CN220724331U - Chemical vapor deposition equipment - Google Patents
Chemical vapor deposition equipment Download PDFInfo
- Publication number
- CN220724331U CN220724331U CN202321923794.XU CN202321923794U CN220724331U CN 220724331 U CN220724331 U CN 220724331U CN 202321923794 U CN202321923794 U CN 202321923794U CN 220724331 U CN220724331 U CN 220724331U
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- box
- groove
- vapor deposition
- chemical vapor
- reaction box
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- 238000005229 chemical vapour deposition Methods 0.000 title claims abstract description 19
- 238000003860 storage Methods 0.000 claims description 16
- 238000007789 sealing Methods 0.000 claims description 12
- 239000004744 fabric Substances 0.000 claims description 7
- 230000006978 adaptation Effects 0.000 claims description 3
- 238000007740 vapor deposition Methods 0.000 abstract description 5
- 239000010406 cathode material Substances 0.000 abstract 1
- 239000007789 gas Substances 0.000 description 28
- 241000220317 Rosa Species 0.000 description 13
- 238000000151 deposition Methods 0.000 description 13
- 230000008021 deposition Effects 0.000 description 13
- 238000009434 installation Methods 0.000 description 13
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 10
- 229910052799 carbon Inorganic materials 0.000 description 10
- 239000010405 anode material Substances 0.000 description 6
- 239000000835 fiber Substances 0.000 description 6
- 239000012535 impurity Substances 0.000 description 6
- 230000003014 reinforcing effect Effects 0.000 description 5
- 239000000463 material Substances 0.000 description 4
- 238000000034 method Methods 0.000 description 4
- 230000000694 effects Effects 0.000 description 3
- 238000001914 filtration Methods 0.000 description 3
- 238000003825 pressing Methods 0.000 description 3
- 230000009286 beneficial effect Effects 0.000 description 2
- 238000004891 communication Methods 0.000 description 2
- 239000002131 composite material Substances 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 239000002994 raw material Substances 0.000 description 2
- 239000004215 Carbon black (E152) Substances 0.000 description 1
- 239000011247 coating layer Substances 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 229930195733 hydrocarbon Natural products 0.000 description 1
- 150000002430 hydrocarbons Chemical class 0.000 description 1
- 238000011031 large-scale manufacturing process Methods 0.000 description 1
- 239000002296 pyrolytic carbon Substances 0.000 description 1
- 238000003756 stirring Methods 0.000 description 1
Landscapes
- Chemical Vapour Deposition (AREA)
Abstract
The utility model relates to the technical field of vapor deposition equipment, in particular to chemical vapor deposition equipment, wherein one side of a reaction box is provided with a gas mixer, the output end of the gas mixer is fixedly provided with an air inlet pipe, the air inlet pipe is communicated with the gas mixer, the side end of the air inlet pipe is fixedly provided with a control valve, one side of the reaction box is fixedly provided with a heater, and a temperature controller is fixedly arranged above the heater; an exhaust pipe is fixedly arranged on one side of the reaction box, a filter box is fixedly arranged on one side of the exhaust pipe, and a locking structure is arranged between the cover plate and the reaction box. The chemical vapor deposition equipment provided by the utility model has strong connectivity, is convenient for utilizing the discharged hot gas, saves resources and improves the electrochemical performance of the cathode material.
Description
Technical Field
The utility model relates to the technical field of vapor deposition equipment, in particular to chemical vapor deposition equipment.
Background
The chemical vapor deposition method is one of the main methods for preparing the carbon-coated composite material, and is characterized in that carbon source gases such as hydrocarbon are introduced into a deposition furnace, the carbon source gases are pyrolyzed at high temperature, generated pyrolytic carbon is deposited on the surface of a material to be coated, and finally a coating layer is formed on the surface of the material to be coated, so that the carbon-coated composite material is obtained, and the method has the characteristics of simple process, suitability for large-scale production and the like.
Current cvd furnaces and cvd equipment, as described in the patent publication CN209522919U, include: the device comprises a furnace body, a feed inlet, a discharge outlet, an air inlet, an air outlet and a stirring structure arranged in the furnace body, wherein a conveying device and a driving device arranged outside the connecting pipeline and used for driving the conveying device to operate are arranged in a connecting pipeline between the raw material bin and the furnace body; and a control valve is arranged on the connecting pipeline and is used for controlling the communication between the connecting pipeline and the raw material bin and the communication between the connecting pipeline and the furnace body.
Disclosure of Invention
The purpose of this application is to solve or at least alleviate the problem that contains a large amount of steam in the exhaust of current chemical vapor deposition equipment, like direct emission, causes the wasting of resources.
In order to achieve the above purpose, the present utility model provides the following technical solutions:
the utility model provides a chemical vapor deposition equipment, includes the reaction tank, the top of reaction tank is provided with the apron, the top of apron is provided with the storage case, the bottom fixed mounting of storage case has communicating pipe, communicating pipe passes the apron, and with the reaction tank intercommunication, one side of reaction tank is provided with gas mixer, gas mixer's output fixed mounting has the intake pipe, the intake pipe with gas mixer intercommunication, the side fixed mounting of intake pipe has the control valve, one side fixed mounting of reaction tank has the heater, the reaction tank is located the top fixed mounting of heater has temperature controller, the bottom fixed mounting of storage case has the supporting shoe, one side fixed mounting of reaction tank has the blast pipe, one side fixed mounting of blast pipe has the rose box, the apron with be provided with locking structure between the reaction tank.
Optionally, a connecting pipe is fixedly installed on one side of the filter box, an air pump is fixedly installed on the top end of the filter box, and the input end of the air pump is fixedly connected with the connecting pipe.
Optionally, the locking structure includes installation piece, mounting groove, holding tank, telescopic link, installation piece fixed mounting in the bottom of apron, the mounting groove set up in the top of reaction box, the mounting piece with the mounting groove activity is pegged graft, the holding tank set up in one side of mounting piece, telescopic link fixed mounting in the holding tank.
Optionally, the locking structure includes stopper, spacing groove, standing groove, second spring, movable block, inserted bar and first spring, the stopper with telescopic link fixed connection, installation piece fixed mounting in the bottom of apron, the mounting groove set up in the top of reaction box, the installation piece with the mounting groove activity is pegged graft, the holding groove set up in one side of installation piece, telescopic link fixed mounting in the holding groove, the stopper with telescopic link fixed connection, first spring housing is established outside the telescopic link, first spring with stopper fixed connection, the spacing groove set up in the both sides of reaction box, the stopper with spacing groove activity is pegged graft, the standing groove set up in one side of spacing groove, second spring fixed mounting in the standing groove, the movable block with second spring fixed connection, the inserted bar with movable block fixed connection, the inserted bar is located in the spacing groove.
Optionally, the inside of rose box is close to connecting pipe department fixed mounting has the filter cloth, the inside bottom slidable mounting of rose box has the collection box.
Optionally, an opening is formed in one side of the filter box, a movable plate is arranged at the position of the filter box, and the movable plate is fixed with the filter box through bolts.
Optionally, rings are fixedly installed on two sides of the top end of the cover plate.
Optionally, the bottom fixed mounting of apron has the sealing washer, the seal groove has been seted up on the top of reaction box, the sealing washer with seal groove looks adaptation.
Optionally, bellows are fixedly installed on two sides of the reaction box, the movable block is located in the bellows, and a sealing ring is fixedly installed on one side of the bellows.
Optionally, the bottom four corners department of reaction box is all fixed mounting has the supporting leg, the bottom fixed mounting of supporting leg has the rubber piece, the bottom fixed mounting of reaction box has row material pipe.
Compared with the prior art, the utility model has the beneficial effects that:
1. the heater, the temperature controller and the control valve are arranged at the air inlet pipe, so that the gas flow and the deposition temperature can be controlled, and the deposition of carbon on the surface of the fiber is facilitated due to the increase of the gas flow; when the deposition temperature is controlled accurately, molecular thermal motion is increased so as to control the carbon deposition amount on the surface of the fiber, so that the electrochemical performance of the anode material can be improved, tail gas in the reaction box is discharged through the exhaust pipe, the tail gas is pumped into the inner wall of the storage box through the air pump, the anode material in the storage box is preheated, and the vapor deposition efficiency is improved.
2. Through being provided with locking structure, locking structure includes the installation piece, the mounting groove, the holding tank, the telescopic link, the stopper, the spacing groove, the standing groove, the second spring, movable block, inserted bar and first spring, peg graft through installation piece and mounting groove and make the apron installation, the cooperation of rethread first spring and telescopic link makes the stopper stretch into in the spacing groove, lock the installation piece, when dismantling, through pressing the movable block, make the second spring shrink, make the inserted bar extrude the stopper spacing groove, make the apron open, the convenience is cleared up inside the reaction box, the reinforcing practicality.
3. Through being provided with the rose box, filter cloth through the rose box in, filter the impurity that contains in the tail gas, and in the impurity after the filtration falls into the collection box, the staff is through opening the fly leaf, conveniently takes out the collection box, through being provided with rings, is convenient for transport the apron, through being provided with the bellows, plays the guard action to the standing groove, through being provided with the sealing washer, reinforcing connection leakproofness.
Drawings
FIG. 1 is a schematic diagram of the overall structure of the present utility model;
FIG. 2 is a schematic view of the internal structure of the reaction tank of the present utility model;
FIG. 3 is an enlarged schematic view of the area A of FIG. 1 according to the present utility model;
FIG. 4 is an enlarged schematic view of the area B of FIG. 2 according to the present utility model;
FIG. 5 is a schematic view of the internal structure of the filter box of the present utility model;
in the figure: 1. a reaction box; 2. a cover plate; 3. a storage bin; 4. a communicating pipe; 5. a gas mixer; 6. an air inlet pipe; 7. a control valve; 8. a heater; 9. a temperature controller; 10. a support block; 11. an exhaust pipe; 12. a filter box; 1201. a filter cloth; 1202. a collection box; 13. a connecting pipe; 14. an air extracting pump; 18. a locking structure; 1801. a mounting block; 1802. a mounting groove; 1803. a receiving groove; 1804. a telescopic rod; 1805. a limiting block; 1806. a limit groove; 1807. a placement groove; 1808. a second spring; 1809. a movable block; 1810. a rod; 1811. a first spring; 19. a movable plate; 20. a bolt; 21. a hanging ring; 22. a bellows; 23. a seal ring; 24. support legs; 25. and a discharge pipe.
Detailed Description
The following description of the embodiments of the present utility model will be made clearly and completely with reference to the accompanying drawings, in which it is apparent that the embodiments described are only some embodiments of the present utility model, but not all embodiments. All other embodiments, which can be made by those skilled in the art based on the embodiments of the utility model without making any inventive effort, are intended to be within the scope of the utility model.
Referring to fig. 1-5, a chemical vapor deposition apparatus includes a reaction box 1, a cover plate 2 is disposed at a top end of the reaction box 1, a storage box 3 is disposed above the cover plate 2, a communicating pipe 4 is fixedly mounted at a bottom end of the storage box 3, the communicating pipe 4 penetrates through the cover plate 2 and is communicated with the reaction box 1, and a locking structure 18 is disposed between the cover plate 2 and the reaction box 1. The gas mixer 5 is arranged on one side of the reaction tank 1, the gas inlet pipe 6 is fixedly arranged at the output end of the gas mixer 5, the gas inlet pipe 6 is communicated with the gas mixer 5, the control valve 7 is fixedly arranged at the side end of the gas inlet pipe 6, the heater 8 is fixedly arranged on one side of the reaction tank 1, the temperature controller 9 is fixedly arranged above the heater 8, the supporting block 10 is fixedly arranged at the bottom end of the storage tank 3, the exhaust pipe 11 is fixedly arranged on one side of the reaction tank 1, the filter tank 12 is fixedly arranged on one side of the exhaust pipe 11, the connecting pipe 13 is fixedly arranged on one side of the filter tank 12, the air pump 14 is fixedly arranged at the top end of the filter tank 12, the input end of the air pump 14 is fixedly connected with the connecting pipe 13, the gas flow and the deposition temperature can be controlled by arranging the heater 8 and the control valve 7 at the gas inlet pipe 6, and the increase of the gas flow is beneficial to the deposition of carbon on the fiber surface; when the deposition temperature is precisely controlled, molecular thermal motion is increased to control the carbon deposition amount on the surface of the fiber, so that the electrochemical performance of the anode material can be improved, tail gas in the reaction tank 1 is discharged through the exhaust pipe 11, the tail gas is pumped into the inner wall of the storage tank 3 through the air pump 14, the anode material in the storage tank 3 is preheated, and the vapor deposition efficiency is improved.
The outside of blast pipe 11 is all fixed mounting has the valve, and the equal fixed mounting in top both sides of apron 2 rings 21, and the bottom fixed mounting of apron 2 has sealing washer 23, and the seal groove has been seted up on the top of reaction tank 1, sealing washer 23 and seal groove looks adaptation. The bellows 22 is fixedly installed on two sides of the reaction box 1, the movable block 1809 is located in the bellows 22, and a sealing ring is fixedly installed on one side of the bellows 22. Through being provided with rings 21, be convenient for transfer apron 2, through being provided with bellows 22, play the guard action to standing groove 1807, through being provided with sealing washer 23, reinforcing connection leakproofness, the equal fixed mounting in bottom four corners department of reaction tank 1 has supporting leg 24, and the bottom fixed mounting of supporting leg 24 has the rubber piece, and the bottom fixed mounting of reaction tank 1 has row material pipe 25.
The locking structure 18 comprises a mounting block 1801, a mounting groove 1802, a containing groove 1803, a telescopic rod 1804, a limiting block 1805, a limiting groove 1806, a placing groove 1807, a second spring 1808, a movable block 1809, an inserting rod 1810 and a first spring 1811, wherein the mounting block 1801 is fixedly mounted at the bottom end of a cover plate 2, the mounting groove 1802 is formed in the top end of the reaction box 1, the mounting block 1801 is movably inserted into the mounting groove 1802, the containing groove 1803 is formed in one side of the mounting block 1801, the telescopic rod 1804 is fixedly mounted in the containing groove 1803, the limiting block 1805 is fixedly connected with the telescopic rod 1804, the first spring 1811 is sleeved outside the telescopic rod 1804, the first spring 1811 is fixedly connected with the limiting block 1805, the limiting groove 1806 is formed in two sides of the reaction box 1, the limiting block 1805 is movably inserted into the limiting groove 1806, the cover plate 2 is mounted through the mounting block 1801 and the mounting groove, and the limiting block 1805 is inserted into the limiting groove 1806 through the cooperation of the first spring 1811 and the telescopic rod 1804, and the limiting block 1805 is locked. The standing groove 1807 is offered in the one side of spacing groove 1806, second spring 1808 fixed mounting is in the standing groove 1807, movable block 1809 and second spring 1808 fixed connection, inserted bar 1810 and movable block 1809 fixed connection, inserted bar 1810 is located spacing groove 1806, when dismantling, through pressing movable block 1809, make second spring 1808 shrink, make inserted bar 1810 extrude spacing groove 1806 with stopper 1805, make apron 2 open, conveniently clear up the inside reaction tank 1, the reinforcing practicality.
The inside of rose box 12 is close to connecting pipe 13 department fixed mounting and has filtered cloth 1201, and the inside bottom slidable mounting of rose box 12 has collected box 1202, and the opening has been seted up to one side of rose box 12, and rose box 12 is located the opening part and is provided with fly leaf 19, and it is fixed through bolt 20 between fly leaf 19 and the rose box 12, filters the filter cloth 1201 in the rose box 12, filters the impurity that contains in the tail gas, and the impurity after the filtration falls into and collect box 1202, and the staff is through opening fly leaf 19, conveniently takes out collection box 1202.
Working principle: the heater 8, the temperature controller 9 and the control valve 7 are arranged at the air inlet pipe 6, so that the gas flow and the deposition temperature can be controlled, and the deposition of carbon on the surface of the fiber is facilitated by the increase of the gas flow; when the deposition temperature is controlled accurately, molecular thermal motion is increased to control the carbon deposition amount on the surface of the fiber, so that the electrochemical performance of the anode material can be improved, tail gas in the reaction tank 1 is discharged through the exhaust pipe 11, the tail gas is pumped into the inner wall of the storage tank 3 through the air pump 14, the anode material in the storage tank 3 is preheated, and the vapor deposition efficiency is improved; the cover plate 2 is installed by inserting the installation block 1801 into the installation groove 1802, the limiting block 1805 stretches into the limiting groove 1806 by matching the first spring 1811 with the telescopic rod 1804, the installation block 1801 is locked, the second spring 1808 is contracted by pressing the movable block 1809 when the installation block 1801 is disassembled, the limiting block 1805 is extruded out of the limiting groove 1806 by the inserting rod 1810, the cover plate 2 is opened, the inside of the reaction box 1 is conveniently cleaned, and the practicability is enhanced; through being provided with rose box 12, filter cloth 1201 through in the rose box 12 filters the impurity that contains in the tail gas, and the impurity after the filtration falls into in collecting box 1202, and the staff is through opening fly leaf 19, conveniently takes out collecting box 1202, through being provided with rings 21, is convenient for transfer apron 2, through being provided with bellows 22, plays the guard action to standing groove 1807, through being provided with sealing washer 23, reinforcing connection leakproofness.
The foregoing description is only a preferred embodiment of the present utility model, and the present utility model is not limited thereto, but it is to be understood that modifications and equivalents of some of the technical features described in the foregoing embodiments may be made by those skilled in the art, although the present utility model has been described in detail with reference to the foregoing embodiments. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present utility model should be included in the protection scope of the present utility model.
Claims (10)
1. Chemical vapor deposition equipment, including reaction box (1), its characterized in that: the top of reaction box (1) is provided with apron (2), the top of apron (2) is provided with storage case (3), the bottom fixed mounting of storage case (3) has communicating pipe (4), communicating pipe (4) pass apron (2), and with reaction box (1) intercommunication, one side of reaction box (1) is provided with gas mixer (5), the output fixed mounting of gas mixer (5) has intake pipe (6), intake pipe (6) with gas mixer (5) intercommunication, the side fixed mounting of intake pipe (6) has control valve (7), one side fixed mounting of reaction box (1) has heater (8), reaction box (1) are located the top fixed mounting of heater (8) has temperature controller (9), the bottom fixed mounting of storage case (3) has supporting shoe (10), one side fixed mounting of reaction box (1) has blast pipe (11), one side fixed mounting of blast pipe (11) has filter box (12), one side fixed mounting of blast pipe (11) has control valve (2) and reaction box (1) have locking structure between the apron (18).
2. A chemical vapor deposition apparatus according to claim 1, wherein: the locking structure (18) comprises a mounting block (1801), a mounting groove (1802), a containing groove (1803) and a telescopic rod (1804), wherein the mounting block (1801) is fixedly mounted at the bottom end of the cover plate (2), the mounting groove (1802) is formed in the top end of the reaction box (1), the mounting block (1801) is movably inserted into the mounting groove (1802), the containing groove (1803) is formed in one side of the mounting block (1801), and the telescopic rod (1804) is fixedly mounted in the containing groove (1803).
3. A chemical vapor deposition apparatus according to claim 2, wherein: the locking structure (18) comprises a limiting block (1805), a limiting groove (1806), a placing groove (1807), a second spring (1808), a movable block (1809), an inserting rod (1810) and a first spring (1811), wherein the limiting block (1805) is fixedly connected with the telescopic rod (1804), the first spring (1811) is sleeved outside the telescopic rod (1804), the first spring (1811) is fixedly connected with the limiting block (1805), the limiting groove (1806) is formed in two sides of the reaction box (1), the limiting block (1805) is movably inserted into the limiting groove (1806), the placing groove (1807) is formed in one side of the limiting groove (1806), the second spring (1808) is fixedly installed in the placing groove (1807), the movable block (1809) is fixedly connected with the second spring (1808), and the inserting rod (1810) is fixedly connected with the movable block (1809), and the limiting rod (1806) is located in the limiting groove (1806).
4. A chemical vapor deposition apparatus according to claim 3, wherein: one side of the filter box (12) is fixedly provided with a connecting pipe (13), the top end of the filter box (12) is fixedly provided with an air pump (14), and the input end of the air pump (14) is fixedly connected with the connecting pipe (13).
5. A chemical vapor deposition apparatus according to claim 1, wherein: an opening is formed in one side of the filter box (12), a movable plate (19) is arranged at the position of the opening of the filter box (12), and the movable plate (19) is fixed with the filter box (12) through bolts (20).
6. A chemical vapor deposition apparatus according to claim 1, wherein: hanging rings (21) are fixedly arranged on two sides of the top end of the cover plate (2).
7. A chemical vapor deposition apparatus according to claim 1, wherein: the bottom fixed mounting of apron (2) has sealing washer (23), the seal groove has been seted up on the top of reaction tank (1), sealing washer (23) with seal groove looks adaptation.
8. A chemical vapor deposition apparatus according to claim 3, wherein: the two sides of the reaction box (1) are fixedly provided with corrugated pipes (22), the movable blocks (1809) are positioned in the corrugated pipes (22), and one side of each corrugated pipe (22) is fixedly provided with a sealing ring.
9. A chemical vapor deposition apparatus according to claim 1, wherein: support legs (24) are fixedly arranged at four corners of the bottom end of the reaction box (1), rubber blocks are fixedly arranged at the bottom ends of the support legs (24), and a discharge pipe (25) is fixedly arranged at the bottom end of the reaction box (1).
10. The chemical vapor deposition apparatus according to claim 4, wherein: the filter box is characterized in that filter cloth (1201) is fixedly arranged in the filter box (12) and close to the connecting pipe (13), and a collecting box (1202) is slidably arranged at the bottom end of the filter box (12).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202321923794.XU CN220724331U (en) | 2023-07-21 | 2023-07-21 | Chemical vapor deposition equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202321923794.XU CN220724331U (en) | 2023-07-21 | 2023-07-21 | Chemical vapor deposition equipment |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN220724331U true CN220724331U (en) | 2024-04-05 |
Family
ID=90484332
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202321923794.XU Active CN220724331U (en) | 2023-07-21 | 2023-07-21 | Chemical vapor deposition equipment |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN220724331U (en) |
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- 2023-07-21 CN CN202321923794.XU patent/CN220724331U/en active Active
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