CN220792821U - Heating device of gas supply system - Google Patents
Heating device of gas supply system Download PDFInfo
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- CN220792821U CN220792821U CN202321858374.8U CN202321858374U CN220792821U CN 220792821 U CN220792821 U CN 220792821U CN 202321858374 U CN202321858374 U CN 202321858374U CN 220792821 U CN220792821 U CN 220792821U
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- interface
- supply system
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- 238000010438 heat treatment Methods 0.000 title claims abstract description 32
- 230000006698 induction Effects 0.000 claims description 20
- 239000012774 insulation material Substances 0.000 claims description 4
- 230000008676 import Effects 0.000 claims 1
- 230000001105 regulatory effect Effects 0.000 abstract description 18
- 230000033228 biological regulation Effects 0.000 abstract description 4
- 230000005674 electromagnetic induction Effects 0.000 abstract description 4
- 230000000712 assembly Effects 0.000 abstract description 2
- 238000000429 assembly Methods 0.000 abstract description 2
- 230000007547 defect Effects 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000002955 isolation Methods 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 230000008569 process Effects 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 229910000831 Steel Inorganic materials 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- 230000008020 evaporation Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 239000010959 steel Substances 0.000 description 1
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- General Induction Heating (AREA)
Abstract
The utility model relates to a heating device of a gas supply system, which is characterized in that a double-channel electromagnetic induction heater is added to the existing gas supply system, and the surface of a pipeline through which gas in the heater flows is heated after induced current is formed by an electromagnetic induction heating principle, so that the heating temperature of the gas in the pipeline is accurately controlled, the usability and the reliability of the whole gas supply system are improved, and the use cost of gas equipment is reduced. The utility model has the advantages that: (1) Under the condition that only one-stage pressure regulating valve is adopted for pressure regulation, the high-pressure high-flow gas supply can ensure that the temperature is not reduced after the gas pressure regulation and the conveying pressure is stable, and meanwhile, a group of pressure reducing valve assemblies can be reduced, so that the overall use cost is reduced; (2) The pipeline and the valve can be ensured to run in a stable gas temperature environment, and the usability and reliability of the pipeline and the valve are improved.
Description
Technical Field
The utility model relates to a heating device of a gas supply system, in particular to a heating device of a special gas supply system for semiconductor production.
Background
In the special gas supply system for semiconductor production, a part of gas supply system needs to heat the gas output by a steel cylinder to increase evaporation capacity and pipeline heat tracing transportation, particularly in the process of high-flow gas transportation, the gas temperature can be greatly reduced and even liquefied due to the cooling effect in the process of reducing the pressure of the gas, and thus the gas supply flow is insufficient and the pipe fittings are damaged due to low temperature.
The general design adopted in the prior art is shown in figure 1, (1) the two-stage pressure regulating valve is used for regulating the pressure of the gas, so that the throttling effect is reduced; (2) The pipeline in front of the two-stage pressure regulating valve is electrically heated, heat is conducted to gas in a contact conduction mode, but the adopted traditional contact resistance heating can cause low power density, and the defects of high heat conduction loss, low heating efficiency and increased use cost of gas equipment exist.
Disclosure of Invention
The utility model provides a heating device of a gas supply system, which aims to overcome the defects in the prior art,
the technical solution of the utility model is as follows: a dual-channel electromagnetic induction heater is added to an existing gas supply system, and induction current is formed on the surface of a pipeline through which gas in the heater flows through an electromagnetic induction heating principle to generate heat, so that the heating temperature of the gas in the pipeline is accurately controlled, the usability and reliability of the whole gas supply system are improved, and the use cost of gas equipment is reduced.
Specifically, a gas supply system heating device, its structure includes gas cylinder and one end and the A gas pipeline of gas cylinder intercommunication, be equipped with first governing valve and first pneumatic valve on the A gas pipeline in proper order, the first gas interface of A gas pipeline other end intercommunication magnetic induction heater, the second gas interface of magnetic induction heater is through the pipeline intercommunication magnetic induction heater's that is equipped with in proper order air-vent valve, isolation valve and check valve third gas interface, the fourth gas interface of magnetic induction heater is through the external gas equipment that uses of pipeline that is equipped with second pneumatic valve and second governing valve in proper order, first gas interface and second gas interface and third gas interface and fourth gas interface are the both ends gas inlet and outlet of two gas channels in the magnetic induction heater. Under the condition of only adopting a primary pressure regulating valve to regulate the pressure, the temperature is not reduced after the pressure of the gas is regulated, the conveying pressure is stable, a group of pressure reducing valve components is reduced, and the overall use cost can be reduced.
Preferably, the magnetic induction heater comprises a housing and a junction box arranged at one end of the housing, a parallel spiral heating pipe is arranged in the housing and connected with the junction box, each spiral heating pipe is sleeved outside a B gas pipeline, a heat insulation material is arranged between the housing and the spiral heating pipe, two ends of one B gas pipeline are respectively connected with a first gas interface and a second gas interface, and two ends of the other B gas pipeline are respectively connected with a third gas interface and a fourth gas interface.
The utility model has the advantages that: (1) Under the condition that only one-stage pressure regulating valve is adopted for pressure regulation, the high-pressure high-flow gas supply can ensure that the temperature is not reduced after the gas pressure regulation and the conveying pressure is stable, and meanwhile, a group of pressure reducing valve assemblies can be reduced, so that the overall use cost is reduced;
(2) The pipeline and the valve can be ensured to run in a stable gas temperature environment, and the usability and reliability of the pipeline and the valve are improved.
Drawings
Fig. 1 is a schematic structural view of a heating apparatus of a prior art gas supply system.
FIG. 2 is a schematic diagram of a heating device of the gas supply system of the present utility model.
Fig. 3 is a schematic view of the structure of the magnetic induction heater of fig. 2.
In the figure, 1 is a gas cylinder, 2 is an A gas pipe, 3 is a first regulating valve, 4 is a first pneumatic valve, 5 is a first contact type resistance heater, 6 is a first-stage pressure regulating valve, 7 is a second contact type resistance heater, 8 is a second-stage pressure regulating valve, 9 is a second pneumatic valve, 10 is a second regulating valve, 11 is a magnetic induction heater, 111 is a first gas interface, 112 is a second gas interface, 113 is a third gas interface, 114 is a fourth gas interface, 12 is a shell, 13 is a junction box, 14 is a heat insulation material, 15 is a spiral heating pipe, 16 is a B gas pipe, 17 is a pressure regulating valve, 18 is an isolation valve, and 19 is a one-way valve.
Detailed Description
The present utility model will be described in further detail with reference to examples and embodiments.
Example 1
As shown in fig. 2, a heating device of a gas supply system is structured to include a gas cylinder 1 and an a gas pipe 2 with one end communicated with the gas cylinder 1, wherein a first regulating valve 3 and a first pneumatic valve 4 are sequentially arranged on the a gas pipe 2, the other end of the a gas pipe 2 is communicated with a first gas port 111 of a magnetic induction heater 11, a second gas port 112 of the magnetic induction heater 11 is communicated with a third gas port 113 of the magnetic induction heater 11 through a pipe sequentially provided with a pressure regulating valve 17, an isolating valve 18 and a one-way valve 19, a fourth gas port 114 of the magnetic induction heater 11 is communicated with a gas device for external connection through a pipe sequentially provided with a second pneumatic valve 9 and a second regulating valve 10, and the first gas port 111, the second gas port 112 and the third gas port 113 and the fourth gas port 114 are gas inlets and outlets at two ends of two gas channels in the magnetic induction heater 11.
When the air conditioner works, air sequentially passes through the air bottle 1, the A air pipeline 2, the first regulating valve 3, the first pneumatic valve 4, the first air interface 111 (air inlet), the second air interface 112 (air outlet, the heating temperature is 55-60 ℃), the pressure regulating valve 17, the isolating valve 18, the one-way valve 19, the third air interface 113 (air inlet), the fourth air interface 114 (air outlet, the heating temperature is 55-60 ℃), the second pneumatic valve 9, the 9-second regulating valve 10 and the air consumption equipment.
Example 2
As shown in fig. 3, the magnetic induction heater 11 is in the prior art, and comprises a stainless steel shell 12 and a junction box 13 arranged at one end of the shell 12, 2 parallel spiral heating pipes 15 are arranged in the shell 12, the spiral heating pipes 15 are connected with the junction box 13, each spiral heating pipe 15 is sleeved outside a B gas pipeline 16, a heat insulation material 14 is arranged between the shell 12 and the spiral heating pipes 15, two ends of one B gas pipeline 16 are respectively connected with a first gas interface 111 and a second gas interface 112, and two ends of the other B gas pipeline 16 are respectively connected with a third gas interface 113 and a fourth gas interface 114.
The above components are all of the prior art, and any model and existing design that can achieve their corresponding functions can be used by those skilled in the art.
The foregoing is merely a preferred embodiment of the present utility model, and it should be noted that modifications and improvements could be made by those skilled in the art without departing from the inventive concept, which falls within the scope of the present utility model.
Claims (2)
1. The utility model provides a gas supply system heating device, its structure includes gas cylinder (1) and one end and A gas pipeline (2) of gas cylinder (1) intercommunication, its characterized in that, A gas pipeline (2) on be equipped with first governing valve (3) and first pneumatic valve (4) in proper order, first gas interface (111) of A gas pipeline (2) other end intercommunication magnetic induction heater (11), second gas interface (112) of magnetic induction heater (11) are through being equipped with air-vent valve (17) in proper order, isolating valve (18) and the pipeline intercommunication magnetic induction heater (11) third gas interface (113) of check valve (19), the external gas equipment of pipeline of second pneumatic valve (9) and second governing valve (10) are passed through in proper order to fourth gas interface (114), first gas interface (111) and second gas interface (112) and third gas interface (113) and fourth gas interface (114) are the both ends gas import and export of two gas channels in magnetic induction heater (11).
2. A gas supply system heating device as claimed in claim 1, characterized in that the magnetic induction heater (11) comprises a housing (12) and a junction box (13) arranged at one end of the housing (12), 2 parallel spiral heating pipes (15) are arranged in the housing (12), the spiral heating pipes (15) are connected with the junction box (13), each spiral heating pipe (15) is sleeved outside a B gas pipeline (16), a heat insulation material (14) is arranged between the housing (12) and the spiral heating pipe (15), two ends of one B gas pipeline (16) are respectively connected with a first gas interface (111) and a second gas interface (112), and two ends of the other B gas pipeline (16) are respectively connected with a third gas interface (113) and a fourth gas interface (114).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202321858374.8U CN220792821U (en) | 2023-07-14 | 2023-07-14 | Heating device of gas supply system |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202321858374.8U CN220792821U (en) | 2023-07-14 | 2023-07-14 | Heating device of gas supply system |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN220792821U true CN220792821U (en) | 2024-04-16 |
Family
ID=90664822
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202321858374.8U Active CN220792821U (en) | 2023-07-14 | 2023-07-14 | Heating device of gas supply system |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN220792821U (en) |
-
2023
- 2023-07-14 CN CN202321858374.8U patent/CN220792821U/en active Active
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