CN220788766U - Laser refractor cooling carrying table - Google Patents
Laser refractor cooling carrying table Download PDFInfo
- Publication number
- CN220788766U CN220788766U CN202322519044.2U CN202322519044U CN220788766U CN 220788766 U CN220788766 U CN 220788766U CN 202322519044 U CN202322519044 U CN 202322519044U CN 220788766 U CN220788766 U CN 220788766U
- Authority
- CN
- China
- Prior art keywords
- laser
- refractor
- cooling
- laser refractor
- shaped limiting
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 238000001816 cooling Methods 0.000 title claims abstract description 85
- 230000000149 penetrating effect Effects 0.000 claims abstract description 6
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims description 6
- 229910052802 copper Inorganic materials 0.000 claims description 6
- 239000010949 copper Substances 0.000 claims description 6
- 239000000498 cooling water Substances 0.000 claims 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 abstract description 12
- 230000000694 effects Effects 0.000 description 8
- 239000011248 coating agent Substances 0.000 description 2
- 238000000576 coating method Methods 0.000 description 2
- 238000009792 diffusion process Methods 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000005294 ferromagnetic effect Effects 0.000 description 1
- 239000007888 film coating Substances 0.000 description 1
- 238000009501 film coating Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 238000004549 pulsed laser deposition Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 239000013077 target material Substances 0.000 description 1
- 238000001771 vacuum deposition Methods 0.000 description 1
Landscapes
- Lasers (AREA)
Abstract
The utility model discloses a laser refraction mirror cooling carrying table, which belongs to the technical field of laser refraction mirror cooling and comprises a carrying table, wherein a first fixing frame and a second fixing frame are fixedly installed on a table top of the carrying table, a laser refraction mirror A is fixedly installed in front of the first fixing frame, a laser refraction mirror B is fixedly installed at the rear of the second fixing frame, two vacuum bellows connecting pieces for installing vacuum bellows are fixedly installed on the table top of the carrying table, a first circulating cooling pipe group is installed in a penetrating manner in a left vacuum bellows connecting piece, a second circulating cooling pipe group is installed in a penetrating manner in a right vacuum bellows connecting piece, the second circulating cooling pipe group is coiled above the laser refraction mirror A, and the first circulating cooling pipe group and the second circulating cooling pipe group are connected with an external cold water circulating system through water guide pipes.
Description
Technical Field
The utility model belongs to the technical field of laser refractor cooling, and particularly relates to a laser refractor cooling carrying table.
Background
Pulsed laser deposition is a physical vacuum coating technique. One of the most important advantages of the pulse laser deposition technology is that the target material and the film components can be kept consistent, and the film coating of the multi-component compound film is facilitated. Currently, the material is widely used for multi-component superconducting films, oxide ferroelectric films, piezoelectric films, thermoelectric films, semiconductor films, superhard films, ferromagnetic films and other film materials.
When the pulse laser is used for coating, the laser is required to be refracted at a corresponding angle under a high-temperature environment by using the laser refractor to finish the coating work, the laser refractor is easy to attenuate the service life under the high-temperature environment for a long time, and the laser refractor under the high temperature can influence the laser refraction effect, so the technical problem is solved by particularly providing a cooling carrying table of the laser refractor.
Disclosure of utility model
The utility model provides a cooling carrying table for a laser refractor, which aims at solving the problems that the service life is easy to attenuate and the laser refraction effect is influenced when the laser refractor in the prior art is used in a vacuum high-temperature environment for a long time. The specific technical scheme is as follows:
The utility model provides a laser refractor cooling loading platform, includes the loading platform, fixed mounting has first mount and second mount on the mesa of loading platform, the place ahead fixed mounting of first mount has laser refractor A, the rear fixed mounting of second mount has laser refractor B, fixed mounting has two vacuum bellows connecting pieces that are used for installing the vacuum bellows on the mesa of loading platform, the left side run through in the vacuum bellows connecting piece and install first circulation cooling tube group, first circulation cooling tube group encircles between second mount and laser refractor B, the right side run through in the vacuum bellows connecting piece and install second circulation cooling tube group, the second circulation cooling tube group coils in laser refractor A's top, first circulation cooling tube group and second circulation cooling tube group are all through water guide connection outside cold water circulation system.
In the above technical scheme, the first circulating cooling tube group is internally provided with a cavity block, the cavity block is communicated with the first circulating cooling tube group, and the cavity block is positioned in front of the laser refractor A.
In the above technical scheme, the cavity block is a copper block.
In the above technical scheme, the outer surface of the second circulation cooling tube group is fixedly provided with a temperature guide plate, and the temperature guide plate is positioned in the groove of the laser refractor A.
In the above technical scheme, a plurality of support rods are fixedly arranged between the first fixing frame and the second fixing frame, and the support rods penetrate through the outer surface of the heat conducting plate.
In the above technical scheme, the upper surface fixed mounting of microscope carrier has first C type locating part, the front surface fixed mounting of first mount has two second C type locating parts, laser refractor A is located between first C type locating part and the second C type locating part, and the surface of first C type locating part and second C type locating part all runs through and installs fixing bolt, laser refractor A supports tightly the back through a plurality of fixing bolts and fixes.
In the above technical scheme, the lower surface fixed mounting of second mount has two L type locating parts, laser refractor B is located two between the L type locating part, a plurality of tight bolts of support are run through to install to the front surface of second mount, the rear end of supporting tight bolt is equal fixed mounting to have the U type to support tight piece, laser refractor B is held between U type supports tight piece and L type locating part.
In the above technical scheme, the U-shaped abutting piece is clamped on the outer surface of the first circulating cooling tube group.
Compared with the prior art, the laser refractor cooling carrying table has the beneficial effects that:
1. According to the utility model, the first circulating cooling pipe group and the second circulating cooling pipe group are arranged and are respectively arranged above the laser refracting mirror A and in front of the laser refracting mirror B, so that the laser refracting mirror A and the laser refracting mirror B can be cooled by the first circulating cooling pipe group and the second circulating cooling pipe group, and the service life of the laser refracting mirror and the laser refracting effect are ensured.
2. According to the utility model, the first circulating cooling pipe group is internally provided with the cavity block made of copper, so that the first circulating cooling pipe group is utilized to cool the laser refractor B, and meanwhile, the cavity block is utilized to cool the front of the laser refractor A, so that the cooling effect can be further enhanced.
3. According to the utility model, the temperature guide plate is arranged on the outer surface of the second circulating cooling tube group and extends into the groove of the laser refractor A, so that the cooling effect of the second circulating cooling tube group on the laser refractor A can be further enhanced.
Drawings
Fig. 1 is a schematic left-view structure of the present utility model.
Fig. 2 is a right-side view of the present utility model.
Fig. 3 is a schematic view of the structure of the first circulating cooling tube set of the present utility model.
Fig. 4 is a schematic view of the structure of a second circulation cooling tube set according to the present utility model.
In fig. 1-4, wherein: the device comprises a 1-carrying platform, a 11-first C-shaped limiting part, a 2-first fixing frame, a 21-second C-shaped limiting part, a 3-second fixing frame, a 31-L-shaped limiting part, a 32-tightening bolt, a 33-U-shaped tightening part, a 4-laser refractor A, a 5-laser refractor B, a 6-supporting rod, a 7-first circulating cooling pipe group, a 71-cavity block, an 8-second circulating cooling pipe group, a 81-heat conducting plate and a 9-vacuum bellows connecting part.
Detailed Description
The following description of the embodiments of the present utility model will be made clearly and completely with reference to the accompanying drawings, in which it is apparent that the embodiments described are only some embodiments of the present utility model, but not all embodiments. All other embodiments, which can be made by those skilled in the art based on the embodiments of the utility model without making any inventive effort, are intended to be within the scope of the utility model.
Referring to fig. 1-4, the present utility model provides a technical solution:
The utility model provides a laser refractor cooling carrier platform, including carrier platform 1, fixedly mounted with first mount 2 and second mount 3 on the mesa of carrier platform 1, fixedly mounted with laser refractor A4 in the place ahead of first mount 2, fixedly mounted with laser refractor B5 in the rear of second mount 3, fixedly mounted with two vacuum bellows connecting pieces 9 that are used for installing the vacuum bellows on the mesa of carrier platform 1, install first circulation cooling tube group 7 in the left side vacuum bellows connecting piece 9 through, first circulation cooling tube group 7 encircles between second mount 3 and laser refractor B5, install second circulation cooling tube group 8 in the right side vacuum bellows connecting piece 9 through, second circulation cooling tube group 8 coils in the top of laser refractor A4, first circulation cooling tube group 7 and second circulation cooling tube group 8 all are through water guide connection external cooling system, install the vacuum bellows respectively at two vacuum bellows connecting pieces 9, utilize respective vacuum bellows to draw forth first circulation cooling tube group 7 and second circulation cooling tube group 8 to the outside of vacuum equipment, first circulation cooling tube group 7 and second circulation cooling tube group 8 are copper pipe and are the second circulation cooling tube group 8;
When the laser refractor is cooled, cold water is injected into the first circulation cooling pipe group 7 and the second circulation cooling pipe group 8 in a circulating way through the water guide pipe by utilizing an external cold water circulation system, and when the cold water circularly flows in the first circulation cooling pipe group 7 and the second circulation cooling pipe group 8, the temperatures of the periphery of the laser refractor A4 and the laser refractor B5 can be reduced, so that the service life and the use effect of the laser refractor are ensured.
In addition, as shown in fig. 1 and 3, the cavity block 71 is provided in the first circulation cooling tube group 7, the cavity block 71 is communicated with the first circulation cooling tube group 7, and the cavity block 71 is located in front of the laser refractor A4, and the cavity block 71 is a copper block, so that when cold water flows in the cavity block 71, the cold water diffusion area can be utilized to cool the left side of the laser refractor A4 on the right side of the cold water diffusion area, and the effect of further cooling the laser refractor A4 can be achieved.
In addition, as shown in fig. 1 and fig. 4, the outer surface of the second circulation cooling tube set 8 is fixedly provided with a temperature guide plate 81, the temperature guide plate 81 is located in the groove of the laser refractor A4, the temperature guide plate 81 is a copper plate, and low temperature emitted by the second circulation cooling tube set 8 can be guided into the groove of the laser refractor A4 by using the temperature guide plate 81, so that the cooling effect on the laser refractor A4 is further enhanced.
In order to ensure the stability of the second circulating cooling tube set 8 and the heat conducting plate 81 after being installed, as shown in fig. 1 or fig. 2, a plurality of support rods 6 are fixedly installed between the first fixing frame 2 and the second fixing frame 3, and after the support rods 6 penetrate through the outer surface of the heat conducting plate 81, the heat conducting plate 81 can be supported by the support rods 6, so that the stability of the second circulating cooling tube set 8 and the heat conducting plate 81 after being installed is enhanced.
Specifically, as shown in fig. 1 and 2, a first C-shaped limiting member 11 is fixedly installed on the upper surface of the carrier 1, two second C-shaped limiting members 21 are fixedly installed on the front surface of the first fixing frame 2, a laser refraction mirror A4 is located between the first C-shaped limiting member 11 and the second C-shaped limiting member 21, fixing bolts are installed on the outer surfaces of the first C-shaped limiting member 11 and the second C-shaped limiting member 21 in a penetrating manner, and the laser refraction mirror A4 is fixed after being abutted by the fixing bolts;
When the laser refraction mirror A4 is installed, the laser refraction mirror A4 is inserted between the first C-shaped limiting piece 11 and the second C-shaped limiting piece 21, the bottom of the laser refraction mirror A4 is lifted by the first C-shaped limiting piece 11, and then fixing bolts are installed on the front surface and the upper surface of the first C-shaped limiting piece 11 and the upper surface of the second C-shaped limiting piece 21, as shown in fig. 2, and the laser refraction mirror A4 is tightly abutted and fixed by a plurality of fixing bolts.
Specifically, as shown in fig. 1 and 2, two L-shaped limiting members 31 are fixedly mounted on the lower surface of the second fixing frame 3, a laser refractor B5 is located between the two L-shaped limiting members 31, a plurality of tightening bolts 32 are mounted on the front surface of the second fixing frame 3 in a penetrating manner, U-shaped tightening members 33 are fixedly mounted at the rear ends of the tightening bolts 32, and the laser refractor B5 is clamped between the U-shaped tightening members 33 and the L-shaped limiting members 31;
specifically, the U-shaped abutting piece 33 is engaged with the outer surface of the first circulation cooling tube group 7.
When the laser refraction mirror B5 is installed, the laser refraction mirror B5 is firstly placed between the two L-shaped limiting parts 31 for lifting, then the first circulating cooling tube set 7 is installed between the L-shaped limiting parts 31 and the second fixing frame 3, and finally the rear end of the U-shaped abutting part 33 abuts against the front surface of the laser refraction mirror B5, and the U-shaped position of the U-shaped abutting part 33 is utilized for clamping and fixing the first circulating cooling tube set 7.
Claims (8)
1. The utility model provides a laser refractor cooling carrier platform, includes carrier platform (1), fixed mounting has first mount (2) and second mount (3) on the mesa of carrier platform (1), the place ahead fixed mounting of first mount (2) has laser refractor A (4), the rear fixed mounting of second mount (3) has laser refractor B (5), a serial communication port, fixed mounting has two vacuum bellows connecting pieces (9) that are used for installing the vacuum bellows on the mesa of carrier platform (1), the left side in vacuum bellows connecting pieces (9) run through and install first circulation cooling nest of tubes (7), first circulation cooling nest of tubes (7) encircle between second mount (3) and laser refractor B (5), the right side in vacuum bellows connecting pieces (9) run through and install second circulation cooling nest of tubes (8), second circulation cooling nest of tubes (8) coil in the top of laser refractor A (4), first circulation cooling nest of tubes (7) and second circulation cooling nest of tubes (8) are all through cooling water piping connection outside circulation system.
2. The cooling stage according to claim 1, wherein a cavity block (71) is disposed in the first circulation cooling tube set (7), the cavity block (71) is in communication with the first circulation cooling tube set (7), and the cavity block (71) is located in front of the laser refractor a (4).
3. A laser refractive mirror cooling stage according to claim 2, wherein the cavity block (71) is a copper block.
4. The cooling carrying table for the laser refractor according to claim 1, wherein a temperature guide plate (81) is fixedly arranged on the outer surface of the second circulating cooling tube set (8), and the temperature guide plate (81) is positioned in a groove of the laser refractor A (4).
5. The cooling carrying table for the laser refractor according to claim 4, wherein a plurality of supporting rods (6) are fixedly arranged between the first fixing frame (2) and the second fixing frame (3), and the supporting rods (6) penetrate through the outer surface of the heat conducting plate (81).
6. The laser refractor cooling carrying table according to claim 1, wherein a first C-shaped limiting piece (11) is fixedly installed on the upper surface of the carrying table (1), two second C-shaped limiting pieces (21) are fixedly installed on the front surface of the first fixing frame (2), the laser refractor a (4) is located between the first C-shaped limiting piece (11) and the second C-shaped limiting piece (21), fixing bolts are installed on the outer surfaces of the first C-shaped limiting piece (11) and the second C-shaped limiting piece (21) in a penetrating mode, and the laser refractor a (4) is fixed after being abutted through the fixing bolts.
7. The cooling carrying table for the laser refractor according to claim 1, wherein two L-shaped limiting pieces (31) are fixedly arranged on the lower surface of the second fixing frame (3), the laser refractor B (5) is located between the two L-shaped limiting pieces (31), a plurality of abutting bolts (32) are installed on the front surface of the second fixing frame (3) in a penetrating mode, U-shaped abutting pieces (33) are fixedly arranged at the rear ends of the abutting bolts (32), and the laser refractor B (5) is clamped between the U-shaped abutting pieces (33) and the L-shaped limiting pieces (31).
8. The cooling stage according to claim 7, wherein the U-shaped abutting member (33) is clamped to the outer surface of the first circulating cooling tube group (7).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202322519044.2U CN220788766U (en) | 2023-09-15 | 2023-09-15 | Laser refractor cooling carrying table |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202322519044.2U CN220788766U (en) | 2023-09-15 | 2023-09-15 | Laser refractor cooling carrying table |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN220788766U true CN220788766U (en) | 2024-04-16 |
Family
ID=90655468
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202322519044.2U Active CN220788766U (en) | 2023-09-15 | 2023-09-15 | Laser refractor cooling carrying table |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN220788766U (en) |
-
2023
- 2023-09-15 CN CN202322519044.2U patent/CN220788766U/en active Active
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN103606430B (en) | High-temperature superconducting magnet low-temperature helium self-circulation cooling system | |
| CN102353582B (en) | Low temperature experiment box for testing mechanical properties of superconducting material | |
| CN220788766U (en) | Laser refractor cooling carrying table | |
| CN103985499A (en) | High-temperature superconducting magnet liquid nitrogen zero-evaporation cooling system | |
| US20180120392A1 (en) | Superconducting magnet cooling system | |
| CN203588785U (en) | Lower-temperature helium self-circulating cooling system for high-temperature superconductive magnet | |
| CN204732668U (en) | A kind of end pumping solid laser crystal heat abstractor | |
| JP4275640B2 (en) | Cryogenic cooling device | |
| CN1926441A (en) | Method for cooling coils and shim iron | |
| CN105552695B (en) | A kind of optical element water cooling plant under vacuum environment | |
| CN111515730B (en) | Freezing clamp system and control method thereof | |
| CN210578300U (en) | Super magnetostrictive driver of pipe cavity integrated cooling system | |
| CN209784512U (en) | Constant-temperature nonmagnetic fixture for measuring magnetic moment of permanent magnet and control device thereof | |
| CN102353583B (en) | Temperature control system for superconducting material mechanical property test system | |
| CN114672876B (en) | Be applied to heat sink of sample platform | |
| CN220397957U (en) | Circulating water heat dissipation module refrigerator | |
| CN110988005A (en) | Strong permanent magnet device for magnetizing material under vacuum system | |
| CN110993143A (en) | Compact superconductive neutron polarization turner | |
| CN211586738U (en) | Medical treatment inspection is with concatenation formula combination test-tube rack | |
| CN220710078U (en) | Step-up transformer | |
| CN213295544U (en) | Wafer electroplating system | |
| CN211742688U (en) | Compact superconductive neutron polarization turner | |
| CN213120967U (en) | Measurement detection workbench of safe operation | |
| CN221101117U (en) | Cooling structure of multilayer film monochromator or reflecting mirror | |
| CN218927744U (en) | Semiconductor detection platform with limiting function |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant |