CN220730623U - Mask plate combination - Google Patents

Abstract

The utility model provides a mask plate combination, which comprises a first mask plate, wherein the first mask plate comprises a first pixel region, the first pixel region comprises a first sub-region, the first sub-region is adjacent to the center of the first pixel region, the first sub-region is strip-shaped and extends along the length direction of the first pixel region, the region of the first pixel region except for the first sub-region is a light transmission region, the first sub-region comprises a plurality of first shading regions and a plurality of first light transmission regions, and the plurality of first shading regions and the plurality of first light transmission regions are alternately arranged along the length direction; each first shading region of the plurality of first shading regions comprises at least one annular first sub-shading region and at least one annular first sub-light-transmitting region, and the at least one first sub-shading region and the at least one first sub-light-transmitting region are alternately arranged along the radial direction of the corresponding first shading region.

Description

Mask plate combination

Technical Field

The utility model relates to the field of display, in particular to a mask plate combination.

Background

With the development of technology, the liquid crystal display device (Liquid Crystal Display, LCD) is widely used in many electronic products, such as mobile phones, tablet computers, etc.

The liquid crystal display device generally comprises an array substrate, a color film substrate and a liquid crystal layer sandwiched between the array substrate and the color film substrate, wherein in the process of manufacturing the color film substrate, a color resist material with a corresponding color is required to be coated on the entire surface of the substrate from one end to the other end to form a color resist material layer, and an exposure and development process is performed on the color resist material layer by using a mask plate, so that a color resist block with a corresponding color is formed in a corresponding sub-pixel region. In the exposure and development process, the ultraviolet energy irradiated to the two side edges of the color resistance material layer is lower than that of the middle part, in addition, as the resolution of the liquid crystal display device is higher and higher, the pixel size is smaller and smaller, the process capability is limited, the formed color resistance block is thick in the middle and thin in the edge, the uniformity is poor, and the color difference of the visual effect is larger. In order to solve the problem of forming the edge pattern of the color block, the solution adopted at present comprises increasing the light accumulation amount of the exposure machine, but the increase of the light accumulation amount can cause the top of the formed color block to be too sharp, when the color block layer is manufactured, a protective layer needs to be formed on the color block layer, and the top of the color block is easy to puncture the protective layer.

Therefore, how to realize the uniform height of the coloring block of the color film substrate and improve the yield and the display effect is a problem to be solved.

Disclosure of Invention

The utility model provides a mask plate combination to solve the technical problems.

In order to achieve the above-mentioned objective, the present utility model provides a mask assembly, the mask assembly comprises a first mask, the first mask comprises a first pixel region, the first pixel region comprises a first sub-region, the first sub-region is adjacent to the center of the first pixel region, the first sub-region is strip-shaped and extends along the length direction of the first pixel region, the region of the first pixel region except for the first sub-region is a transparent region, wherein the first sub-region comprises a plurality of first light shielding regions and a plurality of first transparent regions, and the plurality of first light shielding regions and the plurality of first transparent regions are alternately arranged along the length direction; each first shading region of the plurality of first shading regions comprises at least one annular first sub-shading region and at least one annular first sub-light-transmitting region, and the at least one first sub-shading region and the at least one first sub-light-transmitting region are alternately arranged along the radial direction of the corresponding first shading region.

As an optional technical solution, at least one of the at least one first sub-light-shielding region is closer to the center of each first light-shielding region than the corresponding at least one first sub-light-transmitting region.

As an optional technical solution, the at least one first sub-light-shielding area and the at least one first sub-light-transmitting area are concentrically or eccentrically distributed, and the sum of the number of the at least one first sub-light-shielding area and the number of the at least one first sub-light-transmitting area is between 2 and 5.

As an optional technical solution, the length and width of each of the plurality of first light-shielding regions are smaller than 30um, and the ratio of the area of the plurality of first light-shielding regions to the area of the first sub-region is between 0.05 and 0.4.

As an optional technical scheme, the mask plate combination further comprises a second mask plate, the second mask plate comprises a second pixel region, the second pixel region comprises a second sub-region, the second sub-region is adjacent to the center of the second pixel region, the second sub-region is strip-shaped and extends along the length direction, the region of the second pixel region except for the second sub-region is a light transmission region, wherein the second sub-region comprises a plurality of second shading regions and a plurality of second light transmission regions, and the plurality of second shading regions and the plurality of second light transmission regions are alternately arranged along the length direction; each of the plurality of second light shielding regions comprises at least one annular second sub-light shielding region and at least one annular second sub-light transmitting region, and the at least one second sub-light shielding region and the at least one second sub-light transmitting region are alternately arranged along the radial direction of the corresponding second light shielding region.

As an optional technical scheme, the mask plate combination further comprises a third mask plate, the third mask plate comprises a third pixel region, the third pixel region comprises a third sub-region, the third sub-region is adjacent to the center of the third pixel region, the third sub-region is strip-shaped and extends along the length direction, the region except for the third sub-region in the third pixel region is a light transmission region, wherein the third sub-region comprises a plurality of third shading regions and a plurality of third light transmission regions, and the plurality of third shading regions and the plurality of third light transmission regions are alternately arranged along the length direction; each of the plurality of third light shielding areas comprises at least one annular third sub-light shielding area and at least one annular third sub-light transmitting area, and the at least one third sub-light shielding area and the at least one third sub-light transmitting area are alternately arranged along the radial direction of the corresponding third light shielding area.

As an alternative solution, the area of the first light-shielding area, the area of the second light-shielding area and the area of the third light-shielding area are the same or different.

As an optional technical solution, the width of the first light shielding area, the width of the second light shielding area and the width of the third light shielding area are the same or different.

As an optional technical solution, the first pixel area includes a first number of first sub-areas, the first number of first sub-areas are arranged in the first pixel area at intervals along a width direction of the first pixel area and are adjacent to a center of the first pixel area, and the first number is between 1 and 3.

As an optional technical scheme, the mask plate combination further comprises a third mask plate, the third mask plate comprises a third pixel region, and the third pixel region is a light-transmitting region.

The utility model provides a mask plate combination, which is characterized in that a specific area of a pixel area on a mask plate is provided with a shading area and a light transmission area which are alternately arranged along the length direction of the pixel area, the light transmittance of the specific area is regulated to form a color block with relatively uniform height, the shading area can further comprise sub shading areas and sub light transmission areas which are alternately arranged along the radial direction of the shading area, and the compensation range of the light transmittance is more finely regulated, so that the height uniformity of the color block is realized, and meanwhile, the yield and the display effect are improved.

Drawings

The following describes the embodiments of the present utility model in further detail with reference to the drawings.

Fig. 1A is a schematic structural diagram of a first mask plate in a mask plate assembly according to a first embodiment of the present utility model;

fig. 1B is a schematic structural diagram of a second mask plate in a mask plate assembly according to a first embodiment of the present utility model;

fig. 1C is a schematic structural diagram of a third mask plate in a mask plate assembly according to a first embodiment of the present utility model;

fig. 2 is a schematic structural diagram of a second mask plate in a mask plate assembly according to a second embodiment of the present utility model;

fig. 3A is a schematic structural diagram of a first mask plate in a mask plate assembly according to a third embodiment of the present utility model;

fig. 3B is a schematic structural diagram of a third mask plate in a mask plate assembly according to a third embodiment of the present utility model;

fig. 4 is a schematic structural diagram of a first mask plate in a mask plate assembly according to a fourth embodiment of the present utility model;

fig. 5A to 5C are schematic structural views of a light shielding region on a first mask plate in a mask plate assembly according to the present utility model;

fig. 6 is a schematic structural diagram of a color film substrate of the present utility model.

Detailed Description

In order to more clearly illustrate the present utility model, the present utility model will be further described with reference to preferred embodiments and the accompanying drawings. Like parts in the drawings are denoted by the same reference numerals. It is to be understood by persons skilled in the art that the following detailed description is illustrative and not restrictive, and that this utility model is not limited to the details given herein.

Referring to fig. 1A, fig. 1B, fig. 1C, and fig. 6, fig. 1A is a schematic structural diagram of a first mask plate in a mask plate assembly according to a first embodiment of the present utility model, fig. 1B is a schematic structural diagram of a second mask plate in a mask plate assembly according to a first embodiment of the present utility model, fig. 1C is a schematic structural diagram of a third mask plate in a mask plate assembly according to a first embodiment of the present utility model, and fig. 6 is a schematic structural diagram of a color film substrate according to the present utility model. The utility model provides a mask plate combination, which comprises a first mask plate 100, wherein the first mask plate 100 is used for assisting in forming a plurality of first color blocks 51 on a color film substrate 400, and the first color blocks 51 are, for example, one of red color blocks, green color blocks and blue color blocks. The first mask plate 100 includes a plurality of first pixel regions 10, and when viewed from one of the first pixel regions 10, the first pixel region 10 includes a first sub-region 11, the first sub-region 11 is adjacent to the center of the first pixel region 10, and the first sub-region 11 is strip-shaped and extends along the length direction of the first pixel region 10, and a region of the first pixel region 10 except for the first sub-region 11 is a light-transmitting region, wherein the first sub-region 11 includes a plurality of first light-shielding regions 111 and a plurality of first light-transmitting regions 112, and the plurality of first light-shielding regions 111 and the plurality of first light-transmitting regions 112 are alternately arranged along the length direction of the first pixel region 10; each of the plurality of first light shielding regions 111 includes at least one annular first sub-light shielding region 1111 and at least one annular first sub-light transmitting region 1112, and the at least one first sub-light shielding region 1111 and the at least one first sub-light transmitting region 1112 are alternately arranged along the radial direction of the corresponding first light shielding region 111.

The mask plate combination comprises a first mask plate 100, wherein first shading areas 111 and first light transmission areas 112 which are alternately arranged along the length direction of a first pixel area 10 are arranged in the first sub-area 11 adjacent to the central position in the first pixel area 10 of the first mask plate 100, and the light transmittance of the first sub-area 11 adjacent to the central position of the first pixel area 10 is regulated to form a color block with uniform height, so that the problems that the middle thick edge of the color block is thin and the top is too sharp are avoided. The first light shielding regions 111 may further include first sub-light shielding regions 1111 and first sub-light transmitting regions 1112 alternately arranged along the radial direction of the corresponding first light shielding regions 111, so as to further finely adjust the compensation range of the light transmittance, thereby obtaining a highly uniform color block.

In an embodiment, the mask assembly further includes a second mask 200, where the second mask 200 is used to assist in forming a plurality of second color blocks 52 on the color film substrate 400, and the second color blocks 52 are, for example, another one of red, green, and blue blocks. The first color block 51 and the corresponding second color block 52 may be adjacently arranged in the width direction of the color blocks. The second mask 200 includes a plurality of second pixel regions 20, and when viewed from one of the second pixel regions 20, the second pixel region 20 includes a second sub-region 21, the second sub-region 21 is adjacent to the center of the second pixel region 20, and the second sub-region 21 is strip-shaped and extends along the length direction, and a region of the second pixel region 20 except for the second sub-region 21 is a light-transmitting region, wherein the second sub-region 21 includes a plurality of second light-shielding regions 211 and a plurality of second light-transmitting regions 212, and the plurality of second light-shielding regions 211 and the plurality of second light-transmitting regions 212 are alternately arranged along the length direction; each of the plurality of second light shielding regions 211 includes at least one annular second sub-light shielding region 2111 and at least one annular second sub-light transmitting region 2112, and the at least one second sub-light shielding region 2111 and the at least one second sub-light transmitting region 2112 are alternately arranged along the radial direction of the corresponding second light shielding region 211. As shown in fig. 1A and 1B, the pattern of the first light shielding region 111 is the same as the pattern of the second light shielding region 211, which is not limited in practical operation. In this embodiment, the first mask 100 and the second mask 200 are different masks, and in other embodiments, they may be the same mask.

In an embodiment, the mask assembly further includes a third mask 300, and the third mask 300 is used to assist in forming a plurality of third color blocks 53 on the color film substrate 400, where the third color blocks 53 are, for example, one of red, green, and blue blocks. The third color block 53 and the corresponding first color block 51 and the corresponding second color block 52 may be adjacently arranged in the width direction of the color blocks. The third mask plate 300 includes a plurality of third pixel regions 30, and when viewed from one of the third pixel regions 30, the third pixel region 30 includes a third sub-region 31, the third sub-region 31 is adjacent to the center of the third pixel region 30, and the third sub-region 31 is strip-shaped and extends along the length direction, and a region of the third pixel region 30 except for the third sub-region 31 is a light-transmitting region, wherein the third sub-region 31 includes a plurality of third light-shielding regions 311 and a plurality of third light-transmitting regions 312, and the plurality of third light-shielding regions 311 and the plurality of third light-transmitting regions 312 are alternately arranged along the length direction; each of the plurality of third light shielding regions 311 includes at least one annular third sub-light shielding region 3111 and at least one annular third sub-light transmitting region 3112, and the at least one third sub-light shielding region 3111 and the at least one third sub-light transmitting region 3112 are alternately arranged along the radial direction of the corresponding third light shielding region 311. As shown in fig. 1A to 1C, the patterns of the first light shielding region 111, the second light shielding region 211 and the third light shielding region 311 are the same, but in practical operation, the patterns are not limited to this, for example, the two patterns are the same, or the three patterns are different. In this embodiment, the first mask 100, the second mask 200, and the third mask 300 are different masks, and in other embodiments, they may be the same mask.

In the mask assembly of the embodiment, the first pixel region 10 of the first mask 100, the second pixel region 20 of the second mask 200, and the third pixel region 30 of the third mask 300 respectively have a first sub-region 11, a second sub-region 21, and a third sub-region 31, and the first sub-region 11, the second sub-region 21, and the third sub-region 31 are all in a stripe structure and are located at the center positions of the corresponding pixel regions to adjust the light transmittance of the center positions. The first pixel region 10, the second pixel region 20 and the third pixel region 30 may correspond to color blocks of different colors, respectively. For example, the first pixel region 10 corresponds to a red sub-pixel, the second pixel region 20 corresponds to a green sub-pixel, the third pixel region 30 corresponds to a blue sub-pixel, and the first pixel region 10, the second pixel region 20, and the third pixel region 30 are each provided with a light shielding region to correspondingly adjust the height uniformity of the red block formed by the first mask plate 100, the green block formed by the second mask plate 200, and the blue block formed by the third mask plate 300, but in practical application, the compensation range may be adjusted according to the actual color block height without limitation.

As shown in fig. 1A, in the first sub-area 11, at least one of the at least one first sub-light shielding areas 1111 is closer to the center of each first light shielding area 111 than the corresponding at least one first sub-light transmitting area 1112, and the at least one first sub-light shielding area 1111 and the at least one first sub-light transmitting area 1112 are concentrically or eccentrically distributed, that is, the first light shielding areas 111 are alternately arranged with the first sub-light shielding areas 1112 in a radial direction extending from inside to outside, so as to more finely adjust the compensation range of the light transmittance. Further, in order to avoid the defect of the color block formed in the exposure developing process due to the excessively large area of the light shielding region, the ratio of the area of the first light shielding region 111 to the area of the first sub-region 11 is between 0.05 and 0.4.

As shown in fig. 1B, in the second sub-area 21, at least one of the at least one second sub-light-shielding areas 2111 is closer to the center of each second light-shielding area 211 than the corresponding at least one second sub-light-transmitting area 2112, and the at least one second sub-light-shielding areas 2111 and the at least one second sub-light-transmitting area 2112 are concentrically or eccentrically distributed, that is, the second light-shielding areas 211 are alternately arranged with the second sub-light-shielding areas 2111 and the second sub-light-transmitting areas 2112 in a radial direction extending from inside to outside, and further, a ratio of an area of the second light-shielding areas 211 to an area of the second sub-area 21 is between 0.05 and 0.4; as shown in fig. 1C, in the third sub-area 31, at least one of the at least one third sub-light-shielding regions 3111 is closer to the center of each third light-shielding region 311 than the corresponding at least one third sub-light-transmitting region 3112, and the at least one third sub-light-shielding regions 3111 and the at least one third sub-light-transmitting region 3112 are concentrically or eccentrically distributed, that is, the third sub-light-shielding regions 3111 and the third sub-light-transmitting regions 3112 are alternately arranged in a radial direction in which the third light-shielding regions 311 extend from inside to outside, and further a ratio of an area of the third light-shielding regions 311 to an area of the third sub-area 31 is between 0.05 and 0.4.

As shown in fig. 6, a certain distance exists between the first color block 51 and the second color block 52, the second color block 52 and the third color block 53, for example, a Black Matrix (BM) is disposed between the first color block 51 and the second color block 52, and the third color block 53, but in practical application, the distance is not limited to this, and the first color block 51, the second color block 52, and the third color block 53 may not exist, that is, the first color block 51, the second color block 52, and the third color block 53 may overlap each other or contact each other at edges.

In the mask combination of the present embodiment, the area of the first light shielding region 111 on the first mask 100, the area of the second light shielding region 211 on the second mask 200, and the area of the third light shielding region 311 on the third mask 300 are the same, and the width of the first light shielding region 111, the width of the second light shielding region 211, and the width of the third light shielding region 311 are the same, but in practical application, the area and the width of the light shielding region on the corresponding mask may be set according to practical needs (e.g., the reaction capability of different color resistance materials for light is different, etc.), and the area and/or the width of the first light shielding region 111, the second light shielding region 211, and the third light shielding region 311 may be the same or different from each other.

Referring to fig. 2, fig. 2 is a schematic structural diagram of a second mask plate in a mask plate assembly according to a second embodiment of the utility model. In this embodiment, the first color block 51 corresponds to the red sub-pixel, the second color block 52 corresponds to the green sub-pixel, and the third color block 53 corresponds to the blue sub-pixel, wherein the green color block material used therein has better light response capability, and no compensation is required, so that, as shown in fig. 2, the second pixel regions 20 on the second mask 200A are all light-transmitting regions. Meanwhile, in the mask blank combination of the present embodiment, the first mask blank 100 and the third mask blank 300 may be similar to the first mask blank 100 and the third mask blank 300 in the first embodiment. Specifically, the first pixel region 10 on the first mask plate 100 and the third pixel region 30 on the third mask plate 300 have the first sub-region 11 and the third sub-region 31, respectively, and the first sub-region 11 and the third sub-region 31 include the first light shielding regions 111, the first light transmitting regions 112, the third light shielding regions 311, and the third light transmitting regions 312 alternately arranged in a row in the longitudinal direction. The first light shielding region 111 includes at least one first sub-light shielding region 1111 and at least one first sub-light transmitting region 1112, and the third light shielding region 311 includes at least one third sub-light shielding region 3111 and at least one third sub-light transmitting region 3112, so as to adjust the shapes of the red block formed by the first mask 100 and the blue block formed by the third mask 300.

In one embodiment, it is assumed that the blue-blocking material is better in light response, and no compensation is required, so that the third pixel regions 30 on the third mask 300 are all light-transmitting regions. Meanwhile, in the mask assembly of the present embodiment, the first mask 100 and the second mask 200 may be similar to the first mask 100 and the second mask 200 in the first embodiment. Specifically, the first pixel region 10 on the first mask plate 100 and the second pixel region 20 on the second mask plate 200 have the first sub-region 11 and the second sub-region 21, respectively, and the first sub-region 11 and the second sub-region 21 include the first light shielding region 111, the first light transmitting region 112, the second light shielding region 211, and the second light transmitting region 212 alternately arranged in a row in the longitudinal direction. The first light shielding region 111 includes at least one first sub-light shielding region 1111 and at least one first sub-light transmitting region 1112, and the second light shielding region 211 includes at least one second sub-light shielding region 2111 and at least one second sub-light transmitting region 2112, so as to adjust the shapes of the red block formed by the first mask 100 and the green block formed by the second mask 200.

In another embodiment, it is assumed that the red-color resist material is better in light response, and no compensation is required, so that all of the first pixel regions 10 on the first mask plate 100 are light-transmitting regions. Meanwhile, in the mask assembly of the present embodiment, the second mask blank 200 and the third mask blank 300 may be similar to the second mask blank 200 and the third mask blank 300 of the first embodiment. Specifically, the second pixel region 20 on the second mask plate 200 and the third pixel region 30 on the third mask plate 300 have the second sub-region 21 and the third sub-region 31, respectively, and the second sub-region 21 and the third sub-region 31 include the second light shielding regions 211, the second light transmitting regions 212, the third light shielding regions 311, and the third light transmitting regions 312 alternately arranged in a row in the longitudinal direction. The second light shielding region 211 includes at least one second sub-light shielding region 2111 and at least one second sub-light transmitting region 2112, and the third light shielding region 311 includes at least one third sub-light shielding region 3111 and at least one third sub-light transmitting region 3112, so as to adjust the shapes of the green block formed by the second mask 200 and the blue block of the second mask 200.

Referring to fig. 3A and fig. 3B, fig. 3A is a schematic structural diagram of a first mask plate in a mask plate assembly according to a third embodiment of the utility model, and fig. 3B is a schematic structural diagram of a third mask plate in a mask plate assembly according to a third embodiment of the utility model. In this embodiment, the first color block 51 corresponds to the red sub-pixel, the second color block 52 corresponds to the green sub-pixel, and the third color block 53 corresponds to the blue sub-pixel, wherein the red color block material and the blue color block material used have better light response capability, and no compensation is required, so as to make all the first pixel regions 10 on the first mask plate 100A be light-transmitting regions, as shown in fig. 3A, and all the third pixel regions 30 on the third mask plate 300A be light-transmitting regions, as shown in fig. 3B. Meanwhile, in the mask blank combination of the present embodiment, the second mask blank 200 may be similar to the second mask blank 200 of the first embodiment. Specifically, the second pixel region 20 on the second mask plate 200 has a second sub-region 21, and the second sub-region 21 includes second light shielding regions 211 and second light transmitting regions 212 alternately arranged in a row along the length direction. The second light shielding region 211 includes at least one second sub-light shielding region 2111 having a ring shape and at least one second sub-light transmitting region 2112 having a ring shape, so as to adjust the shape of the green block formed by the second mask 200.

In one embodiment, it is assumed that the green and blue resist materials have better light response capability, and no compensation is required, so that the second pixel region 20 on the second mask 200 and the third pixel region 30 on the third mask 300 are all light-transmitting regions. Meanwhile, in the mask blank combination of the present embodiment, the first mask blank 100 may be similar to the first mask blank 100 in the first embodiment. Specifically, the first pixel region 10 of the first mask plate 100 has a first sub-region 11, and the first sub-region 11 includes first light shielding regions 111 and first light transmitting regions 112 alternately arranged in a row in the longitudinal direction. The first light shielding region 111 includes at least one first sub-light shielding region 1111 and at least one first sub-light transmitting region 1112, so as to adjust the shape of the red block formed by the first mask 100.

In another embodiment, the red-color resist material and the green-color resist material are preferably used to react to light, and no compensation is required, so that the first pixel region 10 on the first mask 100 and the second pixel region 20 on the second mask 200 are all light-transmitting regions. Meanwhile, in the mask blank combination of the present embodiment, the third mask blank 300 may be similar to the third mask blank 300 of the first embodiment. Specifically, the third pixel region 30 on the third mask plate 300 has a third sub-region 31, and the third sub-region 31 includes third light shielding regions 311 and third light transmitting regions 312 alternately arranged in a row in the longitudinal direction. The third light shielding region 311 includes at least one third sub light shielding region 3111 and at least one third sub light transmitting region 3112, thereby adjusting the shape of the blue block formed by the third mask 300.

In the first, second, and third embodiments, the pixel region on at least one of the first pixel region 10 on the first mask plate 100, the second pixel region 20 on the second mask plate 200, and the third pixel region 30 on the third mask plate 300 includes a sub-region having a light shielding effect, and the pixel region of the sub-region having no light shielding effect is a light transmitting region. The sub-regions include light shielding regions and light transmitting regions alternately arranged in a row in the length direction, thereby adjusting the shape of the color block formed by the first mask 100, the second mask 200, and/or the third mask 300. In practical applications, the light shielding regions and the light transmitting regions may be alternately arranged in a plurality of rows along the length direction of the pixel region, and are not limited to one row.

Referring to fig. 4, fig. 4 is a schematic structural diagram of a first mask plate in a mask plate assembly according to a fourth embodiment of the utility model. As shown in fig. 4, the first pixel region 10 of the first mask plate 100B has a first sub-region 11, wherein the first sub-region 11 includes first light shielding regions 111 and first light transmitting regions 112 alternately arranged in two rows, and the two rows of first light shielding regions 111 and the first light transmitting regions 112 are arranged at intervals along the width direction of the first pixel region 10 and are adjacent to the center of the first pixel region 10. The first light shielding region 111 includes at least one first sub-light shielding region 1111 having a ring shape and at least one first sub-light transmitting region 1112 having a ring shape, so as to adjust the shape of the color block formed by the first mask 100B.

In practical applications, the first pixel region 10 includes a first number of first sub-regions 11, which are arranged in the first pixel region 10 at intervals along the width direction of the first pixel region 10 and are adjacent to the center of the first pixel region 10, and the first number is between 1 and 3, that is, the number of columns of alternately arranged light-shielding regions and light-transmitting regions is within 3 columns, and the compensation range can be adjusted according to the actual color resistance height. In actual operation, the designs of the second mask plate and the second sub-region and the third sub-region on the third mask plate may be similar to the first sub-region 11 on the first mask plate 100B, and detailed description is omitted; in addition, the sub-regions on the first mask 100B, the second mask and the third mask may be designed differently, but not limited to this. When the light shielding regions and the light transmitting regions are alternately arranged in a plurality of rows, at least one of the first pixel region 10 of the first mask 100B, the second pixel region of the second mask, and the third pixel region of the third mask includes a sub-region having a light shielding effect.

Referring to fig. 5A to 5C, fig. 5A to 5C are schematic structural views of a light shielding region on a first mask plate in a mask plate assembly according to the present utility model. As shown in fig. 5A to 5C, the light shielding region of the first mask plate 100 forms a circular, rectangular, elliptical or other polygonal shape in a closed loop form, and the length L and the width W of the light shielding region are both smaller than 30um, and in the present utility model, the ratio of the length L to the width W is between 1 and 5, and can be selected according to the size of the required color block, but not limited thereto.

In the utility model, the shading area comprises at least one sub shading area and at least one sub light transmission area, the at least one sub shading area and the at least one sub light transmission area are arranged in a concentric or eccentric alternative way in the radial direction of the shading area extending from inside to outside, and the sum of the number of the sub shading areas and the number of the sub light transmission areas is between 2 and 5. As shown in fig. 5A, the light-shielding regions of the first mask plate 100 constitute a rectangle in a closed loop form, and the sum of the number of sub-light-shielding regions and the number of sub-light-transmitting regions is 3; as shown in fig. 5B, the light-shielding regions of the first mask plate 100 constitute an ellipse in a closed-loop form, and the sum of the number of sub-light-shielding regions and the number of sub-light-transmitting regions is 5; as shown in fig. 5C, the light shielding regions of the first mask plate 100 constitute a circle in a closed loop form, and the sum of the number of sub light shielding regions and the number of sub light transmitting regions is 5.

The patterns of the second sub-region 21 and the third sub-region 31 on the second mask plate 200 and the third mask plate 300 may adopt similar ideas to those of the first mask plate 100, and the actual patterns may be different, which is not described in detail. In practical applications, the shape of the light shielding region, the number of the sub-light shielding regions and the number of the sub-light transmitting regions can be selected according to practical needs, and the present utility model is not limited to the above-mentioned embodiments.

As shown in fig. 6, the color film substrate 200 includes a substrate 40, a first color block 51 formed by using the first mask plate 100 as described in the first embodiment, a second color block 52 formed by using the second mask plate 200 as described in the first embodiment, and a third color block 53 formed by using the third mask plate 300 as described in the first embodiment. In the process of manufacturing the color film substrate 400, a first color resist material is coated on the substrate 40, wherein the first color resist material is a negative photosensitive material, that is, the larger the exposure amount of the color resist material is, the thicker the thickness of a part left after the exposure and development process is, then the first color resist material on the substrate 40 is irradiated through the first mask plate 100, and as the first mask plate 100 is provided with a shading area at the middle position of the corresponding sub-pixel area, the light transmittance of the corresponding area is reduced, that is, the exposure amount of the first color resist material at the middle position of the corresponding sub-pixel area is reduced, so that the thickness of the middle part and the edge part of the finally formed first color resist block 51 tends to be uniform, the display effect is ensured, and the product yield is improved. Similarly, the process of manufacturing the color film substrate 400 further includes coating a second color resist material on the substrate 40, where the second color resist material is a negative photosensitive material, and irradiating the second color resist material on the substrate 40 through the second mask 200, where the second mask 200 is provided with a light shielding region at a middle position of a corresponding sub-pixel region, so that the light transmittance of the corresponding region is reduced, that is, the exposure amount received by the second color resist material at the middle position of the corresponding sub-pixel region is reduced, so that the thicknesses of the middle position and the edge position of the finally formed second color resist block 52 tend to be uniform; the process of manufacturing the color film substrate 400 further includes coating a third color resist material on the substrate 40, where the third color resist material is a negative photosensitive material, and irradiating the third color resist material on the substrate 40 through the third mask 300, where the third mask 300 is provided with a light shielding region at a middle position of a corresponding sub-pixel region, so that the light transmittance of the corresponding region is reduced, that is, the exposure amount of the third color resist material at the middle position of the corresponding sub-pixel region is reduced, so that the thicknesses of the middle portion and the edge portion of the finally formed third color resist block 53 tend to be uniform.

In this embodiment, taking the first color block 51 as an example, an included angle a is formed between the side edge of the first color block 51 and the bottom edge of the first color block 51, and the included angle a is between 20 ° and 90 °, and further, the light shielding region further includes sub light shielding regions and sub light transmitting regions which are alternately arranged, so that the top end of the first color block 51 has a corrugated surface.

In summary, the present utility model provides a mask plate assembly, in which a specific area of a pixel area on a mask plate is provided with light shielding areas and light transmitting areas alternately arranged along a length direction of the pixel area, and a light transmittance of the specific area is adjusted to form a color block with relatively uniform height, and the light shielding area may further include sub-light shielding areas and sub-light transmitting areas alternately arranged along a radial direction of the light shielding area, so that a compensation range of the light transmittance is more finely adjusted, thereby achieving the uniformity of the color block height and improving a yield and a display effect.

It should be understood that the foregoing examples of the present utility model are provided merely for clearly illustrating the present utility model and are not intended to limit the embodiments of the present utility model, and that various other changes and modifications may be made therein by one skilled in the art without departing from the spirit and scope of the present utility model as defined by the appended claims.

Claims (10)

1. A mask plate combination is characterized in that the mask plate combination comprises a first mask plate, the first mask plate comprises,

a first pixel region including a first sub-region adjacent to a center of the first pixel region, the first sub-region being stripe-shaped and extending along a length direction of the first pixel region, a region of the first pixel region other than the first sub-region being a light-transmitting region,

the first sub-region comprises a plurality of first shading regions and a plurality of first light transmission regions, and the plurality of first shading regions and the plurality of first light transmission regions are alternately arranged along the length direction;

each first shading region of the plurality of first shading regions comprises at least one annular first sub-shading region and at least one annular first sub-light-transmitting region, and the at least one first sub-shading region and the at least one first sub-light-transmitting region are alternately arranged along the radial direction of the corresponding first shading region.

2. The mask assembly of claim 1, wherein at least one of the at least one first sub-opaque region is closer to a center of each of the at least one first sub-opaque regions than the corresponding at least one first sub-opaque region.

3. The mask assembly of claim 1, wherein the at least one first sub-light-shielding region and the at least one first sub-light-transmitting region are concentric or eccentrically distributed, and a sum of the number of the at least one first sub-light-shielding region and the number of the at least one first sub-light-transmitting region is between 2 and 5.

4. The mask assembly of claim 1, wherein each of the plurality of first light shielding regions has a length and a width less than 30um, and a ratio of an area of the plurality of first light shielding regions to an area of the first sub-region is between 0.05 and 0.4.

5. The mask assembly of claim 1, further comprising a second mask plate, the second mask plate comprising a second pixel region, the second pixel region comprising a second sub-region, the second sub-region being adjacent to a center of the second pixel region and being stripe-shaped and extending along the length direction, a region of the second pixel region other than the second sub-region being a light transmissive region,

the second sub-region comprises a plurality of second shading regions and a plurality of second light transmission regions, and the plurality of second shading regions and the plurality of second light transmission regions are alternately arranged along the length direction;

each of the plurality of second light shielding regions comprises at least one annular second sub-light shielding region and at least one annular second sub-light transmitting region, and the at least one second sub-light shielding region and the at least one second sub-light transmitting region are alternately arranged along the radial direction of the corresponding second light shielding region.

6. The mask assembly of claim 5, further comprising a third mask plate, the third mask plate comprising a third pixel region, the third pixel region comprising a third sub-region, the third sub-region being adjacent to a center of the third pixel region and being stripe-shaped and extending along the length direction, a region of the third pixel region other than the third sub-region being a light transmissive region,

the third sub-region comprises a plurality of third shading regions and a plurality of third light transmission regions, and the plurality of third shading regions and the plurality of third light transmission regions are alternately arranged along the length direction;

each of the plurality of third light shielding areas comprises at least one annular third sub-light shielding area and at least one annular third sub-light transmitting area, and the at least one third sub-light shielding area and the at least one third sub-light transmitting area are alternately arranged along the radial direction of the corresponding third light shielding area.

7. The mask assembly of claim 6, wherein the area of the first light shielding region, the area of the second light shielding region, and the area of the third light shielding region are the same or different.

8. The mask assembly of claim 6, wherein the width of the first light shielding region, the width of the second light shielding region, and the width of the third light shielding region are the same or different.

9. The mask assembly of claim 1, wherein the first pixel region comprises a first number of first sub-regions spaced apart in the first pixel region along a width of the first pixel region and adjacent to a center of the first pixel region, the first number being between 1 and 3.

10. The mask blank assembly of claim 1 or claim 5, further comprising a third mask blank comprising a third pixel region, the third pixel region being a light transmissive region.