CN220751105U - Device for measuring angle of reflecting surface of light outlet of wavelength division multiplexing chip - Google Patents

Abstract

The utility model relates to a device for measuring the angle of the reflection surface of the light outlet of a wavelength division multiplexing chip, comprising: a base; a laser source, the laser source is used to emit an optical signal; a wavelength division multiplexing chip, a light outlet reflection surface is provided on the end face of the wavelength division multiplexing chip opposite to the laser source, the light outlet reflection surface is used to reflect the optical signal; a test piece, the optical signal is reflected by the light outlet reflection surface and then reflected onto the test piece, the test piece is provided with a reflection surface angle scale. The device for measuring the angle of the reflection surface of the light outlet of a wavelength division multiplexing chip described in the utility model, when measuring the angle of the reflection surface of the light outlet of the wavelength division multiplexing chip, the wavelength division multiplexing chip is placed on the base, the laser source emits an optical signal, the optical signal is reflected by the reflection surface of the light outlet of the wavelength division multiplexing chip and hits the test piece, and the angle of the reflection surface of the light outlet of the wavelength division multiplexing chip is read through the light spot displayed by the optical signal on the test piece.

Description

A device for measuring the angle of reflection surface of the light outlet of a wavelength division multiplexing chip

Technical Field

The utility model relates to the technical field of wafer back-end process, in particular to a device for measuring the angle of reflection surface of a wavelength division multiplexing chip light outlet.

Background technique

The wavelength division multiplexing chip is used in optical communication systems to demultiplex multiplexed signals containing multiple wavelengths of optical signals and separate optical signals of different wavelengths one by one. Usually, the wavelength division multiplexing chip is placed horizontally. In order to facilitate the reception of separated optical signals, a reflection surface with an angle of 41 degrees with the horizontal plane is set at the light outlet of the wavelength division multiplexing chip. After the separated optical signal is reflected by the reflection surface, it propagates vertically and leaves the wavelength division multiplexing chip, and then couples with other devices. Therefore, the angle accuracy of the reflection surface at the light outlet directly affects the coupling performance of the wavelength division multiplexing chip.

At present, the reflection surface angle of the light outlet of the wavelength division multiplexing chip is mainly measured by a two-dimensional image measuring machine. This equipment is expensive and has poor repetition accuracy in repeated measurements, which increases costs and reduces production efficiency.

Utility Model Content

Therefore, the technical problem to be solved by the present invention is to overcome the difficulty in measuring the angle of the reflection surface of the light outlet of the wavelength division multiplexing chip in the prior art.

In order to solve the above technical problems, the utility model provides a device for measuring the angle of the reflection surface of the light outlet of a wavelength division multiplexing chip, comprising: a base, which serves as a support component for measurement; a laser source, which is arranged on the base, and the laser source is used to emit an optical signal; a wavelength division multiplexing chip, which is arranged on the base, and a light outlet reflection surface is provided on the end face of the wavelength division multiplexing chip opposite to the laser source, and the light outlet reflection surface is used for optical signal reflection; a test piece, which is arranged on the base through a support frame, and the optical signal is reflected by the light outlet reflection surface and then reflected onto the test piece, and the test piece is provided with a reflection surface angle scale. The utility model provides a device for measuring the angle of the reflection surface of the light outlet of a wavelength division multiplexing chip with a simple structure and easy operation, which can realize the rapid measurement of the reflection surface angle of the light outlet of the wavelength division multiplexing chip, has a simple structure and low cost, and can be applied to the inspection of wavelength division multiplexing chips.

In one embodiment of the utility model, a positioning groove is provided on the base, and the wavelength division multiplexing chip is arranged in the positioning groove.

In one embodiment of the present invention, the end surface of the positioning groove close to the laser source is a reference surface, and the optical signal is arranged perpendicular to the reference surface.

In an embodiment of the present invention, the edge of the reflective surface of the light outlet contacts with the reference surface.

In one embodiment of the present invention, the laser source and the wavelength division multiplexing chip are located on the same straight line, and the test piece is located directly above the reflective surface of the light outlet.

In an embodiment of the present invention, a bracket is provided on the base, and the test piece is arranged on the bracket.

In one embodiment of the utility model, the light signal forms a light spot on the test piece after being reflected by the light outlet reflection surface, and the position of the light spot on the reflection surface angle scale is used to indicate the angle value of the light outlet reflection surface.

In one embodiment of the present invention, the lower bottom surface of the positioning groove is a plane, and the test piece is arranged parallel to the lower bottom surface of the positioning groove.

In an embodiment of the present invention, the light outlet reflective surface is inclined.

In an embodiment of the present invention, a plurality of angle scales are provided on the angle scale of the reflection surface, and the light spot is located on the angle scales.

The above technical solution of the utility model has the following advantages compared with the prior art:

The utility model discloses a device for measuring the angle of the reflection surface of the light outlet of a wavelength division multiplexing chip. When measuring the angle of the reflection surface of the light outlet of the wavelength division multiplexing chip, the wavelength division multiplexing chip is placed on a base, and the position is fixed by a positioning groove. A laser source emits a light signal, and the light signal is reflected by the reflection surface of the light outlet of the wavelength division multiplexing chip and hits a test piece. The angle of the reflection surface of the light outlet of the wavelength division multiplexing chip is read by the light spot displayed by the light signal on the test piece. The solution of the utility model can realize the rapid measurement of the reflection surface angle of the light outlet of the wavelength division multiplexing chip, has a simple structure, and is low in cost, and can be applied to the inspection of wavelength division multiplexing chips.

BRIEF DESCRIPTION OF THE DRAWINGS

In order to make the content of the utility model easier to understand, the utility model is further described in detail according to the specific embodiments of the utility model in combination with the accompanying drawings, wherein

1 is a schematic diagram of the structure of the device for measuring the angle of the reflection surface of the light outlet of the wavelength division multiplexing chip of the present invention;

FIG. 2 is a schematic structural diagram of a test piece of the present invention.

Description of the accompanying drawings in the specification: base 1, positioning groove 11, reference surface 12, laser source 2, optical signal 3, light spot 31, wavelength division multiplexing chip 4, light outlet reflection surface 41, test piece 5, reflection surface angle scale ruler 51, angle scale 511, bracket 6.

Detailed ways

The present invention will be further described below in conjunction with the accompanying drawings and specific embodiments so that those skilled in the art can better understand the present invention and implement it, but the embodiments are not intended to limit the present invention.

1 , the wavelength division multiplexing chip light outlet reflection surface angle measuring device of the utility model comprises: a base 1, a laser source 2, an optical signal 3, a wavelength division multiplexing chip 4 and a test piece 5 and several other main parts; the base 1, which serves as a support component for measurement; the laser source 2, which is arranged on the base 1, and the laser source 2 is used to emit the optical signal 3; the wavelength division multiplexing chip 4, which is arranged on the base 1, and a light outlet reflection surface 41 is provided on the end face of the wavelength division multiplexing chip 4 opposite to the laser source 2, the light outlet reflection surface 41 is inclined, and the light outlet reflection surface 41 is used to reflect the optical signal 3; the test piece 5, which is arranged on the base 1 through a supporting frame, the optical signal 3 is reflected by the light outlet reflection surface 41 and then reflected onto the test piece 5, and the test piece 5 is provided with a reflection surface angle scale 51.

In the above structure, the base 1 is provided with a positioning groove 11, and the wavelength division multiplexing chip 4 is arranged in the positioning groove 11. The end surface of the positioning groove 11 close to the laser source 2 is a reference surface 12, and the optical signal 3 is arranged perpendicular to the reference surface 12. The edge of the light outlet reflection surface 41 contacts the reference surface 12. The lower bottom surface of the positioning groove 11 is a plane, and the test piece 5 is arranged parallel to the lower bottom surface of the positioning groove 11.

In the above structure, the laser source 2 and the wavelength division multiplexing chip 4 are on the same straight line, and the test piece 5 is located just above the light outlet reflection surface 41 .

In the above structure, a bracket 6 is provided on the base 1 , and the test piece 5 is arranged on the bracket 6 .

In the above structure, the optical signal 3 forms a light spot 31 on the test piece 5 after being reflected by the light outlet reflection surface 41 , and the position of the reflection surface angle scale 51 where the light spot 31 is located is used to indicate the angle value of the light outlet reflection surface 41 .

The overall principle of the wavelength division multiplexing chip light outlet reflection surface angle measurement device of the utility model is: the wavelength division multiplexing chip 4 is placed in the positioning groove 11, and the edge of the light outlet reflection surface is aligned with the edge of the positioning groove 11. The laser source 2 emits a light signal 3, and after being reflected by the light outlet reflection surface 41 of the wavelength division multiplexing chip 4, the light signal 3 continues to propagate to the test piece 5, and a light spot 31 is displayed on the test piece 5. The angle value is read through the light spot 31 and the angle scale line on the test piece 5.

Specifically, as shown in FIG. 2 , the reflecting surface angle scale 51 is provided with a plurality of angle scales 511 , and the light spot 31 is located on the angle scales 511 .

For example, first, a wavelength division multiplexing chip 4 with good processing quality is placed in the positioning groove 11 and aligned to the reference plane 12. The optical signal 3 reaches the test piece 5 after being reflected by the light outlet reflection surface 41, and the first light spot is displayed (as indicated by the position A in Figure 2). The angle of the light outlet reflection surface of the wavelength division multiplexing chip 4 to be tested is read as 41 degrees through the angle scale 511.

Then, a wavelength division multiplexing chip 4 whose light outlet reflection surface 41 may have a larger angle is placed in the positioning groove 11 and aligned to the reference plane 12. The optical signal 3 reaches the test piece 5 after being reflected by the light outlet reflection surface 41, and displays a second light spot (as indicated by B in FIG. 2 ), which is offset to the left compared to the position of the first light spot. The angle of the light outlet reflection surface of the wavelength division multiplexing chip 4 to be tested is read as 41.2 degrees according to the angle scale 511.

Finally, a wavelength division multiplexing chip 4 whose light outlet reflection surface 41 may have a smaller angle is placed in the positioning groove 11 and aligned to the reference plane 12. The optical signal 3 reaches the test chip 5 after being reflected by the light outlet reflection surface 41, showing a third light spot (as indicated by C in Figure 2), which is offset to the right compared to the position of the first light spot. According to the angle scale 511, the angle of the light outlet reflection surface of the wavelength division multiplexing chip 4 to be tested is read as 40.7 degrees.

Obviously, the above embodiments are merely examples for the purpose of clear explanation and are not intended to limit the implementation methods. For those skilled in the art, other different forms of changes or modifications can be made based on the above description. It is not necessary and impossible to list all the implementation methods here. The obvious changes or modifications derived from these are still within the scope of protection of the invention of the utility model.

Claims (10)

1. A device for measuring the angle of reflection surface of a wavelength division multiplexing chip light outlet, characterized in that it comprises: A base, which serves as a support member for measurement; A laser source is disposed on the base, and is used to emit an optical signal; A wavelength division multiplexing chip is arranged on a base, and a light outlet reflection surface is arranged on the end surface of the wavelength division multiplexing chip opposite to the laser source, and the light outlet reflection surface is used for reflecting optical signals; The test piece is arranged on the base through a support frame. The optical signal is reflected by the light outlet reflection surface and then reflected onto the test piece. The test piece is provided with a reflection surface angle scale. 2. The device for measuring the angle of reflection surface of the light outlet of a wavelength division multiplexing chip according to claim 1, characterized in that a positioning groove is provided on the base, and the wavelength division multiplexing chip is arranged in the positioning groove. 3. The device for measuring the angle of reflection surface of the light outlet of a wavelength division multiplexing chip according to claim 2, wherein the end surface of the positioning groove close to the laser source is a reference surface, and the optical signal is arranged perpendicular to the reference surface. 4 . The device for measuring the angle of the reflection surface of the light outlet of a wavelength division multiplexing chip according to claim 3 , wherein the edge of the reflection surface of the light outlet is in contact with the reference surface. 5. The device for measuring the angle of the reflection surface of the light outlet of a wavelength division multiplexing chip according to claim 1, wherein the laser source and the wavelength division multiplexing chip are located on the same straight line, and the test piece is located directly above the reflection surface of the light outlet. 6 . The device for measuring the angle of reflection surface of the light outlet of a wavelength division multiplexing chip according to claim 1 or 5 , wherein a bracket is provided on the base, and the test piece is arranged on the bracket. 7. The device for measuring the angle of the light outlet reflection surface of a wavelength division multiplexing chip according to claim 6 is characterized in that: the optical signal forms a light spot on the test piece after being reflected by the light outlet reflection surface, and the position of the reflection surface angle scale where the light spot is located is used to indicate the angle value of the light outlet reflection surface. 8 . The device for measuring the angle of reflection surface of the light outlet of a wavelength division multiplexing chip according to claim 2 , wherein the lower bottom surface of the positioning groove is a plane, and the test piece is arranged parallel to the lower bottom surface of the positioning groove. 9. The device for measuring the angle of the reflection surface of the light outlet of a wavelength division multiplexing chip according to claim 1, wherein the reflection surface of the light outlet is inclined. 10. The device for measuring the angle of the reflection surface of the light outlet of the wavelength division multiplexing chip according to claim 7, characterized in that: a plurality of angle scales are provided on the angle scale of the reflection surface, and the light spot is located on the angle scales.