CN220706002U - Controller of magnetic suspension molecular pump - Google Patents

Abstract

The utility model discloses a controller of a magnetic suspension molecular pump, which comprises: a housing having a receiving cavity; a power module disposed within the receiving cavity; the control module is arranged in the accommodating cavity and connected with the power supply module to provide a control signal for controlling the magnetic suspension molecular pump; a cooling module connected with the housing and used for cooling the housing and the power module; the partition board is connected with the shell and positioned between the power module and the control module so as to separate the power module and the control module; and the cooling fan is arranged on the side of the power module containing the inner partition plate and is opposite to the power module. Through setting up divided baffle between power module and control module, can restrict radiator fan's air current, the hot air current that the extension power module produced reaches control module's time, and then the cooling module is to the cooling time of the hot air current that the power module produced, effectively reduces the influence of the hot air current that the power module produced to control module.

Description

Controller of magnetic suspension molecular pump

Technical Field

The embodiment of the utility model relates to the technical field of magnetic suspension controllers. More particularly, the present utility model relates to a controller for a magnetic levitation molecular pump.

Background

This section is intended to provide a background or context to the embodiments of the utility model that are recited in the claims. The description herein may include concepts that could be pursued, but are not necessarily ones that have been previously conceived or pursued. Accordingly, unless indicated otherwise, what is described in this section is not prior art to the description and claims in this application and is not admitted to be prior art by inclusion in this section.

The magnetic suspension molecular pump has the advantages of high rotating speed, high vacuum degree, large compression ratio, simple maintenance and the like, and is widely applied to the fields of semiconductors, flat panel displays, high-energy physics and the like. However, the structure is complex, the parameters are strict, the manual accurate control is difficult, and the magnetic suspension molecular pump is often required to be matched with a controller of the magnetic suspension molecular pump.

The controller of the magnetic suspension molecular pump is an automatic device for controlling the magnetic suspension molecular pump to work. According to a preset control algorithm, the working state and the variable of the magnetic suspension molecular pump are monitored in real time, and corresponding control signals are generated to drive the pump to act, so that the magnetic suspension molecular pump operates under the optimal working condition. The controller of the magnetic suspension molecular pump replaces manual control with automatic control, thereby effectively reducing misoperation and improving the system precision and stability.

The controller of the magnetic suspension molecular pump comprises a shell, a power module and a control module, wherein the power module and the control module are integrated in the shell. In addition, the controller of the magnetic suspension molecular pump is a power device, the loss is high, the high loss not only wastes electric energy, but also generates more heat, and a large amount of heat generated by the power supply module is transferred to the control module, so that the normal operation of internal electronic components of the control module can be influenced, even the control module is damaged, and the normal use of the controller is influenced.

Disclosure of Invention

To solve one or more of the technical problems mentioned above, the present utility model provides a controller of a magnetic levitation molecular pump.

In one embodiment, a controller for a magnetic levitation molecular pump includes: a housing having a receiving cavity; a power module disposed within the receiving cavity; the control module is arranged in the accommodating cavity and connected with the power supply module to provide a control signal for controlling the magnetic suspension molecular pump; a cooling module connected to the housing and configured to cool the housing and the power module; a partition plate connected to the housing and located between the power module and the control module to separate the power module and the control module; and the cooling fan is arranged on the side of the power module containing the inner partition plate and opposite to the power module.

In one embodiment, the controller further comprises a rotor motor for driving the magnetic levitation molecular pump; the power module includes: a motor driving unit having one end connected to the control module and the other end connected to the rotor motor to drive the rotor motor based on a control signal generated by the control module; a first conversion unit connected to an external power source for converting the received alternating current into direct current; and one end of the second conversion unit is connected with the first conversion unit, and the other end of the second conversion unit is connected with the control module and the motor driving unit so as to receive the direct current converted by the first conversion unit and output direct current with various specifications to the control module and the motor driving unit.

In one embodiment, the partition plate includes a main plate portion and an auxiliary plate portion connected to the main plate portion, the main plate portion and the auxiliary plate portion are both fixed to the housing, and the main plate portion is erected between the first conversion unit and the control module, the auxiliary plate portion is erected between the motor driving unit and the control module, and a junction of the main plate portion and the auxiliary plate portion is disposed between the second conversion unit and the control module.

In one embodiment, the cooling module includes: a cooling plate fixed to the housing and configured to radiate heat generated in the housing; and a cooling passage provided inside the cooling plate for circulating a cooling medium.

In one embodiment, the housing comprises: a case fixed to the cooling module; the cover body is buckled on the box body; the accommodation chamber is formed between the case and the cover.

In one embodiment, one side of the partition plate is fixedly connected with the box body, and the other side of the partition plate abuts against the cover body.

In one embodiment, the separator is adhesively bonded to the housing.

In one embodiment, the material of the separator is an insulating material.

In one embodiment, the separator is a piece of white paper.

In one embodiment, the thickness of the partition is 0.25mm to 0.35mm, the distance between the partition and the control module is 3.5mm to 4.5mm, the distance between the partition and the power module is 3.5mm to 4.5mm, and the angle between the main plate portion and the auxiliary plate portion is 85 ° to 95 °.

Through the controller of the magnetic suspension molecular pump, through setting up divided baffle between power module and control module, can restrict radiator fan's air current, the hot air current that the extension power module produced reaches control module's time, and then the cooling module is to the cooling time of the hot air current that the power module produced, effectively reduces the hot air current that the power module produced to control module's influence. Further, in some embodiments, the separator is made of green paper, so that the controller has a certain moisture absorption function while isolating heat, and the safety of the controller is further improved.

Drawings

The above, as well as additional purposes, features, and advantages of exemplary embodiments of the present utility model will become readily apparent from the following detailed description when read in conjunction with the accompanying drawings. In the drawings, embodiments of the utility model are illustrated by way of example and not by way of limitation, and like reference numerals refer to similar or corresponding parts and in which:

FIG. 1 is a schematic diagram of the overall structure of an embodiment of the present utility model;

FIG. 2 is a schematic view showing a part of the structure of the partition and the internal components of the controller according to the embodiment of the present utility model.

Reference numerals illustrate: 1. a housing; 1a, a containing cavity; 11. a case; 12. a cover body; 2. a power module; 21. a first conversion unit; 22. a second conversion unit; 23. a motor driving unit; 3. a control module; 4. a cooling module; 41. a cooling plate; 42. a cooling channel; 5. a heat radiation fan; 6. a partition plate; 61. a main board section; 62. an auxiliary plate portion.

Detailed Description

The following description of the technical solutions in the embodiments of the present disclosure will be made clearly and completely with reference to the accompanying drawings in the embodiments of the present disclosure, and it is apparent that the described embodiments are some embodiments of the present disclosure, but not all embodiments. Based on the embodiments in this disclosure, all other embodiments that a person skilled in the art would obtain without making any inventive effort are within the scope of protection of this disclosure.

The magnetic suspension molecular pump is a vacuum pump which utilizes an electromagnetic suspension technology to suspend a rotor and rotates at a high speed to realize air suction. The controller of the magnetic suspension molecular pump is a device for controlling the magnetic suspension molecular pump so as to realize suspension and speed control of the rotor. The magnetic suspension molecular pump must be controlled by the controller in real time to ensure that the rotor is stably suspended and rotates at a high speed.

The application provides a controller of a magnetic suspension molecular pump. As shown in fig. 1 and 2, the controller includes a housing 1, a power module 2, a control module 3, a cooling module 4, a heat radiation fan 5, and a partition 6. The shell 1 is provided with a containing cavity 1a, the power module 2 and the control module 3 are arranged in the containing cavity 1a, and the control module 3 is connected to the power module 2, so that the power module 2 supplies power for the control module 3, and the control module 3 generates control signals for controlling the magnetic suspension molecular pump according to design requirements. The cooling module 4 is connected to the outside of the housing 1 and is mainly used for cooling the housing 1 and the power module 2. The partition 6 is disposed in the accommodation chamber 1a of the housing 1 and is connected to the housing 1. Specifically, the partition 6 is disposed between the power module 2 and the control module 3 to separate the power module 2 and the control module 3, so as to reduce heat generated by the power module 2 from being directly transferred to the control module 3. Accordingly, the heat radiation fan 5 is provided in the accommodation chamber 1a and is disposed at a side of the partition 6 near the power module 2, and the heat radiation fan 5 is disposed with respect to the power module 2.

The power module 2 can produce a large amount of heat in the course of the work, and separate power module 2 and control module 3 through setting up baffle 6 to through setting up radiator fan 5 relative power module 2, can restrict radiator fan 5's air current, the time that the hot air current that the extension power module 2 produced reachs control module 3 effectively reduces the hot air current that power module 2 produced and to control module 3's influence.

As one example, the controller further comprises a rotor motor for driving the magnetic levitation molecular pump. As shown in fig. 2, the power module 2 mainly includes a first conversion unit 21, a second conversion unit 22, and a motor driving unit 23. Specifically, one end of the motor driving unit 23 is connected to the output end of the control module 3, and the other end is connected to the rotor motor to receive the control command output from the control module 3 and drive the rotor motor. The input of the first conversion unit 21 is connected to an external power source for converting the received alternating current into direct current. The dc output of the first conversion unit 21 is connected to the input of the second conversion unit 22 to transfer the converted dc current to the second conversion unit 22. The plurality of output ends of the second conversion unit 22 are respectively connected with the control module 3 and the motor driving unit 23, and provide the required direct current for the control module 3 and the motor driving unit 23.

The first converting unit 21 directly processes a relatively high ac input voltage and a relatively high current, so that the conversion loss generates more heat. The motor driving unit 23 is required to output a large current to drive the motor, and also generates a large amount of heat. The input and output ranges of the second conversion unit 22 are low and the heat loss is relatively low. Therefore, in order to better direct the heat in the controller for better heat dissipation, as shown in fig. 2, preferably, the partition 6 includes a main plate portion 61 and an auxiliary plate portion 62 connected to the main plate portion 61, both the main plate portion 61 and the auxiliary plate portion 62 are fixed to the housing 1, and the main plate portion 61 is erected between the first conversion unit 21 and the control module 3, the auxiliary plate portion 62 is erected between the motor driving unit 23 and the control module 3, the main plate portion 61 and the auxiliary plate portion 62 constitute an L-shaped plate, and the second conversion unit 22 is placed at a corner of the L-shaped plate. The heat generated by the power module 2 flows along the partition plate 6 under the action of the cooling fan 5, so that the heat flows and is matched with the cooling module 4, and a better cooling effect is obtained.

In one implementation, the thickness of the partition 6 is 0.25mm to 0.35mm, the distance between the partition 6 and the control module 3 is 3.5mm to 4.5mm, the distance between the partition 6 and the power module 2 is 3.5mm to 4.5mm, and the angle between the main plate portion 61 and the auxiliary plate portion 62 is 85 ° to 95 °. Experiments have shown that the diaphragm 6 performs better in the controller when the aforementioned parameter limits are met.

Because more electrified components and circuits are arranged in the controller, the partition board 6 is made of insulating materials, so that hidden danger of short circuit can be effectively reduced, meanwhile, the possibility that current in the controller leaks through the partition board 6 can be reduced by the insulating materials, and safety of an electric appliance is effectively ensured. For example, the separator 6 may be made of a material capable of insulating a current, such as ceramic, rubber, or plastic. Preferably, the separator 6 is made of green paper made of ceramic material, and the green paper has the characteristics of good insulating property, high mechanical strength, high temperature resistance, fire resistance and the like. Compared with rubber and plastic insulating materials, the green paper can bear higher working temperature, has a certain moisture absorption effect, can absorb redundant moisture in the controller, reduces humidity, and reduces corrosion and short circuit of water vapor to electronic elements.

In some implementations, as shown in fig. 2, the cooling module 4 includes a cooling plate 41 and a cooling channel 42, where the cooling plate 41 is fixed to the housing 1 and is used for dissipating heat generated in the housing 1, and the cooling channel 42 is provided inside the cooling plate 41 and is used for circulating a cooling medium. The cooling module 4 is matched with the cooling fan 5 and the partition plate 6, so that the controller obtains a good cooling effect. The cooling medium can be water, glycol, heat conducting oil or other medium with high specific heat capacity and heat conducting coefficient, preferably water, which has high specific heat capacity and high heat transfer efficiency compared with other medium, and has low cost and high safety.

In some embodiments, as shown in fig. 1, the housing 1 includes a case 11 and a cover 12, and the cooling module 4 is fixed to the case 11. Specifically, the cooling plate 41 is fixed on the lower surface of the box 11, and the cooling plate 41 and the box 11 can be detachably connected by using a bolt and nut assembly, so that the structure is simple and the operation is easy. The lid 12 lock is in the uncovered department of box 11 for hold chamber 1a and form between box 11 and lid 12, lid 12 also accessible bolt and nut subassembly is fixed in on the box 11 equally, simple structure and be convenient for the assembly of later stage to the controller. Meanwhile, one side of the partition plate 6 is fixed on the lower surface of the inside of the box 11, and the long side of the other side of the partition plate 6 is abutted against one side of the cover 12 close to the box for later assembly. As an example, the partition plate 6 may be glued to the bottom wall of the inner side of the case 11, which is low in cost and convenient in operation.

In the foregoing description of the present application, the terms "fixed," "mounted," "connected," or "connected" are to be construed broadly, unless otherwise specifically indicated and defined. For example, in terms of the term "coupled," it may be fixedly coupled, detachably coupled, or integrally formed; can be mechanically or electrically connected; either directly or indirectly through intermediaries, or in communication with each other or in interaction with each other. Therefore, unless otherwise specifically defined herein, a person skilled in the art can understand the specific meaning of the above terms in the present utility model according to the specific circumstances.

Those skilled in the art will also appreciate from the foregoing description of the present application that terms such as "upper," "lower," "front," "rear," "left," "right," "length," "width," "thickness," "vertical," "horizontal," "top," "bottom," "inner," "outer," "axial," "radial," "circumferential," "center," "longitudinal," "transverse," "clockwise," or "counterclockwise" and the like are used herein for the purpose of facilitating description and simplifying the description of the present utility model, and thus do not necessarily have to have, configure and operate in, the specific orientation, and thus are not to be construed or construed as limiting the inventive solution.

In addition, the terms "first" or "second" and the like used in this application to refer to numbers or ordinal numbers are used for descriptive purposes only and are not to be construed as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defining "a first" or "a second" may explicitly or implicitly include at least one such feature. In the description of the present application, the meaning of "plurality" is at least two, for example, two, three or more, etc., unless explicitly defined otherwise.

While various embodiments of the present utility model have been shown and described herein, it will be obvious to those skilled in the art that such embodiments are provided by way of example only. Numerous modifications, changes, and substitutions will occur to those skilled in the art without departing from the spirit and scope of the utility model. It should be understood that various alternatives to the embodiments of the utility model described herein may be employed in practicing the utility model. The appended claims are intended to define the scope of the utility model and are therefore to cover all equivalents or alternatives falling within the scope of these claims.

Claims (10)

1. A controller for a magnetic molecular pump, comprising:

a housing (1) having a receiving chamber (1 a);

a power supply module (2) disposed within the accommodation chamber (1 a);

the control module (3) is arranged in the accommodating cavity (1 a) and is connected with the power supply module (2) to provide a control signal for controlling the magnetic suspension molecular pump;

a cooling module (4) connected to the housing (1) and for cooling the housing (1) and the power module (2);

a partition plate (6) connected to the housing (1) and located between the power module (2) and the control module (3) to separate the power module (2) and the control module (3);

and a heat radiation fan (5) which is arranged on the side of the power module (2) of the partition board (6) in the accommodating cavity (1 a) and is arranged relative to the power module (2).

2. A controller of a magnetic molecular pump according to claim 1, further comprising a rotor motor for driving the magnetic molecular pump;

the power supply module (2) includes:

a motor driving unit (23) having one end connected to the control module (3) and the other end connected to the rotor motor to drive the rotor motor based on a control signal generated by the control module (3);

a first conversion unit (21) connected to an external power source for converting the received alternating current into direct current;

and one end of the second conversion unit (22) is connected with the first conversion unit (21), and the other end of the second conversion unit is connected with the control module (3) and the motor driving unit (23) so as to receive the direct current converted by the first conversion unit (21) and output direct currents with various specifications to the control module (3) and the motor driving unit (23).

3. A controller of a magnetic molecular pump according to claim 2, wherein the partition plate (6) comprises a main plate portion (61) and an auxiliary plate portion (62) connected to the main plate portion (61), the main plate portion (61) and the auxiliary plate portion (62) are both fixed to the housing (1), and the main plate portion (61) stands between the first conversion unit (21) and the control module (3), the auxiliary plate portion (62) stands between the motor driving unit (23) and the control module (3), and a junction of the main plate portion (61) and the auxiliary plate portion (62) is interposed between the second conversion unit (22) and the control module (3).

4. A controller of a magnetic molecular pump according to claim 1, wherein the cooling module (4) comprises:

a cooling plate (41) that is fixed to the housing (1) and that dissipates heat generated in the housing (1);

and a cooling passage (42) provided inside the cooling plate (41) for circulating a cooling medium.

5. A controller of a magnetic molecular pump according to any one of claims 1 to 4, wherein the housing (1) comprises:

a case (11) fixed to the cooling module (4);

a cover body (12) which is buckled on the box body (11);

the accommodation chamber (1 a) is formed between the case (11) and the cover (12).

6. A controller of a magnetic molecular pump according to claim 5, wherein one side of the partition plate (6) is fixedly connected with the case (11), and the other side abuts against the cover (12).

7. A controller of a magnetic molecular pump according to claim 6, wherein the separator (6) is glued to the housing (11).

8. A controller of a magnetic molecular pump according to claim 7, wherein the material of the partition (6) is an insulating material.

9. A controller of a magnetic molecular pump according to claim 8, wherein the separator (6) is a piece of white paper.

10. A controller of a magnetic molecular pump according to claim 3, characterized in that the thickness of the partition plate (6) is 0.25-0.35 mm, the distance between the partition plate (6) and the control module (3) is 3.5-4.5 mm, the distance between the partition plate (6) and the power module (2) is 3.5-4.5 mm, and the angle between the main plate part (61) and the auxiliary plate part (62) is 85-95 °.