CN220724414U

CN220724414U - Heater structure of large-size sapphire furnace

Info

Publication number: CN220724414U
Application number: CN202322398040.3U
Authority: CN
Inventors: 杨超; 邱一豇; 龚俊茹; 王永树
Original assignee: Zhongdun Crystal Technology Co ltd
Current assignee: Zhongdun Crystal Technology Co ltd
Priority date: 2023-09-04
Filing date: 2023-09-04
Publication date: 2024-04-05
Anticipated expiration: 2033-09-04

Abstract

The utility model discloses a heater structure of a large-size sapphire furnace, which relates to the field of sapphire production equipment and comprises a supporting table, a rotating table, a heater and a reciprocating rotating mechanism, wherein the rotating table is in a ring shape and is rotatably sleeved at the top of the supporting table; the heater is an annular cage body penetrating up and down and is arranged at the top of the rotary table; the reciprocating rotation mechanism is arranged at one side of the bottom of the rotary table. The heater structure of the large-size sapphire furnace can reduce the number of heating rods and is beneficial to uniform thermal field.

Description

Heater structure of large-size sapphire furnace

Technical Field

The utility model relates to the field of sapphire production equipment, in particular to a heater structure of a large-size sapphire furnace.

Background

The heater structure in the stove of sapphire growth usefulness is great to the growth influence of sapphire, and partial heater structure is the annular cage body that runs through from top to bottom among the prior art, and for thermal field distributes evenly, and the side of annular cage body can be denser set up the heating rod, and heating rod quantity is more, and production installation is comparatively troublesome, still appears the inhomogeneous condition of thermal field easily when the heating rod breaks down.

Disclosure of Invention

In order to solve the problems, the utility model provides a heater structure of a large-size sapphire furnace, which can reduce the number of heating rods and is beneficial to uniform thermal field.

The technical scheme of the utility model is as follows:

a heater structure of a large-sized sapphire furnace, comprising:

the rotary table is in a ring shape and is rotatably sleeved at the top of the supporting table;

the heater is an annular cage body penetrating up and down and is arranged at the top of the rotary table;

and the reciprocating rotating mechanism is arranged at one side of the bottom of the rotating platform.

In a further technical scheme, the reciprocating rotary mechanism comprises a motor, a main gear, a pinion and a half external tooth gear ring sleeved on the outer side of the bottom of the rotary table, the main gear is arranged on a machine shaft of the motor, the pinion is meshed with the main gear, and rack bars capable of respectively meshing the half external tooth gear ring are respectively arranged on one side of the top of the main gear and one side of the top of the pinion.

In a further technical scheme, the heater comprises an electrode ring, a heating rod and a connecting ring, wherein the electrode ring and the connecting ring are arranged in parallel, and the heating rod is vertically arranged between the electrode ring and the connecting ring.

In a further technical scheme, the top of the rotary table is provided with a clamping ring with the outer diameter smaller than the inner diameter of the connecting ring.

In a further technical scheme, the electrode ring comprises two copper electrodes which are mutually separated and are arranged in a C-shaped opposite way.

In a further technical scheme, the heating rod is a tungsten heating rod.

In a further technical scheme, the connecting ring is a tungsten ring.

The beneficial effects of the utility model are as follows:

1. the heater structure integrally depends on the structural arrangement of the existing large-size sapphire furnace, the supporting table can be used for supporting a crucible in the existing furnace, the outer side of the crucible is provided with a heater of an annular cage body, the heater is arranged on a rotary table capable of rotating relative to the supporting table and rotates by utilizing a reciprocating rotating mechanism, so that the heater can reciprocally rotate around the crucible and heat, a uniform thermal field can be formed outside the crucible under the condition of reducing heating rods, and the production and the installation are convenient after the quantity of the heating rods is reduced;

2. the clamping ring is arranged on the rotary table, so that the bottom of the heater can be clamped, and excessive deviation of the heater during rotation of the rotary table is avoided.

Drawings

Fig. 1 is a schematic structural view of a heater structure of a large-sized sapphire furnace according to an embodiment of the present utility model;

FIG. 2 is a schematic cross-sectional view of a turntable and support table connection according to an embodiment of the present utility model;

fig. 3 is a schematic top view of a connection of a reciprocating rotary mechanism according to an embodiment of the present utility model.

Reference numerals illustrate:

10. a support table; 20. a rotary table; 21. a clasp; 22. a bearing; 31. an electrode ring; 32. a connecting ring; 33. a heating rod; 40. a reciprocating rotation mechanism; 41. a main gear; 42. a pinion gear; 43. a toothed bar; 44. semi-external tooth gear ring; 50. a furnace body.

Detailed Description

Embodiments of the present utility model are further described below with reference to the accompanying drawings.

Examples:

as shown in fig. 1-3, a heater structure of a large-size sapphire furnace comprises a supporting table 10, a rotary table 20, a heater and a reciprocating rotary mechanism 40, wherein the supporting table 10 can be formed by stacking two cylinders with different diameters, the cylinder with smaller diameter is arranged on the cylinder with larger diameter, the central axes of the two cylinders are overlapped, a bearing 22 is sleeved outside the cylinder with smaller diameter, the rotary table 20 is in a circular ring shape, is sleeved outside the bearing 22 at the top of the supporting table 10, and can rotate relative to the supporting table 10; the heater is an annular cage body penetrating up and down and is arranged at the top of the rotary table 20 and used for forming a stable thermal field; the reciprocating rotation mechanism 40 is provided on the bottom side of the rotary table 20, and is mounted on the furnace body 50.

The working principle of the technical scheme is as follows:

in the heater structure, the crucible for growing large-size sapphire is placed on the supporting table 10 fixed at the bottom of the furnace body 50, the heater is sleeved outside the crucible and arranged on the rotary table 20, and the rotary table 20 is driven by the reciprocating rotary mechanism 40 to rotate reciprocally relative to the supporting table 10 during the operation of the heater, so that the heater can rotate reciprocally relative to the crucible, and a uniform thermal field can be formed by the heater.

In another embodiment, as shown in fig. 3, the reciprocating rotary mechanism 40 includes a motor, a main gear 41, a pinion gear 42, and a half external gear ring 44 sleeved on the outer side of the bottom of the rotary table 20, the motor is installed on the outer side of the furnace body 50, the shaft of the motor extends into the furnace body 50 through the furnace body 50, the main gear 41 is disposed on the shaft of the motor, the furnace body 50 is provided with a rotating shaft for installing the pinion gear 42, the pinion gear 42 is meshed with the main gear 41, and a rack bar 43 capable of respectively meshing with the half external gear ring 44 is disposed on the top side of the main gear 41 and the top side of the pinion gear 42, i.e., when the rack bar 43 of the main gear 41 and the rack bar 43 of the pinion gear 42 are disposed to face each other, there is no case that the rack bar 43 of the main gear 41 and the rack bar 43 of the pinion gear 42 simultaneously mesh with the half external gear ring 44.

In another embodiment, as shown in fig. 1, the heater includes an electrode ring 31, a heating rod 33 and a connection ring 32, the electrode ring 31 and the connection ring 32 being disposed in parallel, and the heating rod 33 being vertically disposed between the electrode ring 31 and the connection ring 32. The electrode ring 31 is made of copper electrodes which are mutually separated and are arranged in a C-shaped opposite direction, the heating rod 33 is made of tungsten heating rod, and the connecting ring 32 is made of tungsten ring.

In another embodiment, as shown in fig. 2-3, a snap ring 21 having an outer diameter smaller than an inner diameter of the connection ring 32 is provided at the top of the turntable 20 to lock the bottom of the heater and prevent the heater from being excessively shifted when the turntable 20 rotates.

The foregoing examples merely illustrate specific embodiments of the utility model, which are described in greater detail and are not to be construed as limiting the scope of the utility model. It should be noted that it will be apparent to those skilled in the art that several variations and modifications can be made without departing from the spirit of the utility model, which are all within the scope of the utility model.

Claims

1. A heater structure of a large-sized sapphire furnace, comprising:

2. The heater structure of a large-sized sapphire furnace according to claim 1, wherein the reciprocating rotary mechanism comprises a motor, a main gear, a pinion and a half-external gear ring sleeved outside the bottom of the rotary table, the main gear is arranged on the shaft of the motor, the pinion is meshed with the main gear, and a rack bar capable of respectively meshing with the half-external gear ring is arranged on one side of the top of the main gear and one side of the top of the pinion.

3. The heater structure of claim 1, wherein the heater comprises an electrode ring, a heating rod and a connecting ring, the electrode ring and the connecting ring are arranged in parallel, and the heating rod is vertically arranged between the electrode ring and the connecting ring.

4. A heater structure of a large-sized sapphire furnace according to claim 3, wherein a snap ring having an outer diameter smaller than an inner diameter of the connection ring is provided at the top of the turntable.

5. A heater structure of a large-sized sapphire furnace according to claim 3, wherein the electrode ring comprises two copper electrodes separated from each other and arranged in a C-shape facing each other.

6. A heater structure of a large-sized sapphire furnace according to claim 3, wherein the heating rod is a tungsten heating rod.

7. A heater structure for a large-sized sapphire furnace according to claim 3, wherein said connecting ring is a tungsten ring.