CN220707911U - Novel wafer electroplating line hot air drying device - Google Patents
Novel wafer electroplating line hot air drying device Download PDFInfo
- Publication number
- CN220707911U CN220707911U CN202322426216.1U CN202322426216U CN220707911U CN 220707911 U CN220707911 U CN 220707911U CN 202322426216 U CN202322426216 U CN 202322426216U CN 220707911 U CN220707911 U CN 220707911U
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- drying box
- hot air
- frame
- screw rod
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- 238000007602 hot air drying Methods 0.000 title claims abstract description 14
- 238000009713 electroplating Methods 0.000 title claims abstract description 11
- 238000001035 drying Methods 0.000 claims abstract description 38
- 238000007664 blowing Methods 0.000 claims abstract description 14
- 238000007747 plating Methods 0.000 claims description 12
- 230000006835 compression Effects 0.000 claims description 10
- 238000007906 compression Methods 0.000 claims description 10
- 238000000429 assembly Methods 0.000 claims description 6
- 230000000712 assembly Effects 0.000 claims description 6
- 238000010438 heat treatment Methods 0.000 claims description 4
- 235000012431 wafers Nutrition 0.000 abstract description 47
- 238000000034 method Methods 0.000 description 4
- 230000008569 process Effects 0.000 description 4
- 239000000463 material Substances 0.000 description 3
- 229910052751 metal Inorganic materials 0.000 description 3
- 239000002184 metal Substances 0.000 description 3
- 239000003638 chemical reducing agent Substances 0.000 description 2
- 150000001875 compounds Chemical class 0.000 description 2
- 238000009434 installation Methods 0.000 description 2
- 229910021645 metal ion Inorganic materials 0.000 description 2
- 230000009471 action Effects 0.000 description 1
- 230000004075 alteration Effects 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005868 electrolysis reaction Methods 0.000 description 1
- 239000003792 electrolyte Substances 0.000 description 1
- 239000010408 film Substances 0.000 description 1
- 230000005484 gravity Effects 0.000 description 1
- 230000036541 health Effects 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- QSHDDOUJBYECFT-UHFFFAOYSA-N mercury Chemical compound [Hg] QSHDDOUJBYECFT-UHFFFAOYSA-N 0.000 description 1
- 229910052753 mercury Inorganic materials 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
Classifications
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/10—Greenhouse gas [GHG] capture, material saving, heat recovery or other energy efficient measures, e.g. motor control, characterised by manufacturing processes, e.g. for rolling metal or metal working
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- Drying Of Solid Materials (AREA)
Abstract
The utility model relates to the technical field of wafer electroplating line drying, and discloses a novel wafer electroplating line hot air drying device which comprises a drying box main body, wherein a box door is arranged on one side of the drying box main body, a moving assembly is arranged in the drying box main body, a blowing assembly is arranged at the top of the drying box main body, a bottom plate is fixedly arranged on the inner side of the drying box main body, and a connecting rod is connected to the inner side of the moving assembly. The utility model realizes that the fixed frame is convenient to move to the outer side of the drying box main body through the arranged moving assembly, thereby being convenient for workers to install and detach wafers, being convenient for the workers to operate to a certain extent, and enabling the output end of the motor to drive the screw rod to rotate through starting the motor, enabling the screw rod to rotate so as to drive the movable block to move, enabling the movable block to move so as to drive the connecting plate to move, enabling the connecting plate to move so as to drive the fixed frame to move, and enabling the fixed frame to move to the outer side of the drying box main body.
Description
Technical Field
The utility model relates to the technical field of wafer electroplating line drying, in particular to a novel wafer electroplating line hot air drying device.
Background
Wafer plating is a process of forming a thin film of metal or other material on the wafer surface by immersing a cylindrical electrode of a metal ingot or other material in mercury, and depositing the metal or other material onto the wafer surface by electrolysis; the shape of the electrode determines the shape and thickness of the deposited film; in the process of electroplating a wafer, the electrolyte contains metal ions or other compounds, and the metal ions or other compounds are deposited on the surface of the wafer through the action of current.
The wafer plating line refers to a general term of all plating equipment in the wafer plating process, and after the wafer plating is finished on a product, the product needs to be dried to remove liquid on the surface of the wafer, and when the wafer plating product is dried, a drying device needs to be utilized.
The existing device can realize that the wafer is simultaneously dried on both sides in the maximum extent, and then realize the protection effect to the wafer performance, and current wafer drying device is inside the stoving case is entered into to the health that needs staff in the use, installs and dismantles the wafer, and the staff is comparatively inconvenient at the inside operation of box, and box inner space is less, and the staff is located when its inside operation, and work efficiency is lower, is inconvenient for the staff operation to a certain extent.
Disclosure of Invention
The utility model aims to provide a novel hot air drying device for a wafer electroplating line, which aims to solve the problem that the prior art is inconvenient to install a wafer.
In order to solve the technical problems, the utility model provides the following technical scheme: the utility model provides a novel hot air drying device of wafer electroplating line, includes stoving case main part, one side of stoving case main part is provided with the chamber door, the internally mounted of stoving case main part has the movable assembly, the top of stoving case main part is provided with the subassembly of blowing, and the inboard of stoving case main part is fixed to be provided with the bottom plate, the inboard of movable assembly is connected with the connecting rod, and the one end of connecting rod is provided with clamping assembly, the inside of stoving case main part is provided with the hot plate;
the movable assembly comprises a motor, the output end of the motor is connected with a screw rod, the outer side of the screw rod is provided with a movable block, the top of the movable block is provided with a connecting plate, the top of the connecting plate is connected with a fixed frame, two sides of the bottom of the fixed frame are connected with sliding blocks, the inside of the bottom plate is provided with a sliding groove, and one side of the sliding groove is provided with a through groove;
the clamping assembly comprises a fixed sleeve, a screw hole is formed in the fixed sleeve, a screw rod is arranged on the inner side of the screw hole, the top of the screw rod is connected with a knob, a bearing seat is arranged on the outer side of the bottom of the screw rod, and a pressing sleeve is arranged at the bottom of the bearing seat;
the air blowing assembly comprises an outer frame, a mounting frame is arranged in the outer frame, a fan is mounted on one side of the mounting frame, and a filter screen is arranged at the top of the inner side of the outer frame.
Preferably, the motor is arranged on one side of the drying box main body, the motor is detachably connected with the screw rod, a screw hole matched with the screw rod is formed in the movable block, and the connecting plate is fixedly connected with the movable block.
Preferably, the connecting plate is fixedly connected with the fixing frame, the connecting plate penetrates through the through groove and extends to the outer side of the through groove, the sliding block is fixedly connected with the fixing frame, the sliding block is matched with the sliding groove, and the sliding block is in sliding connection with the sliding groove.
Preferably, the quantity of subassembly of blowing is the multiunit, and the multiunit the subassembly of blowing is located stoving case main part top and sets up, and outer frame runs through stoving case main part and extends to its inside, fixed connection between mounting bracket and the outer frame, and can dismantle between mounting bracket and the fan and be connected, the filter screen is located outer frame top and sets up.
Preferably, the number of the clamping assemblies is multiple, the multiple groups of the clamping assemblies are symmetrically arranged on the inner side of the fixing frame, and the fixing sleeve is fixedly connected with the connecting rod.
Preferably, the number of the screw holes is two, the two screw holes are symmetrically formed in two ends of the fixing sleeve, the screw holes are matched with the screw rods, and the screw holes are in threaded connection with the screw rods.
Preferably, the knob is fixedly connected with the screw rod, the screw rod is in interference connection with the bearing seat, the bearing seat is fixedly connected with the compression sleeve, and the compression sleeve is of an arc-shaped structure.
Compared with the prior art, the utility model has the following beneficial effects:
the utility model is convenient for moving the fixing frame to the outer side of the drying box main body through the moving assembly, thereby being convenient for workers to install and detach wafers, being convenient for the workers to operate to a certain extent, enabling the output end of the motor to drive the screw rod to rotate through the starting motor, enabling the screw rod to rotate so as to drive the movable block to move, enabling the movable block to move so as to drive the connecting plate to move, enabling the connecting plate to move so as to drive the fixing frame to move, enabling the fixing frame to move to the outer side of the drying box main body, being simple in structure and convenient to operate, and improving flexibility of the device.
The clamping assembly is arranged, so that the wafer can be clamped and fixed conveniently, the wafer can be clamped and fixed in the using process, the wafer can be dried, the wafer is placed in the compression sleeve, the knob is rotated, the knob drives the screw to rotate, the screw is positioned in the screw hole to rotate, the screw pushes the bearing seat to move, the bearing seat drives the compression sleeve to move, and the two groups of compression sleeves are matched with each other, so that the wafer can be fixed conveniently, and the wafer can be fixed conveniently.
Drawings
FIG. 1 is a schematic diagram of the structure of the present utility model;
FIG. 2 is a cross-sectional view of the present utility model;
FIG. 3 is a schematic view of a connecting structure of a clamping assembly of a fixing frame according to the present utility model;
FIG. 4 is a schematic view of a connection structure between a bottom plate and a through slot according to the present utility model;
fig. 5 is a schematic view of a connection structure of a fixing sleeve and a pressing sleeve according to the present utility model.
In the figure: 1. a drying box main body; 2. a door; 3. a moving assembly; 301. a motor; 302. a screw rod; 303. a movable block; 304. a connecting plate; 305. a fixing frame; 306. a slide block; 307. a chute; 308. a through groove; 4. a blowing assembly; 401. an outer frame; 402. a mounting frame; 403. a blower; 404. a filter screen; 5. a bottom plate; 6. a connecting rod; 7. a clamping assembly; 701. a fixed sleeve; 702. a screw hole; 703. a screw; 704. a knob; 705. a bearing seat; 706. a compacting sleeve; 8. and (5) heating the plate.
Detailed Description
The following description of the embodiments of the present utility model will be made clearly and completely with reference to the accompanying drawings, in which it is apparent that the embodiments described are only some embodiments of the present utility model, but not all embodiments. All other embodiments, which can be made by those skilled in the art based on the embodiments of the utility model without making any inventive effort, are intended to be within the scope of the utility model.
Referring to fig. 1-5, a novel hot air drying device for a wafer electroplating line comprises a drying box main body 1, wherein a box door 2 is arranged on one side of the drying box main body 1, a moving assembly 3 is arranged in the drying box main body 1, a blowing assembly 4 is arranged at the top of the drying box main body 1, a bottom plate 5 is fixedly arranged on the inner side of the drying box main body 1, a connecting rod 6 is connected on the inner side of the moving assembly 3, a clamping assembly 7 is arranged at one end of the connecting rod 6, and a heating plate 8 is arranged in the drying box main body 1; the moving assembly 3 comprises a motor 301, the output end of the motor 301 is connected with a screw rod 302, the outer side of the screw rod 302 is provided with a movable block 303, the top of the movable block 303 is provided with a connecting plate 304, the top of the connecting plate 304 is connected with a fixed frame 305, the two sides of the bottom of the fixed frame 305 are connected with sliding blocks 306, a sliding groove 307 is formed in the bottom plate 5, and a through groove 308 is formed in one side of the sliding groove 307; the clamping assembly 7 comprises a fixed sleeve 701, a screw hole 702 is formed in the fixed sleeve 701, a screw 703 is arranged on the inner side of the screw hole 702, a knob 704 is connected to the top of the screw 703, a bearing seat 705 is arranged on the outer side of the bottom of the screw 703, and a compression sleeve 706 is arranged at the bottom of the bearing seat 705; the air blowing assembly 4 includes an outer frame 401, and the inside of the outer frame 401 is provided with a mounting frame 402, a blower 403 is installed at one side of the mounting frame 402, and a filter screen 404 is provided at the top of the inner side of the outer frame 401.
Through the technical scheme, through the moving assembly 3, the fixed frame 305 is conveniently moved to the outer side of the drying box main body 1, so that a worker can conveniently install and detach wafers, the operation of the worker is convenient to a certain extent, the output end of the motor 301 drives the screw rod 302 to rotate through starting the motor 301, the screw rod 302 rotates to drive the movable block 303 to move, the movable block 303 moves to drive the connecting plate 304 to move, the connecting plate 304 moves to drive the fixed frame 305 to move, the fixed frame 305 moves to the outer side of the drying box main body 1, the device is simple in structure and convenient to operate, and the flexibility of the device is improved; simultaneously through the clamping assembly 7 that sets up, realize being convenient for better carry out the centre gripping fixed to the wafer, can guarantee to carry out the centre gripping fixed to the wafer in the use, make each wafer can accomplish and dry it, place the wafer inside compressing tightly the cover 706, then rotate knob 704, make knob 704 drive screw 703 rotate, make screw 703 be located the inside rotation of screw 702, make screw 703 promote bearing frame 705 and remove, make bearing frame 705 drive compressing tightly the cover 706 and remove, two sets of compressing tightly the cover 706 and mutually support, realize being convenient for fix the wafer, so as to fix the wafer.
Specifically, the motor 301 is located at one side of the drying box main body 1, and the motor 301 is detachably connected with the screw rod 302, a screw hole matched with the screw rod 302 is formed in the movable block 303, and the connecting plate 304 is fixedly connected with the movable block 303.
Through the above technical scheme, the motor 301 is a positive and negative motor, the output end of the motor 301 is connected with a worm gear reducer, the worm gear reducer is connected with the screw rod 302 through a coupler, and the motor 301 can drive the screw rod 302 to rotate, so that the screw rod 302 rotates to drive the movable block 303 to move.
Specifically, the connecting plate 304 is fixedly connected with the fixing frame 305, the connecting plate 304 penetrates through the through groove 308 and extends to the outer side of the through groove, the sliding block 306 is fixedly connected with the fixing frame 305, the sliding block 306 is matched with the sliding groove 307, and the sliding block 306 is in sliding connection with the sliding groove 307.
Through the technical scheme, the movable block 303 moves to drive the connecting plate 304 to move, the connecting plate 304 moves to drive the fixing frame 305 to move, the arranged connecting plate 304 is located in the through groove 308 to slide, the movable block 303 can be ensured to move along the straight line direction outside the screw rod 302, the arranged sliding block 306 is located at the bottom of the fixing frame 305, and the sliding block 306 is located in the sliding groove 307 to slide, so that the fixing frame 305 is supported better, and the fixing frame 305 can bear more gravity.
Specifically, the quantity of the blowing components 4 is multiple groups, the multiple groups of the blowing components 4 are located at the top of the drying box main body 1 and extend to the inside of the drying box main body 1, the outer frame 401 penetrates through the drying box main body 1, the installation frame 402 and the outer frame 401 are fixedly connected, the installation frame 402 and the fan 403 are detachably connected, and the filter screen 404 is located at the top of the outer frame 401 and is arranged.
Through above-mentioned technical scheme, the multiunit that sets up is bloied subassembly 4 and is convenient for can accelerate the inside air flow of stoving case main part 1 to be convenient for better messenger's hot air is located the inside flow of stoving case main part 1, thereby be convenient for better carry out the drying to the wafer, and the fan 403 that sets up is current device, does not do too much in here and repeating the description, and the outside of device is provided with energy supply device, and the device passes through PLC control system.
Specifically, the number of the clamping assemblies 7 is multiple, the multiple groups of the clamping assemblies 7 are symmetrically arranged at the inner side of the fixing frame 305, and the fixing sleeve 701 is fixedly connected with the connecting rod 6.
Through above-mentioned technical scheme, the clamping component 7 of setting is the multiunit to be convenient for place the wafer, and the multiunit clamping component 7 of setting is convenient for once dry multiunit wafer, accelerates the efficiency of work to a certain extent.
Specifically, the number of the screw holes 702 is two, the two screw holes 702 are symmetrically arranged at two ends of the fixing sleeve 701, the screw holes 702 are matched with the screw 703, and the screw holes 702 are in threaded connection with the screw 703.
Through the above technical scheme, the screw 703 and the screw hole 702 are in threaded connection, and the knob 704 rotates to drive the screw 703 to rotate, so that the knob 704 rotates to drive the screw 703 to rotate inside the screw hole 702, and the screw 703 can move up and down along the screw hole 702.
Specifically, the knob 704 is fixedly connected with the screw 703, the screw 703 is in interference connection with the bearing seat 705, the bearing seat 705 is fixedly connected with the compression sleeve 706, and the compression sleeve 706 is of an arc-shaped structure.
Through above-mentioned technical scheme, setting up bearing frame 705 can effectually avoid compressing tightly cover 706 and rotate along with the rotation of screw 703, guarantees that compressing tightly cover 706 only can remove along the vertical direction of screw 703, and two sets of compressing tightly cover 706 mutually support, and the wafer that can be better is held fixedly.
When in use, when a worker needs to clamp and fix a wafer, the motor 301 is started, the output end of the motor 301 drives the screw rod 302 to rotate, the screw rod 302 rotates to drive the movable block 303 to move, the movable block 303 moves to drive the connecting plate 304 to move, the connecting plate 304 moves to drive the fixing frame 305 to move, the fixing frame 305 moves to drive the sliding block 306 arranged at the bottom of the fixing frame to move, the sliding block 306 is positioned in the sliding groove 307 to slide, the fixing frame 305 is positioned above the bottom plate 5 to slide, the fixing frame 305 is then moved to the outer side of the drying box main body 1, then the wafer is fixed in the fixing sleeve 701, the wafer is placed in the inner side of the pressing sleeve 706, the knob 704 is rotated to drive the screw 703 to rotate, the screw 703 is positioned in the screw hole 702 to rotate, the screw 703 is rotated to be moved in the screw hole 702, the bottom of the screw 703 is driven to drive the bearing seat 705 to move, the two groups of the pressing sleeves 706 are matched with each other, the pressing sleeve 706 clamps and fix the wafer, after the fixing is finished, the motor 301 is started, the fixing frame 301 is driven to reset, the fixing frame 305 is started, the heating plate 305 and the fan 403 is started, and the drying box main body 1 is dried, and the wafer is dried more evenly, and the drying speed is higher.
Although embodiments of the present utility model have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations can be made to these embodiments without departing from the principles and spirit thereof, the scope of which is defined in the appended claims and their equivalents.
Claims (7)
1. The utility model provides a novel hot air drying device of wafer electroplating line which characterized in that: the drying box comprises a drying box body, wherein a box door is arranged on one side of the drying box body, a moving assembly is arranged in the drying box body, a blowing assembly is arranged at the top of the drying box body, a bottom plate is fixedly arranged on the inner side of the drying box body, a connecting rod is connected to the inner side of the moving assembly, a clamping assembly is arranged at one end of the connecting rod, and a heating plate is arranged in the drying box body;
the movable assembly comprises a motor, the output end of the motor is connected with a screw rod, the outer side of the screw rod is provided with a movable block, the top of the movable block is provided with a connecting plate, the top of the connecting plate is connected with a fixed frame, two sides of the bottom of the fixed frame are connected with sliding blocks, the inside of the bottom plate is provided with a sliding groove, and one side of the sliding groove is provided with a through groove;
the clamping assembly comprises a fixed sleeve, a screw hole is formed in the fixed sleeve, a screw rod is arranged on the inner side of the screw hole, the top of the screw rod is connected with a knob, a bearing seat is arranged on the outer side of the bottom of the screw rod, and a pressing sleeve is arranged at the bottom of the bearing seat;
the air blowing assembly comprises an outer frame, a mounting frame is arranged in the outer frame, a fan is mounted on one side of the mounting frame, and a filter screen is arranged at the top of the inner side of the outer frame.
2. The novel wafer plating line hot air drying device according to claim 1, wherein: the motor is located one side setting of stoving case main part, and can dismantle between motor and the lead screw and be connected, movable block inside offered with lead screw assorted screw, fixed connection between connecting plate and the movable block.
3. The novel wafer plating line hot air drying device according to claim 1, wherein: the connecting plate is fixedly connected with the fixing frame, the connecting plate penetrates through the through groove and extends to the outer side of the through groove, the sliding block is fixedly connected with the fixing frame, the sliding block is matched with the sliding groove, and the sliding block is in sliding connection with the sliding groove.
4. The novel wafer plating line hot air drying device according to claim 1, wherein: the quantity of subassembly of blowing is the multiunit, and the multiunit the subassembly of blowing is located stoving case main part top and sets up, and outer frame runs through stoving case main part and extends to its inside, fixed connection between mounting bracket and the outer frame, and can dismantle between mounting bracket and the fan and be connected, the filter screen is located outer frame top and sets up.
5. The novel wafer plating line hot air drying device according to claim 1, wherein: the number of the clamping assemblies is multiple, the multiple groups of the clamping assemblies are symmetrically arranged on the inner side of the fixing frame, and the fixing sleeve is fixedly connected with the connecting rod.
6. The novel wafer plating line hot air drying device according to claim 1, wherein: the number of the screw holes is two, the two screw holes are symmetrically formed in two ends of the fixing sleeve, the screw holes are matched with the screw rods, and the screw holes are in threaded connection with the screw rods.
7. The novel wafer plating line hot air drying device according to claim 1, wherein: the rotary knob is fixedly connected with the screw rod, the screw rod is in interference connection with the bearing seat, the bearing seat is fixedly connected with the compression sleeve, and the compression sleeve is of an arc-shaped structure.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202322426216.1U CN220707911U (en) | 2023-09-07 | 2023-09-07 | Novel wafer electroplating line hot air drying device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202322426216.1U CN220707911U (en) | 2023-09-07 | 2023-09-07 | Novel wafer electroplating line hot air drying device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN220707911U true CN220707911U (en) | 2024-04-02 |
Family
ID=90438076
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202322426216.1U Active CN220707911U (en) | 2023-09-07 | 2023-09-07 | Novel wafer electroplating line hot air drying device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN220707911U (en) |
-
2023
- 2023-09-07 CN CN202322426216.1U patent/CN220707911U/en active Active
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