CN220724333U - Metal organic chemical vapor deposition equipment - Google Patents
Metal organic chemical vapor deposition equipment Download PDFInfo
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- CN220724333U CN220724333U CN202322056340.3U CN202322056340U CN220724333U CN 220724333 U CN220724333 U CN 220724333U CN 202322056340 U CN202322056340 U CN 202322056340U CN 220724333 U CN220724333 U CN 220724333U
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- vapor deposition
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- chemical vapor
- metal organic
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- 238000005229 chemical vapour deposition Methods 0.000 title claims abstract description 32
- 239000002184 metal Substances 0.000 title claims abstract description 26
- 239000007788 liquid Substances 0.000 claims abstract description 29
- 230000007246 mechanism Effects 0.000 claims abstract description 10
- 238000002474 experimental method Methods 0.000 abstract description 11
- 239000007921 spray Substances 0.000 abstract description 10
- 239000000126 substance Substances 0.000 abstract description 7
- 238000005507 spraying Methods 0.000 abstract description 4
- 238000007740 vapor deposition Methods 0.000 abstract description 3
- 239000000463 material Substances 0.000 description 4
- 238000004140 cleaning Methods 0.000 description 3
- 238000006243 chemical reaction Methods 0.000 description 2
- 239000013078 crystal Substances 0.000 description 2
- 238000000151 deposition Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 238000005137 deposition process Methods 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 229910010272 inorganic material Inorganic materials 0.000 description 1
- 239000011147 inorganic material Substances 0.000 description 1
- 229910000765 intermetallic Inorganic materials 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 150000001247 metal acetylides Chemical class 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 150000004767 nitrides Chemical class 0.000 description 1
- 230000003863 physical function Effects 0.000 description 1
- 238000001556 precipitation Methods 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 239000013049 sediment Substances 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- 238000003786 synthesis reaction Methods 0.000 description 1
- 150000003568 thioethers Chemical class 0.000 description 1
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- Spray Control Apparatus (AREA)
Abstract
The utility model relates to the technical field of chemical vapor deposition and discloses metal organic chemical vapor deposition equipment, which comprises an equipment main body, wherein a handle is fixedly arranged on the surface of the equipment main body, and an adjusting mechanism is arranged on the inner wall of the equipment main body; the adjusting mechanism comprises a liquid pump, the liquid pump is fixedly arranged at the top of the equipment main body, flexible hoses are fixedly communicated with the bottom of the liquid pump, the number of the flexible hoses is two, and a mobile station is slidably arranged on the inner wall of the equipment main body. According to the metal organic chemical vapor deposition equipment, when a user utilizes the equipment main body to carry out metal organic chemical vapor deposition experiments, the user can adjust the position of the spray header to comprehensively spray substances which are subjected to vapor deposition in the equipment main body, the situation that part of positions are not sprayed due to small spraying range is avoided, and the efficiency and the quality of the metal organic chemical vapor deposition experiments are effectively improved.
Description
Technical Field
The utility model relates to the technical field of chemical vapor deposition, in particular to metal organic chemical vapor deposition equipment.
Background
Chemical vapor deposition is a chemical technology, which is mainly a method for producing a film by using one or more vapor compounds or simple substances containing film elements to perform chemical reaction on the surface of a substrate, chemical vapor deposition is a new technology developed for decades to prepare inorganic materials, chemical vapor deposition has been widely used for purifying substances, developing new crystals and depositing various single crystal, polycrystalline or glassy inorganic film materials, the materials can be oxides, sulfides, nitrides and carbides, and can also be binary or multi-element intermetallic compounds in III-V, II-IV, IV-VI, and the physical functions of the materials can be precisely controlled by a deposition process of vapor doping, chemical vapor deposition has become a new field of inorganic synthesis chemistry, and metal organic chemical vapor deposition equipment can be used in the process of metal organic chemical vapor deposition experiments.
In the Chinese patent, CN201521112918.1 is disclosed as a metal organic chemical vapor deposition device, wherein a laser generating and receiving device generates laser, the laser irradiates on a reflecting layer of a reaction platform after passing through a window and a small hole and is reflected, the reflected laser is received by the laser generating and receiving device, the laser generating and receiving device judges the aperture of the small hole according to the intensity of the received reflected laser, and when the aperture of the small hole is too small, the laser generating and receiving device sends a signal to a buzzer to give an alarm to warn a worker to clear the small hole; when cleaning, the brush is adjusted to a proper height through the lifting table, the motor is started, and the motor drives the single-arm rotary rod to rotate so as to drive the brush to clean the small holes, so that the cleaning is quick and convenient, the labor cost is saved, and the working efficiency is improved; the hairbrush is arranged in a mode of arranging high-low bristles at intervals, so that the cleaning effect is better.
However, when an actual user performs a metal organic chemical vapor deposition experiment by using the equipment main body, the user is not convenient to adjust the position of the spray header to comprehensively spray the vapor deposition substances in the equipment main body, the spraying range is small, and part of positions are possibly not sprayed, so that the efficiency and the quality of the metal organic chemical vapor deposition experiment are reduced.
Disclosure of Invention
The present utility model is directed to a metal organic chemical vapor deposition apparatus for solving the problems set forth in the background art.
In order to solve the technical problems, the utility model provides the following technical scheme: the metal organic chemical vapor deposition equipment comprises an equipment main body, wherein a handle is fixedly arranged on the surface of the equipment main body, and an adjusting mechanism is arranged on the inner wall of the equipment main body;
the adjusting mechanism comprises a liquid pump which is fixedly arranged at the top of the equipment main body, the bottom of the liquid pump is fixedly communicated with two telescopic hoses, the inner wall of the equipment main body is slidably provided with a mobile station, one end of each telescopic hose is fixedly communicated with the surface of the mobile station, the bottom fixed mounting of mobile station has the shower head, the quantity of shower head is four, shower head and flexible hose cooperation use, one side fixed mounting of equipment main part has the motor, the output fixed mounting of motor has the threaded rod, the threaded rod rotates the inner wall of installing in equipment main part, the surface of threaded rod is located to the mobile station cover.
Preferably, the bottom of the equipment main body is fixedly provided with four supporting legs, the surface of the supporting legs is fixedly provided with universal wheels, and the number of the universal wheels is four.
Preferably, a transparent plate is fixedly arranged on the surface of the equipment main body, and a liquid suction pipe is fixedly communicated with the surface of the liquid suction pump.
Preferably, a feeding port is fixedly communicated with one side of the equipment main body, a bracket is fixedly arranged on one side of the equipment main body, and the inner wall of the bracket is fixedly connected with the surface of the motor.
Preferably, a sliding groove is formed in the inner wall of the equipment main body, sliding rods are fixedly arranged on the inner wall of the sliding groove, and the number of the sliding rods is two.
Preferably, the surface of the mobile station is fixedly provided with two sliding blocks.
Preferably, the sliding block is sleeved on the surface of the sliding rod, the surface of the sliding block is in contact with the inner wall of the sliding groove, a bearing is fixedly arranged on the inner wall of the equipment main body, and the inner wall of the bearing is fixedly connected with one end of the threaded rod.
Compared with the prior art, the utility model has the following beneficial effects:
according to the utility model, by arranging the adjusting mechanism, when a user performs a metal organic chemical vapor deposition experiment by using the equipment main body, the user can adjust the position of the spray header to comprehensively spray the substances performing vapor deposition in the equipment main body, so that the problem that part of positions are not sprayed due to a small spraying range is avoided, and the efficiency and the quality of the metal organic chemical vapor deposition experiment are effectively improved.
Drawings
FIG. 1 is a perspective view of the present utility model;
FIG. 2 is a perspective view of a partial structure of the present utility model;
FIG. 3 is a schematic view of a partial structure of the present utility model;
fig. 4 is an exploded view of a partial structure of the present utility model.
Wherein: 1. an apparatus main body; 2. a handle; 3. an adjusting mechanism; 301. a liquid pump; 302. a flexible hose; 303. a mobile station; 304. a spray header; 305. a motor; 306. a threaded rod; 4. support legs; 5. a universal wheel; 6. a transparent plate; 7. a liquid suction pipe; 8. a feed inlet; 9. a bracket; 10. a chute; 11. a slide bar; 12. a slide block; 13. and (3) a bearing.
Detailed Description
The following description of the embodiments of the present utility model will be made clearly and completely with reference to the accompanying drawings, in which it is apparent that the embodiments described are only some embodiments of the present utility model, but not all embodiments. All other embodiments, which can be made by those skilled in the art based on the embodiments of the utility model without making any inventive effort, are intended to be within the scope of the utility model.
Referring to fig. 1-4, a metal organic chemical vapor deposition apparatus includes an apparatus main body 1, a handle 2 is fixedly installed on a surface of the apparatus main body 1, and an adjusting mechanism 3 is disposed on an inner wall of the apparatus main body 1;
the adjustment mechanism 3 includes the drawing liquid pump 301, drawing liquid pump 301 fixed mounting is in the top of equipment main part 1, the fixed intercommunication in bottom of drawing liquid pump 301 has flexible hose 302, flexible hose 302's quantity is two, the inner wall slidable mounting of equipment main part 1 has movable platform 303, flexible hose 302's one end fixed intercommunication is in the surface of movable platform 303, movable platform 303's bottom fixed mounting has shower head 304, shower head 304's quantity is four, shower head 304 and flexible hose 302 cooperation use, one side fixed mounting of equipment main part 1 has motor 305, the output fixed mounting of motor 305 has threaded rod 306, threaded rod 306 rotates the inner wall of installing in equipment main part 1, the surface of threaded rod 306 is located to movable platform 303 cover.
Specifically, the bottom of the apparatus body 1 is fixedly provided with four support legs 4, the surface of the support legs 4 is fixedly provided with universal wheels 5, and the number of the universal wheels 5 is four.
Through above-mentioned technical scheme, through setting up supporting leg 4 and universal wheel 5, when the user utilizes equipment main part 1 to carry out metal organic chemical vapor deposition experiment, the user can hold handle 2 and remove equipment main part 1 to suitable test position through supporting leg 4 and universal wheel 5 that its surface set up.
Specifically, the transparent plate 6 is fixedly mounted on the surface of the apparatus main body 1, and the liquid suction pipe 7 is fixedly communicated with the surface of the liquid suction pump 301.
Through above-mentioned technical scheme, through setting up transparent plate 6, the user can observe the inside sediment phenomenon of equipment main part 1 through transparent plate 6, and is more convenient, through setting up drawing liquid pipe 7, drawing liquid pump 301 is through drawing liquid pump 7 with the liquid that needs to draw, carries the shower head 304 that sets up to the mobile station 303 surface through flexible hose 302, sprays in the equipment main part 1 through the shower head 304 blowout.
Specifically, a feed inlet 8 is fixedly communicated with one side of the equipment main body 1, a support 9 is fixedly installed on one side of the equipment main body 1, and the inner wall of the support 9 is fixedly connected with the surface of the motor 305.
Through above-mentioned technical scheme, through setting up feed inlet 8, the inside of sending into equipment main part 1 through feed inlet 8 with the material that needs to carry out precipitation experiment etc. is gone into to the user, through setting up support 9, can fix motor 305, makes it more stable when the operation.
Specifically, the inner wall of the equipment main body 1 is provided with sliding grooves 10, sliding rods 11 are fixedly arranged on the inner wall of the sliding grooves 10, and the number of the sliding rods 11 is two.
Through above-mentioned technical scheme, through setting up spout 10 and slide bar 11, slider 12 is at the inner wall contact of spout 10 and is removed, and slider 12 cover is moved on the surface of slide bar 11 and can be played the effect of direction to the removal of mobile station 303, makes it more stable when moving.
Specifically, the surface of the moving stage 303 is fixedly provided with the sliders 12, and the number of sliders 12 is two.
Through the above technical scheme, through setting up slider 12, slider 12 contacts the removal at the inner wall of spout 10, and slider 12 cover is moved on the surface of slide bar 11 and can be played the guide to the removal of mobile station 303, makes it more stable when moving.
Specifically, the sliding block 12 is sleeved on the surface of the sliding rod 11, the surface of the sliding block 12 is in contact with the inner wall of the sliding groove 10, the bearing 13 is fixedly mounted on the inner wall of the equipment main body 1, and the inner wall of the bearing 13 is fixedly connected with one end of the threaded rod 306.
Through above-mentioned technical scheme, through setting up bearing 13, bearing 13 can make threaded rod 306 more smooth and stable when rotating.
When the metal organic chemical vapor deposition experiment is carried out by using the equipment main body 1, a user can hold the handle 2 and move the equipment main body 1 to a proper test position through the universal wheel 5 arranged on the supporting legs 4 and the surface of the equipment main body, the user sends substances and the like needing to be subjected to the deposition experiment into the equipment main body 1 through the feed inlet 8, then the liquid suction pump 301 is started through the external control switch, the liquid suction pump 301 supplies power through the external power supply, the liquid suction pump 301 pumps up required liquid through the liquid suction pipe 7, the liquid suction pump 301 is conveyed to the spray head 304 arranged on the surface of the movable table 303 through the telescopic hose 302, the spraying is carried out in the equipment main body 1 through the spray head 304, meanwhile, the user starts the motor 305 to supply power through the external control switch, the output end of the motor 305 drives the threaded rod 306 to rotate, the bearing 13 can enable the threaded rod 306 to be smoother and stable during rotation, the threaded rod 306 rotates to drive the movable table 303 to move, the sliding block 12 can contact and move on the inner wall of the sliding groove 10, the sliding block 12 is sleeved on the surface of the sliding rod 11, the sliding rod 11 can move the movable table, and the transparent plate can move the movable table 6 can move more stably, and the transparent main body can move the movable table 1 through the transparent main body, and the transparent plate can be observed at the same time, and the phenomenon can be observed more stable when the movement of the movable main body is more stable can be observed.
Finally, it should be noted that: the foregoing description is only a preferred embodiment of the present utility model, and the present utility model is not limited thereto, but it is to be understood that modifications and equivalents of some of the technical features described in the foregoing embodiments may be made by those skilled in the art, although the present utility model has been described in detail with reference to the foregoing embodiments. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present utility model should be included in the protection scope of the present utility model.
Claims (7)
1. Metal organic chemical vapor deposition equipment, including equipment main part (1), its characterized in that: the surface of the equipment main body (1) is fixedly provided with a handle (2), and the inner wall of the equipment main body (1) is provided with an adjusting mechanism (3);
adjustment mechanism (3) are including drawing liquid pump (301), drawing liquid pump (301) fixed mounting is in the top of equipment main part (1), the fixed intercommunication in bottom of drawing liquid pump (301) has flexible hose (302), the quantity of flexible hose (302) is two, the inner wall slidable mounting of equipment main part (1) has movable table (303), the fixed surface that communicates in movable table (303) of one end of flexible hose (302), the fixed mounting in bottom of movable table (303) has shower head (304), the quantity of shower head (304) is four, shower head (304) and flexible hose (302) cooperation are used, one side fixed mounting of equipment main part (1) has motor (305), the output fixed mounting of motor (305) has threaded rod (306), threaded rod (306) rotate the inner wall of installing in equipment main part (1), the surface of threaded rod (306) is located to movable table (303) cover.
2. A metal organic chemical vapor deposition apparatus according to claim 1, wherein: the device is characterized in that supporting legs (4) are fixedly arranged at the bottom of the device body (1), the number of the supporting legs (4) is four, universal wheels (5) are fixedly arranged on the surface of the supporting legs (4), and the number of the universal wheels (5) is four.
3. A metal organic chemical vapor deposition apparatus according to claim 1, wherein: the surface of the equipment main body (1) is fixedly provided with a transparent plate (6), and the surface of the liquid suction pump (301) is fixedly communicated with a liquid suction pipe (7).
4. A metal organic chemical vapor deposition apparatus according to claim 1, wherein: one side of the equipment main body (1) is fixedly communicated with a feed inlet (8), one side of the equipment main body (1) is fixedly provided with a support (9), and the inner wall of the support (9) is fixedly connected with the surface of the motor (305).
5. A metal organic chemical vapor deposition apparatus according to claim 1, wherein: the device is characterized in that a sliding groove (10) is formed in the inner wall of the device body (1), sliding rods (11) are fixedly arranged on the inner wall of the sliding groove (10), and the number of the sliding rods (11) is two.
6. A metal organic chemical vapor deposition apparatus according to claim 1, wherein: the surface of the mobile station (303) is fixedly provided with sliding blocks (12), and the number of the sliding blocks (12) is two.
7. A metal organic chemical vapor deposition apparatus according to claim 6, wherein: the sliding block (12) is sleeved on the surface of the sliding rod (11), the surface of the sliding block (12) is in contact with the inner wall of the sliding groove (10), a bearing (13) is fixedly arranged on the inner wall of the equipment main body (1), and the inner wall of the bearing (13) is fixedly connected with one end of the threaded rod (306).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202322056340.3U CN220724333U (en) | 2023-08-02 | 2023-08-02 | Metal organic chemical vapor deposition equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202322056340.3U CN220724333U (en) | 2023-08-02 | 2023-08-02 | Metal organic chemical vapor deposition equipment |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN220724333U true CN220724333U (en) | 2024-04-05 |
Family
ID=90502784
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202322056340.3U Active CN220724333U (en) | 2023-08-02 | 2023-08-02 | Metal organic chemical vapor deposition equipment |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN220724333U (en) |
-
2023
- 2023-08-02 CN CN202322056340.3U patent/CN220724333U/en active Active
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