CN220781598U - Scanning electron microscope sample stage cleaning device - Google Patents
Scanning electron microscope sample stage cleaning device Download PDFInfo
- Publication number
- CN220781598U CN220781598U CN202322055181.5U CN202322055181U CN220781598U CN 220781598 U CN220781598 U CN 220781598U CN 202322055181 U CN202322055181 U CN 202322055181U CN 220781598 U CN220781598 U CN 220781598U
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- China
- Prior art keywords
- scanning electron
- electron microscope
- washing
- cleaning device
- microscope sample
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- 238000004140 cleaning Methods 0.000 title claims abstract description 59
- 230000005540 biological transmission Effects 0.000 claims abstract description 14
- 238000001914 filtration Methods 0.000 claims abstract description 7
- 238000005406 washing Methods 0.000 claims description 26
- 238000011084 recovery Methods 0.000 claims description 15
- 238000007789 sealing Methods 0.000 claims description 12
- 238000004064 recycling Methods 0.000 claims 3
- 239000007788 liquid Substances 0.000 abstract description 10
- 239000000853 adhesive Substances 0.000 description 4
- 230000001070 adhesive effect Effects 0.000 description 4
- 239000004576 sand Substances 0.000 description 4
- 238000004458 analytical method Methods 0.000 description 2
- 239000011347 resin Substances 0.000 description 2
- 229920005989 resin Polymers 0.000 description 2
- 229920000742 Cotton Polymers 0.000 description 1
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000011086 high cleaning Methods 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 238000004626 scanning electron microscopy Methods 0.000 description 1
- 239000002699 waste material Substances 0.000 description 1
Landscapes
- Sampling And Sample Adjustment (AREA)
Abstract
The utility model discloses a scanning electron microscope sample table cleaning device which comprises a cleaning device cavity, wherein a power device is arranged at the upper end of the cleaning device cavity, a transmission device is connected and arranged at the lower end of the power device, the lower end of the transmission device is connected and provided with the cleaning device, and a filter device is connected and arranged at the lower end of a cleaning barrel. The utility model is provided with the filtering and purifying device, and can recycle the used cleaning liquid, thereby further saving the cost.
Description
Technical Field
The utility model relates to the technical field of scanning electron microscope analysis instruments, in particular to a scanning electron microscope sample stage cleaning device.
Background
Scanning electron microscopy is a common instrument used for morphology and composition analysis of material samples. Because the scanning electron microscope can reach the resolution of nanometer level and the inside is in a high vacuum environment, the tested sample needs to be fixed on a sample table matched with the scanning electron microscope. For the fixation of most conventional samples, double-sided conductive adhesive is adopted to adhere and fix the samples on a sample table. The sample platform is generally hard alloy, has higher price and needs to be reused, so that the conductive adhesive and the sample stuck on the sample platform need to be removed after the test is finished. The method mainly adopted at present is that the conducting resin is scraped from the sample table as much as possible by the blade, then the residual conducting resin is wiped and removed by the cotton swab stained with absolute ethyl alcohol, the sample table is cleaned one by one completely by manpower, the cleaning efficiency is low, and the high labor cost is also accompanied, and the conventional scanning electronic competition sample table cleaning device cannot recover the cleaning liquid, so that the resource is wasted.
Disclosure of Invention
The utility model provides a scanning electron microscope sample table cleaning device for solving the problems of low efficiency and high cost of the existing cleaning mode, and solves the problems of incapability of recovering cleaning liquid and resource waste.
In order to solve the technical problems, the technical scheme of the utility model is as follows: the utility model provides a scanning electron microscope sample platform belt cleaning device, includes the belt cleaning device cavity, belt cleaning device cavity upper end is equipped with power device, the power device lower extreme is connected and is equipped with transmission, the transmission lower extreme is connected and is equipped with washing device, washing device lower extreme is connected and is equipped with filter equipment.
Further, a control panel is arranged on the cavity of the cleaning device, two throwing boxes and two recovery boxes are arranged on the cavity of the cleaning device, a throwing pipeline is connected to the throwing boxes, and a recovery pipeline is connected to the recovery boxes.
Further, the power device is a motor.
Further, the transmission device comprises a driving gear and a driven gear, the driving gear is meshed with the driven gear, and the driving gear is fixedly connected with a driving shaft of the motor.
Further, the washing device is provided with two washing barrels and four connecting discs, two ends of the two washing barrels are fixed on the connecting discs, the two connecting discs at the upper end are rotatably provided with impellers, the two impellers are respectively connected to the driving gear and the driven gear, the two upper end connecting discs are connected with the throwing pipeline, and the two connecting discs at the lower end are fixed on the cavity of the washing device.
Further, an opening, a sealing cover and a plurality of sample platform placing areas are arranged on the cleaning barrel, and the sealing cover is arranged at the opening in a sealing way.
Further, the filter device is a filter, the filter is connected with the recovery box through a recovery pipeline, and the filter is connected to the two connecting discs through pipelines.
Compared with the prior art, the utility model has the advantages that: the utility model has simple structure and convenient operation, and can realize the batch electric cleaning of a plurality of sample platforms, thereby saving and reducing the repeated manual labor, and having high cleaning efficiency and good cleaning effect. The utility model is provided with the filtering and purifying device, and can recycle the used cleaning liquid, thereby further saving the cost.
Drawings
FIG. 1 is a schematic view showing the external structure of a scanning electron microscope sample stage cleaning device according to the present utility model.
Fig. 2 is a schematic diagram of the internal structure of a scanning electron microscope sample stage cleaning device according to the present utility model.
Fig. 3 is an exploded view of a cleaning barrel of a scanning electron microscope sample stage cleaning device according to the present utility model.
As shown in the figure: 1. a cleaning device cavity; 11. a control panel; 12. a dispensing box; 121. a pipeline is put in; 13. a recovery box; 2. a power device; 21. a motor; 3. a transmission device; 31. a drive gear; 32. a driven gear; 4. a washing device; 41. cleaning a barrel; 411. an opening; 412. sealing cover; 413. a sample stage placement area; 42. a connecting disc; 421. a pulsator; 5. a filtering device; 51. and (3) a filter.
Detailed Description
In the description of the present utility model, it should be understood that the terms "upper", "lower", "front", "rear", "left", "right", "inner", "outer", "center", etc. indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings, are merely for convenience in describing the present utility model and simplifying the description, and do not indicate or imply that the devices or elements referred to must have a specific orientation configuration and operation, and thus are not to be construed as limiting the present utility model.
In the description of the present utility model, it should also be noted that, unless explicitly stated or limited otherwise, the terms "provided with," "mounted to," "connected to," and the like are to be construed broadly, and may be, for example, fixedly connected, detachably connected, or integrally connected, mechanically connected, electrically connected, directly connected, indirectly connected through an intermediary, or in communication between two elements. The specific meaning of the above terms in the present utility model can be understood by those of ordinary skill in the art according to the specific circumstances.
The present utility model will be described in further detail with reference to the accompanying drawings.
Referring to fig. 1 to 3, a cleaning device for a scanning electron microscope sample table comprises a cleaning device cavity 1, wherein a power device 2 is arranged at the upper end of the cleaning device cavity 1, a transmission device 3 is connected with the lower end of the power device 2, a cleaning device 4 is connected with the lower end of the transmission device 3, and a filtering device 5 is connected with the lower end of a cleaning barrel.
The cleaning device comprises a cleaning device cavity 1, and is characterized in that a control panel 11 is arranged on the cleaning device cavity 1, two throwing boxes 12 and two recovery boxes 13 are arranged on the cleaning device cavity 1, a throwing pipeline 121 is connected to the throwing boxes 12, and a recovery pipeline is connected to the recovery boxes 13.
The power device 2 is a motor 21.
The transmission device 3 comprises a driving gear 31 and a driven gear 32 in the transmission device, the driving gear 31 is meshed with the driven gear 32, and the driving gear 31 is fixedly connected with a driving shaft of the motor 21.
The washing device 4 is provided with two washing barrels 41 and four connecting discs 42, the washing device 4 comprises two washing barrels 41 and four connecting discs 42, two ends of the washing barrels 41 are fixed on the connecting discs 42, the upper ends of the two connecting discs are provided with wave wheels 421 and are respectively connected to the driving gear 31 and the driven gear 32, the two connecting discs 42 at the upper ends of the washing barrels are respectively connected with two throwing pipelines 121, and the lower ends of the two connecting discs 42 are fixed on the cavity 1 of the washing device.
The cleaning barrel 41 is provided with an opening 411, a sealing cover 412 and a plurality of sample platform placing areas 413, and the sealing cover 412 is arranged at the opening 411 in a sealing way.
The filter device 5 is a filter 51, the filter 51 is connected with the recovery box 13 through a recovery pipeline 131, and the filter 51 is connected with the two connecting discs 42 through pipelines.
Specific embodiments of the utility model: before the utility model is used, the cavity 1 of the cleaning device is opened, the sealing cover 412 of the cleaning barrel 41 is opened, the sample platform is placed on the sample platform placing area 413, after the sample platform is fixed, the sealing cover 412 is closed, cleaning liquid and fine sand are poured into the throwing box, an external power supply is connected, the motor 21 is started through the control panel, the driving shaft starts to rotate so as to drive the transmission device 3 to rotate, the rotation of the impeller 421 on the connecting disc 42 is further driven, the cleaning liquid and the fine sand in the cleaning barrel are stirred, and the conductive adhesive on the sample platform is cleaned.
After cleaning, the pipeline connected with the connecting disc 12 and the filter 51 is opened through the control panel, the electromagnetic valve is arranged on the pipeline, the control panel controls the electromagnetic valve to be opened, cleaning liquid and fine sand are discharged into the filtering device 51 for filtering, the cleaning liquid flows into the recovery box after being filtered, the cleaning liquid in the recovery box can be directly used for next cleaning, after the cleaning liquid is recovered, the filter is taken out, and the fine sand mixed with conductive adhesive impurities is poured out.
The utility model and its embodiments have been described above with no limitation, and the actual construction is not limited to the embodiments of the utility model as shown in the drawings. In summary, if one of ordinary skill in the art is informed by this disclosure, a structural manner and an embodiment similar to the technical solution should not be creatively devised without departing from the gist of the present utility model.
Claims (6)
1. The utility model provides a scanning electron microscope sample platform belt cleaning device, includes belt cleaning device cavity (1), its characterized in that: the washing device comprises a washing device body, and is characterized in that a power device (2) is arranged at the upper end of the washing device body (1), a transmission device (3) is connected to the lower end of the power device (2), a washing device (4) is connected to the lower end of the transmission device (3), a filtering device (5) is connected to the lower end of the washing device (4), a control panel (11) is arranged on the washing device body (1), two throwing boxes (12) and two recycling boxes (13) are arranged on the washing device body (1), a throwing pipeline (121) is connected to the throwing boxes (12), and a recycling pipeline is connected to the recycling boxes (13).
2. The scanning electron microscope sample stage cleaning device according to claim 1, wherein: the power device (2) is a motor (21).
3. A scanning electron microscope sample stage cleaning device according to claim 2, characterized in that: the transmission device (3) comprises a driving gear (31) and a driven gear (32), the driving gear (31) is meshed with the driven gear (32), and the driving gear (31) is fixedly connected with a driving shaft of the motor (21).
4. A scanning electron microscope sample stage cleaning device according to claim 3, characterized in that: the washing device (4) comprises two washing barrels (41) and four connecting discs (42), wherein two ends of each washing barrel (41) are fixed on the corresponding connecting discs (42), two connecting discs at the upper end are rotatably provided with wave wheels (421), the two wave wheels (421) are respectively connected to a driving gear (31) and a driven gear (32), the two connecting discs (42) at the upper end of each washing barrel are respectively connected with two delivery pipelines (121), and the two connecting discs (42) at the lower end are fixed on a cavity (1) of the washing device.
5. The scanning electron microscope sample stage cleaning device according to claim 4, wherein: the cleaning barrel (41) is provided with an opening (411), a sealing cover (412) and a plurality of sample platform placing areas (413), and the sealing cover (412) is arranged at the opening (411) in a sealing mode.
6. The scanning electron microscope sample stage cleaning device according to claim 4, wherein: the filter device (5) is a filter (51), the filter (51) is connected with the recovery box (13) through a recovery pipeline (131), and the filter (51) is communicated with the two connecting discs (42) through the pipeline.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202322055181.5U CN220781598U (en) | 2023-08-02 | 2023-08-02 | Scanning electron microscope sample stage cleaning device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202322055181.5U CN220781598U (en) | 2023-08-02 | 2023-08-02 | Scanning electron microscope sample stage cleaning device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN220781598U true CN220781598U (en) | 2024-04-16 |
Family
ID=90658442
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202322055181.5U Active CN220781598U (en) | 2023-08-02 | 2023-08-02 | Scanning electron microscope sample stage cleaning device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN220781598U (en) |
-
2023
- 2023-08-02 CN CN202322055181.5U patent/CN220781598U/en active Active
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