According to some embodiments of the application, the back-blowing type exhaust gas filtering device further comprises a discharging structure, wherein the discharging structure is arranged on the second sealing head and is communicated with the activated carbon filter cores through the discharging holes, and the discharging structure is used for outputting the target chlorosilane conveyed to the discharging holes.
According to some embodiments of the application, the blowback type exhaust gas filtering apparatus further comprises a blow-down structure, the blow-down structure is connected with the first seal head, and the blow-down structure is communicated with the interior of the exhaust gas filtering cartridge through the blow-down outlet, and the blow-down structure is used for exhausting the exhaust gas in the activated carbon filter cartridge.
Additional aspects and advantages of the application will be set forth in part in the description which follows, and in part will be obvious from the description, or may be learned by practice of the application.
Drawings
Additional aspects and advantages of the present application will become apparent and readily appreciated from the following description of the embodiments, taken in conjunction with the accompanying drawings, in which:
fig. 1 is a schematic structural diagram of a blowback type exhaust gas filtering apparatus according to an embodiment of the present application;
FIG. 2 is a top view of an exhaust gas filtration cartridge provided by an embodiment of the present application;
Fig. 3 is a schematic structural view of an installed venturi provided by an embodiment of the present application.
Reference numerals:
A back-blowing type exhaust gas filtering device 100;
The waste gas filtering filter cartridge 110, the first seal head 111, the pollution discharge structure 112, the cleaning structure 113, the observation mechanism 114, the second seal head 115, the discharging structure 116, the filter cartridge supporting piece 117, the differential pressure meter interface 118 and the activated carbon filter element 119;
A first blowback pipe 120, a second blowback pipe 121, a venturi 122, and a blowback port 123;
A first connector 130, a second connector 131, a connecting flange 132, a feed structure 133.
Detailed Description
Embodiments of the present application are described in detail below, examples of which are illustrated in the accompanying drawings, wherein like or similar reference numerals refer to like or similar elements or elements having like or similar functions throughout. The embodiments described below by referring to the drawings are illustrative only and are not to be construed as limiting the application.
In the description of the present application, it should be understood that references to orientation descriptions such as upper, lower, front, rear, left, right, etc. are based on the orientation or positional relationship shown in the drawings, are merely for convenience of description of the present application and to simplify the description, and do not indicate or imply that the apparatus or elements referred to must have a particular orientation, be constructed and operated in a particular orientation, and thus should not be construed as limiting the present application.
In the description of the present application, the description of the first and second is only for the purpose of distinguishing technical features, and should not be construed as indicating or implying relative importance or implying the number of technical features indicated or the precedence of the technical features indicated.
In the description of the present application, unless explicitly defined otherwise, terms such as arrangement, installation, connection, etc. should be construed broadly and the specific meaning of the terms in the present application can be reasonably determined by a person skilled in the art in combination with the specific contents of the technical scheme.
In the related art, the treatment principle of the hydrogen-containing waste gas containing a trace amount of chlorosilane is as follows: firstly, hydrolyzing hydrogen-containing waste gas into hydrogen chloride and silicon dioxide, then neutralizing hydrochloric acid by alkali liquor, and then discharging the hydrogen-containing waste gas into the atmosphere at a high point after absorbing the hydrogen-containing waste gas by a water sealed tank.
However, the treatment of this hydrogen-containing off-gas containing a trace amount of chlorosilane has the following problems: a large amount of factory water and 32% liquid alkali are consumed, so that raw material consumption is increased, and the generation amount of solid waste is increased; the hydrolysis generates a large amount of silicon dioxide, and the silicon dioxide is used as solid waste for landfill after being filtered by a filter press, so that the environmental protection disposal cost is increased; the particle size of the silicon dioxide is small, and the conventional filter press cannot effectively remove suspended matters in the effluent, so that the suspended matters in the effluent cannot reach the emission standards, the environmental impact is caused, and the treatment difficulty is increased; chlorosilanes are treated as waste and cannot be effectively utilized.
In order to solve the above-mentioned problems, the present application provides a back-blowing type exhaust gas filtering apparatus 100, and embodiments of the present application are further described below with reference to the accompanying drawings.
Referring to fig. 1 to 3, the present application provides a back-blowing type exhaust gas filtering device 100, which comprises an exhaust gas filtering cartridge 110, a plurality of activated carbon filter cores 119, a back-blowing assembly, a plurality of venturi tubes 122, a first seal head 111 and a second seal head 115, wherein a feed inlet is formed on the side wall of the exhaust gas filtering cartridge 110; a plurality of activated carbon cartridges 119 are disposed in the exhaust gas filtration cartridge 110 at intervals; the back-blowing component is arranged on the side wall penetrating through the exhaust gas filtering filter cartridge 110, a plurality of back-blowing openings 123 are formed in the back-blowing component, each back-blowing opening 123 is arranged in one-to-one correspondence with the active carbon filter element 119, and the back-blowing component is used for introducing nitrogen into the exhaust gas filtering filter cartridge 110; the venturi tubes 122 are arranged in one-to-one correspondence with the activated carbon filter cores 119, and the venturi tubes 122 are arranged at the tops of the corresponding activated carbon filter cores 119 and are close to the blowback ports 123 corresponding to the activated carbon filter cores 119; the first end enclosure 111 is sealed at the bottom of the exhaust gas filtering cartridge 110, a drain outlet is formed in the first end enclosure 111, and the activated carbon filter element 119 is used for filtering the hydrogen-containing exhaust gas conveyed through the feed inlet to obtain target chlorosilane; the second head 115 covers the top of the exhaust gas filtering cartridge 110, one end of the blowback component, which is positioned inside the exhaust gas filtering cartridge 110, is arranged between the activated carbon filter element 119 and the second head 115, a discharge hole is arranged on the second head 115, and the target chlorosilane is output through the discharge hole.
In some embodiments, the blowback exhaust gas filtering apparatus 100 further includes a filter element fixing plate, on which a plurality of filter element mounting holes are formed, each filter element mounting hole is correspondingly provided with an activated carbon filter element 119, and each activated carbon filter element 119 is penetrated through the filter element fixing plate by the corresponding filter element mounting hole; each activated carbon filter element 119 is correspondingly provided with a bolt, and each activated carbon filter element 119 is connected with the filter element fixing plate through the corresponding bolt.
In some embodiments, the exhaust gas filtration cartridge 110 is a cylindrical hollow cylinder; in other embodiments, the exhaust gas filtering cartridge 110 may be configured in other shapes, and embodiments of the present application are not limited in this regard.
It should be noted that, the feed port is formed on the side wall of the exhaust gas filtering cartridge 110 and is close to the blowback component, and the venturi tube 122 is inserted into one end of the activated carbon filter element 119 close to the blowback component.
In the application, a plurality of active carbon filter cores 119 are arranged in the middle of an exhaust gas filtering filter cylinder 110, a first end socket 111 and a second end socket 115 are arranged at two ends of the exhaust gas filtering filter cylinder 110, the exhaust gas filtering filter cylinder 110 is sealed, after hydrogen-containing waste gas containing chlorosilane is introduced into the active carbon filter core 119 through a feed inlet, the hydrogen-containing waste gas is sequentially pressurized and cooled, then the active carbon is adopted to adsorb the chlorosilane, after the active carbon adsorbs the chlorosilane to be saturated, nitrogen is introduced into the active carbon through a back blowing port 123 to purge, the chlorosilane adsorbed on the active carbon is regenerated, and the regenerated target chlorosilane is output through a discharge port. Through the arrangement, the hydrogen-containing waste gas containing chlorosilane is recycled, so that the hydrolysis amount of the chlorosilane is reduced, the solid waste discharge amount is reduced, and waste materials can be changed into things of value.
Specifically, after hydrogen-containing waste gas containing chlorosilane is introduced into the activated carbon filter element 119 through a feed inlet, the hydrogen-containing waste gas is pressurized and cooled, then the activated carbon is adopted to adsorb the chlorosilane in the hydrogen-containing waste gas, after the activated carbon adsorbs the chlorosilane to be saturated, the activated carbon adsorption column is heated and depressurized, nitrogen is introduced into the back-blowing component and is blown through the back-blowing port 123, and the chlorosilane adsorbed on the activated carbon is regenerated; cooling and condensing the regenerated chlorosilane to-40 ℃, performing gas-liquid separation, heating the gas-phase chlorosilane, returning to the pressurizing process, outputting the separated liquid chlorosilane through a discharge hole, and removing impurities from the liquid chlorosilane by adopting a resin adsorption tower, wherein the liquid chlorosilane can be used in a system.
Referring to fig. 1, it can be understood that the blowback assembly includes a first blowback pipe 120 and a second blowback pipe 121, the first blowback pipe 120 and the second blowback pipe 121 are symmetrically disposed on two sidewalls of the exhaust gas filtering cartridge 110, a plurality of blowback ports 123 are disposed on one sides of the first blowback pipe 120 and the second blowback pipe 121, which are close to the activated carbon filter cores 119, and each activated carbon filter core 119 is disposed opposite to the corresponding blowback port 123.
In some embodiments, referring to fig. 2, a plurality of first blowback pipes 120 and a plurality of second blowback pipes 121 are provided, the plurality of first blowback pipes 120 are arranged side by side at intervals across the sidewall of the exhaust gas filter cartridge 110, and the plurality of second blowback pipes 121 are arranged side by side at intervals across the other sidewall of the exhaust gas filter cartridge 110 and are symmetrically arranged with the plurality of first blowback pipes 120. The chlorosilane adsorbed on the activated carbon is regenerated by providing a first back-blowing pipe 120 and a second back-blowing pipe 121 to introduce nitrogen and purge through a back-blowing port 123; or the exhaust gas filtering cartridge 110 is introduced with gas through the first back-blowing pipe 120 and the second back-blowing pipe 121 to purge the venturi tube 122 and the exhaust gas filtering cartridge, so as to achieve the aim of cleaning.
Referring to fig. 1, it can be appreciated that the blowback exhaust gas filtering apparatus 100 further includes a cartridge support 117, the cartridge support 117 being provided at an outer sidewall of the exhaust gas filtering cartridge 110, and the cartridge support 117 being located at an intermediate position of the exhaust gas filtering cartridge 110.
The exhaust gas filter cartridge 110 is supported and fixed by providing the cartridge support 117 on the outer sidewall of the exhaust gas filter cartridge 110 and the cartridge support 117 is located at the middle position of the exhaust gas filter cartridge 110 so that the exhaust gas filter cartridge 110 is hung by the cartridge support 117.
Referring to fig. 1, it can be appreciated that the cartridge support 117 is provided in two, and that the two cartridge support 117 are symmetrically provided at both outer side walls of the exhaust gas filtering cartridge 110.
It should be noted that, the cartridge supporting members 117 are symmetrically disposed on the outer side walls of the two sides of the exhaust gas filtering cartridge 110, so that the exhaust gas filtering cartridge 110 is better hung by the two cartridge supporting members 117, the symmetrical stability is improved, and the exhaust gas filtering cartridge 110 is supported and fixed.
In some embodiments, referring to fig. 2, cartridge supports 117 are provided in four, four cartridge supports 117 are provided on the outer sidewalls of the four sides of exhaust gas filtration cartridge 110,
Referring to FIG. 1, it can be appreciated that a plurality of differential pressure gauge interfaces 118 are provided on the exhaust filter cartridge 110.
The differential pressure gauge interface 118 is provided to connect with an external differential pressure gauge, and the differential pressure gauge is used in cooperation with the venturi tube 122 to measure the flow rate of the fluid, and may be used to measure the liquid level and the resistance of a pipe, a tower apparatus, or the like.
In the present embodiment, referring to fig. 1 to 2, two differential pressure gauge interfaces 118 are provided, one differential pressure gauge interface 118 being provided on the second head 115 and being provided near the exhaust port; the other differential pressure gauge port 118 is provided in the sidewall of the exhaust gas filter cartridge 110 and is disposed symmetrically to the air inlet.
It should be noted that, by setting the differential pressure gauge interface 118 so as to connect with an external differential pressure gauge, the differential pressure gauge displays the pressure difference in the current exhaust gas filtering cartridge 110, and whether the internal pressure of the exhaust gas filtering cartridge 110 is normal can be timely found through the change of the pressure difference, so that the activated carbon filter element 119 can be timely adjusted or replaced, and the normal operation and the filtering effect of the back-blowing type exhaust gas filtering device 100 are ensured; meanwhile, the differential pressure gauge can also help an operator determine whether cleaning or maintenance of the blowback type exhaust gas filtration apparatus 100 is required.
Referring to fig. 1, it can be understood that the first sealing head 111 has an inverted conical structure, a cleaning opening is further formed on a side wall of the first sealing head 111, which is close to the sewage outlet, and the back-blowing type exhaust gas filtering device 100 further includes a cleaning structure 113, where the cleaning structure 113 penetrates through the side wall of the first sealing head 111 through the cleaning opening and is disposed close to the sewage outlet.
It should be noted that, the cleaning structure 113 is a curved pipe, the curved pipe penetrates through the side wall of the first seal head 111, the curved portion of the curved pipe is disposed corresponding to the sewage outlet, and the cleaning structure 113 is connected to an external pump to blow in gas into the cleaning structure 113 to clean the sewage outlet.
Referring to fig. 1, it can be appreciated that the blowback exhaust gas filtering apparatus 100 further includes an observation mechanism 114, and the observation mechanism 114 is disposed on a side wall of the first seal head 111.
By providing the observation mechanism 114, an operator can observe the cleaning degree of the inside of the back-blowing type exhaust gas filtering device 100 and whether the back-blowing type exhaust gas filtering device 100 is abnormal in operation outside the exhaust gas filtering cartridge 110, so that the inside of the exhaust gas filtering cartridge 110 can be cleaned and maintained in time by opening the observation mechanism 114 when the inside of the back-blowing type exhaust gas filtering device 100 is not clean or is abnormal in operation.
Referring to fig. 1, it can be appreciated that the blowback exhaust gas filtration apparatus 100 further includes a feed structure 133, the feed structure 133 being coupled to the exhaust gas filtration cartridge 110, and the feed structure 133 being in communication with the plurality of activated carbon cartridges 119 through a feed port, the feed structure 133 being configured to deliver hydrogen-containing exhaust gas into the exhaust gas filtration cartridge 110 through the feed port.
By providing the feeding structure 133, the hydrogen-containing exhaust gas is fed to the inside of the exhaust gas filtering cartridge 110 through the feeding structure 133, so that the plurality of activated carbon cartridges 119 in the exhaust gas filtering cartridge 110 perform the exhaust gas filtering on the exhaust gas filtering cartridge 110.
Referring to fig. 1, it can be understood that the blowback exhaust gas filtering apparatus 100 further includes a discharging structure 116, the discharging structure 116 is disposed on the second seal head 115, and the discharging structure 116 is communicated with the plurality of activated carbon filter elements 119 through a discharging port, and the discharging structure 116 is used for outputting the target chlorosilane conveyed to the discharging port.
By arranging the discharging structure 116, the target chlorosilane filtered by the carbon impurities is output through the discharging structure 116, so that the target chlorosilane is obtained.
Referring to fig. 1, it can be understood that the blowback type exhaust gas filtering apparatus 100 further includes a drain structure 112, the drain structure 112 is connected to the first seal head 111, and the drain structure 112 is communicated with the interior of the exhaust gas filtering cartridge 110 through a drain, and the drain structure 112 is used for discharging exhaust gas in the activated carbon filter element 119.
After the chlorosilane is pumped by the pump through the discharging structure 116, the remaining exhaust gas flows to the bottom of the exhaust gas filtering cartridge 110, and flows out to the discharging structure 112 through the drain outlet for output.
In some embodiments, referring to fig. 1, the exhaust gas filtering device further includes a first connecting member 130 and a second connecting member 131, where the first connecting member 130 and the second connecting member 131 sequentially penetrate through two side walls of the exhaust gas filtering cartridge 110, and the first connecting member 130 and the second connecting member 131 are connected through a connecting flange 132.
In the description of the present specification, reference to the terms "one embodiment," "some embodiments," "illustrative embodiments," "examples," "specific examples," or "some examples," etc., means that a particular feature, structure, material, or characteristic described in connection with the embodiment or example is included in at least one embodiment or example of the application. In this specification, schematic representations of the above terms do not necessarily refer to the same embodiments or examples. Furthermore, the particular features, structures, materials, or characteristics described may be combined in any suitable manner in any one or more embodiments or examples.
While the foregoing is directed to the preferred embodiments of the present application, it will be appreciated by those skilled in the art that changes and modifications may be made without departing from the principles of the application, such changes and modifications are also intended to be within the scope of the application.
While embodiments of the present application have been shown and described, it will be understood by those of ordinary skill in the art that: many changes, modifications, substitutions and variations may be made to the embodiments without departing from the spirit and principles of the application, the scope of which is defined by the claims and their equivalents.
Claims (10)
1. A blowback exhaust gas filtering apparatus, comprising:
The exhaust gas filtering filter cartridge is provided with a feed inlet on the side wall;
The active carbon filter elements are arranged in the exhaust gas filtering filter cartridge at intervals;
The back-blowing assembly is arranged on the side wall of the exhaust gas filtering filter cartridge in a penetrating manner, a plurality of back-blowing openings are formed in the back-blowing assembly, each back-blowing opening is arranged in one-to-one correspondence with the active carbon filter element, and the back-blowing assembly is used for introducing nitrogen into the exhaust gas filtering filter cartridge;
The venturi tubes are arranged in one-to-one correspondence with the active carbon filter cores, are arranged at the tops of the corresponding active carbon filter cores, and are arranged close to the blowback openings corresponding to the active carbon filter cores;
The first end socket is sealed at the bottom of the exhaust gas filtering filter cartridge, a drain outlet is formed in the first end socket, and the active carbon filter element is used for filtering the exhaust gas of the hydrogen-containing exhaust gas containing chlorosilane conveyed through the feed inlet to obtain target chlorosilane;
The second head is covered on the top of the exhaust gas filtering filter cylinder, one end of the back blowing component, which is positioned inside the exhaust gas filtering filter cylinder, is arranged between the active carbon filter core and the second head, a discharge hole is formed in the second head, and the target chlorosilane is output through the discharge hole.
2. The back-blowing type waste gas filtering device according to claim 1, wherein the back-blowing assembly comprises a first back-blowing pipe and a second back-blowing pipe, the first back-blowing pipe and the second back-blowing pipe are symmetrically arranged on two side walls penetrating through the waste gas filtering filter cartridge, a plurality of back-blowing ports are formed in one sides, close to the active carbon filter cores, of the first back-blowing pipe and the second back-blowing pipe, and each active carbon filter core is arranged opposite to the corresponding back-blowing port.
3. The blowback exhaust gas filtration apparatus of claim 1, further comprising a cartridge support member disposed on an outer sidewall of the exhaust gas filtration cartridge, the cartridge support member being located at a mid-position of the exhaust gas filtration cartridge.
4. A blowback exhaust gas filtering apparatus as recited in claim 3, wherein said cartridge support members are provided in two, and said cartridge support members are symmetrically provided on both outer side walls of said exhaust gas filtering cartridge.
5. The back-blowing exhaust gas filter apparatus of claim 1, wherein the exhaust gas filter cartridge is provided with a plurality of differential pressure gauge interfaces.
6. The back-flushing type waste gas filtering device according to claim 1, wherein the first sealing head is of an inverted conical structure, a cleaning opening is further formed in the side wall, close to the sewage outlet, of the first sealing head, and the back-flushing type waste gas filtering device further comprises a cleaning structure, and the cleaning structure penetrates through the side wall of the first sealing head through the cleaning opening and is arranged close to the sewage outlet.
7. The back-blowing exhaust gas filtering device of claim 6, further comprising an observation mechanism disposed on a sidewall of the first head.
8. The blowback exhaust gas filtration apparatus of claim 1, further comprising a feed structure coupled to the exhaust gas filtration cartridge and in communication with the plurality of activated carbon filter cartridges through the feed inlet, the feed structure for delivering the hydrogen-containing exhaust gas into the exhaust gas filtration cartridge through the feed inlet.
9. The back-blowing exhaust gas filtering device of claim 1, further comprising a discharge structure disposed on the second head, the discharge structure being in communication with the plurality of activated carbon filter elements through the discharge port, the discharge structure being configured to output the target chlorosilane delivered to the discharge port.
10. The back-blowing exhaust gas filtering device of claim 1, further comprising a blow-down structure connected to the first head and communicating with the interior of the exhaust gas filtering cartridge through the blow-down outlet, the blow-down structure configured to expel exhaust gas from the activated carbon cartridge.
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| Application Number | Priority Date | Filing Date | Title |
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| CN202322383888.9U CN220802430U (en) | 2023-09-04 | 2023-09-04 | Back-flushing type waste gas filtering device |
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| Application Number | Priority Date | Filing Date | Title |
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| CN202322383888.9U CN220802430U (en) | 2023-09-04 | 2023-09-04 | Back-flushing type waste gas filtering device |
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| CN220802430U true CN220802430U (en) | 2024-04-19 |
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| CN202322383888.9U Active CN220802430U (en) | 2023-09-04 | 2023-09-04 | Back-flushing type waste gas filtering device |
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