CN220788869U - Germanium single crystal furnace with leakage drainage mechanism - Google Patents
Germanium single crystal furnace with leakage drainage mechanism Download PDFInfo
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- CN220788869U CN220788869U CN202322592549.1U CN202322592549U CN220788869U CN 220788869 U CN220788869 U CN 220788869U CN 202322592549 U CN202322592549 U CN 202322592549U CN 220788869 U CN220788869 U CN 220788869U
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- furnace
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- 239000013078 crystal Substances 0.000 title claims abstract description 31
- 229910052732 germanium Inorganic materials 0.000 title claims abstract description 28
- GNPVGFCGXDBREM-UHFFFAOYSA-N germanium atom Chemical compound [Ge] GNPVGFCGXDBREM-UHFFFAOYSA-N 0.000 title claims abstract description 26
- 230000007246 mechanism Effects 0.000 title claims abstract description 22
- 238000007789 sealing Methods 0.000 claims abstract description 29
- 230000000149 penetrating effect Effects 0.000 claims abstract description 10
- 238000010438 heat treatment Methods 0.000 claims abstract description 6
- 230000005540 biological transmission Effects 0.000 claims description 13
- 230000001681 protective effect Effects 0.000 claims description 7
- 238000004891 communication Methods 0.000 claims description 6
- 238000001816 cooling Methods 0.000 claims description 3
- 238000012546 transfer Methods 0.000 claims description 3
- 238000002955 isolation Methods 0.000 abstract description 7
- 230000008859 change Effects 0.000 abstract description 2
- 238000013461 design Methods 0.000 abstract description 2
- 238000001514 detection method Methods 0.000 abstract description 2
- 150000002290 germanium Chemical class 0.000 abstract description 2
- 239000000463 material Substances 0.000 description 5
- 230000000694 effects Effects 0.000 description 3
- 238000009434 installation Methods 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 238000000926 separation method Methods 0.000 description 2
- 239000002699 waste material Substances 0.000 description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
- 230000009471 action Effects 0.000 description 1
- 230000032683 aging Effects 0.000 description 1
- 230000004075 alteration Effects 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000003912 environmental pollution Methods 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 239000000155 melt Substances 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
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- Crystals, And After-Treatments Of Crystals (AREA)
Abstract
The utility model discloses a germanium single crystal furnace with a leakage drainage mechanism, which comprises a lower furnace body for heating germanium single crystals, wherein a furnace cover is fixedly arranged above the lower furnace body by bolts, and an upper furnace body which is long and thin is arranged above the furnace cover in a penetrating manner; the isolating valve is fixedly arranged between the furnace cover and the upper furnace body by utilizing a flange structure; the sealing cover is arranged outside the lower end of the upper furnace body in a penetrating way; the support base is horizontally placed on the ground by utilizing the lower surface support legs. This germanium single crystal furnace with reveal drainage mechanism adopts novel structural design for utilize inside shielding gas of temperature sensor detection device to reveal (because back temperature is very high, so can make around the temperature rise after shielding gas reveals, utilize temperature sensor to detect this change), thereby make the sealed cowling cover outside the isolation valve, thereby utilize the collection jar to collect the shielding gas of revealing, avoid extravagant and remind the staff to overhaul.
Description
Technical Field
The utility model relates to the technical field of single crystal furnaces, in particular to a germanium single crystal furnace with a leakage drainage mechanism.
Background
The single crystal furnace is a device which is protected by a protective gas, melts and lengthens a polycrystalline material into a single crystal material under the heating of a heating device, and can be used for manufacturing a germanium single crystal, which is a semiconductor material, and is widely applied to various electronic equipment.
In the prior art, chinese patent with the grant publication number CN204918837U discloses a single crystal furnace, which comprises: a main furnace body; the auxiliary furnace body is assembled at the upper part of the main furnace body; the support column is positioned at one side of the main furnace body and one side of the auxiliary furnace body; the connecting mechanism is used for connecting the support column with the auxiliary furnace body, wherein the connecting mechanism comprises a rotating shaft and a connecting plate, the rotating shaft is fixed on the side wall of the support column, the connecting plate is fixedly connected with the auxiliary furnace body and is rotationally connected with the support column, the connecting mechanism further comprises a rotary driving mechanism, the connecting plate is connected, and the rotary driving mechanism can drive the connecting plate to drive the auxiliary furnace body to rotate in the axis direction perpendicular to the rotating shaft. Like this, the single crystal growing furnace is owing to rotary driving mechanism's existence, and the staff accessible control rotary driving mechanism promotes the connecting plate and drives vice furnace body and rotate, has replaced in the tradition to promote vice furnace body rotation through the manpower, has reduced the cost of manpower like this, has improved production efficiency … …
The device utilizes the isolation valve to cut off between main furnace body and the vice furnace body when using, but in actual use, the installation position of isolation valve can appear inside shielding gas because of reasons such as sealing washer ageing and metalwork warp and reveal the condition, and shielding gas's revealing can influence the inside pressure value of furnace body to influence the normal use of device, and the gas of revealing causes certain extravagant and environmental pollution.
Disclosure of utility model
The utility model aims to provide a germanium single crystal furnace with a leakage drainage mechanism, so as to solve the problems that the normal use is affected and waste is generated due to the fact that internal protective gas leakage is proposed in the background technology.
In order to achieve the above purpose, the present utility model provides the following technical solutions: the utility model provides a germanium single crystal furnace with reveal drainage mechanism, is including being used for carrying out the lower furnace body of heating to germanium single crystal, lower furnace body top utilizes bolt fixed mounting to have the bell, just the bell top runs through and installs and be long and thin last furnace body, still includes:
the isolating valve is fixedly arranged between the furnace cover and the upper furnace body by utilizing a flange structure and is used for isolating heat transfer between the lower furnace body and the upper furnace body;
the lifting motor is fixedly arranged outside the upper surface of the upper furnace body and is used for lifting the germanium single crystal in the lower furnace body to the upper furnace body for cooling;
The sealing cover is arranged outside the lower end of the upper furnace body in a penetrating manner, and a sealing structure is formed between an inner ring at the upper end of the sealing cover and the outer surface of the upper furnace body;
the support base is horizontally placed on the ground by utilizing lower surface support legs, the whole support base is of an L-shaped structure, and the support base and the upper furnace body are fixedly connected by utilizing a fixing frame;
The mounting plate is fixedly mounted on the lower surface of the lower furnace body and is used for driving the lower furnace body to synchronously move.
Preferably, the seal cover externally mounted has the collection tank that is used for collecting leakage protection gas, just the collection tank passes through the connecting tube who runs through the installation with it and constitutes the communication structure with the seal cover inside, and the protection gas that leaks gets into the collection tank under the water conservancy diversion effect of connecting tube and collects.
Preferably, the outer surface of the lower end of the upper furnace body is fixedly provided with a temperature sensor for detecting leakage of protective gas, and the inner wall of the upper end of the sealing cover is fixedly provided with an electric sliding block.
Preferably, the electric sliding block is linked with the temperature sensor through Bluetooth signal communication, and an up-down sliding structure is formed between the electric sliding block and a linear sliding rod fixedly arranged in the upper furnace body, and the sealing cover is driven to move downwards by the sliding of the electric sliding block outside the linear sliding rod.
Preferably, a high-temperature-resistant rubber ring is fixedly arranged on the upper surface of the furnace cover, and a sealing structure is formed between the rubber ring and the inner wall of the lower end of the sealing cover.
Preferably, a sliding sleeve with an internal thread structure is fixedly arranged outside the middle position of the lower surface of the mounting plate, a transmission screw rod connected with the supporting base in a rotating way is penetratingly arranged inside the sliding sleeve, the transmission screw rod is directly driven by a driving motor, and the sliding sleeve outside the transmission screw rod is driven by the rotation of the transmission screw rod to move the lower furnace body.
Compared with the prior art, the utility model has the beneficial effects that: this germanium single crystal furnace with reveal drainage mechanism adopts novel structural design for utilize inside shielding gas of temperature sensor detection device to reveal (because back temperature is very high, so can make around the temperature rise after shielding gas reveals, utilize temperature sensor to detect this change), thereby make the sealed cowling cover outside the isolation valve, thereby utilize the collection jar to collect the shielding gas of revealing, avoid extravagant and remind the staff to overhaul, its concrete content is as follows:
1. The cooperation between temperature sensor, collection tank, electric slide and the rubber circle is used, utilizes temperature sensor to detect whether there is inside shielding gas revealing, drives the sealed cowling through electric slide at the outside slip of sharp slide bar and moves down when revealing, utilizes the rubber circle to seal it this moment to the shielding gas who leaks gets into under connecting tube's water conservancy diversion effect and collects in the collection tank, avoids extravagant, and the sealed cowling that falls simultaneously can remind the action personnel to overhaul the device.
2. The cooperation between sliding sleeve, transmission lead screw and the support base is used, utilizes driving motor's rotation to drive the transmission lead screw and takes place to rotate to make the outside sliding sleeve of transmission lead screw drive down the furnace body remove, thereby separate between it and the last furnace body, the convenience is to the inside operation of putting into and taking out inside germanium crystal.
Drawings
FIG. 1 is a schematic view of the overall three-dimensional structure of the present utility model;
FIG. 2 is a schematic view of a three-dimensional cross-sectional structure of a seal cover according to the present utility model;
FIG. 3 is a schematic perspective view showing the closed state of the seal cover of the present utility model;
FIG. 4 is a perspective view showing the separation state of the lower furnace body;
fig. 5 is a schematic diagram of the connection relationship between the sliding sleeve and the transmission screw rod.
In the figure: 1. a lower furnace body; 2. a furnace cover; 3. an upper furnace body; 4. an isolation valve; 5. lifting the motor; 6. a sealing cover; 7. a support base; 8. a fixing frame; 9. a mounting plate; 10. a collection tank; 11. a connecting pipe; 12. a temperature sensor; 13. an electric slide block; 14. a linear slide bar; 15. a rubber ring; 16. a sliding sleeve; 17. a transmission screw rod; 18. and driving the motor.
Detailed Description
The following description of the embodiments of the present utility model will be made clearly and completely with reference to the accompanying drawings, in which it is apparent that the embodiments described are only some embodiments of the present utility model, but not all embodiments. All other embodiments, which can be made by those skilled in the art based on the embodiments of the utility model without making any inventive effort, are intended to be within the scope of the utility model.
Referring to fig. 1-5, the present utility model provides a technical solution: the utility model provides a germanium single crystal furnace with reveal drainage mechanism, is including being used for carrying out lower furnace body 1 of heating to germanium single crystal, and lower furnace body 1 top utilizes bolt fixed mounting to have bell 2, and the bell 2 top runs through and installs and be long and thin last furnace body 3, still includes: the isolating valve 4 is fixedly arranged between the furnace cover 2 and the upper furnace body 3 by utilizing a flange structure, and the isolating valve 4 is used for isolating heat transfer between the lower furnace body 1 and the upper furnace body 3; the lifting motor 5 is fixedly arranged outside the upper surface of the upper furnace body 3, and the lifting motor 5 is used for lifting the germanium single crystal in the lower furnace body 1 to the inside of the upper furnace body 3 for cooling; the sealing cover 6 is arranged outside the lower end of the upper furnace body 3 in a penetrating manner, and a sealing structure is formed between the inner ring at the upper end of the sealing cover 6 and the outer surface of the upper furnace body 3;
The collecting tank 10 for collecting leakage protective gas is arranged outside the sealing cover 6, the collecting tank 10 and the sealing cover 6 are internally formed into a communication structure through a connecting pipeline 11 penetrating the collecting tank 10, a temperature sensor 12 for detecting leakage of the protective gas is fixedly arranged on the outer surface of the lower end of the upper furnace body 3, an electric sliding block 13 is fixedly arranged on the inner wall of the upper end of the sealing cover 6, the electric sliding block 13 and the temperature sensor 12 are in linkage through Bluetooth signal communication, an up-down sliding structure is formed between the electric sliding block 13 and a linear sliding rod 14 fixedly arranged in the upper furnace body 3, a high-temperature-resistant rubber ring 15 is fixedly arranged on the upper surface of the furnace cover 2, and a sealing structure is formed between the rubber ring 15 and the inner wall of the lower end of the sealing cover 6;
When the device is used, germanium polycrystal materials are firstly placed into the lower furnace body 1 to be heated and stretched into germanium monocrystal materials, in the process, if internal protective gas leaks (in general, the connection position of the isolation valve 4 leaks), gas leakage (ambient temperature rises when gas leaks) is detected by the temperature sensor 12, then the electric sliding block 13 is notified and started through Bluetooth signals, the electric sliding block 13 moves downwards outside the linear sliding rod 14, so that the sealing cover 6 is driven to move downwards to a position attached to the furnace cover 2, the lower end of the sealing cover 6 is sealed by the rubber ring 15, the leaked gas enters the collecting tank 10 under the guide effect of the connecting pipeline 11 to be collected, the gas waste and the environment pollution are avoided, and meanwhile, the falling sealing cover 6 can remind workers of the equipment, so that maintenance is timely carried out.
The support base 7 is horizontally placed on the ground by using lower surface support legs, the whole support base 7 is of an L-shaped structure, and the support base 7 and the upper furnace body 3 are fixedly connected by using a fixing frame 8; the mounting plate 9 is fixedly arranged on the lower surface of the lower furnace body 1, the mounting plate 9 is used for driving the lower furnace body 1 to synchronously move, a sliding sleeve 16 with an internal thread structure is fixedly arranged outside the middle position of the lower surface of the mounting plate 9, a transmission screw rod 17 in rotary connection with the support base 7 is arranged inside the sliding sleeve 16 in a penetrating manner, and the transmission screw rod 17 is directly driven by a driving motor 18;
When the germanium single crystal in the interior needs to be taken out, firstly, the bolt between the isolation valve 4 and the upper furnace body 3 is loosened, then the driving screw rod 17 is driven to rotate by the driving motor 18, the sliding sleeve 16 which is arranged outside the driving screw rod 17 in a penetrating threaded manner drives the lower furnace body 1 to move to the side surface, the separation of the lower furnace body 1 and the upper furnace body 3 is realized, and then the germanium single crystal in the interior can be taken out.
Although embodiments of the present utility model have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations can be made therein without departing from the principles and spirit of the utility model, the scope of which is defined in the appended claims and their equivalents.
Claims (6)
1. The utility model provides a germanium single crystal furnace with reveal drainage mechanism, is including being used for carrying out lower furnace body (1) of heating to germanium single crystal, lower furnace body (1) top utilizes bolt fixed mounting to have bell (2), just bell (2) top runs through and installs and be long and thin last furnace body (3), its characterized in that still includes:
The isolating valve (4) is fixedly arranged between the furnace cover (2) and the upper furnace body (3) by utilizing a flange structure, and the isolating valve (4) is used for isolating heat transfer between the lower furnace body (1) and the upper furnace body (3);
The lifting motor (5) is fixedly arranged outside the upper surface of the upper furnace body (3), and the lifting motor (5) is used for lifting the germanium single crystal in the lower furnace body (1) to the inside of the upper furnace body (3) for cooling;
The sealing cover (6) is arranged outside the lower end of the upper furnace body (3) in a penetrating manner, and a sealing structure is formed between the inner ring at the upper end of the sealing cover (6) and the outer surface of the upper furnace body (3);
The support base (7) is horizontally placed on the ground by utilizing lower surface support legs, the whole support base (7) is of an L-shaped structure, and the support base (7) and the upper furnace body (3) are fixedly connected by utilizing a fixing frame (8);
the mounting plate (9) is fixedly mounted on the lower surface of the lower furnace body (1), and the mounting plate (9) is used for driving the lower furnace body (1) to synchronously move.
2. The germanium single crystal furnace provided with the leakage drainage mechanism according to claim 1, wherein: the sealing cover (6) is externally provided with a collecting tank (10) for collecting leakage protection gas, and the collecting tank (10) and the inside of the sealing cover (6) form a communication structure through a connecting pipeline (11) penetrating the collecting tank.
3. The germanium single crystal furnace provided with the leakage drainage mechanism according to claim 1, wherein: the outer surface of the lower end of the upper furnace body (3) is fixedly provided with a temperature sensor (12) for detecting leakage of protective gas, and the inner wall of the upper end of the sealing cover (6) is fixedly provided with an electric sliding block (13).
4. A germanium single crystal furnace provided with a leakage drainage mechanism according to claim 3, wherein: the electric sliding block (13) is in linkage with the temperature sensor (12) through Bluetooth signal communication, and an up-down sliding structure is formed between the electric sliding block (13) and a linear sliding rod (14) fixedly arranged in the upper furnace body (3).
5. The germanium single crystal furnace provided with the leakage drainage mechanism according to claim 1, wherein: the upper surface of the furnace cover (2) is fixedly provided with a high-temperature-resistant rubber ring (15), and a sealing structure is formed between the rubber ring (15) and the inner wall of the lower end of the sealing cover (6).
6. The germanium single crystal furnace provided with the leakage drainage mechanism according to claim 1, wherein: the sliding sleeve (16) with an internal thread structure is fixedly arranged outside the middle position of the lower surface of the mounting plate (9), a transmission screw rod (17) which is rotationally connected with the supporting base (7) is arranged inside the sliding sleeve (16) in a penetrating mode, and the transmission screw rod (17) is directly driven by the driving motor (18).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202322592549.1U CN220788869U (en) | 2023-09-25 | 2023-09-25 | Germanium single crystal furnace with leakage drainage mechanism |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202322592549.1U CN220788869U (en) | 2023-09-25 | 2023-09-25 | Germanium single crystal furnace with leakage drainage mechanism |
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| Publication Number | Publication Date |
|---|---|
| CN220788869U true CN220788869U (en) | 2024-04-16 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202322592549.1U Active CN220788869U (en) | 2023-09-25 | 2023-09-25 | Germanium single crystal furnace with leakage drainage mechanism |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN220788869U (en) |
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2023
- 2023-09-25 CN CN202322592549.1U patent/CN220788869U/en active Active
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