CN220774278U

CN220774278U - Movable diaphragm and semiconductor detection equipment

Info

Publication number: CN220774278U
Application number: CN202322502941.2U
Authority: CN
Inventors: 战东北
Original assignee: Dongfang Jingyuan Electron Ltd
Current assignee: Dongfang Jingyuan Electron Ltd
Priority date: 2023-09-14
Filing date: 2023-09-14
Publication date: 2024-04-12
Anticipated expiration: 2033-09-14

Abstract

The application belongs to the technical field of semiconductor manufacturing, and particularly relates to a movable diaphragm and semiconductor detection equipment. The movable diaphragm comprises a first automatic adjusting mechanism, a second automatic adjusting mechanism, a guide rod and a diaphragm component; the diaphragm component is connected with the guide rod; the second automatic adjusting mechanism is connected with the guide rod and is arranged to drive the guide rod to move in a second direction; the first automatic adjusting mechanism is connected with the second automatic adjusting mechanism and is arranged to drive the second automatic adjusting mechanism to move in the first direction; wherein the first direction is perpendicular to the second direction. The diaphragm assembly has a first direction motion degree of freedom and a second direction motion degree of freedom, so that the position of the diaphragm hole can be adjusted to adapt to electron beam flows of different specifications. The movable diaphragm can be connected into a control system in the semiconductor detection equipment, the position of the diaphragm component is automatically adjusted according to the input signal, the efficiency is higher, the precision is higher, and the manual intervention and the operation are less.

Description

Movable diaphragm and semiconductor detection equipment

Technical Field

The application belongs to the technical field of semiconductor manufacturing, and particularly relates to a movable diaphragm and semiconductor detection equipment.

Background

In recent years, with the rapid development of the semiconductor industry, the requirements for defect detection equipment in the wafer manufacturing process are also becoming more and more widespread. Since the features of the wafer to be inspected are all microscopic, the conventional optical inspection apparatus cannot meet the use requirements. All existing wafer inspection equipment is electron beam inspection. In order to ensure clear imaging of electron beam detection, a diaphragm is additionally arranged between an electron beam pump source and a detected workpiece, so that the centermost beam of the detected electron beam is ensured to pass through, and the rest electrons are intercepted.

The diaphragm is provided with a plurality of diaphragm holes to adapt to electron beam flows of different specifications, and a mechanical structure is generally arranged to adjust the position of the diaphragm so as to realize the matching of the diaphragm holes and the electron beam flows, however, the mechanical structure for adjusting the position of the diaphragm generally adopts a manual adjustment mode, so that the efficiency is lower, and the precision is deviated.

Disclosure of Invention

The application provides a movable diaphragm and semiconductor detection equipment to solve current manual regulation mode inefficiency, the poor technical problem of precision.

According to one aspect of the present application, there is provided a moving diaphragm comprising a first automatic adjustment mechanism, a second automatic adjustment mechanism, a guide rod, and a diaphragm assembly; the diaphragm component is connected with the guide rod; the second automatic adjusting mechanism is connected with the guide rod and is arranged to drive the guide rod to move in a second direction; the first automatic adjusting mechanism is connected with the second automatic adjusting mechanism and is arranged to drive the second automatic adjusting mechanism to move in the first direction; wherein the first direction is perpendicular to the second direction.

In an alternative scheme of the application, the movable diaphragm further comprises a supporting frame and a movable frame; the first automatic adjusting mechanism is connected with the supporting frame, the movable frame is connected with the second automatic adjusting mechanism, and the guide rod is connected with the movable frame; the second automatic adjusting mechanism drives the movable frame to drive the guide rod to move.

In an alternative scheme of the application, the support frame comprises a first vertical plate, a second vertical plate and a bottom plate; the first vertical plates are arranged on two sides of the bottom plate in the second direction, the first automatic adjusting mechanism is connected with the bottom plate, and the second vertical plates are connected with the first vertical plates on two sides and the bottom plate; the first automatic adjusting mechanism and the second vertical plate are respectively positioned at two sides of the first vertical plate in the first direction, and the second vertical plate is close to the diaphragm component relative to the first automatic adjusting mechanism; the part of the movable frame is arranged in the area surrounded by the first automatic adjusting mechanism, the second vertical plate, the bottom plate and the first vertical plates on two sides, and the guide rod penetrates through the second vertical plate to be connected with the movable frame.

In an alternative scheme of the application, the movable frame comprises a fixed plate and a limiting plate; the fixed plate is connected to the second automatic adjusting mechanism, and the limiting plate is connected to the fixed plate and faces to the area surrounded by the first automatic adjusting mechanism, the second vertical plate, the bottom plate and the first vertical plates on two sides; the guide rod passes through the second vertical plate to be connected with the limiting plate.

In an alternative scheme of the application, the movable diaphragm further comprises a deformation sleeve, and the guide rod is provided with a ring protrusion; the deformation sleeve is arranged outside the support frame and is far away from the first automatic adjusting mechanism in the first direction, the deformation sleeve is sleeved outside the guide rod, and two ends of the deformation sleeve are respectively connected with the support frame and the annular protrusion.

In this application alternative scheme, the movable diaphragm still includes the adapter sleeve, and adapter sleeve connects in the support frame and overcoat in deformation sleeve pipe.

In an alternative aspect of the present application, the moving diaphragm further comprises an electrode connected to the adapter sleeve and extending partially into the adapter sleeve.

In an alternative scheme of the application, the first automatic adjusting mechanism comprises a first sliding table base, a first guide rail, a first table top and a first transmission device; the first guide rail extends along a first direction and is connected to the first sliding table base, the first table top is movably connected to the first guide rail, and the first transmission device is arranged on the first sliding table base and used for driving the first table top to move along the first guide rail; the second automatic adjusting mechanism is connected to the first table top.

In an alternative scheme of the application, the second automatic adjusting mechanism comprises a second sliding table base, a second guide rail, a second table top and a second transmission device; the second sliding table base is connected to the first table top, the second guide rail extends along the second direction and is connected to the second sliding table base, the second table top is movably connected to the second guide rail, and the second transmission device is arranged on the second sliding table base and is used for driving the second table top to move along the second guide rail; the guide rod is provided with a motion degree of freedom in a first direction and a motion degree of freedom in a second direction under the action of the second table top.

According to another aspect of the present application, there is provided a semiconductor inspection apparatus including the above-described moving diaphragm.

To sum up, the movable diaphragm and the semiconductor detection device provided by the application have the following beneficial effects:

in the movable diaphragm, the first automatic adjusting mechanism can provide the motion degree of freedom in the first direction, the second automatic adjusting mechanism can provide the motion degree of freedom in the second direction under the action of the first automatic adjusting mechanism, so that the guide rod connected with the second automatic adjusting mechanism has the motion degree of freedom in the first direction and the motion degree of freedom in the second direction, and the diaphragm assembly fixedly installed on the guide rod correspondingly has the motion degree of freedom in the first direction and the motion degree of freedom in the second direction.

Therefore, the diaphragm assembly has the freedom degree of movement in the first direction and the freedom degree of movement in the second direction under the action of the first automatic adjusting mechanism and the second automatic adjusting mechanism, so that the positions of diaphragm holes can be adjusted to adapt to electron beam flows of different specifications.

The movable diaphragm can be applied to semiconductor detection equipment, the first automatic adjusting mechanism and the second automatic adjusting mechanism can be connected to a control system in the semiconductor detection equipment, the position of the diaphragm component can be automatically adjusted according to input signals, the efficiency is higher, the precision is higher, and manual intervention and operation are less.

Drawings

In order to more clearly illustrate the embodiments of the present application or the technical solutions in the prior art, the drawings that are used in the description of the embodiments or the prior art will be briefly described below. It will be apparent that the figures in the following description are some embodiments of the present application, and that other figures can be obtained from these figures without inventive effort to those skilled in the art.

FIG. 1 is an assembly view of a moving diaphragm provided according to one embodiment of the present application;

FIG. 2 is an exploded view of the moving diaphragm of FIG. 1;

FIG. 3 is an enlarged view of a portion of the moving diaphragm of FIG. 1;

FIG. 4 is an exploded view of the first and second self-adjusting mechanisms of FIG. 1;

fig. 5 is a schematic view of the moving diaphragm of fig. 1 with the adapter sleeve and electrodes hidden from view.

The reference numerals are as follows:

10. a first automatic adjustment mechanism; 11. a first slipway base; 12. a first guide rail; 13. a first mesa; 14. a first transmission;

20. a second automatic adjustment mechanism; 21. a second slipway base; 22. a second guide rail; 23. a second mesa; 24. a second transmission;

30. a guide rod; 31. a ring bulge;

40. a diaphragm assembly;

50. a support frame; 51. a first vertical plate; 52. a second vertical plate; 53. a bottom plate;

60. a movable frame; 61. a fixing plate; 62. a limiting plate;

70. a deformed sleeve;

80. a transfer sleeve;

90. an electrode.

Detailed Description

In the description of the present application, it should be understood that, if there are descriptions of terms such as "center", "longitudinal", "lateral", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", "axial", "radial", "circumferential", etc., indicating orientation or positional relationship, it should be understood that the orientation or positional relationship shown based on the drawings is merely for convenience of description and simplification of the description, and does not indicate or imply that the apparatus or element in question must have a specific orientation, be configured and operated in a specific orientation, and should not be construed as limiting the present application.

Furthermore, the presence of features defining "first" and "second" for descriptive purposes only, should not be interpreted as indicating or implying a relative importance or implicitly indicating the number of features indicated. Features defining "first", "second" may include at least one such defined feature, either explicitly or implicitly. If a description of "a plurality" is present, the generic meaning includes at least two, e.g., two, three, etc., unless specifically defined otherwise.

In this application, unless explicitly stated or limited otherwise, terms such as "mounted," "connected," "secured," and the like, are to be construed broadly. For example, the two parts can be fixedly connected, detachably connected or integrated; the connection may be mechanical connection, electrical connection, direct connection, indirect connection through an intermediate medium, communication between two elements or interaction relationship between two elements. The specific meaning of the terms in the present application can be understood by those skilled in the art according to the specific circumstances.

In the description of the present specification, the terms "one embodiment," "some embodiments," "examples," "specific examples," or "some examples," etc., as used herein, mean that a particular feature, structure, material, or characteristic described in connection with the embodiment or example is included in at least one embodiment or example of the present application. In this specification, schematic representations of the above terms are not necessarily directed to the same embodiment or example. Furthermore, the particular features, structures, materials, or characteristics described may be combined in any suitable manner in any one or more embodiments or examples. Furthermore, the different embodiments or examples described in this specification and the features of the different embodiments or examples may be combined and combined by those skilled in the art without contradiction.

Fig. 1 is an assembly view of a moving diaphragm provided according to one embodiment of the present application. Referring to fig. 1, in one aspect, a moving diaphragm is provided and includes a first self-adjusting mechanism 10, a second self-adjusting mechanism 20, a guide rod 30, and a diaphragm assembly 40. It should be noted that, the diaphragm assembly 40 is provided with a plurality of diaphragm holes with different apertures, and these diaphragm holes are used to control the transmission of light and the shape of beam.

Wherein the diaphragm assembly 40 is connected to the guide rod 30. The second automatic adjusting mechanism 20 is connected to the guide rod 30 and configured to drive the guide rod 30 to move in the second direction. The first automatic adjustment mechanism 10 is connected to the second automatic adjustment mechanism 20 and is configured to drive the second automatic adjustment mechanism 20 to move in the first direction. The first direction is perpendicular to the second direction.

In the present embodiment, the first automatic adjustment mechanism 10 can provide a degree of freedom of movement in a first direction, and the second automatic adjustment mechanism 20 can provide a degree of freedom of movement in a second direction. The second automatic adjustment mechanism 20 is fixedly mounted on the first automatic adjustment mechanism 10, and the first automatic adjustment mechanism 10 can provide the second automatic adjustment mechanism 20 with a first direction of movement degree of freedom, so that the guide rod 30 connected with the second automatic adjustment mechanism 20 has the first direction of movement degree of freedom and a second direction of movement degree of freedom, and the diaphragm assembly 40 correspondingly fixedly mounted on the guide rod 30 has the first direction of movement degree of freedom and the second direction of movement degree of freedom.

It can be seen that the first automatic adjustment mechanism 10 does not directly drive the guide bar 30 to move in the first direction, but drives the guide bar 30 to move in the first direction by driving the second automatic adjustment mechanism 20, and the movement of the guide bar 30 in the second direction is driven by the second automatic adjustment mechanism 20. The diaphragm assembly 40 has a degree of freedom of movement in a first direction and a degree of freedom of movement in a second direction under the action of the first automatic adjusting mechanism 10 and the second automatic adjusting mechanism 20, so that the positions of the diaphragm holes can be adjusted to adapt to electron beam currents of different specifications.

It should be noted that the movable diaphragm can be applied to a semiconductor inspection device, and specifically, the first automatic adjustment mechanism 10 and the second automatic adjustment mechanism 20 can be connected to a control system (for example, a control system constructed based on a programmable logic controller PLC) in the semiconductor inspection device, so that the position of the diaphragm assembly 40 is automatically adjusted according to an input signal, so that the efficiency is higher, the precision is higher, and less human intervention and operation are required.

In the present embodiment, the first direction is the axial direction of the guide bar 30, and the second direction is the radial direction of the guide bar 30.

In a further alternative embodiment, the mobile diaphragm further comprises a support frame 50 and a movable frame 60, the first automatic adjusting mechanism 10 is connected to the support frame 50, the movable frame 60 is connected to the second automatic adjusting mechanism 20, and the guide rod 30 is connected to the movable frame 60. The second automatic adjusting mechanism 20 drives the movable frame 60 to move the guide rod 30.

In the present embodiment, the first automatic adjustment mechanism 10 is fixedly mounted on the support frame 50, and the support frame 50 is capable of supporting the first automatic adjustment mechanism 10 and the second automatic adjustment mechanism 20 mounted on the first automatic adjustment mechanism 10. As can be seen from the foregoing, the second automatic adjustment mechanism 20 has a first-direction movement degree of freedom and can provide a second-direction movement degree of freedom under the action of the first automatic adjustment mechanism 10, so that the movable frame 60 mounted on the second automatic adjustment mechanism 20 has the first-direction movement degree of freedom and the second-direction movement degree of freedom, and the movable frame 60 drives the guide rod 30.

It can be seen that the support frame 50 has a fixed supporting function, and the movable frame 60 has two degrees of freedom of movement in two directions, so as to perform a switching function and connect the guide rod 30 with the second automatic adjusting mechanism 20.

Fig. 2 is an exploded view of the moving diaphragm of fig. 1, and fig. 3 is a partially enlarged view of the moving diaphragm of fig. 1. Referring to fig. 2 and 3, in a further alternative embodiment, the support 50 includes a first upright 51, a second upright 52, and a bottom plate 53. The first vertical plates 51 are provided on both sides of the bottom plate 53 in the second direction, the first automatic adjusting mechanism 10 is connected to the bottom plate 53, and the second vertical plates 52 are connected to the first vertical plates 51 and the bottom plate 53 on both sides.

The first automatic adjustment mechanism 10 and the second vertical plate 52 are located on both sides of the first vertical plate 51 in the first direction, respectively, and the second vertical plate 52 is close to the diaphragm assembly 40 with respect to the first automatic adjustment mechanism 10. The movable frame 60 is partially disposed in an area surrounded by the first automatic adjusting mechanism 10, the second vertical plate 52, the bottom plate 53 and the first vertical plates 51 on both sides, and the guide rod 30 passes through the second vertical plate 52 to be connected to the movable frame 60.

In the present embodiment, the support 50 is formed by assembling a first vertical plate 51, a second vertical plate 52 and a bottom plate 53, and the second vertical plate 52, the first vertical plate 51 and the first automatic adjusting mechanism 10 are sequentially mounted on the bottom plate 53 in the first direction. Wherein the second vertical plates 52 are closer to the diaphragm assembly 40 in the first direction, the number of the first vertical plates 51 is even, and the second vertical plates 52 are mounted on two sides of the bottom plate 53 in the second direction, and the second vertical plates 52 are assembled with the first vertical plates 51 on two sides, so as to further improve the stability of the support frame 50.

The first automatic adjustment mechanism 10 is disposed on the opposite side of the second standing plate 52 in the first direction, and encloses a movable area of the movable frame 60 with each plate of the supporting frame 50. The limit position of the movable frame 60 in the first direction is determined by the mounting positions of the second vertical plate 52 and the first automatic adjusting mechanism 10, and the limit position of the movable frame 60 in the second direction is determined by the mounting positions of the first vertical plates 51 on both sides.

Further, the guide bar 30 extends in the first direction and passes through the second riser 52 to extend into the area enclosed by the first automatic adjusting mechanism 10 and each plate of the supporting frame 50, thereby being mounted and fixed to the portion of the movable frame 60 extending into the area.

In the embodiment shown in the drawings, the number of first risers 51 is 2 and are located on the edges of the base plate 53 on both sides in the second direction, respectively. Of course, the number of the first standing plates 51 is not limited to this, and may be an even number of cases such as 4, 6, etc. For example, in the case where the number of the first standing plates 51 is 4, 2 first standing plates 51 are arranged on both sides of the bottom plate 53 in the second direction, and the 2 first standing plates 51 on one side are spliced in the first direction. Accordingly, other even numbers of cases may be inferred, and are not illustrated herein.

In a further alternative embodiment, the movable frame 60 includes a fixed plate 61 and a limiting plate 62, the fixed plate 61 is connected to the second automatic adjusting mechanism 20, and the limiting plate 62 is connected to the fixed plate 61 and faces the first automatic adjusting mechanism 10, the second vertical plate 52, the bottom plate 53 and the area enclosed by the first vertical plates 51 on both sides. The guide bar 30 passes through the second riser 52 to be connected to the limiting plate 62.

In the present embodiment, the movable frame 60 is assembled by the fixing plate 61 and the limiting plate 62, the fixing plate 61 is fixedly mounted on the second automatic adjusting mechanism 20, the limiting plate 62 is fixedly mounted on the fixing plate 61, and the limiting plate 62 moves in the area enclosed by the first automatic adjusting mechanism 10 and the supporting frame 50, so as to limit the movement range of the whole movable frame 60.

It can be seen that the portion of the movable frame 60 located in the area enclosed by the first automatic adjusting mechanism 10 and the supporting frame 50 refers to the portion of the limiting plate 62 extending into the area. Further, one end of the guide rod 30 is fixedly mounted on the limiting plate 62, and the other end is connected to the diaphragm assembly 40.

In the above embodiment, the supporting frame 50 and the movable frame 60 are assembled by a plurality of plates, but the utility model is not limited thereto, and the supporting frame 50 and the movable frame 60 may be integrally formed by machining.

Fig. 4 is an exploded view of the first and second automatic adjustment mechanisms 10 and 20 of fig. 1. Referring to fig. 4, in some alternative embodiments, the first automatic adjustment mechanism 10 includes a first slide base 11, a first rail 12, a first table 13, and a first transmission 14. The first guide rail 12 extends along the first direction and is connected to the first sliding table base 11, the first table top 13 is movably connected to the first guide rail 12, and the first transmission device 14 is arranged on the first sliding table base 11 and is used for driving the first table top 13 to move along the first guide rail 12. The second automatic adjustment mechanism 20 is connected to the first table top 13.

In this embodiment, the components of the first automatic adjustment mechanism 10 are laid out on the basis of the first slide base 11, the first transmission device 14 and the first guide rail 12 are both mounted on the first slide base 11, and the first table top 13 is mounted on the first guide rail 12 and can translate along the first guide rail 12 under the drive of the first transmission device 14, that is, the first table top 13 has a degree of freedom of movement in the first direction.

The second automatic adjustment mechanism 20 is mounted on the first table top 13, and the first table top 13 can drive the second automatic adjustment mechanism 20 to move, so that the second automatic adjustment mechanism 20 has a degree of freedom of movement in the first direction. In a specific application, the first sliding table base 11 is fixedly installed on the bottom plate 53, and one end of the first sliding table base abuts against the first vertical plates 51 on two sides, so that the first sliding table base and each plate on the supporting frame 50 enclose a movable area of the limiting plate 62.

In a further alternative embodiment, the second automatic adjustment mechanism 20 includes a second slide mount 21, a second rail 22, a second table top 23, and a second transmission 24. The second sliding table base 21 is connected to the first table top 13, the second guide rail 22 extends along the second direction and is connected to the second sliding table base 21, the second table top 23 is movably connected to the second guide rail 22, and the second transmission device 24 is arranged on the second sliding table base 21 and is used for driving the second table top 23 to move along the second guide rail 22. The guide bar 30 is provided so as to have a degree of freedom of movement in the first direction and a degree of freedom of movement in the second direction by the second table 23.

In the present embodiment, the second automatic adjustment mechanism 20 is identical to the constituent members of the first automatic adjustment mechanism 10. Each component of the second automatic adjustment mechanism 20 is laid out based on a second slide table base 21, the second slide table base 21 is fixedly mounted on the first table top 13, and each component of the second automatic adjustment mechanism 20 has a degree of freedom of movement in a first direction under the action of the first table top 13, that is, the second table top 23 has a degree of freedom of movement in the first direction.

Further, the second transmission device 24 and the second guide rail 22 are both mounted on the second sliding table base 21, and the second table top 23 is mounted on the second guide rail 22 and can translate along the second guide rail 22 under the drive of the second transmission device 24, that is, the second table top 23 also has a second direction of freedom of movement.

It can be seen that the second table 23 has a degree of freedom of movement in the first direction and a degree of freedom of movement in the second direction. In a specific application, the fixed plate 61 in the movable frame 60 is mounted on the second table top 23, and the second table top 23 drives the guide rod 30 through the movable frame 60, so that the guide rod 30 has a first direction of freedom of movement and a second direction of freedom of movement, and further the diaphragm assembly 40 has the first direction of freedom of movement and the second direction of freedom of movement.

As can be seen from the above description, the first automatic adjusting mechanism 10 and the second automatic adjusting mechanism 20 are both linear motion modules, and in specific applications, the first transmission device 14 and the second transmission device 24 can be any one of a linear motor, a ball screw driven by a motor, a worm gear driven by a motor, and the like.

Fig. 5 is a schematic view of the moving diaphragm of fig. 1 with the adapter sleeve 80 and the electrode 90 hidden from view. Referring to fig. 5, in some alternative embodiments, the moving diaphragm further comprises a deformable sleeve 70, and the guide rod 30 is provided with an annular protrusion 31. The deformation sleeve 70 is located outside the support frame 50 and is far away from the first automatic adjusting mechanism 10 in the first direction, the deformation sleeve 70 is sleeved outside the guide rod 30, and two ends of the deformation sleeve 70 are respectively connected to the support frame 50 and the annular protrusion 31.

It should be noted that the diaphragm assembly 40 is generally required to be used in a vacuum environment, and in a specific application, the diaphragm assembly 40 is disposed in a sealed cavity, and the vacuum environment can be formed in the sealed cavity.

In this embodiment, the deformation sleeve 70 is sleeved on the guide rod 30, one end of the deformation sleeve is fixedly mounted on the second vertical plate 52 of the support frame 50, and the other end of the deformation sleeve is sealed by the annular protrusion 31. As can be seen from the foregoing, one end of the guide rod 30 passes through the second vertical plate 52, and thus a via hole allowing the guide rod 30 to pass through is provided on the second vertical plate 52, and the deformation sleeve 70 cooperates with the annular protrusion 31 to cover the via hole on the second vertical plate 52. In the case where the diaphragm assembly 40 is housed in a sealed chamber (vacuum environment), the vacuum side and the atmosphere side are isolated by the deformation sleeve 70.

In addition, the deformation sleeve 70 is capable of deforming when driven. It should be appreciated that since one end of the deformation sleeve 70 is fixed to the annular protrusion 31 of the guide bar 30, the deformation sleeve 70 needs to be deformed following the movement of the guide bar 30. When the guide bar 30 moves in the first direction, the deformation sleeve 70 expands and contracts in the first direction, and when the guide bar 30 moves in the second direction, the deformation sleeve 70 swings in the second direction.

In a specific application, the deformation sleeve 70 is a bellows, but is not limited thereto, and may include, for example, an elastic rubber tube.

Referring to fig. 1 and 2, in a further alternative embodiment, the moving diaphragm further includes an adapter sleeve 80, and the adapter sleeve 80 is connected to the support frame 50 and sleeved on the deformation sleeve 70.

In this embodiment, the adapter sleeve 80 can protect the deformation sleeve 70, in addition, one end of the adapter sleeve 80 is mounted on the second vertical plate 52 of the support frame 50, the other end is fixed on the sealing cavity containing the diaphragm assembly 40, and the adapter sleeve 80 can cooperate with a sealing member (such as a sealing gasket, a sealing rubber ring, etc.) to ensure the tightness of the sealing cavity.

In a further alternative embodiment, the moving diaphragm further comprises an electrode 90, the electrode 90 being connected to the adapter sleeve 80 and extending partly into the adapter sleeve 80.

In this embodiment, the electrode 90 is used for transmitting electric energy and electric signals, and the relevant electric components in the sealed cavity are electrically connected with external components through the electrode 90. In addition, the electrode 90 is mounted on the adapter sleeve 80 and connected to components in the vacuum environment, so that it is also required to have reliable sealing performance.

In a specific application, the electrode 90 is a vacuum electrode, and the vacuum electrode has good sealing performance and reliable high-voltage insulation performance, so that the vacuum electrode is widely applied to high-vacuum and ultra-high-vacuum systems.

The present application also provides a semiconductor inspection apparatus having the above-mentioned moving diaphragm, so that it is obvious that the apparatus has all the advantageous effects brought by the moving diaphragm, and a repetitive description will not be given here.

Although embodiments of the present application have been shown and described above, it will be understood that the above embodiments are illustrative and not to be construed as limiting the application, and that variations, modifications, alternatives, and variations may be made to the above embodiments by those skilled in the art within the scope of the application.

Claims

1. The movable diaphragm is characterized by comprising a first automatic adjusting mechanism, a second automatic adjusting mechanism, a guide rod and a diaphragm assembly;

the diaphragm component is connected to the guide rod;

the second automatic adjusting mechanism is connected with the guide rod and is arranged to drive the guide rod to move in a second direction;

the first automatic adjusting mechanism is connected with the second automatic adjusting mechanism and is arranged to drive the second automatic adjusting mechanism to move in a first direction;

wherein the first direction is perpendicular to the second direction.

2. The movable diaphragm of claim 1, further comprising a support frame and a movable frame;

the first automatic adjusting mechanism is connected with the supporting frame, the movable frame is connected with the second automatic adjusting mechanism, and the guide rod is connected with the movable frame;

the second automatic adjusting mechanism drives the movable frame to drive the guide rod to move.

3. The moving diaphragm of claim 2 wherein the support frame comprises a first riser, a second riser, and a base plate;

the first vertical plates are arranged on two sides of the bottom plate in the second direction, the first automatic adjusting mechanism is connected to the bottom plate, and the second vertical plates are connected to the first vertical plates and the bottom plate on two sides;

the first automatic adjusting mechanism and the second vertical plate are respectively positioned at two sides of the first vertical plate in the first direction, and the second vertical plate is close to the diaphragm assembly relative to the first automatic adjusting mechanism;

the movable frame is characterized in that a part of the movable frame is arranged in an area surrounded by the first automatic adjusting mechanism, the second vertical plate, the bottom plate and the first vertical plates on two sides, and the guide rod penetrates through the second vertical plate to be connected with the movable frame.

4. A moving diaphragm according to claim 3, wherein the movable frame comprises a fixed plate and a limiting plate;

the fixed plate is connected to the second automatic adjusting mechanism, and the limiting plate is connected to the fixed plate and faces into an area surrounded by the first automatic adjusting mechanism, the second vertical plate, the bottom plate and the first vertical plates on two sides;

the guide rod passes through the second vertical plate to be connected with the limiting plate.

5. The moving diaphragm of claim 2, further comprising a deformable sleeve, the guide rod being provided with a collar;

the deformation sleeve is positioned outside the support frame and far away from the first automatic adjusting mechanism in the first direction, and the deformation sleeve is sleeved outside the guide rod, and two ends of the deformation sleeve are respectively connected with the support frame and the annular protrusion.

6. The moving diaphragm of claim 5 further comprising an adapter sleeve coupled to the support frame and sleeved over the deformation sleeve.

7. The moving diaphragm of claim 6 further comprising an electrode connected to the adapter sleeve and extending partially into the adapter sleeve.

8. The moving diaphragm of claim 1 wherein the first automatic adjustment mechanism comprises a first slide mount, a first rail, a first table top, and a first transmission;

the first guide rail extends along the first direction and is connected with the first sliding table base, the first table top is movably connected with the first guide rail, and the first transmission device is arranged on the first sliding table base and is used for driving the first table top to move along the first guide rail;

the second automatic adjusting mechanism is connected to the first table top.

9. The moving diaphragm of claim 8 wherein the second automatic adjustment mechanism comprises a second slip base, a second rail, a second table top, and a second transmission;

the second sliding table base is connected with the first table top, the second guide rail extends along the second direction and is connected with the second sliding table base, the second table top is movably connected with the second guide rail, and the second transmission device is arranged on the second sliding table base and is used for driving the second table top to move along the second guide rail;

the guide rod is arranged to have the degree of freedom of movement in the first direction and the degree of freedom of movement in the second direction under the action of the second table top.

10. A semiconductor inspection apparatus, characterized in that it comprises a moving diaphragm according to any one of claims 1 to 9.