CN220724318U - Motor thickness control device based on vacuum coating on-line detection - Google Patents
Motor thickness control device based on vacuum coating on-line detection Download PDFInfo
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- CN220724318U CN220724318U CN202322403996.8U CN202322403996U CN220724318U CN 220724318 U CN220724318 U CN 220724318U CN 202322403996 U CN202322403996 U CN 202322403996U CN 220724318 U CN220724318 U CN 220724318U
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- thickness control
- connecting rod
- control device
- line detection
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- 238000001771 vacuum deposition Methods 0.000 title claims abstract description 23
- 238000001514 detection method Methods 0.000 title claims abstract description 19
- 238000012937 correction Methods 0.000 claims abstract description 37
- 230000007246 mechanism Effects 0.000 claims abstract description 12
- 239000012528 membrane Substances 0.000 claims abstract description 7
- 230000000712 assembly Effects 0.000 claims abstract description 5
- 238000000429 assembly Methods 0.000 claims abstract description 5
- 238000003825 pressing Methods 0.000 claims description 24
- 238000007747 plating Methods 0.000 claims description 15
- 238000006073 displacement reaction Methods 0.000 claims description 9
- 238000005520 cutting process Methods 0.000 claims description 6
- 230000001681 protective effect Effects 0.000 claims description 4
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 3
- 230000005855 radiation Effects 0.000 claims description 3
- 239000000741 silica gel Substances 0.000 claims description 3
- 229910002027 silica gel Inorganic materials 0.000 claims description 3
- 239000005030 aluminium foil Substances 0.000 claims description 2
- 230000009977 dual effect Effects 0.000 claims description 2
- 230000000149 penetrating effect Effects 0.000 claims description 2
- 239000011248 coating agent Substances 0.000 abstract description 14
- 238000000576 coating method Methods 0.000 abstract description 14
- 238000001755 magnetron sputter deposition Methods 0.000 abstract description 10
- 230000033001 locomotion Effects 0.000 abstract description 5
- 238000000034 method Methods 0.000 abstract description 4
- 230000008569 process Effects 0.000 abstract description 4
- 239000011247 coating layer Substances 0.000 abstract description 2
- 238000001816 cooling Methods 0.000 description 7
- 238000004891 communication Methods 0.000 description 6
- 239000007888 film coating Substances 0.000 description 6
- 238000009501 film coating Methods 0.000 description 6
- 238000012544 monitoring process Methods 0.000 description 4
- 239000010410 layer Substances 0.000 description 3
- 230000005540 biological transmission Effects 0.000 description 2
- 230000008859 change Effects 0.000 description 2
- 238000005260 corrosion Methods 0.000 description 2
- 230000007797 corrosion Effects 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 229910000838 Al alloy Inorganic materials 0.000 description 1
- 230000009471 action Effects 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- 230000006835 compression Effects 0.000 description 1
- 238000007906 compression Methods 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 238000004134 energy conservation Methods 0.000 description 1
- 230000007613 environmental effect Effects 0.000 description 1
- 239000011888 foil Substances 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 210000001503 joint Anatomy 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 230000002035 prolonged effect Effects 0.000 description 1
- 230000008707 rearrangement Effects 0.000 description 1
- 230000004044 response Effects 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
- 238000009504 vacuum film coating Methods 0.000 description 1
- 239000002699 waste material Substances 0.000 description 1
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- Physical Vapour Deposition (AREA)
Abstract
The utility model provides a vacuum coating based on-line detection motor thickness control device which comprises a driving plate and a plurality of thickness control assemblies, wherein the driving plate is positioned in a shell, the thickness control assemblies are arranged side by side, each thickness control assembly comprises a linear motor, a connecting rod, a connecting block and a correction plate which are sequentially connected, the driving plate controls the correction plates to approach or be far away from an ion membrane emission column through the linear motor, the connecting rod penetrates through a front panel of the shell, and a position locking mechanism is arranged at the connecting rod. The external pc end sends an instruction to the driving plate, the linear motor is controlled by an output signal, the connecting rod, the connecting block and the correction plate are driven to do linear motion, the gap between the front end of the correction plate and the ion membrane emission column can be accurately controlled, the concentration of the ion membrane passing through the magnetron sputtering process is controlled, and the thickness of the coating layer is controlled. The utility model can realize on-line control of the thickness of the vacuum coating, can realize thickness-variable coating, is easy to popularize and apply, and has great practical value.
Description
Technical Field
The utility model relates to the technical field of mechanical automation, in particular to a motor thickness control device based on vacuum coating on-line detection.
Background
The correction plates are used for adjusting the uniformity of the magnetron sputtering and controlling key technological parameters such as the thickness of the film coating of the workpiece in the using link of the magnetron sputtering vacuum film coating machine, however, the positions of each correction plate are manually adjusted, the efficiency of the film coating machine is greatly reduced, and waste in the film coating working process is brought about when the furnace is opened and closed every time. The passing concentration of the ion film is changed by adjusting the gap between the correction plate and the magnetron sputtering ion film emission column, and the thickness of the film coating layer is controlled. The traditional correction plate is connected with the vacuum coating equipment through screws and U-shaped grooves. The specific process needs to release the vacuum environment, take out the coating materials, manually adjust the displacement distance of the correction plate of the corresponding point according to the thickness of the coating at each point, and control the consistency of the coating thickness. The prior art is time-consuming for displacement control and misoperation of the correction plate, the work is repeated due to manual adjustment precision errors in the working process, and the vacuum environment is manufactured and relieved every time, so that the reliability is low, the time consumption is long, and the cost is high.
Disclosure of Invention
The application provides a motor thickness control device based on vacuum coating on-line measuring, which can realize on-line control of vacuum coating thickness and thickness variability coating. In view of the above problems, the application provides a motor thickness control device based on vacuum coating on-line detection.
The utility model provides a thick device of on-line measuring motor accuse based on vacuum coating, includes the thick subassembly of accuse that is located the inside drive plate of shell and a plurality of side by side that set up, thick subassembly is including the linear electric motor who connects gradually, connecting rod, connecting block and correction board, the drive plate is close or keep away from the ion membrane emission post through linear electric motor control correction board, the connecting rod passes the front panel of shell, and connecting rod department is provided with the position locking mechanism.
The linear motor is fixed in the shell through the motor base.
The position locking mechanism comprises a fixed seat, a cam, a pressing plate, supporting rods and springs, wherein a linear motor is arranged in the fixed seat, the front end of the linear motor is fixedly connected with the cam, the upper side of the pressing plate is provided with a landslide matched with the cam, a plurality of semicircular grooves matched with the connecting rods are formed in the lower side of the pressing plate, holes penetrating through the supporting rods are formed in the two sides of the pressing plate, the other ends of the supporting rods are fixed inside a shell, and the springs are arranged on the supporting rods and control the distance between the pressing plates and the connecting rods through the springs and the cams.
Soft silica gel is arranged in the digging groove of the pressing plate.
The connecting rod is further provided with a limiting device, the limiting device comprises a limiting strip fixed on the front panel, a plane cutting groove is formed in the cylindrical surface of the connecting rod, the limiting strip is located at a notch part of the plane cutting groove, and the length of the notch is the safe displacement distance of the motor.
The front end of connecting rod passes through bolt and connecting block fixed connection, the front end of connecting block passes through dual screw thread and mends board fixed connection.
And the part of the connecting rod, which is positioned outside the shell, is additionally provided with a high-temperature-resistant rubber telescopic protective cover.
The outside of linear electric motor is provided with the cooler bin, and the shell surface pastes the thermal-insulated aluminium foil paper that has the thermal-insulated radiation of protection.
The number of the thickness control assemblies is 6-10.
In the plurality of side-by-side thickness control assemblies, the linear motor of the thickness control assembly can be integrally controlled through the driving plate, and the gap width between the correction plate and the ion membrane emission column can be adjusted; the linear motor of the single thickness control component and the linear motors of the multiple thickness control components can be independently adjusted, and the positions of the multiple correction plates are different.
The thickness control device based on the vacuum coating on-line monitoring motor is simple in structure, convenient to operate, labor-saving, time-saving, high in reliability, low in cost, strong in adaptability of a micro-special motor, small in influence of environmental factors, capable of controlling the thickness of the vacuum coating on line, capable of realizing thickness variable coating, easy to popularize and apply and high in practical value.
Drawings
FIG. 1 is an application scene diagram of a vacuum coating based on-line detection motor thickness control device provided by an embodiment of the utility model;
FIG. 2 is a perspective view of a motor thickness control device based on-line monitoring of vacuum coating according to an embodiment of the present utility model;
FIG. 3 is a top view of a vacuum plating film based on-line monitoring motor thickness control device according to an embodiment of the utility model;
FIG. 4 is a schematic working diagram of a motor thickness control device based on-line monitoring of vacuum coating according to an embodiment of the present utility model;
FIG. 5 is a schematic view of the location of the cooling box;
FIG. 6 is a schematic side view of the position locking mechanism;
reference numerals illustrate:
1-a drive plate; 2-communication lines; 3-an electric motor; 4-connecting rods; 5-connecting blocks; 6-a correction plate; 7-supporting frames; 8-an ion membrane emission column; 9-cooling the box body; 10-coating a workpiece; 11-vacuum bin; 12-coating a film workpiece frame; 13-position locking mechanism; 14-fixing base; 15-a cam; 16-pressing plate; 17-a front panel; 18-protecting cover; 19-a spring; 20-notch.
Detailed Description
As shown in fig. 1, a film plating work-piece holder 12 and an ion film emission column 8 are installed in the vacuum bin 11, the film plating work-piece holder 12 is used for fixedly supporting a film plating work-piece 10, the ion film emission column 8 performs magnetron sputtering on the film plating work-piece 10, and a motor thickness control device based on vacuum film plating on-line detection is arranged between the film plating work-piece holder and the ion film emission column. The motor thickness control device based on vacuum coating on-line detection is fixed in the vacuum bin 11 through the support frame 7.
The motor thickness control device based on vacuum coating on-line detection comprises a shell, and a driving plate 1 and a thickness control assembly which are arranged in the shell and shown in fig. 2 and 3. The shell comprises module shell, front panel 17 and rear panel, both sides are sealed through front panel 17 and rear panel respectively around the module shell, the shell adopts aviation level aluminum alloy material to build, has characteristics such as intensity height weight is light, and has electromagnetic shield's effect, not only can independently use, and inside can make a plurality of accuse thick devices splice together through the installation connecting piece. The thick subassembly of accuse includes motor 3, connecting rod 4, connecting block 5 and the correction board 6 that connect gradually, connecting rod 4 passes front panel 17, drive plate 1 is used for driving multiunit accuse thick subassembly through communication line 2, in this embodiment, accuse thick subassembly is provided with eight groups, drive plate 1 adopts eight drive plates, is located eight groups accuse thick subassembly's top, communication line 2 is connected with motor 3.
The motor 3 adopts a linear motor and is fixed on a motor base, and the linear motor has the excellent characteristics of small volume, light weight, large thrust, quick response and the like, and can still stably work in a vacuum environment; the motor base adopts integrated integral processing and can be directly integrated with components in the motor, so that the manufacturing cost of the linear motor is saved, and meanwhile, the purchasing cost of a customer is reduced.
As shown in fig. 4 and 5, a plurality of thickness control modules are arranged side by side, a position locking mechanism 13 is arranged at the connecting rod 4, and the position locking mechanism 13 is used for locking and limiting the arranged correction plate 6 so that the correction plate is not moved any more. Referring to fig. 6, the position locking mechanism 13 includes a fixing seat 14, a cam 15 and a pressing plate 16, a linear motor is disposed in the fixing seat 14, a cam 15 is disposed at the front end of the linear motor, a landslide is disposed on the upper side of the pressing plate 16, a plurality of semicircular grooves matched with the connecting rod 4 are disposed under the pressing plate 16, and the cam 15 is matched with the landslide on the upper side of the pressing plate 16. The linear motor pushes the cam 15 to move towards the landslide direction, and along with the movement of the cam 15, the landslide moves downwards, so that the pressing plate 16 is driven to move downwards. The position locking mechanism 13 enables the pressing plate 16 with semicircular grooves to move downwards through the transmission process of the contact between the cam 15 and the landslide, and tightly presses the connecting rod 4 connected with the correction plate 6, and soft silica gel is arranged in the grooves of the pressing plate 16, so that the pressing friction force is greatly enhanced. The mechanism has compact structure, reliable operation and adjustable compression degree along with the stroke of the cam 15, and can be integrated into the driving plate 1 for control. Further, the two sides of the pressing plate 16 are provided with holes, the holes are penetrated with supporting rods, the other ends of the supporting rods are fixed inside the shell, springs 19 are arranged on the supporting rods and used for providing upward force for the pressing plate 16, when the cam 15 moves, the elastic force of the springs is overcome, the pressing plate 16 moves downwards, when the linear motor stretches and contracts, and the cam 15 is driven to move upwards under the action of the springs when being far away from the landslide direction.
The displacement of the motor 3 cannot exceed the maximum displacement distance, so that a safe displacement distance must be determined for the motor 3, the limiting device comprises a limiting strip 21 fixed on the front panel 17, a plane cutting groove 20 is formed in the cylindrical surface of the connecting rod 4, the length of the notch is the maximum safe displacement distance of the motor 3, the limiting strip 21 is placed in the plane cutting groove 20 to play a limiting role, and the connecting rod 4 is limited to rotate only along the linear movement because the connecting rod 4 is in plane contact with the limiting strip 21. The limiting device prevents the motor 3 from exceeding the safety travel of the motion, and the purpose of protecting the motor is achieved. The front end of the connecting rod 4 is fixedly connected with the connecting block 5 through a bolt, and the front end of the connecting block 5 is fixedly connected with the correction plate 6 through double threads.
Since the working area of the correction plate 6 is located in the vacuum high temperature coater internal environment, a protective measure is indispensable. The heat-insulating aluminum foil paper for preventing heat radiation is adhered to the surface of the shell of the motor thickness control device based on vacuum coating on-line detection, so that the external high temperature is effectively isolated, and all parts in the motor thickness control device work normally; in addition, in order to avoid corrosion pollution of the connecting rod 4 exposed in the vacuum magnetron sputtering environment, the exposed part of the connecting rod 4 outside the front panel 17 is additionally provided with the high-temperature-resistant rubber telescopic protective cover 18, so that the connecting rod 4 is effectively protected, and the service life of the unit module is prolonged.
In one embodiment, the eight-axis drive board 1 is connected to a communication line 2, and the communication line 2 is used for connecting a linear motor 3. The front end of the linear motor 3 is provided with a hole site, and the correction plate 6 is connected with the front end of the linear motor 3 through a connecting block 5 and a connecting rod 4. The external pc end of the vacuum bin 11 sends an instruction to the driving plate 1, a signal output by the driving plate 1 reaches the control linear motor 3, the linear motor 3 drives the connecting rod 4, the connecting block 5 and the correction plate 6 to realize linear motion, and the gap between the front end of the correction plate 6 and the ion film emission column 8 is precisely controlled, so that the concentration of the ion film passing through the magnetron sputtering is controlled, and the thickness of a film coating layer is controlled. The utility model realizes the motor control under the vacuum environment through the electric control system, so that the correction plate is displaced, and the gap width between the correction plate 6 and the ion film emission column 8 is controlled, the concentration of the ion film passing through the magnetron sputtering is controlled, and the thickness of the film coating layer is controlled.
Further, in this embodiment, the temperature of the high-temperature coating environment can reach 300 ℃, the cooling box 9 can be arranged inside the housing of the ballast, the cooling box 9 can be directly connected to the cooling system of the vacuum coating equipment, the linear motor 3 is wrapped, the motor is protected from failure in the high-temperature environment, and the driving plate 1 is arranged at the rear side of the cooling box 9, so that physical cooling is effectively realized, and ion film sputtering pollution is avoided. The connecting rod 4 is arranged at the top ends of the motor 3 and the connecting block 5 in a threaded connection mode, the connecting block 5 and the correction plate 6 are in a double threaded connection mode, all the connection tightness is good, and force transmission between the motor 3 and the correction plate 6 can be effectively achieved.
The embodiment adopts the integrated control application of the linear motor, has small volume and large quantity, can adapt to the online control operation of the special vacuum coating environment, not only can integrally control the linear motor and adjust the gap width between the correction plate 6 and the ion film emission column 8, but also can adjust the thickness of the coating fed back by each point of the coating layer on line, and can control the passing concentration of the ion film magnetron sputtering at the corresponding point by a single motor on line, thereby correcting the thickness of the coating at the position, so that the thickness of the coating is uniform and consistent; and the plurality of motors 3 can be controlled to realize different positions of the plurality of correction plates 6, so that the gap width between the correction plates 6 and the ion film emission column 8 achieves a change effect, and the thickness change of the coating film is realized.
The vacuum coating on-line detection motor thickness control device provided by the utility model is used as a control unit module of the correction plate, adopts an integrated modularized design of the miniature linear motor, can be composed of a plurality of (6-10) miniature motors, can be spliced freely according to the actual space of a coating machine, is in seamless butt joint, can position the adjustment position of the locking correction plate in real time, and has the functions of heat insulation protection, magnetron sputtering corrosion pollution protection and the like. The motor adopts multiaxis control drive, and the displacement and the speed of programmable control motor can realize long-range regulation and control through with outside communication, intelligent regulation and correction board's position. The module greatly releases the manual labor, improves the working efficiency of the correction plate, and plays a key role in energy conservation and synergy in the vacuum coating industry.
Note that the above is only a preferred embodiment of the present utility model and the technical principle applied. It will be understood by those skilled in the art that the present utility model is not limited to the particular embodiments described herein, but is capable of various obvious changes, rearrangements and substitutions as will now become apparent to those skilled in the art without departing from the scope of the utility model. Therefore, while the utility model has been described in connection with the above embodiments, the utility model is not limited to the embodiments, but may be embodied in many other equivalent forms without departing from the spirit or scope of the utility model, which is set forth in the following claims.
Claims (9)
1. Based on vacuum coating's on-line measuring motor accuse thick device, its characterized in that: including being located the inside drive plate of shell and a plurality of accuse thick subassembly that sets up side by side, accuse thick subassembly is including the linear motor who connects gradually, connecting rod, connecting block and correction board, the drive plate is close or keep away from the ion membrane emission post through linear motor control correction board, the connecting rod passes the front panel of shell, and connecting rod department is provided with the dead mechanism of position lock.
2. The vacuum plating film based on-line detection motor thickness control device according to claim 1, wherein: the linear motor is fixed in the shell through the motor base.
3. The vacuum plating film based on-line detection motor thickness control device according to claim 1, wherein: the position locking mechanism comprises a fixed seat, a cam, a pressing plate, supporting rods and springs, wherein a linear motor is arranged in the fixed seat, the front end of the linear motor is fixedly connected with the cam, the upper side of the pressing plate is provided with a landslide matched with the cam, a plurality of semicircular grooves matched with the connecting rods are formed in the lower side of the pressing plate, holes penetrating through the supporting rods are formed in the two sides of the pressing plate, the other ends of the supporting rods are fixed inside a shell, and the springs are arranged on the supporting rods and control the distance between the pressing plates and the connecting rods through the springs and the cams.
4. The vacuum plating film based on-line detection motor thickness control device according to claim 3, wherein: soft silica gel is arranged in the digging groove of the pressing plate.
5. The vacuum plating film based on-line detection motor thickness control device according to claim 1, wherein: the connecting rod is further provided with a limiting device, the limiting device comprises a limiting strip fixed on the front panel, a plane cutting groove is formed in the cylindrical surface of the connecting rod, the limiting strip is located at a notch part of the plane cutting groove, and the length of the notch is the safe displacement distance of the motor.
6. The vacuum plating film based on-line detection motor thickness control device according to claim 1, wherein: the front end of connecting rod passes through bolt and connecting block fixed connection, the front end of connecting block passes through dual screw thread and mends board fixed connection.
7. The vacuum plating film based on-line detection motor thickness control device according to claim 1, wherein: and the part of the connecting rod, which is positioned outside the shell, is additionally provided with a high-temperature-resistant rubber telescopic protective cover.
8. The vacuum plating film based on-line detection motor thickness control device according to claim 1, wherein: the outside of linear electric motor is provided with the cooler bin, and the shell surface pastes the thermal-insulated aluminium foil paper that has the thermal-insulated radiation of protection.
9. The vacuum plating film based on-line detection motor thickness control device according to claim 1, wherein: the number of the thickness control assemblies is 6-10.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202322403996.8U CN220724318U (en) | 2023-09-05 | 2023-09-05 | Motor thickness control device based on vacuum coating on-line detection |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202322403996.8U CN220724318U (en) | 2023-09-05 | 2023-09-05 | Motor thickness control device based on vacuum coating on-line detection |
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| Publication Number | Publication Date |
|---|---|
| CN220724318U true CN220724318U (en) | 2024-04-05 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202322403996.8U Active CN220724318U (en) | 2023-09-05 | 2023-09-05 | Motor thickness control device based on vacuum coating on-line detection |
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| Country | Link |
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| CN (1) | CN220724318U (en) |
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2023
- 2023-09-05 CN CN202322403996.8U patent/CN220724318U/en active Active
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