CN220774333U - Semiconductor wafer detects frock - Google Patents
Semiconductor wafer detects frock Download PDFInfo
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- CN220774333U CN220774333U CN202322298553.7U CN202322298553U CN220774333U CN 220774333 U CN220774333 U CN 220774333U CN 202322298553 U CN202322298553 U CN 202322298553U CN 220774333 U CN220774333 U CN 220774333U
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- 239000004065 semiconductor Substances 0.000 title claims abstract description 34
- 230000001105 regulatory effect Effects 0.000 claims abstract description 5
- 230000000149 penetrating effect Effects 0.000 claims description 3
- 238000007689 inspection Methods 0.000 claims 6
- 235000012431 wafers Nutrition 0.000 abstract description 29
- 238000001514 detection method Methods 0.000 abstract description 20
- 238000004519 manufacturing process Methods 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
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Abstract
The utility model provides a semiconductor wafer detection tool, relates to the technical field of wafer detection tools, solves the problems that the detection tool of the existing part of detection equipment is simpler in structure and inconvenient for workers to adjust according to the model volume of semiconductor wafers when facing the semiconductor wafers with different volumes, and comprises a main body; the main body is symmetrically provided with sliding grooves, and the sliding grooves are connected with adjusting blocks in a sliding manner; the adjusting block is symmetrically provided with movable grooves, the left movable groove of the adjusting block is also provided with movable holes, and the bottom of the adjusting block is provided with threaded holes; through setting up the sliding connection of adjusting handle and screw thread axle, make the adjusting handle install on the screw thread axle, utilize the sliding connection of gag lever post and the spacing hole of the through-hole internal thread axle of adjusting handle afterwards, make adjusting handle and screw thread axle become a whole, and then utilize adjusting handle to drive screw thread axle rotation, make the screw thread axle drive regulating block adjustment position.
Description
Technical Field
The utility model belongs to the technical field of wafer detection tools, and particularly relates to a semiconductor wafer detection tool.
Background
In the semiconductor manufacturing field, in order to improve production efficiency and improve yield accuracy, detection equipment is required to detect the wafer, and when detecting, the wafer is required to be placed on a detection tool of the detection equipment, but the detection tool of the existing part detection equipment can only fix one semiconductor wafer at a time, so that working efficiency of staff is lower, and the detection tool of the wafer detection equipment is simpler in structure, and is inconvenient for staff to adjust according to model volumes of the semiconductor wafers when facing the semiconductor wafers with different volumes.
Disclosure of Invention
In order to solve the technical problems, the utility model provides a semiconductor wafer detection tool, which solves the problems that the detection tool of the existing part of detection equipment is simpler in structure and inconvenient for a worker to adjust according to the model volume of semiconductor wafers when facing the semiconductor wafers with different volumes.
The utility model discloses a semiconductor wafer detection tool, which is characterized by comprising the following specific technical means:
a semiconductor wafer detection tool comprises a main body; the main body is symmetrically provided with sliding grooves, and the sliding grooves are connected with adjusting blocks in a sliding manner; the adjusting block is symmetrically provided with movable grooves, the left movable groove of the adjusting block is also provided with movable holes, and the bottom of the adjusting block is provided with threaded holes; threaded holes are respectively formed at two ends of the sliding groove, and mounting blocks are respectively connected to two sides of the sliding groove in a sliding manner; the sliding groove threaded hole is internally connected with a fixing bolt in a threaded manner, and the top of the sliding groove fixing bolt is attached to the mounting block; the mounting block is provided with a threaded hole, the threaded hole of the mounting block is internally connected with a threaded shaft in a threaded manner, and the top of the threaded shaft is provided with a limiting hole; the movable groove is connected with a sliding block in a sliding way, a threaded hole is formed in the sliding block, and a through hole is formed in the bottom of the threaded hole of the sliding block; the sliding block is provided with a through hole, and a threaded shaft is connected inside the through hole of the sliding block in a sliding manner; an adjusting handle is arranged on the threaded shaft, and a square hole is formed in the adjusting handle; the screw shaft is fixedly connected with a fixing plate, and the screw shaft is in threaded connection with the inside of a threaded hole at the bottom of the adjusting block.
Further, an adjusting shaft is arranged on the sliding block, threads are arranged on the adjusting shaft, and the adjusting shaft is in threaded connection with the inside of a threaded hole of the sliding block; the bottom of the adjusting shaft is rotationally connected with a thread block, and the thread block is slidably connected in a through hole of the sliding block.
Further, the square hole of the adjusting handle is internally and slidably connected with a threaded shaft, the top of the adjusting handle is fixedly connected with a limiting piece, and a guide hole is formed in the limiting piece.
Furthermore, a limiting rod is connected in the limiting piece through hole in a sliding manner, and the limiting rod is also connected in the top limiting hole of the threaded shaft in a penetrating manner; and the limiting rod is provided with a reset spring, and the other end of the reset spring is arranged on the limiting sheet.
Further, a fixed rod is fixedly connected to one side of the sliding block, a threaded hole is formed in the fixed rod, and the fixed rod is slidably connected to the inside of the movable hole; the screw thread internal thread of dead lever is connected with the screw thread axle, and the bottom of screw thread axle on the dead lever rotates to be connected on the regulating block.
Further, threaded holes are formed in the fixing plate in a linear arrangement mode, and movable shafts are arranged in the threaded holes of the fixing plate; the movable shaft is provided with threads, and the movable shaft is in threaded connection with the inside of the threaded hole of the fixed plate.
Further, the top of the movable shaft is rotatably connected with a fixed block, and the fixed block is attached to the outer side of the semiconductor wafer; threaded holes are formed in the rotating connection positions of the movable shaft and the fixed block, bolts are connected in the threaded holes of the movable shaft in a threaded mode, and the tops of the bolts of the movable shaft are attached to the fixed block.
Compared with the prior art, the utility model has the following beneficial effects:
1. according to the utility model, the adjusting handle is arranged on the threaded shaft through the sliding connection of the adjusting handle and the threaded shaft, then the adjusting handle and the threaded shaft are integrated through the sliding connection of the limiting rod and the limiting hole of the threaded shaft in the through hole of the adjusting handle, the threaded shaft is driven to rotate by the adjusting handle, the threaded shaft drives the adjusting block to adjust the position, the threaded shaft is further applied to the fixed rod, the sliding block can be driven to adjust the height on the adjusting block after the threaded shaft of the fixed rod is rotated, in addition, the threaded shaft is further arranged on the sliding block, and the sliding block is driven to be meshed and connected with the threaded shaft under the rotation of the adjusting shaft, so that the sliding block can be displaced on the sliding block after the threaded shaft of the sliding block rotates, and the threaded shaft can be rapidly moved when the threaded block is not meshed with the threaded shaft, thereby being convenient for workers to use.
2. According to the utility model, the movable shaft is rotated to drive the movable shaft and the fixed block to move, and then the position of the movable shaft on the fixed plate is adjusted according to the volume type of the semiconductor wafer, so that the semiconductor wafer is clamped and fixed.
Drawings
FIG. 1 is an overall schematic of the present utility model;
FIG. 2 is a schematic view of the lower rear view angle of FIG. 1 of the present utility model;
FIG. 3 is an isometric view of a slider of the present utility model;
fig. 4 is an isometric view of an adjustment handle of the present utility model.
In the figure, the correspondence between the component names and the drawing numbers is:
1. a main body; 101. a sliding groove; 2. an adjusting block; 201. a movable groove; 202. a movable hole; 3. a mounting block; 4. a threaded shaft; 5. a sliding block; 502. a fixed rod; 6. an adjusting shaft; 601. a screw block; 7. adjusting the handle; 701. a limiting piece; 702. square holes; 8. a limit rod; 9. a return spring; 10. a fixing plate; 11. a movable shaft; 12. and a fixed block.
Detailed Description
Embodiments of the present utility model are described in further detail below with reference to the accompanying drawings and examples.
Embodiment one:
as shown in fig. 1 to 4:
the utility model provides a semiconductor wafer detection tool, which comprises: comprising a main body 1; the main body 1 is symmetrically provided with a sliding groove 101, and an adjusting block 2 is connected in the sliding groove 101 in a sliding way; the adjusting block 2 is symmetrically provided with a movable groove 201, the left movable groove 201 of the adjusting block 2 is also provided with a movable hole 202, and the bottom of the adjusting block 2 is provided with a threaded hole; threaded holes are respectively formed at two ends of the sliding groove 101, and the two sides of the sliding groove 101 are respectively connected with the mounting blocks 3 in a sliding manner; a fixing bolt is connected in the threaded hole of the sliding groove 101 in a threaded manner, and the top of the fixing bolt of the sliding groove 101 is attached to the mounting block 3; the mounting block 3 is provided with a threaded hole, the threaded hole of the mounting block 3 is internally connected with a threaded shaft 4 in a threaded manner, and the top of the threaded shaft 4 is provided with a limiting hole; the movable groove 201 is connected with the sliding block 5 in a sliding way, a threaded hole is formed in the sliding block 5, and a through hole is formed in the bottom of the threaded hole of the sliding block 5; the sliding block 5 is provided with a through hole, and a threaded shaft 4 is connected inside the through hole of the sliding block 5 in a sliding manner; the threaded shaft 4 is provided with an adjusting handle 7, and the adjusting handle 7 is provided with a square hole 702; the threaded shaft 4 is fixedly connected with a fixing plate 10, and the threaded shaft 4 is in threaded connection with the inside of a threaded hole at the bottom of the adjusting block 2; the sliding block 5 is provided with an adjusting shaft 6, the adjusting shaft 6 is provided with threads, and the adjusting shaft 6 is in threaded connection with the inside of a threaded hole of the sliding block 5; the bottom of the adjusting shaft 6 is rotatably connected with a threaded block 601, and the threaded block 601 is slidably connected in a through hole of the sliding block 5; the square hole 702 of the adjusting handle 7 is slidably connected with the threaded shaft 4, the top of the adjusting handle 7 is fixedly connected with the limiting piece 701, and the limiting piece 701 is provided with a guide hole; the limiting plate 701 is connected with a limiting rod 8 in a sliding way in the through hole, and the limiting rod 8 is also connected inside the top limiting hole of the threaded shaft 4 in a penetrating way; a reset spring 9 is arranged on the limiting rod 8, and the other end of the reset spring 9 is arranged on the limiting plate 701; a fixed rod 502 is fixedly connected to one side of the sliding block 5, a threaded hole is formed in the fixed rod 502, and the fixed rod 502 is slidably connected to the inside of the movable hole 202; the screw thread inner thread of the fixed rod 502 is connected with a screw thread shaft 4, and the bottom of the screw thread shaft 4 on the fixed rod 502 is rotationally connected with the adjusting block 2; through the sliding connection of adjusting handle 7 and screw shaft 4, make adjusting handle 7 install on screw shaft 4, then utilize the sliding connection of the through-hole internal screw shaft 4 of gag lever post 8 and adjusting handle 7, make adjusting handle 7 and screw shaft 4 become a whole, and then utilize adjusting handle 7 to drive screw shaft 4 rotation, make screw shaft 4 drive regulating block 2 adjustment position, screw shaft 4 still use on dead lever 502, behind the screw shaft 4 of rotatory dead lever 502, can drive slider 5 and adjust the height on regulating block 2, in addition, still install screw shaft 4 on slider 5, and can drive screw block 601 and screw shaft 4 meshing connection under the rotation of adjusting shaft 6, make the screw shaft 4 of slider 5 rotatory back, can displace on slider 5, and when screw block 601 does not mesh with screw shaft 4, can remove screw shaft 4 fast, make things convenient for the staff to use.
Embodiment two:
on the basis of the first embodiment, threaded holes are formed in the fixing plate 10 in a linear arrangement, and a movable shaft 11 is arranged in the threaded holes of the fixing plate 10; the movable shaft 11 is provided with threads, and the movable shaft 11 is in threaded connection with the inside of a threaded hole of the fixed plate 10; the top of the movable shaft 11 is rotatably connected with a fixed block 12, and the fixed block 12 is attached to the outer side of the semiconductor wafer; a threaded hole is formed in the rotary connection position of the movable shaft 11 and the fixed block 12, a bolt is connected in the threaded hole of the movable shaft 11 in a threaded manner, and the top of the bolt of the movable shaft 11 is attached to the fixed block 12; the movable shaft 11 and the fixed block 12 are driven to displace by the rotation of the movable shaft 11, and then the position of the movable shaft 11 on the fixed plate 10 is adjusted according to the volume type of the semiconductor wafer, so that the semiconductor wafer is clamped and fixed.
Specific use and action of the embodiment:
when the utility model is used, firstly, the adjusting handle 7 is in sliding connection with the threaded shaft 4, the limiting rod 8 is in sliding connection with the through hole of the adjusting handle 7 and the limiting hole of the threaded shaft 4, so that the adjusting handle 7 and the threaded shaft 4 are integrated, the threaded shaft 4 is driven to rotate by the adjusting handle 7, the threaded shaft 4 drives the adjusting block 2 to adjust the position, the threaded shaft 4 can also drive the sliding block 5 to adjust the height on the adjusting block 2, in addition, the threaded block 601 can be driven to be meshed with the threaded shaft 4 under the rotation of the adjusting shaft 6, the threaded shaft 4 of the sliding block 5 can be displaced on the sliding block 5 after rotating, and the threaded shaft 4 can be rapidly moved when the threaded block 601 is not meshed with the threaded shaft 4, so that the utility model is convenient for workers to use;
then, through the rotation of loose axle 11, drive loose axle 11 and fixed block 12 displacement, then according to the volume model of semiconductor wafer, adjust the position of loose axle 11 on fixed plate 10, carry out the centre gripping fixedly to the semiconductor wafer, solve the detection frock of current partial check out test set, the structure is comparatively simple, when facing the semiconductor wafer of different volumes, the problem that the staff of being inconvenient for carries out the adjustment according to the model volume of semiconductor wafer.
Claims (7)
1. A semiconductor wafer detects frock, its characterized in that: comprising a main body (1); the main body (1) is symmetrically provided with a sliding groove (101), and an adjusting block (2) is connected in the sliding groove (101) in a sliding way; the adjusting block (2) is symmetrically provided with a movable groove (201), the left movable groove (201) of the adjusting block (2) is also provided with a movable hole (202), and the bottom of the adjusting block (2) is provided with a threaded hole; screw holes are respectively formed at two ends of the sliding groove (101), and the two sides of the sliding groove (101) are respectively connected with the mounting blocks (3) in a sliding manner; a fixing bolt is connected in the threaded hole of the sliding groove (101) in a threaded manner, and the top of the fixing bolt of the sliding groove (101) is attached to the mounting block (3); the mounting block (3) is provided with a threaded hole, the threaded hole of the mounting block (3) is internally connected with a threaded shaft (4) in a threaded manner, and the top of the threaded shaft (4) is provided with a limiting hole; a sliding block (5) is connected in the movable groove (201) in a sliding way, a threaded hole is formed in the sliding block (5), and a through hole is formed in the bottom of the threaded hole of the sliding block (5); the sliding block (5) is provided with a through hole, and a threaded shaft (4) is connected inside the through hole of the sliding block (5) in a sliding manner; an adjusting handle (7) is arranged on the threaded shaft (4), and a square hole (702) is formed in the adjusting handle (7); the screw shaft (4) is fixedly connected with a fixing plate (10), and the screw shaft (4) is in threaded connection with the inside of a threaded hole at the bottom of the adjusting block (2).
2. The semiconductor wafer inspection tool as claimed in claim 1, wherein: an adjusting shaft (6) is arranged on the sliding block (5), threads are arranged on the adjusting shaft (6), and the adjusting shaft (6) is in threaded connection with the inside of a threaded hole of the sliding block (5); the bottom of the adjusting shaft (6) is rotatably connected with a threaded block (601), and the threaded block (601) is slidably connected in the through hole of the sliding block (5).
3. The semiconductor wafer inspection tool as claimed in claim 1, wherein: the square hole (702) of the adjusting handle (7) is connected with the threaded shaft (4) in a sliding mode, the top of the adjusting handle (7) is fixedly connected with the limiting piece (701), and the limiting piece (701) is provided with the guide hole.
4. A semiconductor wafer inspection tool as claimed in claim 3, wherein: the limiting piece (701) is connected with a limiting rod (8) in a sliding way in the through hole, and the limiting rod (8) is also connected inside the top limiting hole of the threaded shaft (4) in a penetrating way; and a reset spring (9) is arranged on the limiting rod (8), and the other end of the reset spring (9) is arranged on the limiting plate (701).
5. The semiconductor wafer inspection tool as claimed in claim 1, wherein: a fixed rod (502) is fixedly connected to one side of the sliding block (5), a threaded hole is formed in the fixed rod (502), and the fixed rod (502) is slidably connected to the inside of the movable hole (202); the screw thread internal thread of dead lever (502) is connected with screw thread axle (4), and the bottom of screw thread axle (4) on dead lever (502) rotates to be connected on regulating block (2).
6. The semiconductor wafer inspection tool as claimed in claim 1, wherein: threaded holes are formed in the fixing plate (10) in a linear arrangement mode, and movable shafts (11) are arranged in the threaded holes of the fixing plate (10); the movable shaft (11) is provided with threads, and the movable shaft (11) is in threaded connection with the inside of the threaded hole of the fixed plate (10).
7. The semiconductor wafer inspection tool as claimed in claim 6, wherein: the top of the movable shaft (11) is rotatably connected with a fixed block (12), and the fixed block (12) is attached to the outer side of the semiconductor wafer; threaded holes are formed in the rotating connection positions of the movable shaft (11) and the fixed block (12), bolts are connected in the threaded holes of the movable shaft (11) in a threaded mode, and the tops of the bolts of the movable shaft (11) are attached to the fixed block (12).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202322298553.7U CN220774333U (en) | 2023-08-25 | 2023-08-25 | Semiconductor wafer detects frock |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202322298553.7U CN220774333U (en) | 2023-08-25 | 2023-08-25 | Semiconductor wafer detects frock |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN220774333U true CN220774333U (en) | 2024-04-12 |
Family
ID=90597799
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202322298553.7U Active CN220774333U (en) | 2023-08-25 | 2023-08-25 | Semiconductor wafer detects frock |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN220774333U (en) |
-
2023
- 2023-08-25 CN CN202322298553.7U patent/CN220774333U/en active Active
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| TR01 | Transfer of patent right |
Effective date of registration: 20240604 Address after: 201100 2nd floor, No. 450, Husong Road, Minhang District, Shanghai Patentee after: Shanghai Nidong Technology Co.,Ltd. Country or region after: China Address before: No. 61, East Sanjiali, Xiaomuqiao Road, Xuhui District, Shanghai, 200000 Patentee before: Luo Shigui Country or region before: China |