CN220751105U - Device for measuring angle of reflecting surface of light outlet of wavelength division multiplexing chip - Google Patents
Device for measuring angle of reflecting surface of light outlet of wavelength division multiplexing chip Download PDFInfo
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- CN220751105U CN220751105U CN202322287259.6U CN202322287259U CN220751105U CN 220751105 U CN220751105 U CN 220751105U CN 202322287259 U CN202322287259 U CN 202322287259U CN 220751105 U CN220751105 U CN 220751105U
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- reflecting surface
- division multiplexing
- wavelength division
- light outlet
- multiplexing chip
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- 230000003287 optical effect Effects 0.000 claims abstract description 36
- 238000012360 testing method Methods 0.000 claims abstract description 36
- 238000005259 measurement Methods 0.000 claims description 7
- 238000007689 inspection Methods 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000004891 communication Methods 0.000 description 1
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- 238000005859 coupling reaction Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
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Abstract
The utility model relates to a wavelength division multiplexing chip light outlet reflecting surface angle measuring device, which comprises: a base; the laser source is used for emitting optical signals; the end face of the wave-division multiplexing chip, which is opposite to the laser source, is provided with a light outlet reflecting surface which is used for reflecting the optical signals; the light signal is reflected by the light outlet reflecting surface and then reflected to the test piece, and the test piece is provided with a reflecting surface angle graduated scale. When the angle of the reflecting surface of the light outlet of the wavelength division multiplexing chip is measured, the wavelength division multiplexing chip is placed on the base, the laser source emits light signals, the light signals are reflected by the reflecting surface of the light outlet of the wavelength division multiplexing chip and are beaten on the test piece, and the angle of the reflecting surface of the light outlet of the wavelength division multiplexing chip is read through light spots displayed on the test piece by the light signals.
Description
Technical Field
The utility model relates to the technical field of wafer back-end processes, in particular to a device for measuring the angle of a reflecting surface of a light outlet of a wavelength division multiplexing chip.
Background
The wavelength division multiplexing chip is used in an optical communication system and is used for demultiplexing multiplexing signals containing optical signals with multiple wavelengths and separating the optical signals with different wavelengths one by one. In order to conveniently receive the separated optical signals, the wavelength division multiplexing chip is provided with a reflecting surface with an included angle of 41 degrees with the horizontal plane at the light outlet, and the separated optical signals are reflected by the reflecting surface, spread along the vertical direction and leave the wavelength division multiplexing chip, and are coupled with other devices. Therefore, the angular precision of the reflecting surface of the light outlet directly influences the coupling performance of the wavelength division multiplexing chip.
At present, the angle of the light outlet reflecting surface of the wave-division multiplexing chip mainly uses a secondary image measuring machine, the equipment is relatively expensive, the repeated measurement and repetition precision is poor, and the production efficiency is relatively low while the cost is increased.
Disclosure of Invention
Therefore, the utility model aims to solve the technical problem that the angle of the reflecting surface of the light outlet of the wavelength division multiplexing chip is difficult to measure in the prior art.
In order to solve the technical problems, the utility model provides a wavelength division multiplexing chip light outlet reflecting surface angle measuring device, which comprises: a base as a supporting member for measurement; a laser source disposed on the base, the laser source for emitting an optical signal; the wavelength division multiplexing chip is arranged on the base, and an optical outlet reflecting surface is arranged on the end surface of the wavelength division multiplexing chip opposite to the laser source and is used for reflecting optical signals; the test piece is arranged on the base through the support frame, the optical signal is reflected to the test piece after being reflected by the reflecting surface of the light outlet, and the angle graduated scale of the reflecting surface is arranged on the test piece. The utility model provides a device for measuring the angle of the reflecting surface of the light outlet of a wavelength division multiplexing chip, which has simple structure and easy operation, can realize the rapid measurement of the angle of the reflecting surface of the light outlet of the wavelength division multiplexing chip, has simple structure and low cost, and can be applied to the inspection of the wavelength division multiplexing chip.
In one embodiment of the present utility model, the base is provided with a positioning groove, and the wavelength division multiplexing chip is disposed in the positioning groove.
In one embodiment of the present utility model, an end surface of the positioning groove, which is close to the laser source, is a reference surface, and the optical signal is perpendicular to the reference surface.
In one embodiment of the present utility model, an edge of the light outlet reflecting surface contacts with a reference surface.
In one embodiment of the present utility model, the laser source and the wavelength division multiplexing chip are on the same line, and the test piece is located right above the reflecting surface of the light outlet.
In one embodiment of the utility model, the base is provided with a bracket, and the test piece is arranged on the bracket.
In one embodiment of the present utility model, the optical signal is reflected by the light outlet reflecting surface to form a light spot on the test piece, and the position of the light spot on the reflecting surface angle scale is used for indicating the angle value of the light outlet reflecting surface.
In one embodiment of the present utility model, the lower bottom surface of the positioning groove is a plane, and the test piece is disposed parallel to the lower bottom surface of the positioning groove.
In one embodiment of the present utility model, the light outlet reflecting surface is disposed obliquely.
In one embodiment of the utility model, the reflecting surface angle graduation scale is provided with a plurality of angle graduations, and the light spots are positioned on the angle graduations.
Compared with the prior art, the technical scheme of the utility model has the following advantages:
when the angle of the reflecting surface of the light outlet of the wavelength division multiplexing chip is measured, the wavelength division multiplexing chip is placed on the base, the position is fixed through the positioning groove, the laser source emits light signals, the light signals are reflected by the reflecting surface of the light outlet of the wavelength division multiplexing chip, the light signals are beaten on the test piece, and the angle of the reflecting surface of the light outlet of the wavelength division multiplexing chip is read through light spots displayed on the test piece by the light signals. The scheme of the utility model can realize rapid measurement of the angle of the reflecting surface of the light outlet of the wavelength division multiplexing chip, has simple structure and low cost, and can be applied to the inspection of the wavelength division multiplexing chip.
Drawings
In order that the utility model may be more readily understood, a more particular description of the utility model will be rendered by reference to specific embodiments thereof that are illustrated in the appended drawings, in which
FIG. 1 is a schematic diagram of a device for measuring the angle of a reflecting surface of an optical outlet of a wavelength division multiplexing chip;
FIG. 2 is a schematic structural view of a test strip according to the present utility model.
Description of the specification reference numerals: the device comprises a base 1, a positioning groove 11, a reference surface 12, a laser source 2, an optical signal 3, a light spot 31, a wavelength division multiplexing chip 4, a light outlet reflecting surface 41, a test piece 5, a reflecting surface angle scale 51, an angle scale 511 and a bracket 6.
Detailed Description
The present utility model will be further described with reference to the accompanying drawings and specific examples, which are not intended to be limiting, so that those skilled in the art will better understand the utility model and practice it.
Referring to fig. 1, the wavelength division multiplexing chip light outlet reflecting surface angle measuring device of the present utility model includes: the device comprises a base 1, a laser source 2, an optical signal 3, a wavelength division multiplexing chip 4, a test piece 5 and other main parts; a base 1 as a supporting member for measurement; a laser source 2 disposed on the base 1, the laser source 2 for emitting an optical signal 3; a wavelength division multiplexing chip 4, which is arranged on the base 1, and an optical outlet reflecting surface 41 is arranged on the end surface of the wavelength division multiplexing chip 4 opposite to the laser source 2, the optical outlet reflecting surface 41 is obliquely arranged, and the optical outlet reflecting surface 41 is used for reflecting the optical signal 3; the test piece 5 is arranged on the base 1 through a supporting frame, the optical signal 3 is reflected to the test piece 5 after being reflected by the light outlet reflecting surface 41, and the test piece 5 is provided with a reflecting surface angle graduated scale 51.
In the above structure, the base 1 is provided with a positioning groove 11, and the wavelength division multiplexing chip 4 is disposed in the positioning groove 11. The end surface of the positioning groove 11, which is close to the laser source 2, is a reference surface 12, and the optical signal 3 is perpendicular to the reference surface 12. The edge of the light outlet reflecting surface 41 contacts the reference surface 12. The lower bottom surface of the positioning groove 11 is a plane, and the test piece 5 is arranged parallel to the lower bottom surface of the positioning groove 11.
In the above structure, the laser source 2 and the wavelength division multiplexing chip 4 are on the same line, and the test piece 5 is located right above the light outlet reflecting surface 41.
In the above structure, the base 1 is provided with a stand 6, and the test piece 5 is disposed on the stand 6.
In the above structure, the optical signal 3 is reflected by the light outlet reflecting surface 41 to form a light spot 31 on the test piece 5, and the position of the light spot 31 on the reflecting surface angle scale 51 is used for indicating the angle value of the light outlet reflecting surface 41.
The utility model relates to a device for measuring the angle of a reflecting surface of a light outlet of a wavelength division multiplexing chip, which comprises the following general principles: the wavelength division multiplexing chip 4 is placed in the positioning groove 11, and the edge of the reflecting surface of the light outlet is aligned with the edge of the positioning groove 11. The laser source 2 emits an optical signal 3, and the optical signal 3 continues to propagate to the test piece 5 after being reflected by the light outlet reflecting surface 41 of the wavelength division multiplexing chip 4, and the light spot 31 is displayed on the test piece 5, and the value of the angle is read out through the light spot 31 and the angle scale mark on the test piece 5.
Specifically, referring to fig. 2, the reflecting surface angle graduation scale 51 is provided with a plurality of angle graduations 511, and the light spot 31 is located on the angle graduations 511.
For example, firstly, a wavelength division multiplexing chip 4 with better processing quality is placed in a positioning groove 11 and aligned to a reference plane 12, an optical signal 3 reaches a test piece 5 after being reflected by an optical outlet reflecting surface 41, a first light spot (a position pointed by a in fig. 2) is displayed, and an angle of the optical outlet reflecting surface of the wavelength division multiplexing chip 4 to be measured is read out through an angle scale 511 to be 41 degrees.
Then, the wavelength division multiplexing chip 4 with a possibly larger angle of the light outlet reflecting surface 41 is placed in the positioning groove 11 and aligned to the reference surface 12, the optical signal 3 reaches the test piece 5 after being reflected by the light outlet reflecting surface 41, and shows a second light spot (the position pointed by B in fig. 2), and compared with the position of the first light spot, the position is shifted to the left, and the angle of the light outlet reflecting surface of the wavelength division multiplexing chip 4 to be measured is read out according to the angle scale 511 to be 41.2 degrees.
Finally, a wavelength division multiplexing chip 4 with a possibly smaller angle of the light outlet reflecting surface 41 is placed in the positioning groove 11 and aligned to the reference surface 12, the light signal 3 reaches the test 5 pieces after being reflected by the light outlet reflecting surface 41, a third light spot (such as the position pointed by C in fig. 2) is displayed, compared with the position of the first light spot, the position is shifted rightward, and the angle of the light outlet reflecting surface of the wavelength division multiplexing chip 4 to be tested is read out according to the angle scale 511 and is 40.7 degrees.
It is apparent that the above examples are given by way of illustration only and are not limiting of the embodiments. Other variations and modifications of the present utility model will be apparent to those of ordinary skill in the art in light of the foregoing description. It is not necessary here nor is it exhaustive of all embodiments. And obvious variations or modifications thereof are contemplated as falling within the scope of the present utility model.
Claims (10)
1. The utility model provides a wavelength division multiplexing chip light-emitting port reflecting surface angle measurement device which characterized in that includes:
a base as a supporting member for measurement;
a laser source disposed on the base, the laser source for emitting an optical signal;
the wavelength division multiplexing chip is arranged on the base, and an optical outlet reflecting surface is arranged on the end surface of the wavelength division multiplexing chip opposite to the laser source and is used for reflecting optical signals;
the test piece is arranged on the base through the support frame, the optical signal is reflected to the test piece after being reflected by the reflecting surface of the light outlet, and the angle graduated scale of the reflecting surface is arranged on the test piece.
2. The wavelength division multiplexing chip light outlet reflecting surface angle measuring device according to claim 1, wherein: the base is provided with a positioning groove, and the wavelength division multiplexing chip is arranged in the positioning groove.
3. The wavelength division multiplexing chip light outlet reflecting surface angle measuring device according to claim 2, wherein: the end face, close to the laser source, of the positioning groove is a reference surface, and the optical signal is perpendicular to the reference surface.
4. The wavelength division multiplexing chip light outlet reflecting surface angle measuring device according to claim 3, wherein: the edge of the light outlet reflecting surface is contacted with the reference surface.
5. The wavelength division multiplexing chip light outlet reflecting surface angle measuring device according to claim 1, wherein: the laser source and the wavelength division multiplexing chip are positioned on the same straight line, and the test piece is positioned right above the reflecting surface of the light outlet.
6. The wavelength division multiplexing chip light outlet reflecting surface angle measuring device according to claim 1 or 5, wherein: the base is provided with a support, and the test piece is arranged on the support.
7. The wavelength division multiplexing chip light outlet reflecting surface angle measuring device according to claim 6, wherein: the optical signal is reflected by the light outlet reflecting surface to form a light spot on the test piece, and the position of the reflecting surface angle graduated scale where the light spot is positioned is used for indicating the angle value of the light outlet reflecting surface.
8. The wavelength division multiplexing chip light outlet reflecting surface angle measuring device according to claim 2, wherein: the lower bottom surface of the positioning groove is a plane, and the test piece is arranged in parallel with the lower bottom surface of the positioning groove.
9. The wavelength division multiplexing chip light outlet reflecting surface angle measuring device according to claim 1, wherein: the light outlet reflecting surface is obliquely arranged.
10. The wavelength division multiplexing chip light outlet reflecting surface angle measuring device according to claim 7, wherein: the reflecting surface angle scale is provided with a plurality of angle scales, and the light spots are positioned on the angle scales.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202322287259.6U CN220751105U (en) | 2023-08-24 | 2023-08-24 | Device for measuring angle of reflecting surface of light outlet of wavelength division multiplexing chip |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202322287259.6U CN220751105U (en) | 2023-08-24 | 2023-08-24 | Device for measuring angle of reflecting surface of light outlet of wavelength division multiplexing chip |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN220751105U true CN220751105U (en) | 2024-04-09 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202322287259.6U Active CN220751105U (en) | 2023-08-24 | 2023-08-24 | Device for measuring angle of reflecting surface of light outlet of wavelength division multiplexing chip |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN220751105U (en) |
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2023
- 2023-08-24 CN CN202322287259.6U patent/CN220751105U/en active Active
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